STRASBAUGH, INC.
January 16, 2000
6DS-SP Software Ver 4.32
Page 1
Strasbaugh Confidential Information
6DS-SP SOFTWARE VERSION 4.32
NEW FEATURES / INSTALLATION
Summary of Software Release Changes:
Software version 4.32 (January 16, 2000) adds the following features:
-
Independent left and right spindle "move down" variables
-
Throughput improvement when using scrubber
-
Throughput shuttle "both switches on" alarm and interlocking
-
Send elevators made immediately "inactive" when cassette arm lifted
-
Force spindle flush wafer blowoff choice
-
Always lower both spindles for wafer unloading added
-
Wafer check added for demand wafer unload
-
"Keep elevator tanks full" feature
-
Close dual slurry source valves during slurry system flush
-
Queue GEM remote start command when in wet idle spindle flush
-
Gem driver sensing
-
Miscellaneous improvements
IMPORTANT !
Version 4.29.1 adds an “alarm action” feature that completely changes how alarms effect machine
operation. If not already done, follow instructions in those release notes to review your machine’s
current alarm configuration and reconfigure appropriately.
IMPORTANT !
Version 4.32 replaces "move down" calibration variables 38, 39, 48, and 49 with variables 217
through 224. If re-installing a version older than 4.32, check variables 38, 39, 48, and 49 to make
sure they contain appropriate values. If skipping version 4.32, refer to 4.32 release notes.
NOTE: Unless otherwise noted, this document describes only those features added or changed
with version 4.32.
If you have any version other than 4.31, you are not up to date on features and possible settings
required by any version(s) that was never installed. Refer to documentation for all skipped
versions to familiarize yourself with their new features and to perform any special setup required
by those versions.
Also, if your machine's version is 4.10 through 4.17, you MUST first install 4.18. If your
machine's version is prior to 4.10 you MUST first install BOTH 4.10 and 4.18.
IMPORTANT NOTES CONTINUED ON NEXT PAGE - PLEASE READ
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
Page 1008: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1511: ......
Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Page 1560: ...Introduction APPENDICES...
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