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Strasbaugh 6DS-SP, Operation Manual

The Strasbaugh 6DS-SP Operation Manual is a crucial resource for understanding how to operate and maintain this advanced polishing system. You can easily download this manual for free from our website. Ensure smooth functioning of your equipment by having the manual on hand at all times.

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STRASBAUGH, INC. 

 

Page 28 

6DS-SP Calibration/Configuration Reference 

November 9, 2001 (Ver 4.38) 

 

 
111  Robot arm(s) position Axis 6 
 

Calibration 

 

All machines 

 

Nominal values: 

 

 

3000 for the two arm robot 

 

 

50000 for the RTZ robot 

 

 
A value, in counts, required to move either the two arm robot's 
arms or the RTZ robot's single arm into the Axis 6 location 
(furthest right viewed from the polish doors). 

 
112  Robot arm(s) position Axis 7 
 

Calibration 

 

All machines 

 

Nominal values: 

 

 

3000 for the two arm robot 

 

 

50000 for the RTZ robot 

 

 
A value, in counts, required to move either the two arm robot's 
arms or the RTZ robot's single arm into the Axis 7 location (nearest 
left viewed from the polish doors). 

 
113  Robot arm(s) position Axis 8 
 

Calibration 

 

All machines 

 

Nominal values: 

 

 

3000 for the two arm robot 

 

 

50000 for the RTZ robot 

 

 
A value, in counts, required to move either the two arm robot's 
arms or the RTZ robot's single arm into the Axis 8 location (nearest 
right viewed from the polish doors). 

 
114  Robot arm(s) position LT load 
 

Calibration 

 

All machines 

 

Nominal values: 

 

 

3000 for the two arm robot 

 

 

50000 for the RTZ robot 

 

 
A value, in counts, required to move either the two arm robot's 
arms into the left load station or the RTZ robot's single arm into the 
load station. 

 
115  Robot arm position RT load 
 

Calibration 

 

All machines 

 

Nominal values: 

 

 

5000 for the two arm robot 

 

 

50000 for the RTZ robot 

 

 
A value, in counts, required to move either the two arm robot's 
upper arm into the right load station or the RTZ robot's single arm 
into the load station. 

 
116  Robot up/dn top position 
 

Calibration 

 

All machines 

 

Nominal value:  0.21 in. 

 

 
Value, in inches, to move the robot's up/down axis to a position 
below the home position that is slightly above wafers in a cassette.  

Summary of Contents for 6DS-SP

Page 1: ......

Page 2: ...e current some chapters may not contain all of the changes made to comply with the latest CE regulations These manuals will be replaced with Version 4 1 of the Model 6DSSP Operations and Maintenance M...

Page 3: ...Model 6DS SP Planarizer Operations Manual STRASBAUGH 825 Buckley Road San Luis Obispo California 93401 Phone 805 541 6424 Fax 805 541 6425...

Page 4: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...

Page 5: ...t the Keyboard 6 At the Control Panel 7 Step By Step Instructions 7 ABOUT THE MODEL 6DS SP PLANARIZER 8 A Basic Machine with Optional Features 8 Mechanical Components 9 Electrical Distribution and Con...

Page 6: ...ds 20 Menus 21 MECHANICAL DESCRIPTION 24 Bridge Drive Assembly 24 Elevator Assembly 25 Robot Assembly 27 Left Right Load Unload Stations 28 Left Right Carrier Wafer Cleaning Stations 28 Shuttle Assemb...

Page 7: ...Grouping and Recipe Definition 8 Menu Grouping 8 Recipe Definition 9 Calibration Configuration Changes 10 User Interface Description 11 Screen Usage 12 Keypad and Keyboard Usage 15 User Input 17 Light...

Page 8: ...er Backing Insert Change 64 Wafer Template Ring Change 66 Operation of a Table Conditioning Cycle Using the Conditioning Arm 68 Operation of a Table Conditioning Cycle with Conditioning Devices on the...

Page 9: ...oubleshooting 5 1 OVERVIEW 6 ALARM LOG MENU 8 Function Key Choices Available at the Alarm Log Menu 10 FREQUENTLY ENCOUNTERED PROBLEM CONDITIONS 11 Machine Won t Power Up 12 Machine Won t Home 13 Cycle...

Page 10: ...IGH ALARM 8 35 TABLE TEMP LOW ALARM 9 36 TABLE TEMP HIGH ALARM 10 36 TABLE SPEED LOW ALARM 11 36 TABLE SPEED HIGH ALARM 12 36 SLURRY 1 FLOW LOW ALARM 13 37 SLURRY 1 FLOW HIGH ALARM 14 37 SLURRY 2 FLOW...

Page 11: ...44 56 BRIDGE NOT ARRIVING AT TABLE 2 148 56 WAFER NOT FOUND ON ROBOT 149 57 SHUTTLE NOT ARRIVING FRONT 150 57 SHUTTLE NOT ARRIVING REAR 151 57 TBL 2 NOT LOCKING left lock 152 58 TBL 2 NOT LOCKING righ...

Page 12: ...AD 183 64 ROBOT UP DN NOT ARRIVING AT TOP 184 64 ROBOT UP DN NOT ARRIVING AT MIDDLE 185 64 ROBOT UP DN NOT ARRIVING AT BOTTOM 186 64 ROBOT UP DN NOT ARRIVING AT ABOVE LOAD 187 64 ROBOT UP DN NOT ARRIV...

Page 13: ...Polish Cycle Menu Operations v Ch 3 Operator Functions Auto Polish Parameters Menu Operations v Ch 4 Machine Setup Calibration Configuration Menu Maintenance v Ch 10 Software Calibration v Appendix A...

Page 14: ...Details Manual Location s Password Menu Operations v Ch 4 Machine Setup Polish Parameters Recipe Management Menu Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Slurry System Flush Menu Ope...

Page 15: ...ntenance v Ch 10 Software Calibration v Appendix A Calibration Variables Presettable Wafer Polish Count Auto Polish Menu Auto Polish Parameters Menu Operations v Ch 3 Operator Functions v Ch 4 Machine...

Page 16: ...ns topic Menu Selection On the Fly Changes Auto Polish Menu Process Parameters Menus Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Auto Cycle Features Auto Polish Menu Operations v Ch 3 Op...

Page 17: ...ables Pre or Post Pad Conditioning Conditioning Cleaning Parameters Menu Operations v Ch 4 Machine Setup Scrubber Support Machine Setup Menu Calibration Configuration Menu Manual Control Menu Operatio...

Page 18: ...enu 28 Figure 3 7 Slurry Flush Menu 34 Figure 3 8 Recipe Management Menu 37 Figure 3 9 Home Machine Menu 42 Figure 3 10 Auto Polish Cycle Menu 45 Figure 3 11 Slurry Flush Menu 58 Chapter 4 4 1 Figure...

Page 19: ...Introduction INTRODUCTION...

Page 20: ...Strasbaugh Introduction Version 4 0 February 1998 Update 10 19 01 1 1 1 Introduction WHAT S NEW ABOUT THE 6DS SP MANUALS ABOUT THE MODEL 6DS SP PLANARIZER SAFETY GUARANTEE WARRANTY...

Page 21: ...and Purpose 6 Maintenance Manual Contents and Purpose 6 Document Conventions 7 Computer Commands Extended and Abreviated 7 At the Keyboard 7 At the Control Panel 8 Step By Step Instructions 8 ABOUT TH...

Page 22: ...7 27 GALLIUM ARSENIDE AND GERMANIUM USE 29 Gallium Arsenide GaAs 29 Health Warning 29 Ingestion 29 Skin Contact 30 Eye Contact 30 Inhalation 30 Special Protection 30 Fire and Explosion Hazards 31 Reac...

Page 23: ...rted by a movable arm may be located at either the front right or left side of the machine cabinet Options available include dual front and side interfaces and a mobile remote interface installed in a...

Page 24: ...in Maintenance Volume 2 Appendix B have been revised to include up to date part numbers and maintenance information for new features and engineering advances 6DS SP USER INTERFACE REFERENCE DOCUMENT...

Page 25: ...enance manual is a five volume set Volume Contents 1 Chapters 1 through 13 2 Appendix A through Appendix E 3 4 5 Appendix F Manufacturers Data Sheets filed alphabetically by manufacturer The Maintenan...

Page 26: ...ced user AT THE KEYBOARD For commands entered at the keyboard the 6DS SP manuals are designed as much as possible in a two column format with commands to be entered or typed displayed in bold type in...

Page 27: ...all caps in angled brackets represent a single pushbutton on the control panel Example MACHINE ON is the symbol used for the Machine On pushbutton in procedures shown in this manual STEP BY STEP INST...

Page 28: ...nd stable thermal characteristics In addition to superior mechanical design the Planarizer utilizes efficient reliable computer and coprocessor systems for machine and process control functions The co...

Page 29: ...software interlocks provide for user safety during all machine operations The bridge assembly a rigid structure containing the spindle drive assemblies and their support hardware travels on ball beari...

Page 30: ...e support arm Dual front and side interfaces and a mobile remote interface are available as options The planarizer design takes advantage of such benefits inherent in the application of a personal com...

Page 31: ...edures The following is a list of safety instructions GENERAL OPERATION Operating the machine with loose wafers inside is harmful to the machine and wafers Follow the procedures in the Troubleshooting...

Page 32: ...exposure to low frequency electromagnetic fields The data concerning low frequency electromagnetic health effects is inconclusive but a 1995 IEEE engineering publication recommends prudent avoidance...

Page 33: ...t surfaces chemical hazards and electrical hazards on the machine HAZARD MAGNITUDE LEVELS The definitions of the keywords signal words used to define hazard levels are shown below Keyword Definition D...

Page 34: ...Warning International Symbol Self Start Hazard Warning with International Symbol Crush Hazard Keep hands and other body parts clear of the area or component Caution with International Symbol Electric...

Page 35: ...nd this area or set of components Danger with International Symbol Electrical Hazard high voltage 208 Volts Use extreme caution when working in and around this area or set of components 120 Volt circu...

Page 36: ...ed in the 6DS SP Operations and Maintenance manuals is presented below together with information on when to be aware of the hazard Note that text box information may change as is appropriate to most p...

Page 37: ...ing the machine or associated equipment as in during installation NOTES Lifting the polish table s presents the potential for a lifting strain hazard use a crane to avoid a strain A table falling duri...

Page 38: ...with the table motor s spindle motors slurry pump motors pad conditioning device rotate motor table coolant valves control computer and monitor s Alert Graphic Symbol chemical hazard When to be Aware...

Page 39: ...switches Whenever one of the four lower access panels or one of the two large electrical cabinet doors is not in place the safety relay opens the output contacts This disconnects power to the coil of...

Page 40: ...s power down to the entire machine including the control computer Opening one of the polish area operator doors sliding or bi fold doors are opened the safety controller monitoring that area must be r...

Page 41: ...ed for use in slurry compounds may be hazardous Be sure to follow all local state and federal regulations regarding personnel safety and waste disposal Refer to suppliers material safety data sheets W...

Page 42: ...oval and transfer of lockout devices or tagout devices and the responsibility for them and D Specific requirements for testing a machine or equipment to determine and verify the effectiveness of locko...

Page 43: ...erein and instruction provided by the machine owner designated safety personnel Each new or transferred affected operator or maintenance person shall be instructed accordingly in the purpose and use o...

Page 44: ...ocking bleeding down etc 4 Lockout the energy isolating devices with an assigned individual lock 5 After ensuring that no personnel are exposed and as a check on having disconnected the energy sources...

Page 45: ...uipment for the whole crew In such cases it shall be the responsibility of the individual to carry out all steps of the lockout procedure and inform the crew when it is safe to work on the equipment A...

Page 46: ...nd equipment being controlled cannot be operated until the lockout device is removed A lockout device utilizes a positive means such as a lock key or combination type to hold an energy isolating devic...

Page 47: ...there is a change in their job assignments a change in machines equipment or processes that present a new hazard or when there is a change in the energy control procedures After January 2 1990 wheneve...

Page 48: ...binary compound possesses good electrical properties making this material highly attractive for electronic applications In addition GaAs possesses good and unique optoelectronic properties because it...

Page 49: ...s Call a physician for further instructions INHALATION If inhalation occurs obtain medical attention The following effects may result irritation of mucous membranes and upper respiratory tract pharyng...

Page 50: ...RONMENTAL INFORMATION During wafer processing the wastewater generated must be monitored it cannot be allowed to flow freely into an open drain Consult local state or federal EPA regulations for prope...

Page 51: ...ersion 4 0 February 1998 Update 10 19 01 REFERENCES Electronic Materials Handbook Volume 1 Packaging ASM International Materials Park 1989 SAX s Dangerous Properties of Industrial Materials Eighth Edi...

Page 52: ...lly considered to be low in toxicity Its NFPA Rating for Health is 0 on a scale of 0 4 INGESTION If ingestion occurs obtain immediate medical attention The following effects may result hypothermia lis...

Page 53: ...ned flushing must be available A safety drench shower and hygienic facilities for washing should be located nearby See Sections 8 and 9 of the germanium MSDS for additional information FIRE AND EXPLOS...

Page 54: ...ts should be avoided When germanium decomposes germanium dioxide is formed WARNING Germanium may be a fire hazard if ground to a fine powder When germanium is in this state it ignites and burns on con...

Page 55: ...tive equipment the response team should cover the spill with dry sand vermiculite or any other approved absorbent material Mix well and carefully transfer the contaminated absorbent material to an app...

Page 56: ...IN MACHINE MAINTENANCE This section contains Material Safety Data Sheets MSDS for products recommended by Strasbaugh for use in machine maintenance The product names are listed immediately below Chevr...

Page 57: ...Operations Model 6DS SP Planarizer 1 38 Version 4 0 February 1998 Update 10 19 01 GUARANTEE WARRANTY CERTIFICATE...

Page 58: ......

Page 59: ...Introduction ACHINE ESCRIPTION...

Page 60: ...0 February 1998 2 1 2 Machine Description OVERVIEW CABINETRY PLANARIZER SUBASSEMBLIES CONTROL PANEL AND EMERGENCY OFF BUTTONS CONTROL COMPUTER MECHANICAL DESCRIPTION FACILITIES CONNECTIONS AUTO POLIS...

Page 61: ...ROL COMPUTER 19 Where to Find More Information on the Software 19 Where to Find More Information on the Control Computer System 19 Monitors and Keyboards 19 Keyboards 20 Menus 21 MECHANICAL DESCRIPTIO...

Page 62: ...lities 36 Electrical 37 Compressed Air 39 Vacuum and D I Water 39 Vacuum System 39 Vacuum Separator 40 Exhaust 40 Temperature Controlled Water 40 Temperature Control Unit 40 Drains 41 Slurry System Co...

Page 63: ...s with the functions of items found on the control panel as well as additional Emergency Off buttons The Control Computer section provides information on the monitor the two keyboards available and th...

Page 64: ...e or counterclockwise as needed When locking service doors firmly tighten with the Phillips screwdriver to provide maximum security against unauthorized opening INTERLOCK SAFETY SWITCHES The operator...

Page 65: ...he cycle had been polishing polishing will end but the rest of the cycle can be continued Opening an elevator access operator door will not halt the cycle but it will prevent elevator and robot moveme...

Page 66: ...S SP Planarizer Front View 1 Control Panel 2 Monitor and Keyboard 3 Right Top Emergency Off Button 4 Left Side Polish Section Operator Door 5 Right Side Polish Section Operator Door 6 Lower Left Front...

Page 67: ...with the fixed or remote terminal option may be mounted at the left side of the machine above the elevators or on a mobile cart The polish section operator doors must be closed in order for the machin...

Page 68: ...ght Side Electrical Cabinet side view 13 Elevator Access Doors The Left Side Service Door 11 provides access to the front and side regulator and valve assembly panels The regulator panels hold the reg...

Page 69: ...rvice Door side view 16 Right Top Service Door 17 Lower Right Side Service Door 18 Left Side Electrical Cabinet side view The Lower Right Side Service Door 17 when removed permits access to the bridge...

Page 70: ...Figure 2 4 Planarizer Rear View 19 Left Side Electrical Cabinet Service Door 20 Right Side Electrical Cabinet Service Doors 21 Rear Door Emergency Off Button 22 Rear Door Power On Lamp 23 Rear Electri...

Page 71: ...Enclosure Latch 23 rotates counterclockwise to latch the service door and enable the Main Power Supply Circuit Breaker 24 The Right Side Service Doors 20 are secured by a key locked latch To open the...

Page 72: ...ith a second polish table installed refer to engineering drawing 225220U2 Figure 2 5 Planarizer Subassemblies 1 Bridge Assembly 6 Robot Assembly 2 Left Spindle 7 Shuttle Assembly 3 Right Spindle 8 Lef...

Page 73: ...left spindle curtain rinse position places the bridge assembly between the load stations and the polish table with the left spindle at the optional curtain rinse The right spindle curtain rinse posit...

Page 74: ...cement on the carriers and removal from the carriers The Left and Right Cleaning Stations 10 and 11 clean and rinse the carriers wafers to keep the inserts clean and free of slurry buildup Note that r...

Page 75: ...ure With the fixed or remote terminal option an additional monitor with keyboard and control panel may be mounted above the elevators or on a mobile cart Selection of the active keyboard is made at a...

Page 76: ...power to all subassemblies and controllers After pressing an EMERG OFF button the operator restarts the machine from the beginning by pressing the MACHINE ON pushbutton To restart after correcting th...

Page 77: ...bypass is made by depressing the 30 Second Timer pushbutton with the yellow lamp next to the rotary switch on the Control Select Panel at the rear of the machine This is used only for the purpose of c...

Page 78: ...find information on a specific menu see the Menu Information Locator table in the Contents section at the front of each manual volume For information on 4 25 and post 4 25 software version features r...

Page 79: ...h located at the rear of the machine on the electrical cabinet KEYBOARDS Two keyboards are available with the 6DS SP a flat panel mounted on the bezel of the monitor or a PC personal computer style en...

Page 80: ...ush is selected at this menu For further information refer to the Operator Functions and Machine Setup chapters of the 6DS SP Operations manual Recipe Management Menu Polish programs recipes are store...

Page 81: ...his menu For further information refer to the Machine Setup chapter of the 6DS SP Operations manual Machine Setup Menu Machine settings that affect machine operation but not processing are set at this...

Page 82: ...is homed at this menu For further information refer to the Operator Functions chapter of the 6DS SP Operations manual Password Menu Changing of password levels creation of passwords and deletion of p...

Page 83: ...work at each end Two pulleys and a toothed drive belt connect the lead screw to a brushless DC servo motor This arrangement converts motor drive force into linear motion moving the bridge assembly lef...

Page 84: ...when the elevator has reached the bottom limit of travel This information is used to home the elevator Note that the elevators are water resistant Each of the four cassette sensor arms has a mechanica...

Page 85: ...from a receive cassette without disturbing the elevator tank fill dump valves If an elevator arm is lowered and the elevator access door is closed the elevator s tank will fill for the time period en...

Page 86: ...ownward movement of the robot Encoder feedback monitors position and speed The Z axis has a single inductive sensor located at the middle range of travel and functioning as a home switch The robot rot...

Page 87: ...left and right load chucks will be rinsed even if only one spindle is in use Load chuck rinsing does not occur in condition mode The fountain rinse option provides rinsing of the front side of the waf...

Page 88: ...and one air cylinder POLISH TABLE DRIVE ASSEMBLY The polish table drive assembly consists of a brushless DC servo motor worm gear reduction gearbox shaft and granite table The brushless DC servo motor...

Page 89: ...rrier mounting assembly The motor mounting block and quill housing are bolted together They support the entire spindle drive assembly The mounting block serves as an attachment point for the spindle f...

Page 90: ...y transferring air or vacuum as needed to retain or release the wafer down through the carrier to the wafer Back pressure is used for wafer transport and unloading whether or not it is enabled for pol...

Page 91: ...der to the spindle drive assembly The load cell senses the amount of applied force on the spindle drive assembly and wafer carrier and generates an analog voltage signal proportional to the amount of...

Page 92: ...cond air cylinder together with a load cell and an electro pneumatic regulator raises and lowers the device itself producing and controlling conditioning down force The second air cylinder s function...

Page 93: ...ifications shown below in order for the Model 6DS SP Planarizer to operate correctly The following list identifies the minimum facilities requirements for the machine Electrical 208 VAC THREE PHASE 60...

Page 94: ...Strasbaugh Machine Description Version 4 0 February 1998 2 35 GENERAL FACILITIES AND ELECTRICAL SERVICE DATA SHEET...

Page 95: ...out of the rear of a standard configuration 6DS SP showing utility connections and plumbing For a rear view of a B Model 6DS SP see drawing 225091A2 Assuming a standard machine configuration Figure 2...

Page 96: ...ions Standard Configuration 1 Compressed Air Supply 9 Loader Drain 2 Slurry 1 Supply 10 D I Water In 3 Slurry 2 Supply 10a D I Water Return 4 Exhaust 11 Coolant In 5 Vacuum 11a Coolant Bypass 6 Coolan...

Page 97: ...d as 1CB in the engineering drawings The door handle 13 shown trips the lever of the disconnect box door handle assembly to enable the circuit breaker A hole must be drilled in the left side electrica...

Page 98: ...ly 1 should be connected to the supply connector on the left end of the air preparation assembly The supply should be flexible tubing designed to accommodate the specified flow and pressure VACUUM AND...

Page 99: ...n 11 and coolant out 6 must be connected to the temperature control unit A bypass valve coolant bypass 11A mounted at the rear of the machine provides overpressure protection for the polish table If c...

Page 100: ...to the drain tub below the shuttle and elevators With a standard machine configuration this pipe carries D I water and residual amounts of slurry thus it may not require any special handling provisio...

Page 101: ...are labeled slurry 1 and slurry 2 The other connections leading to the diaphragm pumps are identified in Figure 2 1 as slurry 1 supply 2 and slurry 2 supply 3 The two slurry systems are identical in...

Page 102: ...he diaphragm pump The slurry main return is also a large 3 8 tube located opposite the slurry supply connection on the slurry cart cover This tube should be connected to the slurry return connection o...

Page 103: ...in the Machine Setup chapter of the 6DS SP Operations manual for setup of auto polish cycle parameters machine setup parameters pad and carrier conditioning parameters alarm parameters slurry flush pa...

Page 104: ...moves out over the load chuck 11 The load chuck travels to its up position 12 Vacuum at the load chuck is turned on to sense the wafer 13 The robot Z moves from its position above the load station to...

Page 105: ...able 9 If the second table option is not installed the wafer unloading sequence begins refer to Section D below 10 If the second table option is installed a The bridge moves to polish position over th...

Page 106: ...0 If time has been entered for wafer rinsing wafers are rinsed 11 The robot travel moves to its left right load position 12 The robot Z moves to its above load position 13 The robot arm extends out ov...

Page 107: ...is finished the spindles move up e The shuttle moves forward f The machine begins the next auto cycle or 28 If carrier cleaning is not enabled the carrier cleaning sub sequence is skipped 29 The machi...

Page 108: ...Introduction PERATOR UNCTIONS...

Page 109: ...TRODUCTION TO THE 6DS SP VERSION 4 25 SOFTWARE MENUS USED IN BASIC OPERATION BASIC OPERATION OPERATION USING MANUAL LOADING OF WAFERS OPERATOR ROUTINE PREVENTIVE MAINTENANCE AND ASSOCIATED PROCEDURES...

Page 110: ...Home Machine Menu 27 AUTO POLISH CYCLE MENU 28 Function Key Choices Available at the Auto Polish Cycle Menu 29 Additional Features 30 SLURRY FLUSH MENU 34 Menu Item Descriptions at the Slurry Flush Me...

Page 111: ...Flush Cycle 75 Heater Chiller Operation 76 Heater Chiller Control Unit and Temperature Display 76 Water Temperature Display on the 6DS SP Status 76 CYCLE HALTING FUNCTIONS AND ASSOCIATED PROCEDURES 7...

Page 112: ...anual Because control computer software can be updated more rapidly than manual information onscreen directions may be more current than the contents of this manual Should the manual and the screen in...

Page 113: ...options Therefore some options shown on menus may not apply to a specific machine The 6DS SP Version 2 0 manuals provide the keystroke by keystroke instructions required by pre 4 00 software versions...

Page 114: ...endix A Calibration Variables PRESETTABLE WAFER POLISH COUNT Auto Polish Menu Auto Polish Parameters Menu Operations Ch 3 Operator Functions Ch 4 Machine Setup ODD WAFER POLISHING Machine Parameters M...

Page 115: ...ns topic Menu Selection ON THE FLY CHANGES Auto Polish Menu Process Parameters Menus Operations Ch 3 Operator Functions Ch 4 Machine Setup AUTO CYCLE FEATURES Auto Polish Menu Operations Ch 3 Operator...

Page 116: ...x A Calibration Variables PRE OR POST PAD CONDITIONING Conditioning Cleaning Parameters Menu Operations Ch 4 Machine Setup SCRUBBER SUPPORT Machine Setup Menu Calibration Configuration Menu Manual Con...

Page 117: ...s Operation Process Setup recipe Machine Setup routinely changed machine setups that are not process related Maintenance Miscellaneous Both the Slurry Flush Menu and Recipe Management Menu apply to op...

Page 118: ...e not process related Machine settings which are seldom or never changed reside in the Calibration Configuration Menu The maintenance menus work together as a group If any change is made in the Manual...

Page 119: ...neer The Calibration Menu of previous software versions contained some choices that could affect process and operation These choices have been moved to either the Conditioning Parameters Menu or the M...

Page 120: ...Operations Model 6DS SP Planarizer 3 12 Version 4 0 February 1998 USER INTERFACE DESCRIPTION Figure 3 2 User Interface Parts of the Screen...

Page 121: ...ursor and the prompt line Color Color is used to help communicate information and direct the eye to areas of interest The colors used and their functions are Yellow Function key choices involved with...

Page 122: ...s for Pad 1 Pad 2 left carrier right carrier and lifetime Timer and counter information is saved to disk thus it will be retrievable after the machine is turned off Choice of Units Displayed The units...

Page 123: ...on up as calibration variable 185 The idle state turns off the existing display screen and replaces it with a small activity indicator display leaving most of the screen blank a majority of the time...

Page 124: ...operation the only keys used are F1 through F10 Corresponds to choices showing on the bottom of screen Numbers For number entry Decimal Minus sign Enter Backspace Escape Used to escape errors and unde...

Page 125: ...ers in the upper right corner of a key are obtained by pressing the Shift key and the key of choice at the same time The Ctrl and Alt keys are functionally identical to those found on a standard keybo...

Page 126: ...s pressed the field color will change to red indicating the value is in the process of being input by the user but is not yet confirmed by pressing the Enter key An unconfirmed value can still be edit...

Page 127: ...are available for viewing at all password levels Abort Reset Function Key The Abort Reset choice always shows as the F10 key F10 can be used to abort whatever the machine is doing and return everythin...

Page 128: ...operates as shown below Color Condition RED The machine is halted or has an error condition The light will also be red if the machine s 24 VDC supply fails or if the I O system controlling the relays...

Page 129: ...nt Alarm No maint or alarm YELLOW Cycle halted A port empty cassette not physically present or cassette ready to be removed All ports filled GREEN Processing in a cycle running or halted Idle never BL...

Page 130: ...nu is selected it will be displayed along with appropriate function key choices for that menu All menus can be selected at least for viewing in all password levels New Feature at All Menus Menu Hoppin...

Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...

Page 132: ...a load or cleaning station During bridge and shuttle moves loaded carriers can collide with unloaded carriers causing machine damage Therefore always remove loose carriers from the machine before tak...

Page 133: ...Rotate choices display if the RTZ type robot is installed Robot TopArm and Robot BotArm choices show if the two arm type robot is installed If the optional scrubber station is installed its choice wi...

Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...

Page 135: ...l will cause the linear robot to be homed This should not be selected unless the robot arms have been homed and are seen to be at their zero positions Robot Arm Robot Arm will cause both the arm and r...

Page 136: ...YCLE MENU This menu provides most of the functions needed for normally operating the machine A polishing cycle may be started when this menu is showing Choices may be unavailable based on password lev...

Page 137: ...mits entry of a finite number of wafers to polish before automatically going to a Finish Cycle state when polishing the last wafers The Wfrs display area will show the number of wafers remaining to be...

Page 138: ...afer polish count is applicable in the automatic cassette to cassette mode only Function key choices No of Wafers and ALL Wafers show on the Auto Polish Menu and the Polish Parameters Menu If No of Wa...

Page 139: ...will polish the odd wafer using the left spindle only The Stat display will show Odd Wafer Polish when polishing begins When polishing is finished the machine will automatically return to normal poli...

Page 140: ...entered values MENU HOPPING Menu hopping menu changing is permitted while the machine is operating While all menus are always accessible some function key choices may be ghosted if the choices would c...

Page 141: ...continue with polishing and fully automatic operation thereafter Start W Unload is applicable only if the auto mode is used If selected wafers are manually placed in the unload stations before pressi...

Page 142: ...ush cycle may be started when this menu is showing If in the operator password level all choices will be unavailable and the cursor will not show The Slurry Flush Menu must be showing to start a slurr...

Page 143: ...th the Slurry 1 and 2 systems to be flushed Flow Rate Sets the flow rate for the DI water that will flush the selected slurry system s Flush Time Sets the duration of the slurry flush Additional Featu...

Page 144: ...ng retrieving and deleting recipes Up to 72 recipes can be stored All recipe names will show Note If you are using the bezel keyboard the Alpha key must be pressed to set the keyboard to alpha in orde...

Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...

Page 146: ...recipe When retrieved the recipe name will show in the Rec area of the screen Store Recipe Stores the current setup of the Slurry Flush menu all Parameter menus and the Alarm menu The recipe name may...

Page 147: ...e loose carriers from the machine before taking any action that will cause machine motions SUMMARY The list below is a summary of the procedures needed to start up the 6DS SP and complete an auto poli...

Page 148: ...Operator Action Explanation Screen Display 1 Utilities Confirm that all facilities to the machine are ON 2 Operator Service Doors Close all doors to the machine 3 MACHINE ON Press the green MACHINE ON...

Page 149: ...rry flush cycle until the home sequence is performed Follow the steps below to display the Home Machine Menu Operator Action Explanation Screen Display 1 Upper f Lower f On the bezel keyboard set the...

Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...

Page 151: ...machine into correct alignment for the auto polish cycle select ALL at the Home Machine Menu Operator Action Explanation Screen Display 6 F1 Press the F5 key to select ALL Wait for the machine to com...

Page 152: ...with a Second Polish Table located on page 3 85U Set carrier s right left or both on cleaning stations 1 Open Left Side Operator Door 2 Set carriers on cleaning stations aligning each with its load ri...

Page 153: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 45 Figure 3 10 Auto Polish Cycle Menu...

Page 154: ...enu press the F8 key to select OTHER displaying the alternate function key list 7 F1 Press the F1 key to select Load Carriers The shuttle will now move back and the bridge will move to the load positi...

Page 155: ...etup chapter of this manual Operator Action Explanation Screen Display 1 F9 Press the F9 key to choose Select Menu 2 F3 Display the Recipe Management Menu by pressing the F3 key to select Recipe Manag...

Page 156: ...template rings See the Operator Routine Maintenance section below in this chapter for procedures The operator has placed the carriers on the spindles Per instructions from the process engineer or supe...

Page 157: ...pervisor instructions 4 Open the Elevator Access Operator Door 5 Holding by top handle place cassette s on send elevator s making sure cassettes are seated in elevator notches Notes If one cassette is...

Page 158: ...perator Action Explanation Screen Display START Press the black START button located on the control panel The machine will execute the normal sequence of loading the wafers onto the carrier s performi...

Page 159: ...e of the wafer handling system SUMMARY The list below is a summary of the procedures needed to start up the machine and complete an auto polish cycle using the manual wafer loading option 1 Power Up 2...

Page 160: ...M HOME SEQUENCE ROUTINE Following the steps found in the Basic Operation section of this chapter above home the machine 3 PLACE CARRIERS ON SPINDLES Following the steps found in the Basic Operation se...

Page 161: ...ish Cycle Menu and choose Start With Unload Operator Action Explanation Screen Display 1 F9 Press the F9 key to choose Select Menu 2 F1 Display the Auto Polish Cycle Menu by pressing the F1 key to sel...

Page 162: ...by spraying up inside the carrier DO NOT direct spray up inside machine cabinet 8 Close all doors to the machine 9 Start the cycle Operator Action Explanation Screen Display START Press the black STA...

Page 163: ...be performed by the machine operator Regular operator preventive maintenance together with the preventive maintenance detailed in the 6DS SP Maintenance manual significantly minimizes machine downtim...

Page 164: ...ot Vacuum Chuck Dial Pressure Gauge Readings Operate Slurry Flush Cycle once each shift Inspect and change each shift Inspect and change each shift Inspect and change each shift Wipe down inside and o...

Page 165: ...le periods of four hours or more the slurry lines should be flushed before polishing The slurry lines should also be flushed before any anticipated long periods of idleness Assumption The procedures b...

Page 166: ...Operations Model 6DS SP Planarizer 3 58 Version 4 0 February 1998 Figure 3 11 Slurry Flush Menu...

Page 167: ...il Both is displayed Notes To select Slurry 1 press the F3 key until Slurry 1 is displayed To select Slurry 2 press the F3 key until Slurry 2 is displayed 4 F4 Press the F4 key to select Enter Choice...

Page 168: ...to the Flush Time line 9 30 Enter the desired number of seconds for example 30 To correct press the Escape or Backspace key 10 F4 When the desired number is displayed on the Flush Time line press the...

Page 169: ...ble located on page 3 85U WARNING Always follow the procedure below to remove carriers from spindles To prevent damage to table and spindles DO NOT allow spindles to drop onto table 1 Close all doors...

Page 170: ...t OTHER displaying the alternate function key list 5 F2 Press the F2 key to select Unload Carriers 6 Wait Wait for bridge and spindles to finish moving Carriers will remain on cleaning stations as spi...

Page 171: ...g procedures detailed above power up the machine and perform the home sequence routine Remove table pad and clean table 2 Open the Right Side Operator Door 3 Swing the slurry tubes to the rear of the...

Page 172: ...eel back the backing three to four inches and fold it under toward the center of the pad 3 While continuing to maintain alignment press the exposed adhesive portion of the pad down onto the table 4 Li...

Page 173: ...iers from spindles 2 Following procedures detailed above in this chapter remove the carriers from spindles 3 Place carriers on a work bench bottom side up Remove pads and clean each carrier 4 Use a pl...

Page 174: ...he backing two to three inches and fold it under toward the center of the pad 11 While continuing to maintain hole alignment press the exposed adhesive portion of the pad down onto the carrier bottom...

Page 175: ...rm the home sequence routine Remove carriers from spindles 2 Following procedures detailed above in this chapter remove the carriers from spindles 3 Place carriers on a work bench bottom side up Remov...

Page 176: ...the clamp ring 11 Replace the eight 10 32 clamp screws rotating them clockwise to snug 12 Using a torque screwdriver tighten each of the eight clamp screws to 80 oz in tightening in a diametrically o...

Page 177: ...t the Auto Polish Menu SUMMARY 1 Power Up 2 Perform Home Sequence Routine 3 Retrieve a Stored Recipe 4 Run Auto Polish Cycle Using the Pad Conditioning Feature Assumptions The procedures below were wr...

Page 178: ...OUTINE Following the steps found in the Basic Operation section of this chapter above home the machine 3 RETRIEVE A STORED RECIPE Following the steps found in the Basic Operation section of this chapt...

Page 179: ...the Auto Polish Cycle Menu and choose Condition Pad Operator Action Explanation Screen Display 1 F9 Press the F9 key to choose Select Menu 2 F1 Display the Auto Polish Cycle Menu by pressing the F1 ke...

Page 180: ...The list below is a summary of the procedures needed to start up the machine and complete a table conditioning cycle using pad conditioning devices mounted on the spindles 1 Power Up 2 Perform Home S...

Page 181: ...ction of this chapter above home the machine 3 LOAD PAD CONDITIONING DEVICES ON SPINDLES Following the Place Carriers On Spindles procedure found in the Basic Operation section of this chapter above p...

Page 182: ...e will begin When the cycle is finished the bridge will return to the load position Note Load chuck rinsing does not occur during table pad conditioning 4 Wait for the cycle to finish 5 Open the Eleva...

Page 183: ...eaning enabled Carrier cleaning parameters are set at the Conditioning Cleaning Parameters Menu When running a cycle at the Auto Polish Cycle Menu select Clean Carriers the F6 key at the choices displ...

Page 184: ...emperature display for the heater chiller unit are mounted on the front of the unit s cabinet As hot and cold processing requirements are process specific they should be determined by the process engi...

Page 185: ...ime shuts power down to the entire machine including the control computer Opening a polish area operator door during an auto polish cycle interrupts and suspends the cycle If a front polish area opera...

Page 186: ...nates polishing suspends wafer handling until the CYCLE START button is pressed Pressing the CYCLE START button will continue DURING ROBOT WAFER MOVEMENT PHASE OF AUTO POLISH CYCLE Operator Action Loc...

Page 187: ...ture Keyboard During Auto Polish Cycle The finish cycle feature causes automatic operation to end when the currently processing wafers are finished As a reminder the screen will display FINISHING CYCL...

Page 188: ...bort the cycle the second time confirms your selection Keyboard During Auto Polish Cycle All rotational movement stops and spindles rise Terminates Auto Polish Cycle or other motion and returns all co...

Page 189: ...ycle During Auto Polish Cycle During Auto Polish Cycle All rotational movement stops and spindles rise Terminates Auto Polish Cycle Shuts down machine power Remove wafer s if needed close door power u...

Page 190: ...FF button Control Panel At any time after machine is powered up Shuts all power to the machine down All rotational movement stops and spindles rise if they are not already up Screen display goes blank...

Page 191: ...shing cycle Note This procedure requires two operators If the robot is holding a wafer when a cycle is terminated remove it by following Steps 1 through 9 below Operator 1 1 Prepare to catch the wafer...

Page 192: ...Off line 6 F3 Press the F3 key until Off is displayed 7 F4 Press the F4 key to confirm turning robot end effector vacuum off Operator 1 8 The wafer will now drop from the robot Be sure to catch it Ope...

Page 193: ...rmits placement and removal of carriers with a reduced lift reach With the exception of installation and use of the carrier load fixture to assist in movement of the carrier the loading and loading se...

Page 194: ...fixture 6 Slide the carrier toward and under the spindle until it drops into the load station CAUTION Take care to avoid damaging the teflon spray nozzles located near the load stations 7 To load a se...

Page 195: ...planation Screen Display 12 F8 At the Auto Polish Cycle menu press the F8 key to select OTHER displaying the alternate function key list 13 F1 Press the F1 key to select Load Carriers The spindles wil...

Page 196: ...to table and spindles DO NOT allow spindles to drop onto table Tools Required carrier load fixture Symix 274559 Procedure 1 Close all doors to the machine Select the Auto Polish Cycle Menu Operator Ac...

Page 197: ...fixture and remove carriers from load stations 7 Open Left Side Operator Door 8 With the flat side of the white plastic carrier load fixture facing up place the fixture between the load station and t...

Page 198: ...Lift the carrier out of the machine 14 To unload a second carrier repeat Steps 10 11 12 and 13 immediately above 15 Remove the fixture Note To avoid damage to the machine always remove the fixture be...

Page 199: ...tion of Chapter 11 Pneumatic Adjustments of the 6DS SP Maintenance manual as 4 in the Cleaning Station Adjustment Series the cleaning station pad pressure adjustments detailed below are appropriate pr...

Page 200: ...pensate for the moving weight Cylinder Pressure psi Pad Force lbs Pad psi lbs in 2 20 2 0 0 12 25 6 4 0 40 30 10 8 0 68 35 15 3 0 96 40 19 7 1 24 45 24 1 1 52 50 28 6 1 80 55 33 0 2 08 60 37 4 2 35 65...

Page 201: ...pneumatic regulator positioned under Solenoid 2 of the valve panel located inside the Left Front Service Door 4 Rotate the adjustment knob of the regulator until the gauge displays the desired value N...

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Page 203: ...Introduction ACHINE ETUP...

Page 204: ...y 1998 4 1 4 Machine Setup OVERVIEW SLURRY FLUSH MENU RECIPE MANAGEMENT MENU AUTO POLISH PARAMETERS MENU SWEEP PARAMETERS MENU CONDITIONING CLEANING PARAMETERS MENU MACHINE PARAMETERS MENU ALARM PARAM...

Page 205: ...n and Process Setup 4 On the Fly Recipe Parameter Changes 5 Machine Setup 5 SLURRY FLUSH MENU 6 RECIPE MANAGEMENT MENU 9 AUTO POLISH PARAMETERS MENU 12 SWEEP PARAMETERS MENU 19 CONDITIONING CLEANING P...

Page 206: ...ter were written with the assumptions that 1 The operator user has read chapters One Two and Three of this manual Introduction Machine Description and Operator Functions 2 The machine has been correct...

Page 207: ...AND PROCESS SETUP The recipe is defined as everything seen in the Slurry Flush Menu and everything in the parameter menus Note With previous software only polish parameter values were saved as the re...

Page 208: ...rease If the current step s time is shorter than what has transpired the step will end Many conditioning and machine parameters may be changed However changes that could cause trouble such as changing...

Page 209: ...on a slurry flush cycle may be started when this menu is showing If in the operator password level all choices will be unavailable and the cursor will not show The Slurry Flush Menu must be showing to...

Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...

Page 211: ...both the Slurry 1 and 2 systems to be flushed Flow Rate Sets the flow rate for the DI water that will flush the selected slurry system s Flush Time Sets the duration of the slurry flush Additional Fea...

Page 212: ...rieving and deleting recipes Up to 72 recipes can be stored All recipe names will show Note If you are using the bezel keyboard the Alpha key must be pressed to set the keyboard to alpha in order to e...

Page 213: ...Operations Model 6DS SP Planarizer 4 10 Version 4 0 February 1998 Figure 4 3 Recipe Management Menu...

Page 214: ...e When retrieved the recipe name will show in the Rec area of the screen Store Recipe Stores the current setup of the Slurry Flush menu all Parameter menus and the Alarm menu The recipe name may be up...

Page 215: ...et the number of wafers to be polished and start an auto polish cycle without returning to the Auto Polish Menu Thus you may make polish parameter changes and start an auto cycle without ever having t...

Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...

Page 217: ...olumn If on step 1 will wrap to the highest step Move Right Move Right causes the next step to the right to move to the center column If already on the highest step will wrap to step 1 All Wafers All...

Page 218: ...the Machine Parameters Menu a value entered here will also be entered for the left spindle Polish Force Sets the target polish force The units will be either psi or lbs depending on Calibration Variab...

Page 219: ...nal second table Slurry l Flow Sets the flow rate for the Slurry l pump Zero disables the pump Slurry 2 Flow Sets the flow rate for the Slurry 2 pump Zero disables the pump Pump 3 Flow Sets the flow r...

Page 220: ...reaches zero the machine status will automatically change from In Polish Cycle to Finishing Cycle When the machine stops the Wfrs status will automatically switch back to ALL If the machine is interru...

Page 221: ...ed values ON THE FLY CHANGES As noted at the beginning of this chapter a number of recipe parameter changes can be made while the machine is operating For example past present or future polishing step...

Page 222: ...r to the inner position This range is divided into 20 segments Segment l is at the outer position and segment 20 is at the inner position Each step has a corresponding time and force By varying the ti...

Page 223: ...Operations Model 6DS SP Planarizer 4 20 Version 4 0 February 1998 Figure 4 5 Sweep Parameters Menu...

Page 224: ...sor one column to the left Move Right Move Right moves the cursor one column to the right Times 1st Times l st sets all steps to the time showing in the first step This is useful if all times are to b...

Page 225: ...Menu has choices that define the sweep endpoints in terms of inches from the table center Sweep Parameters Setup Determine the endpoints of the desired arm sweep in terms of the distance in inches fr...

Page 226: ...tu conditioning is selected pad conditioning will occur during primary table polishing Also if in situ conditioning is selected the choices for pre or post conditioning Pad Conditioning Interval Condi...

Page 227: ...Operations Model 6DS SP Planarizer 4 24 Version 4 0 February 1998 Figure 4 6 Conditioning Cleaning Parameters Menu Screen Page 1...

Page 228: ...sh cycles Conditioning cycles occur after polish cycles Conditioning Table Speed Sets the table speed during conditioning Ranges 0 250 rpm for standard 0 100 rpm for low speed machines Conditioning Fo...

Page 229: ...Flow Rate Sets the flow rate for the Slurry 2 pump Ignored if fluid type not used for conditioning Range 0 1000 ml m Pump 3 Flow Rate Sets the flow rate for the optional Pump 3 Ignored if fluid type n...

Page 230: ...permits setting some of the parameters that determine the pad conditioning cycle the wafer cleaning cycle and the carrier cleaning cycle Two table machines do not have the carrier cleaning or wafer c...

Page 231: ...Operations Model 6DS SP Planarizer 4 28 Version 4 0 February 1998 Figure 4 7 Conditioning Cleaning Parameters Menu Screen Page 2...

Page 232: ...Inner The conditioning arm will start at the outer position The conditioning arm will start at the inner position In situ Conditioning Enbl Dsbl Conditioning will occur during polishing Outer will be...

Page 233: ...nsed during wafer cleaning Wafer Cleaning Device Enbl Dsbl Single table machines only The cleaning device will be raised against the wafer during wafer cleaning However it will be lowered 12 seconds b...

Page 234: ...between lbs and psi no recipe values will be changed For example 7 psi would become 7 lbs if the units were changed SINGLE SWEEP STYLE CHOICE The choice Single is among the One way and Two way sweep...

Page 235: ...constant pressure or constant temperature In the constant pressure mode the polish force will be whatever is entered in the Polish Parameters Menu In the constant temperature mode force will be varied...

Page 236: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 33 Figure 4 8 Machine Parameters Menu Screen Page 1...

Page 237: ...al to the Pat Temperature value Pad Temperature The target pad temperature if using the constant temperature mode Ignored if using the constant pressure mode Backpressure Enbl Dsbl Enables backpressur...

Page 238: ...ibration Configuration menus Carrier pad rinse time also applies to the rinses that spray the tops and sides of the carriers Single table machines don t have carrier pad rinses but do have top side ri...

Page 239: ...Operations Model 6DS SP Planarizer 4 36 Version 4 0 February 1998 Figure 4 9 Machine Parameters Menu Screen Page 2...

Page 240: ...Rinse Type DI Water Chemical Selects desired fluid for the right clean rinse Single table machines only Curtain Rinse Type DI Water Chemical Selects desired fluid for the optional curtain rinse Wet I...

Page 241: ...nd in the Machine Parameters and Calibration Configuration menus If the machine does not have fountain rinses the Fountain Rinsing choice should be set to Disable If the machine does not have a curtai...

Page 242: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 39 Figure 4 10 Machine Parameters Menu Screen Page 3...

Page 243: ...e time each carrier will be curtain rinsed Table Rinse W Curtain Rinse Enbl Dsbl Enable primary table rinsing and rotating fixed 10 rpm during curtain rinsing Polish Time Entry Left Right Matched Poli...

Page 244: ...set for dual spindle polishing to polish a single remaining odd wafer This feature is applicable in the automatic cassette to cassette mode only Odd Wafer Polish and Odd Wafer Time Adjust choices are...

Page 245: ...e saved as part of the recipe The diameter is not used if lbs is used for force If psi is used and zero is entered for the diameter displays will show Wfr Dia or Dev Dia to warn that no diameter is en...

Page 246: ...xceeded the alarm will sound and an error message will show and be logged into the error log If the limit was either a low table or low spindle speed polishing will halt and an error message indicatin...

Page 247: ...Operations Model 6DS SP Planarizer 4 44 Version 4 0 February 1998 Figure 4 11 Alarm Parameters Menu...

Page 248: ...s right spindle force alarm limits Right Spindle Speed Sets right spindle speed alarm limits Table Temp Sets table temperature alarm limits in degrees Table Speed Sets table speed alarm limits If the...

Page 249: ...ent of certain action to the presence of an alarm indicating low or absent slurry If set to 0 slurry alarms will display as information only If set to 1 cycle starting will be inhibited if any polish...

Page 250: ...processing Also these are changes that are involved with normal machine operation Other one time settings are in the Calibration Configuration menu If the machine does not have a scrubber station the...

Page 251: ...Operations Model 6DS SP Planarizer 4 48 Version 4 0 February 1998 Figure 4 12 Machine Setup Menu...

Page 252: ...tion OffLine OnLine LOC OnLine REM Disables the optional SECS communications Enables SECS with local machine control only Enables SECS with remote machine control only However Halt Abort and EMO will...

Page 253: ...s up in the operator level The Engineer level may require an engineer password and permits operation and recipe changes but not maintenance If no engineer passwords exist the engineer password level w...

Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...

Page 255: ...hange to Engineer Set to Maint Set to Set to Maintenance Level will cause a prompt for a maintenance password If a valid password is entered the level will change to Maintenance Otherwise a warning wi...

Page 256: ...rds are 1 to 8 digit numbers Alpha characters cannot be used These password levels define access to function key choices on the various menus They are not used for any other purpose Password levels ar...

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Page 258: ...Introduction TROUBLESHOOTING...

Page 259: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 1 5 Troubleshooting OVERVIEW ALARM LOG MENU FREQUENTLY ENCOUNTERED PROBLEM CONDITIONS ERROR MESSAGES AND ALARMS...

Page 260: ...able Part B 22 Wafers Break During Polish Cycle Part A 22 Wafers Break During Polish Cycle Part B 24 Carriers Drop Off Spindles 25 Robot Drops Wafers Part A 26 Robot Drops Wafers Part B 27 Software Co...

Page 261: ...DLE VACUUM SWITCH OFF 52 40 SEND CASSETTE S NOT ACTIVE 53 42 ROBOT TOP BOTTOM NOT AT ZERO 54 42 LEFT SPINDLE NOT UP 55 43 RIGHT SPINDLE NOT UP 56 43 AXIS 1 SERVO AMPLIFIER FAULT 57 Left Spindle 44 AXI...

Page 262: ...VACUUM NOT FOUND 157 59 CONDITION ARM NOT ARRIVING UP 158 60 CONDITION ARM NOT ARRIVING DOWN 159 60 LEFT SPINDLE NOT ARRIVING UP 160 61 LEFT SPINDLE NOT ARRIVING UP 161 61 RIGHT SPINDLE NOT ARRIVING...

Page 263: ...OT ARRIVING AT LEFT LOAD 188 64 ROBOT UP DN NOT ARRIVING AT RIGHT LOAD 189 64 BRIDGE NOT ARRIVING AT LEFT CURTAIN 190 65 BRIDGE NOT ARRIVING AT RIGHT CURTAIN 191 65 COND ARM NOT ARRIVING AT PARK 194 6...

Page 264: ...ation Configuration menus refer to the Software Calibration chapter of the 6DS SP Maintenance manual Problem Prevention The most effective means of preventing problems is careful adherence to all prev...

Page 265: ...ughly familiar with the 6DS SP Planarizer If not read the chapters in the Maintenance manual on Physical Description Installation Mechanical Description Control System Description Power Distribution a...

Page 266: ...ormation that will help identify the source of the problem The alarm log should be reviewed analytically to accurately determine the alarm sources For example alarms might be caused by a service probl...

Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...

Page 268: ...HE ALARM LOG MENU Key Label Function s Page Up Page Up will cause the screen to go to a lower page number If already on the lowest page page 1 there will be no change Page Down Page Down will cause th...

Page 269: ...f maintenance supervisory staff Strasbaugh The group responsible for a resolution s is listed underlined directly below the resolution s for which it is responsible Some problems show more than one un...

Page 270: ...Component Cause Resolution Responsibility CONTROL PANEL LIGHT REMAINS OFF and MONITOR SCREEN REMAINS BLANK Control Panel Screen 1 Facilities power off 2 Door s open 3 Circuit breaker 1a Check to be su...

Page 271: ...on 4 0 February 1998 5 13 MACHINE WON T HOME Problem Indicator Problem Location Component Cause Resolution Responsibility NO RESPONSE TO KEYBOARD HOME COMMAND Monitor screen 1 Doors not closed 1a Chec...

Page 272: ...not homed 5 Wafer on load station perhaps from previously halted cycle 6 No carriers installed 7 Wafer left on carrier 8 Robot holding wafer perhaps from previously halted cycle 1a Check and close al...

Page 273: ...itch 10 All 9 causes and resolutions have been performed and the cycle will still not start 8a Check shuttle position and adjustment 9a Check conditioning brush position and adjustment MAINTENANCE 10a...

Page 274: ...r s open 2 Facilities power off 3 Tripped circuit breaker possible overload 1a If robot is holding wafer carefully remove wafer See Procedures For Safe Removal Of Wafer From Robot in Operator Function...

Page 275: ...tion Operator door opened preventing elevator robot movement OR CYCLE HALT button on the Control Panel pressed 1a If needed close operator door 1b Press the CYCLE START button on the Control Panel OPE...

Page 276: ...Resolution Responsibility MACHINE LIGHTS AND SCREEN DISPLAY ON BUT MACHINE MOTION STOPS Interior of machine 2 Cycle terminated by The Abort Reset key F10 was hit twice 2a If robot is holding wafer ca...

Page 277: ...PRAYER WON T SPRAY Problem Indicator Problem Location Component Cause Resolution Responsibility WATER SPRAYER WON T SPRAY Interior of machine 1 Facilities water off 2 Failed solenoid valve 1a Check fa...

Page 278: ...bility ELEVATOR TANKS WON T HOLD WATER Elevator tanks Manual Drain Valve 1 Elevator drain valve not closed Auto Filling Option 2 Cassette missing or sensor arm up 3 Valve malfunction Manual Drain Valv...

Page 279: ...lity WAFERS LEFT ON TABLE AT END OF AUTO CYCLE Table 1 Inadequate vacuum 2 Inserts not wet enough 3 Inserts and wafer pads need replacement 1a Check and restore facility vacuum supply to installation...

Page 280: ...r blocked 7 Inadequate air and vacuum at spindle 4a Realign spindles and load stations 5a Consider lowering the value of calibration variable 171 set at the Calibration menu to a value lower than the...

Page 281: ...Problem Indicator Problem Location Component Cause Resolution Responsibility WAFER BREAKS DURING POLISH CYCLE Table 1 Debris on carrier 2 Inserts and wafer pads need replacement 1a Press the EMERG OFF...

Page 282: ...um holes in carrier blocked 7 Inadequate air and vacuum at spindle 4a Realign spindles and load stations 5a Consider lowering the value of calibration variable 171 set at the Calibration menu to a val...

Page 283: ...acuum solenoid failure 3 Vacuum solenoid total failure no response to adjustment 1a Press the EMERG OFF button 1b Check facility vacuum supply OPERATIONS 2a Test adjust vacuum solenoid by operating in...

Page 284: ...correct robot Z alignment at the load stations 1a Press the EMERG OFF button 1b Check facility vacuum supply 2a Refer to the procedure found in the Operator Maintenance Schedule located in the Operato...

Page 285: ...ot correct 6a Test adjust vacuum solenoid by operating in diagnostics or manual control mode See the Pneumatic Adjustments chapter and the information on the Diagnostics and Manual Control menus found...

Page 286: ...If the chuck takes the wafer try to pull it off The wafer should be difficult to remove If the chuck does not take the wafer or if the wafer is easy to remove vacuum is inadequate 4 If vacuum is inade...

Page 287: ...E FROM KEYBOARD or NO RESPONSE FROM MACHINE Monitor screen 1 Keyboard not connected 2 Control program and or Control Computer 1a Connect keyboard 2a Press the EMERG OFF button located on the Control P...

Page 288: ...onent Cause Resolution Responsibility 3 If after completing Resolutions 1a through 1e still no response indicates possible damage to control and polish programs and data 3a Follow procedures in the So...

Page 289: ...f the set limits either above the programmed high limit or below the programmed low limit set at the Alarm Parameters Menu the alarm on the control panel will sound until the parameter returns to with...

Page 290: ...POLISH CYCLE Control Panel The bottom of the monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows spindle fo...

Page 291: ...blem Indicator Problem Location Component Cause Resolution Responsibility 3 Calibration of E P setting needed 2b Check to be sure facility air pressure 100 PSI 2c If facilities air pressure 100 PSI pe...

Page 292: ...The bottom of the monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message indicates table and spindle speeds are too...

Page 293: ...spindle speeds are too slow 4 After completing Resolution 3a and 3b table and spindle still not moving or moving at wrong speed 3a Check alarm parameters on Alarm Parameters menu to see if the alarm...

Page 294: ...he monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows alarm Note The alarm is a warning device it does not...

Page 295: ...ntrol Panel The bottom of the monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows slurry flow alarm Note The...

Page 296: ...g the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows slurry pH alarm Note The alarm is a warning device it does not abort the cycle 1a Read the bottom of...

Page 297: ...r Screen 1 Arm unhomed 2 Arm not in park position 3 The conditioning arm is not in park position 1a Home the arm 2a At the Auto Polish Menu move the arm to park position 3a Check related input at the...

Page 298: ...2 Active Carriers at the Machine Parameters menu to match the carriers installed Left Right or Both OPERATIONS 3a If the problem still persists adjust the spindle vacuum switch MAINTENANCE Notes on B...

Page 299: ...n error such as Bridge not arriving at load showing and a servo status with the motor off and the motor error on When this occurs the error log will show the vacuum error immediately no matter how bri...

Page 300: ...tte on a receive elevator OPERATIONS 1b Lower the cassette sensor arm 1c Test to see if the cassette sensor is tripped when the cassette sensor arm is lowered If not adjust the switch MAINTENANCE ROBO...

Page 301: ...use Resolution ERROR MESSAGE Control Computer Screen 1 Spindle not tripping upper limit switch 1a Check and adjust upper limit switch 1b Check related inputs at the Diagnostics menu They should be for...

Page 302: ...ROR MESSAGE Control Computer Screen Left Spindle or Right Spindle or Bridge Travel or Table 1 Polish section door not securely latched 2 Output error 3 Amplifier fuse 4 Loose wiring 5 Motor over tempe...

Page 303: ...n menu OPERATIONS ROBOT TOP AXIS NOT HOMED 64 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Robot top arm not homed 1a Rehome Axis 10 at the Ser...

Page 304: ...ATIONS WAFER FOUND ON ROBOT 67 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Wafer on the robot 1a Manually remove the wafer and restart 2a If p...

Page 305: ...PERATIONS ELEVATOR SECTION OPERATOR DOOR OPEN AT START 70 no alarm Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Elevator section operator door...

Page 306: ...function at affected elevator If the cassette sensor arm is lowered the message indicates wafer is not fully to the rear of the cassette shelf 2 Robot end effector incorrectly adjusted 1a Wafer has tr...

Page 307: ...or malfunction 1a Let cycle finish 1b Clean up spillage if any 1c Clean out table drain basket OPERATIONS 2a Check and adjust sensor MAINTENANCE SLURRY 1 SUPPLY LOW OR ABSENT 105 SLURRY 2 SUPPLY LOW O...

Page 308: ...ad conditioning the control computer checks to see if the wafers are in the carriers rather than left behind on the table 2 If no wafer was left on the table 1a Visually check to see if a wafer was le...

Page 309: ...esolution ERROR MESSAGE Control Computer Screen 1 Fluid leak Three pans at machine bottom one at load area two at polish area are equipped with a sensor to detect liquid 2 Sensor malfunction 1a Let cy...

Page 310: ...ack to the load stations before beginning pad conditioning the control computer checks to see if the wafers are in the carriers rather than left behind on the table 2 If no wafer was left on a carrier...

Page 311: ...hapter of the 6DS SP Maintenance manual add the approved oil MAINTENANCE LOW COOLING WATER FLOW RATE 111 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Sc...

Page 312: ...Verify facilities are on 1b Verify facilities set to correct pressures MAINTENANCE NO ACTIVE RECEIVE CASSETTE 121 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Co...

Page 313: ...the load station vacuum switch MAINTENANCE CARRIER S NOT INDEXING 142 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Indexing carrier hardware in...

Page 314: ...ot transfer 1a Verify wafer is present 2a Verify robot up down left load or right load is calibrated properly 2b Verify load chuck vacuum switch is adjusted correctly MAINTENANCE BRIDGE NOT ARRIVING A...

Page 315: ...ust robot vacuum sensor 1d Clean wafer and robot vacuum chuck MAINTENANCE SHUTTLE NOT ARRIVING FRONT 150 SHUTTLE NOT ARRIVING REAR 151 Problem Indicator Problem Location Component Cause Resolution ERR...

Page 316: ...G RIGHT LOCK 155 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Locking air cylinder reed switch not sensing the commanded position 2 Sensor adju...

Page 317: ...Control Computer Screen 1 Carrier not installed or 2 Mismatch between the setting at Machine Parameters Menu and carrier s installed 3 Vacuum switch error 1a Install carrier for affected spindle 2a Ch...

Page 318: ...olution ERROR MESSAGE Control Computer Screen 1 Conditioning arm not arriving at the commanded position 2 Conditioning arm flow controls and pressure regulator not adjusted correctly 3 Sensor adjustme...

Page 319: ...Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Spindle not tripping upper limit switch 1a Check and adjust upper limit switch 1b Check related i...

Page 320: ...rvo not arriving at the commanded position 1a Servo tripped out Open and close polish section operator doors to reset OPERATIONS BRIDGE NOT ARRIVING AT LOAD 168 BRIDGE NOT ARRIVING AT MIDDLE 169 BRIDG...

Page 321: ...GHT RECV 174 ROBOT NOT ARRIVING AT LEFT LOAD 175 ROBOT NOT ARRIVING AT LEFT LOAD 176 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Robot travel...

Page 322: ...Calibration variable out of range 1a Servo tripped out Open and close polish section operator doors to reset 2a Abort and rehome robot axes OPERATIONS ROBOT UP DN NOT ARRIVING AT TOP 184 ROBOT UP DN...

Page 323: ...sh section operator doors to reset 2a Abort and rehome axis OPERATIONS COND ARM NOT ARRIVING AT PARK 194 COND ARM NOT ARRIVING AT INNER 195 COND ARM NOT ARRIVING AT OUTER 196 Note Error messages 194 1...

Page 324: ...T LOAD 198 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 The load chuck is not sensing the wafer properly seated in the load station 1a Wafer ab...

Page 325: ...omponent Cause Resolution ERROR MESSAGE Control Computer Screen 1 Polish section operator door s open 1a Close door s OPERATIONS ELEVATOR SECTION OPERATOR DOOR OPEN 200 no alarm Problem Indicator Prob...

Page 326: ...Introduction APPENDICES...

Page 327: ...Strasbaugh Inc Appendices Version 4 0 January 1 1998 Appendices Appendix A Electrical Input Output System Address List Refer To Engineering Drawing 217946EM...

Page 328: ...Operations Model 6DS SP Planarizer Version 4 0 February 1998 This page intentionally left blank...

Page 329: ...Introduction LECTRIAL NPUT UTPUT...

Page 330: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix A Electrical Input Output System Address List Refer To Engineering Drawing 217946EM...

Page 331: ...Operations Model 6DS SP Planarizer This page intentionally left blank...

Page 332: ......

Page 333: ...e current some chapters may not contain all of the changes made to comply with the latest CE regulations These manuals will be replaced with Version 4 1 of the Model 6DSSP Operations and Maintenance M...

Page 334: ...Model 6DS SP Planarizer Maintenance Manual VOLUME 1 STRASBAUGH 825 Buckley Road San Luis Obispo California 93401 Phone 805 541 6424 Fax 805 541 6425...

Page 335: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...

Page 336: ...ns 6 At the Keyboard 6 At the Control Panel 7 Step By Step Instructions 7 ABOUT THE MODEL 6DS SP PLANARIZER 8 A Basic Machine with Optional Features 8 Mechanical Components 9 Electrical Distribution a...

Page 337: ...es 11 Electrical 13 Compressed Air 14 Vacuum and D I Water 14 Vacuum System 14 Vacuum Separator 15 Exhaust 15 Temperature Controlled Water 15 Temperature Control Unit 15 Drains 16 Step 7 Slurry System...

Page 338: ...Sequence 5 D Wafer Unloading Sequence 6 E Cassette Removal 7 F Cycle Halt 7 Bridge Drive Assembly 8 Elevator Assembly 9 Robot Assembly 11 Left Right Load Unload Stations 12 Left Right Carrier Wafer C...

Page 339: ...apter 7 Plumbing Description 7 1 Compressed Air System 3 Vacuum System 4 Water System 5 Exhaust System 5 Slurry System 6 Chemical System 8 Drain System 8 Chapter 8 Preventive Maintenance Schedules 8 1...

Page 340: ...ent Series 56 ELEVATORS AND ROBOT ORDER OF ADJUSTMENT 61 ELEVATORS AND ROBOT 62 Elevator Cassette Platform Leveling 62 1 in Elevators and Robot Adjustment Series 62 Elevator Cassette Arm Sensor Switch...

Page 341: ...eviously Measured Position 178 Restoration of Electrical Power for the Second Table 180 Performance of Related Software Calibration Procedures 181 Chapter 10 Software Calibration Procedures 10 1 OVERV...

Page 342: ...ration 6 in Elevators and Robot Adjustment Series 83 Robot Up Down Z Axis Load Positions Calibration 7 in Elevators and Robot Adjustment Series 104 Robot Vacuum Switch Wafer Sensing Calibration 8 in E...

Page 343: ...Arm Adjustment Series 16 Load Stations 19 Load Chuck Raise Pressure 19 Left Load Chuck Raise Pressure 19 Right Load Chuck Raise Pressure 22 Shuttle 23 Shuttle Flow Control Adjustments 23 Slurry Syste...

Page 344: ...1 Wafers Left on Table Part B 22 Wafers Break During Polish Cycle Part A 22 Wafers Break During Polish Cycle Part B 24 Carriers Drop Off Spindles 25 Robot Drops Wafers Part A 26 Robot Drops Wafers Par...

Page 345: ...SPINDLE VACUUM SWITCH OFF 52 40 SEND CASSETTE S NOT ACTIVE 53 42 ROBOT TOP BOTTOM NOT AT ZERO 54 42 LEFT SPINDLE NOT UP 55 43 RIGHT SPINDLE NOT UP 56 43 AXIS 1 SERVO AMPLIFIER FAULT 57 Left Spindle 44...

Page 346: ...DLE VACUUM NOT FOUND 156 59 RIGHT SPINDLE VACUUM NOT FOUND 157 59 CONDITION ARM NOT ARRIVING UP 158 60 CONDITION ARM NOT ARRIVING DOWN 159 60 LEFT SPINDLE NOT ARRIVING UP 160 61 LEFT SPINDLE NOT ARRIV...

Page 347: ...NOT ARRIVING AT ABOVE LOAD 187 64 ROBOT UP DN NOT ARRIVING AT LEFT LOAD 188 64 ROBOT UP DN NOT ARRIVING AT RIGHT LOAD 189 64 BRIDGE NOT ARRIVING AT LEFT CURTAIN 190 65 BRIDGE NOT ARRIVING AT RIGHT CU...

Page 348: ...Drawings bound under separate cover Customer Parts Lists Appendix C Electrical Input Output System Address List Refer to engineering drawing 217946EM Appendix D Options Appendix E Maintenance Log Shee...

Page 349: ...Operations v Ch 3 Operator Functions Auto Polish Parameters Menu Operations v Ch 4 Machine Setup Calibration Configuration Menu Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variab...

Page 350: ...ii Menu Where to Find Details Manual Location s Polish Parameters Recipe Management Menu Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Slurry System Flush Menu Operations v Ch 4 Machine Se...

Page 351: ...Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variables Presettable Wafer Polish Count Auto Polish Menu Auto Polish Parameters Menu Operations v Ch 3 Operator Functions v Ch 4 Mac...

Page 352: ...topic Menu Selection On the Fly Changes Auto Polish Menu Process Parameters Menus Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Auto Cycle Features Auto Polish Menu Operations v Ch 3 Opera...

Page 353: ...Variables Pre or Post Pad Conditioning Conditioning Cleaning Parameters Menu Operations v Ch 4 Machine Setup Scrubber Support Machine Setup Menu Calibration Configuration Menu Manual Control Menu Oper...

Page 354: ...gure 9 9 Orientation of Inner Gimbal Ring 19 Figure 9 10 Orientation of Inner Outer Gimbal Ring Unit Relative to the Wafer Manifold Plate 24 Figure 9 11 Orientation of Gimbal Ring Manifold Plate Unit...

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Page 356: ...Introduction REVISIONS...

Page 357: ...Introduction INTRODUCTION...

Page 358: ...Strasbaugh Introduction Version 4 0 February 1998 Update 10 19 01 1 1 U 1 Introduction WHAT S NEW ABOUT THE 6DS SP MANUALS ABOUT THE MODEL 6DS SP PLANARIZER SAFETY GUARANTEE WARRANTY...

Page 359: ...and Purpose 6 Maintenance Manual Contents and Purpose 6 Document Conventions 7 Computer Commands Extended and Abreviated 7 At the Keyboard 7 At the Control Panel 8 Step By Step Instructions 8 ABOUT T...

Page 360: ...47 27 GALLIUM ARSENIDE AND GERMANIUM USE 29 Gallium Arsenide GaAs 29 Health Warning 29 Ingestion 29 Skin Contact 30 Eye Contact 30 Inhalation 30 Special Protection 30 Fire and Explosion Hazards 31 Rea...

Page 361: ...orted by a movable arm may be located at either the front right or left side of the machine cabinet Options available include dual front and side interfaces and a mobile remote interface installed in...

Page 362: ...d in Maintenance Volume 2 Appendix B have been revised to include up to date part numbers and maintenance information for new features and engineering advances 6DS SP USER INTERFACE REFERENCE DOCUMENT...

Page 363: ...ntenance manual is a five volume set Volume Contents 1 Chapters 1 through 13 2 Appendix A through Appendix E 3 4 5 Appendix F Manufacturers Data Sheets filed alphabetically by manufacturer The Mainten...

Page 364: ...nced user AT THE KEYBOARD For commands entered at the keyboard the 6DS SP manuals are designed as much as possible in a two column format with commands to be entered or typed displayed in bold type in...

Page 365: ...in all caps in angled brackets represent a single pushbutton on the control panel Example MACHINE ON is the symbol used for the Machine On pushbutton in procedures shown in this manual STEP BY STEP IN...

Page 366: ...and stable thermal characteristics In addition to superior mechanical design the Planarizer utilizes efficient reliable computer and coprocessor systems for machine and process control functions The c...

Page 367: ...d software interlocks provide for user safety during all machine operations The bridge assembly a rigid structure containing the spindle drive assemblies and their support hardware travels on ball bea...

Page 368: ...le support arm Dual front and side interfaces and a mobile remote interface are available as options The planarizer design takes advantage of such benefits inherent in the application of a personal co...

Page 369: ...cedures The following is a list of safety instructions GENERAL OPERATION Operating the machine with loose wafers inside is harmful to the machine and wafers Follow the procedures in the Troubleshootin...

Page 370: ...m exposure to low frequency electromagnetic fields The data concerning low frequency electromagnetic health effects is inconclusive but a 1995 IEEE engineering publication recommends prudent avoidance...

Page 371: ...ot surfaces chemical hazards and electrical hazards on the machine HAZARD MAGNITUDE LEVELS The definitions of the keywords signal words used to define hazard levels are shown below Keyword Definition...

Page 372: ...d Warning International Symbol Self Start Hazard Warning with International Symbol Crush Hazard Keep hands and other body parts clear of the area or component Caution with International Symbol Electri...

Page 373: ...und this area or set of components Danger with International Symbol Electrical Hazard high voltage 208 Volts Use extreme caution when working in and around this area or set of components 120 Volt circ...

Page 374: ...sed in the 6DS SP Operations and Maintenance manuals is presented below together with information on when to be aware of the hazard Note that text box information may change as is appropriate to most...

Page 375: ...ving the machine or associated equipment as in during installation NOTES Lifting the polish table s presents the potential for a lifting strain hazard use a crane to avoid a strain A table falling dur...

Page 376: ...with the table motor s spindle motors slurry pump motors pad conditioning device rotate motor table coolant valves control computer and monitor s Alert Graphic Symbol chemical hazard When to be Aware...

Page 377: ...c switches Whenever one of the four lower access panels or one of the two large electrical cabinet doors is not in place the safety relay opens the output contacts This disconnects power to the coil o...

Page 378: ...ts power down to the entire machine including the control computer Opening one of the polish area operator doors sliding or bi fold doors are opened the safety controller monitoring that area must be...

Page 379: ...cted for use in slurry compounds may be hazardous Be sure to follow all local state and federal regulations regarding personnel safety and waste disposal Refer to suppliers material safety data sheets...

Page 380: ...moval and transfer of lockout devices or tagout devices and the responsibility for them and D Specific requirements for testing a machine or equipment to determine and verify the effectiveness of lock...

Page 381: ...herein and instruction provided by the machine owner designated safety personnel Each new or transferred affected operator or maintenance person shall be instructed accordingly in the purpose and use...

Page 382: ...locking bleeding down etc 4 Lockout the energy isolating devices with an assigned individual lock 5 After ensuring that no personnel are exposed and as a check on having disconnected the energy source...

Page 383: ...quipment for the whole crew In such cases it shall be the responsibility of the individual to carry out all steps of the lockout procedure and inform the crew when it is safe to work on the equipment...

Page 384: ...and equipment being controlled cannot be operated until the lockout device is removed A lockout device utilizes a positive means such as a lock key or combination type to hold an energy isolating devi...

Page 385: ...there is a change in their job assignments a change in machines equipment or processes that present a new hazard or when there is a change in the energy control procedures After January 2 1990 whenev...

Page 386: ...binary compound possesses good electrical properties making this material highly attractive for electronic applications In addition GaAs possesses good and unique optoelectronic properties because it...

Page 387: ...es Call a physician for further instructions INHALATION If inhalation occurs obtain medical attention The following effects may result irritation of mucous membranes and upper respiratory tract pharyn...

Page 388: ...IRONMENTAL INFORMATION During wafer processing the wastewater generated must be monitored it cannot be allowed to flow freely into an open drain Consult local state or federal EPA regulations for prop...

Page 389: ...Version 4 0 February 1998 Update 10 19 01 REFERENCES Electronic Materials Handbook Volume 1 Packaging ASM International Materials Park 1989 SAX s Dangerous Properties of Industrial Materials Eighth E...

Page 390: ...ally considered to be low in toxicity Its NFPA Rating for Health is 0 on a scale of 0 4 INGESTION If ingestion occurs obtain immediate medical attention The following effects may result hypothermia li...

Page 391: ...ained flushing must be available A safety drench shower and hygienic facilities for washing should be located nearby See Sections 8 and 9 of the germanium MSDS for additional information FIRE AND EXPL...

Page 392: ...nts should be avoided When germanium decomposes germanium dioxide is formed WARNING Germanium may be a fire hazard if ground to a fine powder When germanium is in this state it ignites and burns on co...

Page 393: ...ctive equipment the response team should cover the spill with dry sand vermiculite or any other approved absorbent material Mix well and carefully transfer the contaminated absorbent material to an ap...

Page 394: ...IN MACHINE MAINTENANCE This section contains Material Safety Data Sheets MSDS for products recommended by Strasbaugh for use in machine maintenance The product names are listed immediately below Chev...

Page 395: ...Maintenance Model 6DS SP Planarizer 1 38 U Version 4 0 February 1998 Update 10 19 01 GUARANTEE WARRANTY CERTIFICATE...

Page 396: ......

Page 397: ...pdate 11 06 01 2 1 U 2 Installation FACILITY AND EQUIPMENT PREPARATION SIGN OFF SHEET UNPACKING INSPECTION MACHINE PLACEMENT LEVELING UTILITIES REQUIREMENTS UTILITIES CONNECTION SLURRY SYSTEM CONNECTI...

Page 398: ...Requirement 7 Leveling Feet 7 Seismic Protection 8 Step 5 Confirming That Utility Sources Meet Requirements 9 General Facilities And Electrical Service Data Sheet 10 Step 6 Connecting Utilities 12 El...

Page 399: ...equipment preparation segment of the installation process As you complete each item by following the steps in this chapter check it off and obtain customer approval SUMMARY The list below is a summar...

Page 400: ...and obtain customer approval Sign Off Sheet Checklist A As received crate inspection and report of any problems B Uncrate unwrap inspection and report of any problems C Packing slip verification and r...

Page 401: ...ceeding PREPARATION FOR INSTALLATION 1 Carefully remove the protective plastic cover 2 The machine is attached to the pallet with lag screws fitted through holes in the cabinet base frame To access th...

Page 402: ...at the forks EXTEND TO THE REAR CHANNEL When lifting from either one of the two sides the forks must reach the CENTER CHANNEL Failure to observe the above procedures when lifting or moving the machine...

Page 403: ...REQUIREMENT The Model 6DS SP Planarizer must be level for proper operation Using the polish table surface as a reference plane level the machine to within 0 010 inches per foot Leveling the polish ta...

Page 404: ...e to the user s flooring and is responsible for how the machine is secured at the user s site When selecting the method for attaching the machine to the flooring the fastening hardware must be able to...

Page 405: ...es requirements for the machine Electrical 208 VAC THREE PHASE 60 Hz 60 FLA 36 Motor Load Amps 25 000 Interrupting Capacity Amps Refer to related electrical drawings listed on page 2 13 Clean Dry Air...

Page 406: ...Maintenance Model 6DS SP Planarizer 2 10 U Version 4 0 February 1998 Update 11 06 01 GENERAL FACILITIES AND ELECTRICAL SERVICE DATA SHEET...

Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...

Page 408: ...946A2 is an accurate layout of the rear of a standard configuration 6DS SP showing utility connections and plumbing Assuming a standard machine configuration Figure 2 1 and 2 2 below is a simplified e...

Page 409: ...01 2 13 U Figure 2 1 Utility Connections Standard Configuration 1 Main Machine Circuit Breaker 2 Door Handle 3 Compressed Air Supply 4 110 VAC Quad Outlet 5 Exhaust 6 Slurry 1 Supply 7 Slurry 2 Supply...

Page 410: ...06 01 Figure 2 2 Utilities Cluster Detail 9 Nitrogen 10 Air 11 DI Water In 12 Table Drain 13 Vacuum 14 DI Water Return 15 Second Table Pan Drain 16 Loader Drain 17 Coolant Out 18 Coolant In 19 Coolan...

Page 411: ...ect box door handle assembly to enable the circuit breaker A hole must be drilled in the left side electrical cabinet in order to pass the wires through the cabinet to the circuit breaker The location...

Page 412: ...d air supply 3 should be connected to the supply connector on the left end of the air preparation assembly The supply should be flexible tubing designed to accommodate the specified flow and pressure...

Page 413: ...ng system to the local 6DS SP machine operator The system requires the user to supply a safety rated normally open contact or switch Closing of that contact if connected to the 6DS SP machine will ann...

Page 414: ...oop The coolant in 18 and coolant out 17 must be connected to the temperature control unit A bypass valve coolant bypass 19 mounted at the rear of the machine provides overpressure protection for the...

Page 415: ...in labeled loader drain 16 is connected to the drain tub below the shuttle and elevators With a standard machine configuration this pipe carries D I water and residual amounts of slurry thus it may no...

Page 416: ...ectrical cabinet enclosure are labeled slurry 1 and slurry 2 The other connections leading to the diaphragm pumps are identified in Figure 2 1 as slurry 1 supply 6 and slurry 2 supply 7 The two slurry...

Page 417: ...of the diaphragm pump The slurry main return is also a large 3 8 tube located opposite the slurry supply connection on the slurry cart cover This tube should be connected to the slurry return connect...

Page 418: ...atus Check Sheet of the R Howard Strasbaugh Inc Installation Report Table 2 2 Installation Status Check Sheet Items Procedure 6DS SP Maintenance Manual Chapter Cleaning Station Alignments single table...

Page 419: ...apter of the 6DS SP Maintenance manual and the Calibration Variables Listing found in the Appendices of the same manual Table 2 3 Calibration Report Items Calibration Items Cooling Water Flow Cooling...

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Page 421: ...Introduction HYSICAL ESCRIPTION...

Page 422: ...Strasbaugh Physical Description Version 4 0 February 1998 3 1 3 Physical Description OVERVIEW CABINETRY PLANARIZER SUBASSEMBLIES CONTROL PANEL AND EMERGENCY OFF BUTTONS CONTROL COMPUTER...

Page 423: ...rlocks 5 PLANARIZER SUBASSEMBLIES 12 CONTROL PANEL AND EMERGENCY OFF BUTTONS 15 Control Panel 15 Additional Emergency Off Buttons 17 CONTROL COMPUTER 18 Where to Find More Information on the Software...

Page 424: ...onents of the machine The Cabinetry section details outside views of the machine including doors and panels location of standard emergency off buttons and power switches The Planarizer Subassemblies s...

Page 425: ...ise or counterclockwise as needed When locking service doors firmly tighten with the Phillips screwdriver to provide maximum security against unauthorized opening INTERLOCK SAFETY SWITCHES The operato...

Page 426: ...cycle had been polishing polishing will end but the rest of the cycle can be continued Opening an elevator access operator door will not halt the cycle but it will prevent elevator and robot movement...

Page 427: ...2 3 4 5 6 7 1 Control Panel of Front Mounted Operator Interface 2 Flat Panel Screen and Keypad of Front Mounted Operator Interface 3 Right Top Emergency Off Button 4 Left Side Polish Section Operator...

Page 428: ...Left Side Polish Section Door 4 and the Right Side Polish Section Door 5 are fitted with switches to sense whether the doors are fully closed The polish section operator doors must be closed in order...

Page 429: ...e Service Door 12 Right Side Electrical Cabinet side view 13 Elevator Access Doors The Left Side Service Door 11 provides access to the front and side regulator and valve assembly panels The regulator...

Page 430: ...e view 16 Right Top Service Door 17 Lower Right Side Service Door 18 Left Side Electrical Cabinet side view The Lower Right Side Service Door 17 when removed permits access to the bridge drive train p...

Page 431: ...4 Planarizer Rear View 19 20 20 21 22 23 24 19 Left Side Electrical Cabinet Service Door 20 Right Side Electrical Cabinet Service Doors 21 Rear Door Emergency Off Button 22 Rear Door Power On Lamp 23...

Page 432: ...closure Latch 23 rotates counterclockwise to latch the service door and enable the Main Power Supply Circuit Breaker 24 The Right Side Service Doors 20 are secured by a key locked latch To open the tw...

Page 433: ...e with a second polish table installed refer to engineering drawing 225220U2 Figure 3 5 Planarizer Subassemblies 1 Bridge Assembly 6 Robot Assembly 2 Left Spindle 7 Shuttle Assembly 3 Right Spindle 8...

Page 434: ...eft spindle curtain rinse position places the bridge assembly between the load stations and the polish table with the left spindle at the optional curtain rinse The right spindle curtain rinse positio...

Page 435: ...placement on the carriers and removal from the carriers The Left and Right Cleaning Stations 10 and 11 clean and rinse the carriers wafers to keep the inserts clean and free of slurry buildup Note tha...

Page 436: ...ile remote interface Figure 3 6 below shows the layout of the panel components A description of each component follows the figure Figure 3 6 Control Panel audible alarm MACHINE ON CYCLE HALT EMERGENCY...

Page 437: ...ies and controllers After pressing an EMERGENCY OFF button the operator restarts the machine from the beginning by pressing the MACHINE ON pushbutton To restart after correcting the problem requiring...

Page 438: ...is made by depressing the 30 Second Timer pushbutton with the yellow lamp next to the rotary switch on the Control Select Panel at the rear of the machine This is used only for the purpose of connect...

Page 439: ...To find information on a specific menu see the Menu Information Locator Table in the Contents section at the front of each manual volume For information on 4 25 and post 4 25 software version feature...

Page 440: ...the front or left side of the machine cabinet For illustrations of front and side mounted operator interface units refer to Figures 3 1 and 3 2 above in this chapter Available options include dual fr...

Page 441: ...em flush is selected at this menu For further information refer to the Operator Functions and Machine Setup chapters of the 6DS SP Operations manual Recipe Management Menu Polish programs recipes are...

Page 442: ...is menu For further information refer to the Machine Setup chapter of the 6DS SP Operations manual Machine Setup Menu Machine settings that affect machine operation but not processing are set at this...

Page 443: ...ine is homed at this menu For further information refer to the Operator Functions chapter of the 6DS SP Operations manual Password Menu Changing of password levels creation of passwords and deletion o...

Page 444: ...Introduction ECHANICAL ESCRIPTION...

Page 445: ...4 Mechanical Description AUTO POLISH CYCLE OPERATION THE SEQUENCE OF EVENTS BRIDGE DRIVE ASSEMBLY ELEVATOR ASSEMBLY ROBOT ASSEMBLY LOAD STATIONS CLEANING STATIONS SHUTTLE ASSEMBLY POLISH TABLE DRIVE...

Page 446: ...Polish Cycle Sequence 5 D Wafer Unloading Sequence 6 E Cassette Removal 7 F Cycle Halt 7 Bridge Drive Assembly 8 Elevator Assembly 9 Robot Assembly 11 Left Right Load Unload Stations 12 Left Right Car...

Page 447: ...n the 6DS SP Maintenance manual correctly setup per procedures in the Machine Setup chapter of the 6DS SP Operations manual for setup of auto polish cycle parameters machine setup parameters pad and c...

Page 448: ...rm moves out over the load chuck 11 The load chuck travels to its up position 12 Vacuum at the load chuck is turned on to sense the wafer 13 The robot Z moves from its position above the load station...

Page 449: ...ble 9 If the second table option is not installed the wafer unloading sequence begins refer to Section D below 10 If the second table option is installed a The bridge moves to polish position over the...

Page 450: ...10 If time has been entered for wafer rinsing wafers are rinsed 11 The robot travel moves to its left right load position 12 The robot Z moves to its above load position 13 The robot arm extends out...

Page 451: ...s finished the spindles move up e The shuttle moves forward f The machine begins the next auto cycle or 28 If carrier cleaning is not enabled the carrier cleaning sub sequence is skipped 29 The machin...

Page 452: ...o a brushless DC servo motor This arrangement converts motor drive force into linear motion moving the bridge assembly left or right between the load stations and the polish table The motor mounted to...

Page 453: ...when the elevator has reached the bottom limit of travel This information is used to home the elevator Note that the elevators are water resistant Each of the four cassette sensor arms has a mechanic...

Page 454: ...s from a receive cassette without disturbing the elevator tank fill dump valves If an elevator arm is lowered and the elevator access door is closed the elevator s tank will fill for the time period e...

Page 455: ...downward movement of the robot Encoder feedback monitors position and speed The Z axis has a single inductive sensor located at the middle range of travel and functioning as a home switch The robot ro...

Page 456: ...left and right load chucks will be rinsed even if only one spindle is in use Load chuck rinsing does not occur in condition mode The fountain rinse option provides rinsing of the front side of the wa...

Page 457: ...s and one air cylinder POLISH TABLE DRIVE ASSEMBLY The polish table drive assembly consists of a brushless DC servo motor worm gear reduction gearbox shaft and granite table The brushless DC servo mot...

Page 458: ...arrier mounting assembly The motor mounting block and quill housing are bolted together They support the entire spindle drive assembly The mounting block serves as an attachment point for the spindle...

Page 459: ...ogy transferring air or vacuum as needed to retain or release the wafer down through the carrier to the wafer Back pressure is used for wafer transport and unloading whether or not it is enabled for p...

Page 460: ...nder to the spindle drive assembly The load cell senses the amount of applied force on the spindle drive assembly and wafer carrier and generates an analog voltage signal proportional to the amount of...

Page 461: ...econd air cylinder together with a load cell and an electro pneumatic regulator raises and lowers the device itself producing and controlling conditioning down force The second air cylinder s function...

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Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...

Page 464: ...Strasbaugh Control System Description Version 4 0 February 1998 5 1 5 Control System Description CONTROL COMPUTER SERVO CONTROLLER DC MOTOR CONTROLLER SERVO AMPLIFIER I O AND INTERFACE SYSTEM...

Page 465: ...Maintenance Model 6DS SP Planarizer 5 2 Version 4 0 February 1998 Control Computer 3 Servo Controller 4 DC Motor Controller 5 Servo Amplifier 5 I O and Interface System 6...

Page 466: ...ft s MS DOS 5 0 or later 6DS SP planarizers serial number 181 and later 12 13 96 are equipped with an operator interface unit consisting of a flat panel display vertically mounted keypad horizontally...

Page 467: ...e additional servo motors support the second table option the programmable servo controlled conditioning arm linear actuator and brush rotation and the enhanced cleaning stations Each motor with the e...

Page 468: ...ier module mates between the motion control board and the brushless DC servo motor The amplifier modules are identified as 1BSC through 12BSC for axes 1 through 12 respectively The axes 1 4 amplifier...

Page 469: ...expansion slot of the control computer interfacing the computer motherboard to the I O bus and conveying input and output instructions from the control computer for specific I O points As shown in eng...

Page 470: ...Introduction OWER ISTRIBUTION...

Page 471: ...Strasbaugh Power Distribution Version 4 0 February 1998 6 1 6 Power Distribution AC DISTRIBUTION DC DISTRIBUTION POWER UP INTERLOCKS...

Page 472: ...Maintenance Model 6DS SP Planarizer 6 2 Version 4 0 February 1998 INTRODUCTION 3 AC DISTRIBUTION 3 DC DISTRIBUTION 4 POWER UP 5 INTERLOCKS 6...

Page 473: ...ectrical power is THREE PHASE 208 VAC 60 AMPERES This inhouse electrical power terminates to the main power circuit breaker 1CB The circuit breaker is a single throw 60 amp rated circuit breaker From...

Page 474: ...circuit breakers protect each of the three transformers 1T 2T and 3T on both the primary and secondary circuits Circuit breakers also protect individual parallel branch circuits on the secondary side...

Page 475: ...tacts for L1 L2 and L3 providing power throughout the machine The contacts for terminals 9 and 5 of the interlock relay 1RLY are closed maintaining power to 1RLY keeping contacts 12 and 8 closed and m...

Page 476: ...s detent and the switch contacts are closed The six interlock switches and the Emergency Off pushbuttons EMO s are wired together in series The EMO s are normally closed and the six interlock switches...

Page 477: ...ng a polish area operator door during an auto polish cycle interrupts and suspends the cycle Opening an elevator area operator door during an auto polish cycle does not interrupt polishing but it does...

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Page 479: ...Introduction LUMBING ESCRIPTION...

Page 480: ...Strasbaugh Plumbing Description Version 4 0 February 1998 7 1 7 Plumbing Description COMPRESSED AIR SYSTEM VACUUM SYSTEM WATER SYSTEM EXHAUST SYSTEM SLURRY SYSTEM CHEMICAL SYSTEM DRAIN SYSTEM...

Page 481: ...Maintenance Model 6DS SP Planarizer 7 2 Version 4 0 February 1998 Compressed Air System 3 Vacuum System 4 Water System 5 Exhaust System 5 Slurry System 6 Chemical System 8 Drain System 8...

Page 482: ...dle blow off slurry diaphragm pumps slurry flush solenoids back pressure enabled solenoids back pressure system shuttle second table assembly forward and backward movement locking of the second table...

Page 483: ...and pressure gauge are mounted at the lower left front valve panel VACUUM SYSTEM The vacuum system controls the vacuum source needed to secure the wafer carriers to the spindle drives the wafer to th...

Page 484: ...pring returned water valves The solenoids are located on the valve panel assembly accessible through the lower left front service door Slurry 1 slurry 2 and the pump 3 receive their D I water supply f...

Page 485: ...at the Auto Polish Cycle Parameters menu Individually programmed by the user for flow rate and duration of flow each is similar in hardware layout and operation Whenever the machine is on as indicated...

Page 486: ...e motor control boards for the slurry 1 and slurry 2 peristaltic pumps 1SCR and 2SCR are mounted to the back panel inside the right electrical cabinet along the top The following is a component overvi...

Page 487: ...2 by toggling between D I water and chemical rinsing for the load stations cleaning stations and curtain rinse DRAIN SYSTEM The drain system consists of drain tubs surrounding the elevator assembly th...

Page 488: ...the rinse ring spurts at fixed time intervals keeping the bottom of the tub relatively clean and preventing the slurry solution from clogging up the drainpipe Three floor pans at the base of the machi...

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Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...

Page 491: ...4 0 February 1998 8 1 8 Preventive Maintenance Schedules DAILY PREVENTIVE MAINTENANCE SCHEDULE 7 DAY PREVENTIVE MAINTENANCE SCHEDULE 28 DAY PREVENTIVE MAINTENANCE SCHEDULE 180 DAY PREVENTIVE MAINTENAN...

Page 492: ...rsion 4 0 February 1998 OVERVIEW 3 DAILY PREVENTIVE MAINTENANCE SCHEDULE 4 7 DAY PREVENTIVE MAINTENANCE SCHEDULE 6 28 DAY PREVENTIVE MAINTENANCE SCHEDULE 8 180 DAY PREVENTIVE MAINTENANCE SCHEDULE 14 3...

Page 493: ...iate chapters of the 6DS SPOperations and Maintenance manuals Assumption The procedures below are discussed with the assumption that the reader is thoroughly familiar with the 6DS SP Planarizer If not...

Page 494: ...ch time a wafer comes out of the carrier on the table during processing Check carrier pocket depth each time wafer backing film or template ring is replaced Check for proper readings for compressed ai...

Page 495: ...ry Lines Slurry System Wafer Backing Insert Wafer Template Ring Operate Slurry Flush Cycle once each shift Flush lines before every pad change before the machine is to sit idle for more than 30 minute...

Page 496: ...cleanliness and condition Clean pan Backup after every change session Crosscheck coolant and table temperature readings Clean and Check Elevator platforms and uprights elevator tanks inside and out el...

Page 497: ...ry distribution lines for condition and leaks replace as needed Drain wipe out rinse out filter screen and reassemble Clean and check slurry pumps and motor panel Ensure pressures are correct on table...

Page 498: ...le 1 position Bridge centered over load stations at load position Inspect for cracking and fraying check individual cogs of belt for worn spots and cracks replace if signs of wear are evident Check be...

Page 499: ...ed Check and calibrate Refer to Software Calibration chapter and Signet manufacturer s data Check and calibrate polish downforce for both left and right spindles Check for proper operation of Power On...

Page 500: ...Alignment Table 1 Table 2 Shuttle Table and Spindle RPM Wafer Blowoff Pressure Wafer Detection Vacuum Sensor Check and calibrate Adjust as needed Check and adjust Check and calibrate flow Check and ad...

Page 501: ...alibration chapters of this manual perform the 9 elevator and robot procedures listed below 1 Elevator Cassette Platform Leveling 2 Elevator Cassette Arm Sensor Switch Adjustments 3 Robot Up Down Z Ax...

Page 502: ...ation Calibration Variables at Elevators 103 and 110 104 and 111 105 and 112 106 and 113 Calibration Variables at Load Stations 107 and 114 108 and 115 7 Robot Up Down Z Axis Load Positions Calibratio...

Page 503: ...entually affect machine operation The coalescing filter should be inspected for visible contamination and replaced if clogged with visible debris or if air flow is restricted The bowl is self draining...

Page 504: ...on Robot Slurry System Check and calibrate bridge position Inspect and replace drive belt if needed Check flow rate Check oil level and fill if required Use 9 ozs AGMA No 8 or equivalent Check and cal...

Page 505: ...5 180 DAY PREVENTIVE MAINTENANCE SCHEDULE SUBJECT ACTION Spindles Spindle Gearbox Oil Left and Right Table 1 Check and adjust carrier wafer detect sensors Check oil level and fill if required Use 0 5...

Page 506: ...Maintenance Model 6DS SP Planarizer 8 16 Version 4 0 February 1998 365 DAY PREVENTIVE MAINTENANCE SCHEDULE SUBJECT ACTION Chiller Heater Flush system and change coolant...

Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...

Page 508: ...chanical Maintenance Procedures Version 4 0 February 1998 9 1 9 Mechanical Maintenance Procedures CARRIERS CLEANING STATIONS CONDITIONING ARM ELEVATORS AND ROBOT LOAD STATIONS SHUTTLE SLURRY SYSTEM SP...

Page 509: ...tioning Arm Switch Adjustments 56 1 in Conditioning Arm Adjustment Series 56 ELEVATORS AND ROBOT ORDER OF ADJUSTMENT 61 ELEVATORS AND ROBOT 62 Elevator Cassette Platform Leveling 62 1 in Elevators and...

Page 510: ...the Terminal Block 138 Measurement of the Present Load Chuck Height Position 139 Removal of the Load Chucks Table and Subtable 142 Second Table Load Position Shock Absorber Adjustments 147 Second Tabl...

Page 511: ...izer If not see the chapters in this manual on Physical Description Installation Mechanical Description Control System Description Power Distribution and Plumbing Description as well as the Operator F...

Page 512: ...aintenance Chapter 10 Software Calibration Procedures for software calibration procedures EXCEPTIONS For the components shown below refer to the Order of Adjustments located at the beginning of the ap...

Page 513: ...98 RUNNING A SHORT TEST CYCLE Use the procedure below whenever an adjustment or calibration in this manual calls for a short test cycle To run a cycle to test wafer handling set the polish times for b...

Page 514: ...of the 6DS SP Operations manual set the polish time for both spindles to 0 6 Run an auto polish cycle Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual 7...

Page 515: ...ents ASSEMBLY DRAWING AND ASSOCIATED PART LISTS Refer to Appendix B located in Volume Two of this manual for the following resources ASSEMBLY DRAWING WITH SYMIX PART NUMBERS LABELED 6DS SP ACC 72 CARR...

Page 516: ......

Page 517: ...0 February 1998 9 9 ILLUSTRATIONS OF CARRIER COMPONENTS The assembly drawing extracts below are provided to aid in identification of the components named in the carrier maintenance procedures Figure 9...

Page 518: ...Maintenance Model 6DS SP Planarizer 9 10 Version 4 0 February 1998 Figure 9 3 Inner Gimbal Ring aka Gimbal Ring Figure 9 4 Outer Gimbal Ring aka Gimbal Retainer...

Page 519: ...Strasbaugh Mechanical Maintenance Procedures Version 4 0 February 1998 9 11 Figure 9 5 Carrier Wafer Mounting Plate Figure 9 6 Carrier Retaining Ring...

Page 520: ...Maintenance Model 6DS SP Planarizer 9 12 Version 4 0 February 1998 Figure 9 7 Retainer Clamp Ring...

Page 521: ...he machine and perform the home sequence routine Remove carriers from spindles 2 Following procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual remove the carriers fro...

Page 522: ...wafer mounting plate backing side down and align its two notches with the alignment pins 12 While continuing to maintain hole alignment press the exposed adhesive portion of the pad down onto the car...

Page 523: ...rs ASSEMBLY OF A CARRIER A detailed knowledge of carrier assembly procedures is essential for replacement of worn parts changing of shim sizes SUMMARY A Assemble Carrier Top Plate B Install Bearings i...

Page 524: ...DS SP ACC 45 45R 150 mm Carrier Spare Parts Kit Item 233555 6DS SP ACC 58 125 mm Carrier Spare Parts Kit Item 225134 6DS SP ACC 56 100 mm Carrier Spare Parts Kit Item 225133 6DS SP ACC 57 75 mm Carrie...

Page 525: ...il the quill socket is seated solidly against the bottom of the plate center hole 6 Using a retaining ring plier squeeze a retaining ring and insert it in the hole releasing it on top of the thrust wa...

Page 526: ...the plate b Start the stud of the swivel elbow into the 10 32 hole by manually rotating it clockwise c At the final rotation of the stud position it such that the barb points at the 10 o clock locatio...

Page 527: ...flange against the shoulder b While holding the ring in a vertical position with one hand palm up and supporting the ring from the inside top with your fingers surrounding one of the two outside diame...

Page 528: ...ning the second inside diameter hole at the bottom of the ring m Repeat Steps g h i j and k immediately above to install a flange bearing in the second inside diameter hole C INSTALL INNER GIMBAL RING...

Page 529: ...l edge of the outer gimbal ring a While holding one assembly screw gimbal pin unit in each hand positioned with the flat of the pin facing up simultaneously insert both assembly screw outer gimbal pin...

Page 530: ...INCHES OF PLAY MOVEMENT IN THE OUTSIDE DIAMETER INNER GIMBAL RING BEARINGS Test Procedure GOAL FOR EACH BEARING When measured with a feeler gauge the gap between the outside diameter bearing and the s...

Page 531: ...y screw clockwise approximately three revolutions 3 Remove both pins by pulling on the assembly screws 4 Lift the outer gimbal ring off the inner gimbal ring 5 Remove the flange bearings from the outs...

Page 532: ...the goal is met b When the goal is met go on to Section E immediately below E INSTALL INNER OUTER GIMBAL RING UNIT ONTO WAFER MANIFOLD PLATE 1 Place the wafer manifold plate on the stainless steel wor...

Page 533: ...ers mating to the counterbores a While holding an inner spacer on each of your middle fingers with your fingers inserted in sides of the spacers opposite the flanges place one hand at 3 o clock and th...

Page 534: ...above to assemble a second assembly screw inner gimbal pin unit 5 Move the entire unit to a corner of the maintenance fixture or workbench top surface 6 Pivot the outer gimbal ring to expose one of th...

Page 535: ...IN THE INSIDE DIAMETER INNER GIMBAL RING BEARINGS Test Procedure GOAL FOR EACH BEARING When measured with a feeler gauge the gap between the inside diameter bearing and the spacer is between 004 and...

Page 536: ...hex key rotate the 1 4 20 x 1 4 in set screw locking the pin counterclockwise approximately two revolutions to loosen 4 Remove the pin by pulling on the assembly screw 5 Expose the second inside diam...

Page 537: ...tool to knock the bearing out d Remove the flange bearing tool e Locate the second inside diameter bearing f Repeat Steps a b and c immediately above to remove the second inner diameter flange bearing...

Page 538: ...on the bench top carrier fixture positioning the unit against the two locator pins of the maintenance fixture and orienting as shown in the figure below GOAL The back side of the manifold plate must b...

Page 539: ...rientation of Gimbal Ring Manifold Plate Unit on the Bench Top Carrier Fixture 3 Using the locking block and screw secure the gimbal ring manifold plate assembly to the bench top carrier fixture 4 Man...

Page 540: ...the thin end of the tubing between the inner gimbal ring and the manifold plate securing the plate For All Carriers 6 Manually install a 3 4 40 jack screw assembly into each of the three holes in the...

Page 541: ...n 125 in beyond the opposite front side of the plate Notes The 3 4 40 jack screws have 40 threads per inch 1 revolution of the jack screw 025 in 5 revolutions x 025 125 in Goal for Six Inch Carriers O...

Page 542: ...nd the manifold plate has two 10 32 screws Install bumper screws of appropriate size in the four holes 13 Release the pivoting ring retainers 14 Rotate the manifold assembly 180 _ to reposition the as...

Page 543: ...ollowing the procedure in Step g immediately below g Correct the position of the jack screw by hand rotating it from the bottom while reading the gauge Rotate the jack screw as needed until the goal i...

Page 544: ...of the other two screws 22 Torque each jack screw to 120 inch pounds using a torque wrench a Attach a 7 8 in crowfoot to the torque wrench b Set the torque wrench at 120 inch pounds c Place a 1 2 in...

Page 545: ...h the square heads of the jack screws protruding down Note The round ends of the jack screws will be facing up 25 Relock the pivoting retainers 26 Fine adjustment Check the height of the jack screws a...

Page 546: ...otating each stud clockwise three or more revolutions 4 Turn the mounting plate over standing it on the three alignment studs 5 Using a small amount of D I deionized water lubricate the O ring and the...

Page 547: ...the wafer mounting plate 8 Release the pivoting ring retainers 9 While holding the wafer mounting plate and gimbal ring manifold plate assembly with one hand rotate the entire assembly to vertical 10...

Page 548: ...confirm that the plate is snug against the jack screws by checking that all three sealing screws have been tightened to firm 18 Torque each sealing screw to 60 inch pounds a Attach a 3 8 in sq x 3 16...

Page 549: ...l the notch is positioned 3 4 in from the wafer insert positioning hole located at 5 o clock The notch will be positioned at approximately 6 o clock 25 Insert the locking disk into the notch of the re...

Page 550: ...p plate concave side down over the carrier assembly and oriented such that the swivel elbow of the top plate is at 6 o clock 4 Install the open end of the top plate s 1 4 in tubing on the barb of the...

Page 551: ...to the holes b Using the power screwdriver tighten the screws to approximately 15 inch pounds of torque 12 Remove the carrier from the maintenance fixture 13 Place the carrier on a solid workbench sur...

Page 552: ...djusting Tool Assembly Strasbaugh Indicator Depth Gauge Assembly Item 233595 Consisting of Mitutoyo Indicator Depth Gauge Item 218198 Indicator Point Flat Carbide Item 218199 Indicator Depth Gauge Hol...

Page 553: ...ing plier feeler gauge 1 4 in socket wrench Obtain the Pocket Depth Specification The pocket depth is process specific The desired depth must be determined by the thickness of the wafers to be process...

Page 554: ...unit against the two locator pins of the maintenance fixture and orienting as shown in Figure 9 13 below GOAL The back side of the manifold plate must be facing up How to Identify the Back Side of th...

Page 555: ...meter measure the pocket depth at three equidistant points around the pocket Note For details on using the indicator refer to Step 16 in Section G above PRELIMINARY GOAL The measurements at the three...

Page 556: ...sured as needed to meet the preliminary goal Note Measure with the indicator depth gauge sitting on the wafer mounting plate and read the height of the retainer ring during adjustment Adjust the remai...

Page 557: ...al goal FINAL GOAL For each of the three jack screw assemblies each lock nut must be torqued to 120 inch pounds each mounting screw must be torqued to 60 inch pounds the measurements at the three poin...

Page 558: ...Model 6DS SP Planarizer 9 50 Version 4 0 February 1998 DISASSEMBLY OF A CARRIER For carrier disassembly follow the steps for assembly in reverse order beginning with Step 14 of Section I Install Carri...

Page 559: ...e Location In Maintenance Manual 1 Cleaning Station Alignment Chapter 9 Mechanical Maintenance Procedures 2 Cleaning Station Device Up Down Adjustments Chapter 11 Pneumatic Adjustments 3 Enhanced Clea...

Page 560: ...nters the cleaning stations under the spindles CAUTION Be sure to perform the Bridge Load Position Calibration procedures in the Software Calibration Procedures chapter of this manual BEFORE beginning...

Page 561: ...e Rear to move the shuttle assembly to its rear position 4 At Page 2 of the Manual Control Menu select Left Spindle Up Down and choose Down to lower the left spindle right spindle Right Spindle Up Dow...

Page 562: ...surements meet the goal 5 When the goal has been met tighten the four bolts at the base of each cleaning station by rotating them clockwise to firm 6 Close the Left Side Operator Door 7 Raise the left...

Page 563: ...ocedures are grouped in each chapter by component Order Procedure Location In Maintenance Manual 1 Conditioning Arm Switch Adjustments Chapter 9 Mechanical Maintenance Procedures 2 Conditioning Arm Pr...

Page 564: ...VICE ARM UP POSITION SWITCH A BEFORE YOU BEGIN TOOLS REQUIRED 1 2 in open end wrench Phillips screwdriver TURN MACHINE POWER ON Follow the procedures detailed in the Operator Functions chapter of the...

Page 565: ...EMERG OFF button on the control panel to turn power off to the machine 3 Using a Phillips screwdriver to release the latch unlatch and remove the right front service door 4 Locate and adjust the arm u...

Page 566: ...this section lowering the switch one notch each time until the input is on when the conditioning arm is in up position D WHEN SATISFACTORY ADJUSTMENT IS ACHIEVED Go on to the Device Arm Park Position...

Page 567: ...ress the EMERG OFF button on the control panel to turn power off to the machine 2 Using a Phillips screwdriver to release the latch unlatch and remove the lower right end service door 3 Locate and adj...

Page 568: ...ing the adjustment procedure in this section moving the switch in 1 in increments each time until the input is on when the conditioning arm is in park position Repeat adjusting and testing until the i...

Page 569: ...6 117 118 Chapter 10 Software Calibration Procedures 4 Elevator Height Positions Calibration Calibration Variables 80 81 82 83 Chapter 10 Software Calibration Procedures 5 Robot Arm Rotation Theta Pos...

Page 570: ...perform the adjustments in the order required THROUGHPUT OPTION If the throughput option is installed in your machine refer to the Front to Back or Side to Side Throughput Option Addendum to the 6DS S...

Page 571: ...ator to its Slot 25 position 2 At Page 1 of the Manual Control Menu select Robot Move and choose Left Send move the robot to the left send elevator 3 At Page 1 of the Manual Control Menu select End Ef...

Page 572: ...ket head adjusting screws mounted on top of the horizontal surface of the elevator platform mount located farthest from the robot Figure 9 14 Sketch Showing Elevator Alignment Screws A left adjustment...

Page 573: ...procedures below to adjust the alignment C ALIGNMENT PROCEDURE GOAL 1 Front to Rear 1 While holding one hand under the elevator support platform to provide support use a 5 32 in hex key to loosen the...

Page 574: ...Goal 1 is met 7 Recheck the Side to Side adjustment Repeat the adjustment as needed until Goal 1 is met GOAL 2 8 When Goal 1 has been met for both Front to Rear and Side to Side if all three screws h...

Page 575: ...f Wafer From Robot located in the Operator Functions chapter of the 6DS SP Operations manual remove the wafer 3 Rehome the machine RIGHT SEND ELEVATOR Repeat as for Left Send Elevator substituting rig...

Page 576: ...EVATOR A BEFORE YOU BEGIN Tools Required small adjustable wrench flat blade screwdriver Turn Machine Power On and Perform Home Sequence Routine Follow the procedures detailed in the Operator Functions...

Page 577: ...ght receive elevator Input 40 a If the input is on skip to When Satisfactory Adjustment Is Achieved below b If the input is off correct it by following the adjustment procedure in Section C immediatel...

Page 578: ...other three elevators b If the goal is not met make corrections by repeating the adjustment procedure above D WHEN SATISFACTORY ADJUSTMENT IS ACHIEVED Rehome the machine Note If doing all four elevat...

Page 579: ...follow the procedures found in Version 2 0 of the 6DS SP Maintenance manual substituting the detailed keystroke instructions which match pre 4 00 software found there with post 4 00 software commands...

Page 580: ...DJUSTMENT SERIES A BEFORE YOU BEGIN Tools Required surface plate with flatness deviation less than 001 in dial indicator with adjustable linkage 7 32 in hex key 7 16 in open end wrench 1 8 in hex key...

Page 581: ...oor 4 Locate the three black right angle connections mounted at the end of the robot carriage nearest the polish table 5 Manually rotate each black right angle connection counterclockwise to disconnec...

Page 582: ...ension of the robot s black base plate by rotating them counterclockwise 15 Lift the robot out of the machine C LEVEL THE ROBOT 1 Place the robot on a surface plate with a specific flatness deviation...

Page 583: ...g them counterclockwise Notes Refer to Figure 9 15 for the locations of the four jam nut set screw pairs labeled A B C and D As Loctite was used at the factory to secure the jam nuts and set screws it...

Page 584: ...6 7 9 Place a small Post it note at each of the points on the surface plate corresponding to those points labeled 1 2 3 4 5 6 and 7 in Figure 9 15 10 Zero the dial indicator at Point 1 11 Move the ind...

Page 585: ...from 0 GOAL The set screw should be adjusted until the indicator reading matches the value determined by the calculation done in Step 12 above Rotate the set screw clockwise or counterclockwise as ne...

Page 586: ...Steps a and b immediately above for jam nut set screw pairs B C and D 18 When all four jam nuts have been tightened to firm recheck the dial indicator readings at all seven points If the final leveli...

Page 587: ...late a Place the level on the end effector in a position parallel to the robot arm b Note whether the level reading meets the goal c Place the level on the end effector in a position perpendicular to...

Page 588: ...1 4 20 button head screws by rotating them clockwise to firm 7 Recheck the adjustment by repeating Steps 1 2 and 3 above in this section a If the goal is met for both parallel and perpendicular placem...

Page 589: ...horizontal surface of the robot s stainless steel cover 9 Reconnect Line 11 to the middle quick disconnect slot 10 Reconnect Line 94 to the bottom quick disconnect slot 11 Reconnect all three black r...

Page 590: ...crewdriver 5 16 in open end wrench 7 32 in hex key Close All Access Doors Turn Machine Power On Perform Home Sequence Routine Follow the procedures detailed in the Operator Functions chapter of the 6D...

Page 591: ...rom one end of the slide to the other b If the goal is met no further adjustment is required c If the goal is not met proceed to Step 5 immediately below to make the adjustment 5 Remove the end effect...

Page 592: ...ulleys toward the center drive pulley slightly b Repeat for the other tensioner pulley c Test by manually moving the slide belt connecting arm from one end of the slide to the other d If the goal is m...

Page 593: ...in the Operator Functions chapter of the 6DS SP Operations manual B CENTER THE LOAD STATIONS UNDER THE SPINDLES Note Lowering the spindles and applying a small amount of down force centers the load st...

Page 594: ...indle Force and enter 3 to change the force to 3 psi 6 At Page 2 of the Manual Control Menu select Right Spindle Force and enter 3 to change the force to 3 psi 7 Select Left Spindle Force and enter 0...

Page 595: ...in the Software Calibration Procedures chapter of this manual BEFORE beginning the load station alignment procedures below A BEFORE YOU BEGIN Tools Required 9 16 in socket wrench straight edge precisi...

Page 596: ...Down to lower the right spindle 5 Open the Left Front Operator Door 6 Hold a straight edge vertically against the intersection of the left carrier and load ring edges 7 Look for light between the car...

Page 597: ...head bolts at the base of the load station by rotating them counterclockwise Rotate each until just snug 5 Based upon the measurements and direction notations made above tap the load station s as need...

Page 598: ...bruary 1998 D WHEN A SATISFACTORY ADJUSTMENT IS ACHIEVED 1 Close all door s 2 At Page 2 of the Manual Control Menu select Left Spindle Up Down and choose Up to raise the left spindle 3 Select Right Sp...

Page 599: ...HUTTLE SHUTTLE TRAVEL ADJUSTMENTS SHUTTLE FORWARD STOP AND REED SWITCH ADJUSTMENT A BEFORE YOU BEGIN Tools Required precision scale accurate to 03125 in 9 16 in open end wrench 9 16 in socket wrench 1...

Page 600: ...the bridge to its load position 4 Open the Left Side Operator Door 5 Position the left load station a Loosen the four hex head bolts at the base of the left load station by turning them counterclockw...

Page 601: ...ward Reed Switch Adjustment below b If the goal is not met using a straight edge placed vertically against the edge of the carrier and the load ring and a precision rule measure at front and rear to d...

Page 602: ...tween the bases of the cleaning stations a Use a flat blade screwdriver on the four counter sunk screws of the cover b Set the screws aside c Lift the access cover off with the edge of a screwdriver 1...

Page 603: ...e shuttle assembly to its forward position 19 Close the Left Side Operator Door 20 Rotate the Compressed Air Supply valve 1 4 turn counterclockwise to turn the compressed air supply ON 21 At Page 1 of...

Page 604: ...stment b If the screen displays 17 ON skip to Step 33 to begin reassembly 28 Remove the stainless steel forward air cylinder cover a At Page 1 of the Manual Control Menu select Bridge Move and choose...

Page 605: ...d air supply ON 32 Re check the shuttle forward reed switch status At the Diagnostics Menu read the shuttle forward reed switch status Input 17 GOAL Input 17 should be ON when the shuttle is in its fo...

Page 606: ...narizer 9 98 Version 4 0 February 1998 h Replace the four hex head bolts on each cleaning station i Reinstall the water lines j Turn facilities water back ON k Close the Left Side Operator Door l Turn...

Page 607: ...BEGIN Tools Required 9 16 in socket wrench 9 16 in open end wrench 1 1 8 in open end wrench precision scale accurate to 03125 in flat blade screwdriver straight edge 3 16 in hex key Turn Machine Power...

Page 608: ...ar of the machine 5 Open the Left Side Operator Door 6 Position the right cleaning station a With a 9 16 in socket wrench loosen the four hex head bolts at the base of the right cleaning station by ro...

Page 609: ...t below C ADJUSTMENT PROCEDURE Rear Stop Adjustment 1 Close the Left Side Operator Door 2 Select Right Spindle Up Down and choose Up to raise the right spindle 3 At Page 1 of the Manual Control Menu s...

Page 610: ...n a By hand push the right cleaning station toward the rear of the machine as far as it will go b With a scale measure the distance between the front edge of the shuttle assembly top plate and the fro...

Page 611: ...the correct distance between the stopping collar and the shock absorber 19 Retighten the jam nut very tight 20 Close the Left Side Operator Door 21 Rotate the Compressed Air Supply valve 1 4 turn cou...

Page 612: ...d the shuttle rear reed switch status Input 18 GOAL Input 18 should be ON when the shuttle is in its rear position a If the screen displays 18 OFF go to Step 29 to begin the reed switch adjustment b I...

Page 613: ...n the round head screw at the left of the switch 31 Close the Left Side Operator Door 32 Rotate the Compressed Air Supply valve 1 4 turn counterclockwise to turn the compressed air supply ON 33 At the...

Page 614: ...r hex head bolts on each cleaning station i Reinstall the water lines j Turn facilities water back ON k Close the Left Side Operator Door l Turn the compressed air back ON m At Page 1 of the Manual Co...

Page 615: ...urn the machine power to OFF by pressing the red EMERG OFF button located on the control panel 2 Turn off the slurry diaphragm pumps at the pump valves located at the right rear of the machine 3 Open...

Page 616: ...Maintenance Model 6DS SP Planarizer 9 108 Version 4 0 February 1998 9 Reinstall the fittings 10 Close the pump head 11 Turn the diaphragm pumps on 12 Power up the machine...

Page 617: ...iate substitutions as shown in the text below The spindle alignment is accurate only when performed against a properly aligned table Be sure the table is correctly aligned BEFORE beginning the procedu...

Page 618: ...quence Routine Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual Move Bridge to Polish Position At Page 1 of the Manual Control Menu select Bridge Move a...

Page 619: ...d choose Up to raise the right spindle 2 Remove the indicator from the spindle 3 At Page 1 of the Manual Control Menu select Bridge Move and choose Load to move the bridge to its load position 4 Turn...

Page 620: ...spindle at approximately 2 RPM 12 Read the indicator dial as the spindle rotates 13 Adjust the four top set screws in the spindle collar a With the indicator rotated to the front of the machine turn...

Page 621: ...e zero the dial Read the dial Repeat 15 When a satisfactory adjustment is reached a Check carefully to be sure all eight set screws are firmly tightened b Re read the dial indicator for 001 in variati...

Page 622: ...the right spindle vacuum chuck Repeat for the left spindle making appropriate substitutions A BEFORE YOU BEGIN Tools Required dial indicator accurate to 1 1000 in and magnetic base clamp 1 2 in open...

Page 623: ...1 to move the bridge to its polish position Clean Bottom of Vacuum Chuck Using a soft cloth and mild solvent clean the bottom surface of the vacuum chuck B CHECK CURRENT CALIBRATION 1 At Page 1 of the...

Page 624: ...he indicator from the spindle 4 Locate the four 3 8 in socket head bolts mounted vertically inside the spindle clamp rings Each bolt is secured by two 5 16 in set screw and jam nut pairs 5 Loosen the...

Page 625: ...to Step 11 immediately below to make further corrections 11 Manually rotate the spindle to a position nearest the bolt registering the lowest measurement 12 While watching the dial indicator rotate th...

Page 626: ...ll stretch the top clamp ring Tighten each set screw equally moving back and forth among them to minimize stretch 16 Recheck with the indicator and feeler gauge again to confirm that the final goal co...

Page 627: ...9 119 SPINDLE UP DOWN LIMIT SWITCH ADJUSTMENTS A BEFORE YOU BEGIN Tools Required screwdriver 1 2 in open end wrench Turn Machine Power On and Perform Home Sequence Routine Follow the procedures detai...

Page 628: ...ADJUSTMENT PROCEDURE 1 Remove the left and right side stainless steel bridge covers a Using a ladder to reach the top of the machine locate the two latches of the left side cover one at each side b F...

Page 629: ...RIGHT SPINDLE UP LIMIT SWITCH Repeat the procedure for the Left Spindle Up Limit Switch making the following substitutions At the Diagnostics menu check for Input 3 Find the upper limit switch and sw...

Page 630: ...t is on skip to the Right Spindle Down Limit Switch below b If the input is not on correct it by following the adjustment procedure in Section C immediately below C ADJUSTMENT PROCEDURE 1 Remove the l...

Page 631: ...hen the goal is met retighten the 5 16 in bolt by rotating it clockwise to snug 6 Go on to the Right Spindle Down Limit Switch immediately below RIGHT SPINDLE DOWN LIMIT SWITCH Repeat the procedure fo...

Page 632: ...ACUUM SWITCH ADJUSTMENTS LEFT SPINDLE A BEFORE YOU BEGIN Tools Required flat blade screwdriver Turn Machine Power On Perform Home Sequence Routine and Remove Carriers from Spindles Follow the procedur...

Page 633: ...ge covers use a 5 64 in hex key to remove the 6 32 button head screws securing each cover 2 Locate the Barksdale vacuum switch for the left spindle mounted at the front of the upper bridge on the left...

Page 634: ...le vacuum Input 6 D CHECK THE DIGITAL INPUT WITH CARRIERS ON 1 Following procedures listed in the Operator Functions chapter of the 6DS SP Operations manual install the carriers on the spindles 2 At t...

Page 635: ...REMOVAL AND INSTALLATION REMOVAL NOTICE The procedure below is a two person job A BEFORE YOU BEGIN Tools Required 3 4 in open end wrench 3 4 in box end wrench 1 2 13 NC eye bolt Strasbaugh table hois...

Page 636: ...otating it counterclockwise with channel lock pliers c Using the channel lock pliers remove the tube fitting from the elbow d Remove the elbow by turning it counterclockwise with an adjustable wrench...

Page 637: ...ING To prevent possible injury do not place hands arms other body parts or tools underneath the table a Verify that the pressure release valve of the jack is fully clockwise b Insert the jack handle i...

Page 638: ...h table hoist crane adjustable height movable cart channel lock pliers adjustable wrench torque wrench small mirror approx 3 in x 5 in Machine Preparation 1 Turn machine power on and perform home sequ...

Page 639: ...d move it into position WARNING To prevent possible injury do not place hands arms other body parts or tools underneath the table a Verify that the pressure release valve of the jack is fully clockwis...

Page 640: ...ckwise as needed for access 12 Retighten each hex head nut to 40 foot pounds with a torque wrench 13 Reinstall the 2 coolant line fittings a Retape each coolant fitting suspending from the subtable wi...

Page 641: ...25 in Turn Machine Power On and Perform Home Sequence Routine Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual Remove Table Pad and Clean Table 1 Open t...

Page 642: ...to OFF Turn the machine power to OFF by pressing the red EMERG OFF button located on the control panel Turn Compressed Air Supply to OFF Rotate the Compressed Air Supply valve 1 4 turn clockwise to t...

Page 643: ...e Lower Right Front Service Door 2 Use a felt marker to mark a line from the center of the table top to the edge corresponding with each of the 3 jack screws protruding down below the subtable and loc...

Page 644: ...dings making adjustments as needed to all 3 jack screws until the goal is met Note If the screws get too tight you may have to loosen them slightly 8 When the adjustment is satisfactory a Remove the d...

Page 645: ...Position 3 Remove Load Chucks Table and Subtable 4 Second Table Load Position Shock Absorber Adjustments 5 Second Table Polish Position Shock Absorber Adjustments 6 Table Travel Cylinder Reed Switch A...

Page 646: ...iled in the Operator Functions chapter of the 6DS SP Operations manual B DISCONNECT 588 589 AND 590 Note Refer to electrical schematic A38 03 1 Open the door to the large electrical cabinet door 2 Loc...

Page 647: ...of the load chucks after the shock absorbers and reed switches have been adjusted the height of the load chucks before disassembly must be measured and recorded A BEFORE YOU BEGIN Tools Required prec...

Page 648: ...ck at its down position a Using a precision scale measure from the adapter plate the small plate nearest the rear of the machine upon which the load chucks are mounted to the bottom of the black bushi...

Page 649: ...scale measure from the adapter plate the small plate nearest the rear of the machine upon which the load chucks are mounted to the bottom of the black bushing housing of the left load chuck b Record t...

Page 650: ...nd open end wrench 9 16 in open end wrench or universal socket wrench 7 16 in open end wrench 3 4 in combination box and open end wrench mirror attached to a long handle 6 mm hex key 7 32 in hex key 1...

Page 651: ...er 6 Using a 1 2 in socket wrench remove the 5 16 24 jam nut from the top of the right load chuck platform by rotating it counterclockwise Note This jam nut secures the right load chuck air cylinder 7...

Page 652: ...the machine and set aside 12 Detach the water lines to both load stations Manually rotate the teflon clamp nuts counterclockwise to loosen them Pull the hoses out 13 Remove the stainless steel pan a...

Page 653: ...and securing the table to the subtable Notes Refer to Assembly Drawing 219165A1 A38 01 for assistance in locating the 3 8 16 hex head bolts c For accessibility from the front of the machine manually...

Page 654: ...on the top of the subtable by rotating them counterclockwise b Lift the subtable out of the machine and set it aside 16 Remove the white polypropylene pan a Using a 7 32 in hex key remove the three bu...

Page 655: ...shock absorber and the small left side shock absorber A BEFORE YOU BEGIN Tools Required 5 8 in open end wrench straight edge precision scale accurate to 03125 in 1 1 8 in open end wrench or crowfoot R...

Page 656: ...te the Compressed Air Supply valve 1 4 turn counterclockwise to turn the compressed air supply ON 7 Confirm that the vacuum supply is ON 8 Power up and home the machine 9 At Page 1 of the Manual Contr...

Page 657: ...end into the load ring a At the Diagnostics Menu select Change Counter and enter 12 to choose Left Spindle E P Regulator b Enter 900 to changethe Left Spindle E P Regulator value to 900 c Select Chang...

Page 658: ...ator Functions chapter of the 6DS SP Operations manual unload the carriers 3 Open the operator doors 4 Manually remove the carriers from the load rings 5 Adjust the large rear shock absorber Note The...

Page 659: ...er approximately 1 2 inch counterclockwise e Retighten the jam nut by rotating it clockwise 6 Test the adjustment by repeating Steps 5 through 18 in Section B above a If the goal is met skip to the Le...

Page 660: ...in Section B above a If the goal is met skip to the Left Load Chuck below b If the goal is not met repeat the adjustment of the small shock absorber by following Steps 1 2 3 4 and 7 above in this sect...

Page 661: ...rier should take vacuum b Manually hold the right carrier underneath the right spindle The carrier should take vacuum 10 Close the operator doors 11 At Page 1 of the Manual Control Menu select Bridge...

Page 662: ...he rear of the machine Front Gap ______ Direction ________ Rear Gap ______ Direction ________ GOAL The measurements at front and rear should be equidistant If no gap exists skip to the Second Table Po...

Page 663: ...ght side shock absorber The polish position adjustments consist of the following shock absorber adjustments lock adjustments carrier stainless pan positioning adjustment A BEFORE YOU BEGIN Tools Requi...

Page 664: ...its rear position 7 Open the operator doors 8 Remove the left load platform and ring a Using a 9 16 in open end wrench or 9 16 in universal socket wrench loosen the two 3 8 16 hex head bolts mounted o...

Page 665: ...cts two holes on opposite sides of the horizontal surface of the motor drive b Manually rotate the motor drive until the line formed by the straight edge is parallel to the front of the machine cabine...

Page 666: ...easure the gap and note its direction d Record the measurement and direction of the gap For direction record whether the table is too far forward toward the front of the machine or too far back toward...

Page 667: ...tion required by the measurements recorded in Step B 14 above Note If the measurements differ between the left and right spindles make the correction a compromise between the two To move the table tow...

Page 668: ...er mounting bracket by rotating it counterclockwise d Manually rotate the small shock absorber as needed to move the table forward or rearward to make the additional correction required by the measure...

Page 669: ...o move the shuttle to its rear position 6 At the Diagnostics Menu select Toggle Output and enter 3 to turn Output 3 Second Table Lock ON engaging the table polish position locks 7 Open the operator do...

Page 670: ...f the machine 10 If either lock is not fully engaged correct by following the Adjustment Procedure immediately below If both locks are fully engaged skip to the Carrier Stainless Pan Positioning below...

Page 671: ...shuttle to its rear position nearest the rear of the machine 7 Open the polish and elevator operator doors 8 Using a precision scale measure the distance between the back of each carrier at a point on...

Page 672: ...absorber as needed to correct the position of the stainless steel pan To move the pan toward the front of the machine rotate the shock absorber counterclockwise To move the pan toward the rear of the...

Page 673: ...rewdriver TABLE FORWARD REED SWITCH The table forward position reed switch is located at the end of the table travel air cylinder nearest the front of the machine B TEST THE PRESENT POSITION AND ADJUS...

Page 674: ...d position a If the screen displays 17 OFF go to Step 7 to begin the reed switch adjustment b If the screen displays 17 ON skip to the Table Rear Reed Switch 7 Open the polish and elevator operator do...

Page 675: ...in increments until the goal is met TABLE REAR REED SWITCH The table rear reed switch is located at the end of the table travel air cylinder nearest the rear of the machine B TEST THE PRESENT POSITION...

Page 676: ...ted at the end of the table travel air cylinder nearest the rear of the machine b Using a flat blade screwdriver loosen the clamp screw securing the switch by rotating it counterclockwise c While watc...

Page 677: ...small flat blade screwdriver flashlight mirror attached to a long handle B TEST THE PRESENT POSITION AND ADJUST 1 Close all machine doors 2 If needed at Page 1 of the Manual Control Menu select Shuttl...

Page 678: ...he screen displays 49 ON and 50 ON skip to the Table Unlocking Cylinder Reed Switches 5 Open the polish area operator doors 6 If needed adjust position of the left locking cylinder reed switch a Using...

Page 679: ...itch mounted at the right end of the locking cylinder b Inserting a flat blade screwdriver with a 24 in handle across from the left end of the cylinder loosen the clamp screw securing the switch by ro...

Page 680: ...TEST THE PRESENT POSITION AND ADJUST 1 Close all machine doors 2 Disengage the table polish position locks and engage the unlock inputs a At the Diagnostics Menu select Toggle Output and enter 3 to t...

Page 681: ...sition of the left unlocking cylinder reed switch mounted on the front of the locking cylinder at the cylinder s left end a Using a small flat blade screwdriver loosen the clamp screw securing the swi...

Page 682: ...KS TABLE AND SUBTABLE A BEFORE YOU BEGIN Tools Required 1 2 in combination box and open end wrench 9 16 in open end wrench or universal socket wrench 7 16 in open end wrench 3 4 in combination box and...

Page 683: ...counterclockwise b Lift the pan off and set it aside 2 Reinstall the white polypropylene pan a Replace the pan in the machine b Using a 7 32 in hex key replace the three button head capscrews securin...

Page 684: ...rotate them clockwise to firm 5 Reinstall the stainless steel pan a Set the pan in place b Replace the four 1 4 20 hex head capscrews mounted in pairs at each end of the pan on the black vertical pan...

Page 685: ...e the 5 16 24 jam nut at the top of the left load chuck platform by rotating it clockwise to firm Note This jam nut secures the left load chuck air cylinder 9 Using a 1 2 in socket wrench replace the...

Page 686: ...g of the load chucks after the shock absorbers and reed switches have been adjusted restoring the height of the load chucks to the position recorded before disassembly A BEFORE YOU BEGIN Tools Require...

Page 687: ...shim up the load chuck raise the load chuck to the down position height recorded before disassembly c Using a 9 16 in open end wrench or 9 16 in universal socket wrench retighten the two 3 8 16 hex he...

Page 688: ...etailed in the Operator Functions chapter of the 6DS SP Operations manual B PROCEDURE TO RECONNECT 588 589 AND 590 1 Open the door to the large electrical cabinet door 2 Locate circuit breakers 19CB 2...

Page 689: ...ing the procedures found in the Software Calibration chapter of this manual Note Be sure to follow the Elevators and Robot Order of Adjustment located in the Elevators section of both this chapter and...

Page 690: ...Maintenance Model 6DS SP Planarizer 9 182 Version 4 0 February 1998 This page intentionally left blank...

Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...

Page 692: ...Version 4 0 February 1998 10 1 10 Software Calibration Procedures MENUS USED IN MECHANICAL ADJUSTMENTS AND SOFTWARE CALIBRATION PROCEDURES BRIDGE CLEANING STATIONS CONDITIONING ARM ELEVATORS LOAD STA...

Page 693: ...31 Bridge Left Right Curtain Position Calibration 34 Bridge Table 2 Position Calibration 37 CLEANING STATIONS 41 Cleaning Stations Adjustment Series Order of Adjustment 41 Enhanced Cleaning Station Ro...

Page 694: ...Switch Wafer Sensing Calibration 8 in Elevators and Robot Adjustment Series 111 TESTING ELEVATOR AND ROBOT CALIBRATION ADJUSTMENTS RUNNING A SHORT CYCLE TO OBSERVE WAFER HANDLING 115 9 in Elevators a...

Page 695: ...ription Installation Mechanical Description Control System Description Power Distribution and Plumbing Description as well as the Operator Functions and Machine Setup chapters of the 6DS SP Operations...

Page 696: ...d for each procedure SAMPLE FORMULA PRESENTATION NEW Current Value OFFSET ADJUSTMENT CALIBRATION VALUE Example NEW 34 325 25 CALIBRATION VALUE NEW 34 075 CALIBRATION VALUE FRACTION DECIMAL INCH CONVER...

Page 697: ...s for mechanical adjustment procedures Refer to Maintenance Chapter 11 Pneumatic Adjustments for pneumatic adjustment procedures Refer to Maintenance Chapter 10 Software Calibration Procedures for sof...

Page 698: ...in Appendix A of the 6DS SP Maintenance manual Refer to the Machine Setup chapter of the 6DS SP Operations manual for details on the parameters menus used in machine setup SOFTWARE FEATURES EASY SERVO...

Page 699: ...r machine calibration for example backpressure end effector vacuum and load chuck raising and lowering Also once a servo move has been requested it will be repeatedly asserted until changed or otherwi...

Page 700: ...divides the table exactly Calibration steps 1 In the Sweep Parameters Menu set the Inner position to 7 inches a medium position 2 In the Manual Control Menu raise the arm and move it to the Inner pos...

Page 701: ...er station at the right receive position which can pass wafers to a wafer scrubber The 6DS SP communicates with the scrubber using six handshake signals connected to 6DS SP digital inputs and outputs...

Page 702: ...mmanded to move to the load position but is stopped because the polish door is opened the bridge will continue on to the load station when the door is closed The status of any item having either servo...

Page 703: ...Maintenance Model 6DS SP Planarizer 10 12 Version 4 0 February 1998 Figure 10 2 Manual Control Menu Screen Page 1...

Page 704: ...the primary table Robot Move Left Send Right Send Left Recv Right Recv Left Load Right Load Moves the robot to the selected position The robot arms must be at zero Note The optional scrubber is insta...

Page 705: ...fferent from all other manual control items because the last entry shows when View Choice is first reselected This permits faster multiple slot incrementing by allowing a repeated View Choice Enter Ch...

Page 706: ...able conditioning arm is installed the Cond Arm Move choices will be Park Outer and Inner The outer and inner positions will be whatever is currently showing on the Sweep Parameters menu If the non pr...

Page 707: ...Maintenance Model 6DS SP Planarizer 10 16 Version 4 0 February 1998 Figure 10 3 Manual Control Menu Screen Page 2...

Page 708: ...the arm will not stop and will run into its limits Cond Force arm must be down Sets the conditioning down force The arm must be down Left Spindle Up Down Right Spindle Up Down Raises and lowers the sp...

Page 709: ...NU SCREEN PAGE 3 This menu page allows manual manipulation of pumps table rinses and backpressure If backpressure is disabled the system is vented to atmosphere If a backpressure value is entered it w...

Page 710: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 19 Figure 10 4 Manual Control Menu Screen Page 3...

Page 711: ...2 pump at the selected flow rate in ML MIN Pump 3 Flow Runs the optional pump 3 at the selected flow rate in ML MIN Table l Rinse On Off Turns the primary table DI water rinse on and off Table 2 Rins...

Page 712: ...you make This flag will be cleared when the Diag Mode no longer exists Manual Mode entered maintenance group of menus exited or abort reset key pressed Viewing and making changes are separate function...

Page 713: ...Maintenance Model 6DS SP Planarizer 10 22 Version 4 0 February 1998 Figure 10 5 Diagnostics Menu...

Page 714: ...s 17 through 24 Next Page Next Page causes whatever type of item is currently viewed to advance to the next page If already on the last page will wrap to the first page Toggle Outpt Toggle Output perm...

Page 715: ...umerical limit protections to prevent potentially damaging values For example every servo calibration variable has this protection A warning will show if an illegal entry has been made Note also that...

Page 716: ...Strasbaugh Software Calibration Procedures Version 4 0 February 1998 10 25 Figure 10 6 Calibration Configuration Menu...

Page 717: ...URE 1 Bridge home position Nominal value 35 in The distance in negative inches from the primary table center to the home position A BEFORE YOU BEGIN Tools Required precision scale accurate to 03125 in...

Page 718: ...ft and Right Spindles 1 At Page 2 of the Manual Control Menu select Left Spindle Up Down and choose Down to lower the left spindle 2 Select Right Spindle Up Down and choose Down to lower the right spi...

Page 719: ...OAL The CALCULATED OFFSET should be less than 062 in 1 16 in If the CALCULATED OFFSET is greater than 062 in 1 16 in adjust the calibration as shown in the Adjustment Procedure section below If the CA...

Page 720: ...n variable 3 At Page 2 of the Manual Control Menu select Left Spindle Up Down and choose Up to raise the left spindle 4 Select Right Spindle Up Down and choose Up to raise the right spindle 5 Enter th...

Page 721: ...STMENT 1 Move the bridge to polish position see the Before You Begin section above 2 Repeat the Check Current Calibration section above 3 If needed repeat the Adjustment Procedure section above E WHEN...

Page 722: ...ment procedures in the Mechanical Maintenance Procedures chapter of this manual CALIBRATION VARIABLE S SET DURING THIS PROCEDURE 2 Bridge load position Nominal value 35 in The distance in negative inc...

Page 723: ...ndle 2 Select Right Spindle Up Down and choose Down to lower the right spindle 3 Open the Polish Area Left Side Operator Door 4 Check the position of each carrier GOAL Each carrier should be fully sea...

Page 724: ...The spindles must be UP before the bridge can be moved a Increase decrease the variable value as needed to meet the goal b Reevaluate the bridge position by repeating Section B above and repeat the po...

Page 725: ...sition Curtain rinse option Nominal value 8 in The distance in negative inches from the primary table center to a position that will place the left carrier over the optional curtain rinse nozzles 15 B...

Page 726: ...t curtain position B CHECK CURRENT CALIBRATION 1 Open the Polish Area Left and Right Side Operator Doors 2 Check the position of the left spindle GOAL If the curtain rinse option is installed the spin...

Page 727: ...bridge to the new location The spindles must be UP before the bridge can be moved a Increase decrease the variable value as needed to meet the goal b Reevaluate the bridge position by repeating Sectio...

Page 728: ...RIABLE S SET DURING THIS PROCEDURE 16 Bridge table 2 position Second table option Nominal value 35 in The distance in negative inches from the primary table center to the exact center of the second po...

Page 729: ...ect Robot Move and choose Left Send to move the robot to its left send position 3 Select Shuttle Move and choose Rear to move the shuttle to its rear position 4 At Page 2 of the Manual Control Menu se...

Page 730: ...ide Measurement Right Side Measurement OFFSET Example CALCULATED 4 5 4 0 OFFSET CALCULATED 0 5 OFFSET GOAL The CALCULATED OFFSET should be less than 0 030 in If the CALCULATED OFFSET is greater than 0...

Page 731: ...Page 2 of the Manual Control Menu select Left Spindle Up Down and choose Up to raise the left spindle 4 Select Right Spindle Up Down and choose Up to raise the right spindle 5 Enter the new calibrati...

Page 732: ...e Location In Maintenance Manual 1 Cleaning Station Alignment Chapter 9 Mechanical Maintenance Procedures 2 Cleaning Station Device Up Down Adjustments Chapter 11 Pneumatic Adjustments 3 Enhanced Clea...

Page 733: ...tion while calibrating the left one 2 At the servo amplifier for the left cleaning station a Set pot 1 loop gain fully counterclockwise b Set pot 2 current limit fully clockwise c Set left slow motor...

Page 734: ...roximately 30 50 rpm 4 At the Diagnostics Menu select Toggle Output and enter 3 to turn on Output 3 Left Brush Up raising the cleaning station brush Right Brush Up Output 4 5 Adjust the left fast moto...

Page 735: ...ures are grouped in each chapter by component Order Procedure Location In Maintenance Manual 1 Conditioning Arm Switch Adjustments Chapter 9 Mechanical Maintenance Procedures 2 Conditioning Arm Pressu...

Page 736: ...hat define the sweep endpoints in terms of inches from the table center CALIBRATION VARIABLES SET DURING THIS PROCEDURE 125 Prog cond park position Programmable conditioning arm Nominal value 0 The di...

Page 737: ...at which the center of the arm divides the table exactly 1 At Page 2 of the Manual Control Menu select Cond Arm Up Dn and choose Up to raise the arm 2 Select Cond Arm Move and choose Park to move it...

Page 738: ...his manual 5 At the Sweep Parameters Menu set the Inner position to 7 inches a medium position 6 At Page 2 of the Manual Control Menu select Cond Arm Up Dn and choose Up to raise the arm 7 Select Cond...

Page 739: ...in inches from the table center to the center of the conditioning device As this will probably involve such process related issues as wafer diameter oscillation stroke and conditioning device diameter...

Page 740: ...ET DURING THIS PROCEDURE 71 Cond force dead weight lbs The zero calibration for the conditioning down force 72 Cond force scale factor Nominal value 1 The span calibration for the conditioning down fo...

Page 741: ...all a Polishing Pad on the Table Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual B PERFORM THE E P CALIBRATION 1 At the Diagnostics Menu select Change...

Page 742: ...ment GOAL The span should be adjusted such that the gauge reads within 1 pound of 60 pounds Using a small screwdriver rotate the span adjustment as needed to meet the goal 10 When the goal has been me...

Page 743: ...Manual Control Menu select Bridge Move and choose Load to move the bridge to load position 3 At Page 2 of the Manual Control Menu select Cond Arm Up Dn and choose Up to raise the conditioning arm 4 S...

Page 744: ...s of 2048 Using a small screwdriver rotate the zero adjustment as needed to meet the goal 13 Disassemble the load cell carrier removing the large plate in order to use the bottom section for force mea...

Page 745: ...screen status area Cond 35 5 lbs Record the value as Display Force Example Display Force 35 5 23 Evaluate the readings GOAL The actual force value from the Sensotec indicator display must be within 3...

Page 746: ...figuration Menu select Page Down to display variable 72 Conditioning force scale factor Example 1 2 3 Calculate the new calibration value for the scale factor NEW CORRECTION FACTOR x Present Scale Fac...

Page 747: ...F WHEN A SATISFACTORY ADJUSTMENT IS ACHIEVED 1 If you changed Conditioning Force Units to lbs in Section D above return to the Conditioning Cleaning Parameters Menu and reset it to psi 2 Remove the l...

Page 748: ...As procedures are grouped in this chapter by component for ease of location you will need to move from the Robot section to the Elevator section and back to the Robot section to complete the procedure...

Page 749: ...ures 5 Robot Arm Rotation Theta Positions Calibration Calibration Variables 76 77 78 79 Chapter 10 Software Calibration Procedures 6 Robot Arm Extension Radial and Travel Linear Positions Calibration...

Page 750: ...o the Robot section below in this chapter BEFORE beginning the Elevator Height Calibration ELEVATOR HEIGHT CALIBRATION 4 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES This adjustment checks the wafer posit...

Page 751: ...t 0 at the wafer loading plane 82 Left recv offset to slot 0 Nominal value for pre 3 95 elevators 2 to 3 in Nominal value for post 3 95 elevators 1 to 2 in The distance in inches required to raise the...

Page 752: ...Page 1 of the Manual Control Menu select Left Send Elev Move and choose Slot 1 to move the left send elevator to slot 1 Receive Elevators Choose Slot 25 5 Select Robot Move and choose Left Send to mo...

Page 753: ...OT SPACING OF LESS THAN 1875 INCHES The Actual Distance must equal 096 in and the arm must be positioned above the wafer a Record the measurement and robot arm position above wafer or below wafer Exam...

Page 754: ...djust the value if needed c Repeat checking and adjusting until the goal has been met d When the goal has been met go on to the Fine Height Adjustment below FINE HEIGHT ADJUSTMENT C Check and Adjust t...

Page 755: ...the goal skip to the Right Send Elevator adjustments c If the wafer position does not meet the goal go to Step 6 immediately below to make corrections 6 At the Calibration Configuration Menu increase...

Page 756: ...ns 1 At the Calibration Configuration Menu 81 Right send offset to slot 0 2 Substitute right send elevator for left send elevator where appropriate FINE HEIGHT ADJUSTMENT Repeat as for Left Send Eleva...

Page 757: ...t receive elevator for left send elevator where appropriate 3 Make the substitutions specified for receive elevators in the text of the procedure FINE HEIGHT ADJUSTMENT Repeat as for Left Send Elevato...

Page 758: ...ions specified for receive elevators in the text of the procedure FINE HEIGHT ADJUSTMENT Repeat as for Left Send Elevator making the following substitutions 1 At the Calibration Configuration Menu 83...

Page 759: ...nk distance slots equals 3 divided by cassette slot spacing Elevators will be unhomed if this variable is changed requiring re homing If any of the above variables is changed the elevators will be unh...

Page 760: ...nsing the vacuum quality at the load chuck High vacuum indicates all load chuck holes are blocked wafer present Low vacuum indicates that at least one load chuck hole is not covered by a wafer wafer a...

Page 761: ...isplays are in negative psi 2 At Page 1 of the Manual Control Menu select Left Load Chuck Up Down and choose Up to raise the left load chuck 3 At the Diagnostics Menu select Toggle Output and enter 13...

Page 762: ...ading Left Wafer Present Reading 2 Example AVERAGE 6 8 6 4 2 AVERAGE 13 2 2 AVERAGE 6 6 9 At the left load chuck sensor display enter the AVERAGE value as the M1 setpoint a Press the Mode Select Switc...

Page 763: ...cuum sensor C TEST THE ADJUSTMENT BY MANUALLY APPLYING AND REMOVING WAFERS 1 At the Diagnostics Menu select Toggle Output and enter 13 to turn Output 13 Left Load Chuck Vacuum OFF 2 Manually remove an...

Page 764: ...of a manual cycle wafer presence is briefly checked every five seconds Thus the load chucks will lower shortly after wafers are manually removed while leaving vacuum released most of the time permitti...

Page 765: ...a two arm robot when Software Version 4 00 or later is installed on your machine follow the procedures found in Version 2 0 of the 6DS SP Maintenance manual substituting the detailed keystroke instru...

Page 766: ...VATORS AND ROBOT ADJUSTMENT SERIES The robot up down alignment procedures adjust the up down travel of the robot on its Z axis when positioned at the elevators Note After setting the Robot Up Down Top...

Page 767: ...116 Value in inches to move the robot s up down axis to a position below the home position that will hold a wafer in the center of the slot in a cassette 118 Robot up dn bottom position Nominal value...

Page 768: ...while holding a wafer into the middle of a cassette slot middle position turn vacuum off to release the wafer and move up slightly above the wafer top position before retracting out of the slot The b...

Page 769: ...ight inch wafers 1 At the Calibration Configuration Menu select Page Down to display variable 117 Robot up down middle position 2 Set the value for the middle position calibration variable to 56 D SET...

Page 770: ...The variables for the send and receive cassette stations are simply set to rotate the robot to a right angle to the linear robot axis If the zero home position is exactly lined up with this axis the r...

Page 771: ...tes the rotation of the RTZ robot to aim the arm into receive cassettes and the optional scrubber station 4000 counts is 90 degrees CW from zero position 79 RTZ robot RT ld rotate pos n Calibrates the...

Page 772: ...IF NEEDED Variable 76 1 Remove the wafer cassettes from the elevators 2 At Page 1 of the Manual Control Menu select Robot Move and choose Left Send to move the robot to the left send elevator Left Rec...

Page 773: ...age b Repeat Steps 3 4 and 5a until the goal is met 6 When variable 76 has been set repeat for variable 77 78 and 79 making the substitutions shown in the text of the procedure D WHEN CALIBRATION VARI...

Page 774: ...EVATORS ROBOT ARM EXTENSION RADIAL AND TRAVEL LINEAR CALIBRATION CALIBRATION VARIABLES SET DURING THIS PROCEDURE 103 Left send robot position Nominal value 36 in The distance in negative inches from t...

Page 775: ...RTZ robot s single arm into the right receive cassette Notes Robot arm extensions and travel positions are calibrated to position the end effector directly over the wafer center at the four elevator...

Page 776: ...equence Routine Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual B PREPARE AN ALIGNMENT GUIDE WAFER 1 At Page 1 of the Manual Control Menu select End Ef...

Page 777: ...Repeat Steps 1 through 3 until the Wafer Centering Goal is met b When the goal has been met go on to Step 6 6 With the test wafer centered under the vacuum chuck use a felt pen to carefully draw an ou...

Page 778: ...ft send position extending the arm out over the target drawn on the guide wafer 8 Evaluate the position of the robot arm ALIGNMENT GOAL AT SEND ELEVATORS The robot arm must be aligned within the targe...

Page 779: ...e for that axis 3 Recheck the position of the just corrected axis 4 If needed repeat changing the calibration value for further correction 5 When the goal for that axis has been met evaluate the posit...

Page 780: ...y 1 inch or smaller increments as needed Make coarse adjustment by changing the variable value in 1 inch increments make fine adjustments with 01 inch increments As shown in the sketch below home for...

Page 781: ...e the variable value as needed b Reevaluate the robot position and readjust the variable value if needed c Repeat checking and adjusting until the goal has been met 3 Check the new position against th...

Page 782: ...positioned too near the robot carriage or too far away from the robot carriage 2 At the Calibration Configuration Menu increase decrease the value of variable 110 Robot arms LT send position as needed...

Page 783: ...eat as for Left Send making the following substitutions 1 At the Calibration Configuration Menu 104 Right send robot pos n and 111 Robot arm s position RT send 2 Substitute right send for left send wh...

Page 784: ...nd making the following substitutions 1 At the Calibration Configuration Menu 106 Right recv robot pos n and 113 Robot arm s position RT recv 2 Substitute right receive for left send where appropriate...

Page 785: ...arm into the left load station 108 Right load robot position Nominal value 0 in The distance in negative inches from the robot home position to a position near the load station and 115 Robot arm s pos...

Page 786: ...e right of the load station to make sure the robot arm extends through the load station cutout This position is actually a mirror image of the right load station calibration which always has the robot...

Page 787: ...n 4 At Page 2 of the Manual Control Menu select Right Spindle Up Down and choose Down to move the right spindle down to the load station 5 At Page 2 of the Manual Control Menu select Left Spindle Forc...

Page 788: ...distance between the edge of the wafer and the edge of the vacuum chuck at three equidistant points around the wafer WAFER CENTERING GOAL The three measurements should be within 0312 in of equal a If...

Page 789: ...load position extending the arm out over the left load station 4 Select Robot Up Down Move and choose Left Load to move the robot Z axis to its left load position 5 Evaluate the position of the robot...

Page 790: ...epeat changing the calibration value for further correction 5 When the goal for that axis has been met evaluate the position of the axis of lesser error 6 Correct the positioning of the axis with the...

Page 791: ...d by increasing or decreasing the value of the variable by 1 inch or smaller increments as needed Make coarse adjustment by changing the variable value in 1 inch increments make fine adjustments with...

Page 792: ...l value for two table machines 5 in Changing the value of variable 107 while the robot is in its left load position via the Manual Control Menu automatically repositions the robot to the new location...

Page 793: ...toward the robot carriage by decreasing the current value of the variable by 500 count increments Procedure 1 Note whether the arm is positioned too near the robot carriage or too far away from the ro...

Page 794: ...NT IS ACHIEVED When a satisfactory adjustment is achieved for both radial and linear positioning go on to the Right Load below RIGHT LOAD Repeat as for Left Load making the following substitutions 1 A...

Page 795: ...he home position that is comfortably above the load station chucks Usually set to zero 131 Robot up dn left load pos n Nominal value 0 4 in Value in inches to move the robot s up down axis to a positi...

Page 796: ...anual Control Menu select Bridge Move and choose Pol Tbl 1 to move the bridge to polish position 2 Select Robot Move and choose Left Load to move the robot to the left load station 3 Select Robot Up D...

Page 797: ...dard machines measure the Actual Distance from the top of the load chuck to the bottom of the wafer or For machines equipped with a second polish table measure the Actual Distance from the top of the...

Page 798: ...ad position via the Manual Control Menu automatically repositions the robot to the new location a Increase decrease the variable value as needed b Remeasure to evaluate the robot position and readjust...

Page 799: ...Carriers on Spindles Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual B CHECK CURRENT CALIBRATION 1 At Page 1 of the Manual Control Menu select Bridge...

Page 800: ...ose Right Load 8 Select Left Load Chuck Up Down and choose Up to move the load chuck to its up position 9 Evaluate the position of the wafer GOAL FOR SINGLE TABLE MACHINES There should be no light gap...

Page 801: ...needed b Reevaluate the robot position and readjust the value if needed c Repeat checking and adjusting until the goal has been met D TEST THE NEW ADJUSTMENT 1 Repeat the Check Current Calibration se...

Page 802: ...um The vacuum switch turns off when a wafer is present maximum vacuum developed The switch turns on when a wafer is absent minimum vacuum Note It may be easiest to use two mirrors to view the vacuum s...

Page 803: ...ion 3 Remove the robot cover located on the end of the robot facing the elevator section doors a Using a 7 64 in hex key remove the four 6 32 socket head capscrews by rotating them counterclockwise b...

Page 804: ...5 8 Press and hold the vacuum switch s SET key until some numbers briefly show on the left side of the vacuum switch display 9 Release the SET key 10 PSI should be showing as the units flashing at the...

Page 805: ...and release SET to return display to the normal display of current vacuum 20 While observing the green LED on the switch the red LED has no application place and remove a wafer on the end effector The...

Page 806: ...5 TESTING ELEVATOR AND ROBOT CALIBRATION ADJUSTMENTS RUNNING A SHORT CYCLE TO OBSERVE WAFER HANDLING 9 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES To run a cycle to test wafer handling set the polish tim...

Page 807: ...P Operations manual set the polish time for both spindles to 0 6 Run an auto polish cycle Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual 7 Observe waf...

Page 808: ...elivery lines tubing age and flow resistance in the slurry line plumbing Calibration therefore becomes necessary Calibration is performed by adjusting the peristaltic pump motor shaft speed Notes Meas...

Page 809: ...lating the error multiplying the original factor by the error and entering the result 75 Pump 3 flow factor Nominal value 1 The span calibration for the Pump 3 peristaltic pump This is calibrated by m...

Page 810: ...5 min 5 Calculate the actual flow ACTUAL FLOW Flow Amount Flow Rate Example ACTUAL FLOW 1800 3 75 ACTUAL FLOW 480 ML MIN GOAL ACTUAL FLOW Programmed Flow Rate test value If the ACTUAL FLOW is not equa...

Page 811: ...or variable NEW Programmed Flow Rate x Current Value CALIBRATION ACTUAL FLOW from screen VALUE Example NEW 600 x 98 CALIBRATION 480 VALUE NEW 1 225 CALIBRATION VALUE 3 Enter the new calibration value...

Page 812: ...es for slurry flow 2 1 On the CALIBRATION menu 20 SLURRY 2 FLOW FACTOR variable 2 In the text of the procedure substitute slurry 2 for slurry 1 PUMP 3 CALIBRATION Repeat as for slurry flow 1 making th...

Page 813: ...flat blade screwdriver clean water clean cloth Turn Machine Power On Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manual SLURRY 1 B CHECK AND WET CALIBRATE...

Page 814: ...rotate the adjusting screw labeled R21 as needed until the transmitter s display meets the goal 9 Rinse the pH electrode in clean water and dry with a clean cloth 10 Submerse the pH electrode into th...

Page 815: ...nsmitter s LCD display adjust the zero potentiometer GOAL The transmitter s display reading must equal the monitor screen s status display value for pH Using a small screwdriver rotate the adjusting s...

Page 816: ...ks left versus right performance Notes The procedure below was written for the left spindle Repeat for the right spindle making appropriate substitutions as shown in the text below This procedure will...

Page 817: ...value 0 The zero calibration for the right backpressure The steps in this section change the value of variable 66 back pressure offset variable 68 for right as needed to cause the status screen displ...

Page 818: ...n back pressure value displayed in psig doesnot meet the goal go to Section C below to make corrections c If the status screen value meets the goal skip to When Satisfactory Adjustment Is Achieved bel...

Page 819: ...k pressure GOAL The back pressure status screen value should equal 14 7 psia a If the status screen back pressure value displayed in psia doesnot meet the goal repeat the correction procedure until th...

Page 820: ...ple 8 4 Check the new adjustment by reading the status screen display for left spindle back pressure GOAL The back pressure status screen value should equal 0 psig a If the status screen back pressure...

Page 821: ...ine 4 Load the carriers 5 At Page 1 of the Manual Control Menu select Bridge Move and choose Pol Tbl 1 to move the bridge to polish position 6 Manually place a test wafer on each carrier a Wet a wafer...

Page 822: ...machine as you are facing the rear of the machine in the lower right corner of the electrical box Note Refer to engineering drawing 217946EM in the Appendices of the 6DS SP Maintenance manual 4 Find a...

Page 823: ...stics Menu select Change Counter and enter a value of 0 for counter 55 producing minimum psi Right backpressure control counter 56 12 Remove the gauge 13 Reconnect tube 80 to the regulator 14 Make sur...

Page 824: ...r and enter a value of 0 for counter 56 5 Read the current left and right spindle back pressure values displayed in the screen status area For Back Pressure Displayed In Psia SPNDL left right Frc 0 Bk...

Page 825: ...isplayed In Psig SPNDL left right Frc 0 BkPr 35 3 35 2 psig Spd 0 Load 0 Example BkPr 35 3 35 2 psig 10 Compare the left and right back pressure status screen values GOAL FOR BACK PRESSURE SET IN PSIA...

Page 826: ...on the regulators by the manufacturer will no longer be valid As considerable spindle force will be applied this procedure will probably damage the pad A BEFORE YOU BEGIN Tools Required small flat bla...

Page 827: ...DJUSTMENT PROCEDURE 1 Open the electrical cabinet doors and pull out the door interlock contact plunger to permit the machine to maintain power with the doors open 2 Restart the machine 3 Rehome the m...

Page 828: ...DS SP Maintenance manual 7 Using a small flat blade screwdriver remove the cover from the top of the left spindle regulator exposing the span trimpot Do not permit debris or particles of any sort to e...

Page 829: ...the brass sealing button at the front of the regulator exposing the zero adjustment 14 Use the zero adjustment at the regulator to set 5 psi GOAL The zero should be adjusted such that the gauge reads...

Page 830: ...he goal 17 Repeat Steps 10 through 16 until the readings at the gauge for both zero and span meet the goals 18 At the Diagnostics Menu set counter 12 to 0 corresponding to minimum psi 19 Remove the ga...

Page 831: ...ites the current value to the monitor s display screen CALIBRATION VARIABLES SET DURING THIS PROCEDURE 36 Left spindle current offset Nominal value 0 The zero calibration for the left spindle Load val...

Page 832: ...ead and record the value of the Left Spindle Load display in the screen status area SPNDL left right Frc 0 BkPr 4 7 4 8 psia Spd 0 Load 0 9 amps 3 Compare the screen status area display for Left Spind...

Page 833: ...ndle current offset Example 0 1 C TEST THE NEW ADJUSTMENT 1 Repeat the Check Present Calibration section above to check the new adjustment 2 If needed repeat the Adjustment Procedure section above D W...

Page 834: ...le dead weight Nominal value 140 lbs The zero calibration for the left spindle down force 43 Right force scale factor Nominal value 1 The span calibration for the right spindle down force 44 Right spi...

Page 835: ...Machine Setup chapter of the 6DS SP Operations manual at Page 1 of the Machine Parameters Menu set both Left Force Scaling and Right Force Scaling to100 B WEIGH CARRIERS AND ADJUST SENSOTEC INDICATOR...

Page 836: ...d on the face of the indicator with a flat blade screwdriver until 0 is displayed d When the reading has been set place the Portable Indicator on an available flat surface inside the machine adjacent...

Page 837: ...ft Spindle Force to settle 8 Read and record as Display High Force the current Left Spindle Force value displayed in the screen status area a Read the left spindle force value SPNDL left Frc 500 b Rec...

Page 838: ...BRATION 500 100 VALUE NEW 395 7 x 982 CALIBRATION 400 VALUE NEW 9714 CALIBRATION VALUE NEW 971 round to three decimal places CALIBRATION VALUE 3 At the Calibration Configuration Menu enter the new cal...

Page 839: ...value entered c Record the indicator reading for each test value d Calculate the actual force comparison test value for each test value entered e Calculate the force error for each test value entered...

Page 840: ...ue for the left spindle force scale factor ACTUAL Indicator COMPENSATION FORCE Reading WEIGHT COMPARISON from Sensotec from above TEST VALUE Example ACTUAL 27 17 FORCE COMPARISON TEST VALUE ACTUAL 44...

Page 841: ...nd the compensation weight calculated above Since 50 is not within 5 lbs of 44 our example does not meet the goal a If a constant error exists throughout the force range go to Step 5 immediately below...

Page 842: ...w calibration value for variable 34 Left spindle dead weight Example 131 8 9 Repeat Steps 3 through 8 above in this section until the goal is met for the ten test values 50 100 150 500 F WHEN A SATISF...

Page 843: ...ted inputprocess force values for both spindles and compare GOAL To prevent uneven polish rates the measured force values shown on the Sensotec Portable Indicator display for the two spindles must be...

Page 844: ...indle force deviation from 250 is greater than that of the left 8 At the Calibration Configuration Menu change the value of the spindle dead weight variable 34 left spindle 44 right spindle to compens...

Page 845: ...plied to both spindles when being moved down onto a table before polishing or when being moved down onto single table machine cleaning stations This value is determined experimentally by entering valu...

Page 846: ...be applied to both spindles when being moved down onto the load stations in a two table machine This value is determined experimentally by entering values into counters 12 and 13 in the Diagnostics Me...

Page 847: ...ine to adjust 5 Read and evaluate the current Left Spindle Force value displayed in the screen status area SPNDL left right Frc 4 3 GOAL FOR VARIABLE 38 The status screen reading displayed for the lef...

Page 848: ...8 Spindles down soft value Example 1200 C CHECK AND ADJUST VARIABLE 39 THE SPINDLES DOWN HARD DOWN VALUE Repeat as for variable 38 substituting 39 for 38 and making other substitutions shown in the te...

Page 849: ...1998 WAFER BLOW OFF PRESSURE CALIBRATION CALIBRATION VARIABLES SET DURING THIS PROCEDURE 170 Approx wafer blowoff psi Nominal value 20 psi Sets the pressure that will be used for wafer blowoff during...

Page 850: ...off the carrier if the pressure is set above 45 psi the carrier may blow off the spindle The recommended initial setting is 30 psi GOAL The wafer must blow off the carrier every time and the carrier...

Page 851: ...through analog input channels The analog signal is converted by the ADC to a digital value A software subroutine determines and writes the current value to the monitor s display screen CALIBRATION VAR...

Page 852: ...nt offset Example 1 0 2 Read and record the value of the Table 1 display in the screen status area TABLES 1 2 Spd 0 Load 0 9 amps Temp 0 3 Compare the screen status area display for Left Spindle Load...

Page 853: ...nt Value TABLE 1 LOAD Value CALIBRATION from screen from status area of screen VALUE Example NEW 1 0 0 9 CALIBRATION VALUE NEW 0 1 CALIBRATION VALUE 2 Enter the new value for variable 63 Table current...

Page 854: ...cooling water entering the machine 6 Temp out scale factor Nominal value 1 The span calibration for the temperature sensor monitoring table cooling water exiting the machine 7 Temp in offset Nominal v...

Page 855: ...Example 1 2 Read and record the value of the Cooling Water TemperatureIn display in the screen status area Note The left of the two columns is cooling water in COOLING WATER Flow I O 22 7 23 2 degC 3...

Page 856: ...ay from screen Example TEMPERATURE IN 20 22 7 OFFSET TEMPERATURE IN 2 7 OFFSET 2 Enter the new value for variable 7 Temp in offset Example 2 7 TEMPERATURE OUT OFFSET 1 Repeat as for the Temperature In...

Page 857: ...display in the screen status area Note The left of the two columns is cooling water in COOLING WATER Flow I O 22 8 23 2 degC 2 Calculate the temperature in scale factor SCALE FACTOR Actual Temperatur...

Page 858: ...e within 2 of the COOLING WATER TEMPERATURE IN status screen display If the goal is met no adjustment is necessary Go on to the Temperature Out Scale Factor section below If the goal is not met repeat...

Page 859: ...etailed in the Operator Functions chapter of the 6DS SP Operations manual At the Filterine Temperature Control Unit 2 Power up the Filterine unit at its main disconnect switch 3 Press the green MACHIN...

Page 860: ...res Version 4 0 February 1998 10 169 POWERING DOWN At the Filterine Temperature Control Unit 1 Press the PUMP ON toggle switch to turn the Filterine unit s pump off 2 Move the main disconnect switch o...

Page 861: ...START switch to its start position 4 Set the Heater Enable switch a For hot processes move the HEATER ENABLE switch to its enabled position or b For cold processes move the HEATER ENABLE switch to its...

Page 862: ...Introduction NEUMATIC DJUSTMENTS...

Page 863: ...Strasbaugh Pneumatic Adjustments Version 4 0 February 1998 11 1 11 Pneumatic Adjustments CLEANING STATIONS CONDITIONING ARM LOAD STATIONS SHUTTLE SLURRY SYSTEM SPINDLES...

Page 864: ...8 Conditioning Arm 11 Conditioning Arm Adjustment Series Order of Adjustment 11 Conditioning Arm Pressure 2 in Conditioning Arm Adjustment Series 12 Conditioning Device Air Cylinder Adjustment 3 in C...

Page 865: ...anual on Physical Description Installation Mechanical Description Control System Description Power Distribution and Plumbing Description as well as the Operator Functions and Machine Setup chapters of...

Page 866: ...cation In Maintenance Manual 1 Cleaning Station Alignment Chapter 9 Mechanical Maintenance Procedures 2 Cleaning Station Device Up Down Adjustments Chapter 11 Pneumatic Adjustments 3 Enhanced Cleaning...

Page 867: ...CE UP DOWN ADJUSTMENTS 2 IN CLEANING STATIONS ADJUSTMENT SERIES Left Cleaning Station Device A BEFORE YOU BEGIN Tools Required none Turn Machine Power On and Perform Home Sequence Routine Follow the p...

Page 868: ...tput 4 2 Note the device motion GOAL The device should rise smoothly and move down slowly and smoothly If the goal is not met correct the motion by following the procedures in Section C immediately be...

Page 869: ...When the goal is met go on to the Down Flow Control below Down Flow Control 7 Rotate the down flow control fully clockwise 8 Rotate the down flow control one full turn counterclockwise 9 Close doors t...

Page 870: ...e Model 6DS SP Planarizer 11 8 Version 4 0 February 1998 CLEANING STATION PAD PRESSURE ADJUSTMENTS 4 IN CLEANING STATIONS ADJUSTMENT SERIES Related Engineering Drawing 220734A1 Solenoid Valve Sub Pane...

Page 871: ...ensate for the moving weight Cylinder Pressure psi Pad Force lbs Pad psi lbs in 2 20 2 0 0 12 25 6 4 0 40 30 10 8 0 68 35 15 3 0 96 40 19 7 1 24 45 24 1 1 52 50 28 6 1 80 55 33 0 2 08 60 37 4 2 35 65...

Page 872: ...he pneumatic regulator positioned under Solenoid 2 of the valve panel located inside the Left Front Service Door 4 Rotate the adjustment knob of the regulator until the gauge displays the desired valu...

Page 873: ...es are grouped in each chapter by component Order Procedure Location In Maintenance Manual 1 Conditioning Arm Switch Adjustments Chapter 9 Mechanical Maintenance Procedures 2 Conditioning Arm Pressure...

Page 874: ...justs the up down stroke of the programmable conditioning arm assembly and the downward pressure of the conditioning device upon the pad surface of the polish table A BEFORE YOU BEGIN Tools Required n...

Page 875: ...achine cabinet 4 Find the pneumatic regulator positioned under Solenoid 9 of the valve panel located inside the Left Front Service Door Rotate the adjustment screw of the regulator counterclockwise 10...

Page 876: ...nside the Left Front Service Door 4 Rotate the adjustment screw of the regulator clockwise 1 2 turn 5 Replace the door s 6 Power up and home the machine 7 Retest by repeating Step 7 of Section B above...

Page 877: ...atisfactory Adjustment Is Achieved below C ADJUSTMENT PROCEDURE 1 Turn the machine power to OFF by pressing the red EMERG OFF button located on the control panel 2 Remove the Right Front Service Door...

Page 878: ...ITIONING DEVICE AIR CYLINDER ADJUSTMENT 3 IN CONDITIONING ARM ADJUSTMENT SERIES A BEFORE YOU BEGIN Tools Required none Turn Machine Power On and Perform Home Sequence Routine Follow the procedures det...

Page 879: ...rd and downward movement should be smooth If the goal is not met correct the motion by following the procedures in Section C immediately below If the goal is met skip to When Satisfactory Adjustment I...

Page 880: ...met rotate each knob two turns clockwise Notes The top knob controls up motion The bottom knob controls down motion 9 Retest by repeating Section B above Correct by rotating the adjustment knobs in 2...

Page 881: ...tments Version 4 0 February 1998 11 19 LOAD STATIONS LOAD CHUCK RAISE PRESSURE Note The machine has no built in gauges to display load chuck raise pressure LEFT LOAD CHUCK RAISE PRESSURE A BEFORE YOU...

Page 882: ...left load chuck c Note the motion GOAL The load chuck should travel up and down slowly and smoothly d If the goal is not met correct the motion by following the procedures in Section C immediately bel...

Page 883: ...bove GOAL The load chuck should travel up slowly and smoothly a If the goal is met go on to the Downward Motion Adjustment b If the goal is not met repeat turning the Solenoid 4 up flow control regula...

Page 884: ...d smoothly a If the goal is met the adjustment is complete b If the goal is not met repeat turning the Solenoid 4 down flow control regulator knob in 1 turn increments clockwise and testing until the...

Page 885: ...TROL ADJUSTMENTS A BEFORE YOU BEGIN Tools Required 9 16 in open end wrench 9 16 in socket wrench flat blade screwdriver 3 16 in hex key Turn Machine Power On and Perform Home Sequence Routine Follow t...

Page 886: ...ion by following the procedure beginning with Step 3 immediately below e If the goal has been met skip to Step 6 of When Satisfactory Adjustment Is Achieved below 3 At Page 1 of the Manual Control Men...

Page 887: ...e exposing the stainless steel air cylinder cover 13 Using a 3 16 in hex key to rotate the four 10 32 socket head screws counterclockwise remove screws and the stainless steel cover 14 Slide the cover...

Page 888: ...STMENT IS ACHIEVED 1 Reinstall the air cylinder cover 2 Reinstall the shuttle access cover 3 Reinstall the cleaning stations 4 Connect the water lines 5 Turn water back on 6 Perform the Cleaning Stati...

Page 889: ...e minimum pressure necessary to maintain slurry solution volume flow through the lines to the peristaltic pumps Greater pressure than necessary could cause the delivery lines to expand from the increa...

Page 890: ...al reads O 3 Regulate the left pump a Rotate the left pump adjustment knob clockwise to 20 25 PSI b Time the audible pumping actions with a stopwatch GOAL 2 audible pumping actions per second c Rotate...

Page 891: ...ed flat blade screwdriver two to four test wafers Turn Machine Power On and Perform Home Sequence Routine Follow the procedures detailed in the Operator Functions chapter of the 6DS SP Operations manu...

Page 892: ...d carrier inserts with the sprayer 2 Following the procedures found in the Operator Functions and Machine Setup chapters of the 6DS SP Operations manual set the polish time for both spindles to 0 3 In...

Page 893: ...e cover e For removal of the front and rear bridge covers use a 5 64 in hex key to remove the 6 32 button head screws securing each cover 4 Climb up on top of the machine and locate the spindle down f...

Page 894: ...ction B above a If the goal is not met repeat the adjustment Step 5 of this section above Continue testing and adjusting until the goal is met b When the goal is met go on to When A Satisfactory Adjus...

Page 895: ...essure is used to help release the carriers from the spindle vacuum chucks A BEFORE YOU BEGIN Tools Required small screwdriver Power Up Remove Carriers and Turn Machine Power Off Follow the procedures...

Page 896: ...ustment knobs 4 Find the black button on the coil of Solenoid 11 on the valve panel Using a screwdriver push up on the button to activate 5 While pressing up on the Solenoid 11 button set the Left Spi...

Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...

Page 898: ...e Version 4 0 February 1998 12 1 12 Software and Control Computer Maintenance OVERVIEW 6DS SP COMPUTER SETUP BACKING UP POLISH RECIPES AND MACHINE DATA FILES RESTORING POLISH RECIPES AND MACHINE DATA...

Page 899: ...ation Setup 5 BACKING UP POLISH RECIPES AND MACHINE DATA FILES 7 RESTORING POLISH RECIPES AND MACHINE DATA FILES 9 OTHER USEFUL SOFTWARE PROCEDURES 10 Exiting to the DOS System Prompt from the 6DS SP...

Page 900: ...of the 6DS SP Operations manual for information on storing and retrieving recipes for customized auto polish process cycles Because stored polish recipes are custom created by the facility process eng...

Page 901: ...puter must be physically configured per Engineering Drawing 217946EO Rev D or later AND have PC DOS installed Related Engineering Drawing 217946EO Rev D or later Cassette to Cassette Planarizer Electr...

Page 902: ...t into Drive A and reboot the computer Note Either cycle the power or press the Ctrl Alt Del key combination b Follow the screen prompts to install PC DOS For further information on installing PC DOS...

Page 903: ...as shown below Power Down Timer 4 Hours Processor Not Managed Video Processor Not Managed Hard Disks Not Managed 3 Save the changes a When the Power Management options have been properly set press the...

Page 904: ...ts 4 Quit the software by typing Alt Q Hold down the Alt and Q keys together The prompt should now show C QB45 5 Insert a diskette into the drive in the computer located behind the Polish Section Left...

Page 905: ...ance Model 6DS SP Planarizer 12 8 Version 4 0 February 1998 7 Remove the diskette and appropriately label it 8 Turn off the machine and replace the service door 9 Turn the machine on to restart the so...

Page 906: ...uit the software by typing Alt Q Hold down the Alt and Q keys together The prompt should now show C QB45 5 Insert the diskette containing previously backed up files into the drive in the computer loca...

Page 907: ...MPT FROM THE 6DS SP CONTROL PROGRAM MENUS To exit to the DOS prompt follow the steps below Operator Action Explanation Screen Display 1 Alpha Check to be sure the Alpha light is ON If not press the Al...

Page 908: ...ont Service Door to access the diskette drive of the Control Computer 3 Format the diskette s Operator Action Explanation Screen Display a FORMAT A Enter At the DOS prompt C QB45 type FORMAT A Follow...

Page 909: ...hod 1 Operator Action Explanation Screen Display a Ctrl Alt Del While holding down the Ctrl key and the Alt key press the Del key b Wait Wait for the control computer to reboot and display the Main Me...

Page 910: ...e Each one functions independently Operator Action Explanation Screen Display 1 Exit to the DOS prompt repeat from above 2 To view the date DATE Enter Enter Type DATE and press the Enter key twice 3 T...

Page 911: ...E Enter Type TIME and press the Enter key once b 09 15 10 Enter Type a new time using the format HH MM SS for example 09 15 10 Notes You must use colons To distinguish P M from A M type a P after the...

Page 912: ...Introduction TROUBLESHOOTING...

Page 913: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 1 13 Troubleshooting OVERVIEW ALARM LOG MENU FREQUENTLY ENCOUNTERED PROBLEM CONDITIONS ERROR MESSAGES AND ALARMS...

Page 914: ...Table Part B 22 Wafers Break During Polish Cycle Part A 22 Wafers Break During Polish Cycle Part B 24 Carriers Drop Off Spindles 25 Robot Drops Wafers Part A 26 Robot Drops Wafers Part B 27 Software C...

Page 915: ...DLE VACUUM SWITCH OFF 52 40 SEND CASSETTE S NOT ACTIVE 53 42 ROBOT TOP BOTTOM NOT AT ZERO 54 42 LEFT SPINDLE NOT UP 55 43 RIGHT SPINDLE NOT UP 56 43 AXIS 1 SERVO AMPLIFIER FAULT 57 Left Spindle 44 AXI...

Page 916: ...E VACUUM NOT FOUND 157 59 CONDITION ARM NOT ARRIVING UP 158 60 CONDITION ARM NOT ARRIVING DOWN 159 60 LEFT SPINDLE NOT ARRIVING UP 160 61 LEFT SPINDLE NOT ARRIVING UP 161 61 RIGHT SPINDLE NOT ARRIVING...

Page 917: ...NOT ARRIVING AT LEFT LOAD 188 64 ROBOT UP DN NOT ARRIVING AT RIGHT LOAD 189 64 BRIDGE NOT ARRIVING AT LEFT CURTAIN 190 65 BRIDGE NOT ARRIVING AT RIGHT CURTAIN 191 65 COND ARM NOT ARRIVING AT PARK 194...

Page 918: ...ration Configuration menus refer to the Software Calibration chapter of the 6DS SP Maintenance manual Problem Prevention The most effective means of preventing problems is careful adherence to all pre...

Page 919: ...ughly familiar with the 6DS SP Planarizer If not read the chapters in the Maintenance manual on Physical Description Installation Mechanical Description Control System Description Power Distribution a...

Page 920: ...formation that will help identify the source of the problem The alarm log should be reviewed analytically to accurately determine the alarm sources For example alarms might be caused by a service prob...

Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...

Page 922: ...THE ALARM LOG MENU Key Label Function s Page Up Page Up will cause the screen to go to a lower page number If already on the lowest page page 1 there will be no change Page Down Page Down will cause t...

Page 923: ...ff maintenance supervisory staff Strasbaugh The group responsible for a resolution s is listed underlined directly below the resolution s for which it is responsible Some problems show more than one u...

Page 924: ...Component Cause Resolution Responsibility CONTROL PANEL LIGHT REMAINS OFF and MONITOR SCREEN REMAINS BLANK Control Panel Screen 1 Facilities power off 2 Door s open 3 Circuit breaker 1a Check to be s...

Page 925: ...n 4 0 February 1998 13 13 MACHINE WON T HOME Problem Indicator Problem Location Component Cause Resolution Responsibility NO RESPONSE TO KEYBOARD HOME COMMAND Monitor screen 1 Doors not closed 1a Chec...

Page 926: ...e not homed 5 Wafer on load station perhaps from previously halted cycle 6 No carriers installed 7 Wafer left on carrier 8 Robot holding wafer perhaps from previously halted cycle 1a Check and close a...

Page 927: ...witch 10 All 9 causes and resolutions have been performed and the cycle will still not start 8a Check shuttle position and adjustment 9a Check conditioning brush position and adjustment MAINTENANCE 10...

Page 928: ...or s open 2 Facilities power off 3 Tripped circuit breaker possible overload 1a If robot is holding wafer carefully remove wafer See Procedures For Safe Removal Of Wafer From Robot in Operator Functio...

Page 929: ...tion Operator door opened preventing elevator robot movement OR CYCLE HALT button on the Control Panel pressed 1a If needed close operator door 1b Press the CYCLE START button on the Control Panel OPE...

Page 930: ...e Resolution Responsibility MACHINE LIGHTS AND SCREEN DISPLAY ON BUT MACHINE MOTION STOPS Interior of machine 2 Cycle terminated by The Abort Reset key F10 was hit twice 2a If robot is holding wafer c...

Page 931: ...SPRAYER WON T SPRAY Problem Indicator Problem Location Component Cause Resolution Responsibility WATER SPRAYER WON T SPRAY Interior of machine 1 Facilities water off 2 Failed solenoid valve 1a Check f...

Page 932: ...ibility ELEVATOR TANKS WON T HOLD WATER Elevator tanks Manual Drain Valve 1 Elevator drain valve not closed Auto Filling Option 2 Cassette missing or sensor arm up 3 Valve malfunction Manual Drain Val...

Page 933: ...lity WAFERS LEFT ON TABLE AT END OF AUTO CYCLE Table 1 Inadequate vacuum 2 Inserts not wet enough 3 Inserts and wafer pads need replacement 1a Check and restore facility vacuum supply to installation...

Page 934: ...er blocked 7 Inadequate air and vacuum at spindle 4a Realign spindles and load stations 5a Consider lowering the value of calibration variable 171 set at the Calibration menu to a value lower than the...

Page 935: ...Problem Indicator Problem Location Component Cause Resolution Responsibility WAFER BREAKS DURING POLISH CYCLE Table 1 Debris on carrier 2 Inserts and wafer pads need replacement 1a Press the EMERG OF...

Page 936: ...uum holes in carrier blocked 7 Inadequate air and vacuum at spindle 4a Realign spindles and load stations 5a Consider lowering the value of calibration variable 171 set at the Calibration menu to a va...

Page 937: ...acuum solenoid failure 3 Vacuum solenoid total failure no response to adjustment 1a Press the EMERG OFF button 1b Check facility vacuum supply OPERATIONS 2a Test adjust vacuum solenoid by operating in...

Page 938: ...ncorrect robot Z alignment at the load stations 1a Press the EMERG OFF button 1b Check facility vacuum supply 2a Refer to the procedure found in the Operator Maintenance Schedule located in the Operat...

Page 939: ...not correct 6a Test adjust vacuum solenoid by operating in diagnostics or manual control mode See the Pneumatic Adjustments chapter and the information on the Diagnostics and Manual Control menus foun...

Page 940: ...If the chuck takes the wafer try to pull it off The wafer should be difficult to remove If the chuck does not take the wafer or if the wafer is easy to remove vacuum is inadequate 4 If vacuum is inad...

Page 941: ...E FROM KEYBOARD or NO RESPONSE FROM MACHINE Monitor screen 1 Keyboard not connected 2 Control program and or Control Computer 1a Connect keyboard 2a Press the EMERG OFF button located on the Control P...

Page 942: ...ponent Cause Resolution Responsibility 3 If after completing Resolutions 1a through 1e still no response indicates possible damage to control and polish programs and data 3a Follow procedures in the S...

Page 943: ...set limits either above the programmed high limit or below the programmed low limit set at the Alarm Parameters Menu the alarm on the control panel will sound until the parameter returns to within th...

Page 944: ...O POLISH CYCLE Control Panel The bottom of the monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows spindle f...

Page 945: ...blem Indicator Problem Location Component Cause Resolution Responsibility 3 Calibration of E P setting needed 2b Check to be sure facility air pressure 100 PSI 2c If facilities air pressure 100 PSI pe...

Page 946: ...l The bottom of the monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message indicates table and spindle speeds are too...

Page 947: ...spindle speeds are too slow 4 After completing Resolution 3a and 3b table and spindle still not moving or moving at wrong speed 3a Check alarm parameters on Alarm Parameters menu to see if the alarm...

Page 948: ...the monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows alarm Note The alarm is a warning device it does not...

Page 949: ...ontrol Panel The bottom of the monitor screen will display a message showing the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows slurry flow alarm Note Th...

Page 950: ...ng the cause 1 Machine parameter out of range of a programmed alarm parameter 2 Screen message shows slurry pH alarm Note The alarm is a warning device it does not abort the cycle 1a Read the bottom o...

Page 951: ...er Screen 1 Arm unhomed 2 Arm not in park position 3 The conditioning arm is not in park position 1a Home the arm 2a At the Auto Polish Menu move the arm to park position 3a Check related input at the...

Page 952: ...r 2 Active Carriers at the Machine Parameters menu to match the carriers installed Left Right or Both OPERATIONS 3a If the problem still persists adjust the spindle vacuum switch MAINTENANCE Notes on...

Page 953: ...n error such as Bridge not arriving at load showing and a servo status with the motor off and the motor error on When this occurs the error log will show the vacuum error immediately no matter how bri...

Page 954: ...ette on a receive elevator OPERATIONS 1b Lower the cassette sensor arm 1c Test to see if the cassette sensor is tripped when the cassette sensor arm is lowered If not adjust the switch MAINTENANCE ROB...

Page 955: ...ause Resolution ERROR MESSAGE Control Computer Screen 1 Spindle not tripping upper limit switch 1a Check and adjust upper limit switch 1b Check related inputs at the Diagnostics menu They should be fo...

Page 956: ...RROR MESSAGE Control Computer Screen Left Spindle or Right Spindle or Bridge Travel or Table 1 Polish section door not securely latched 2 Output error 3 Amplifier fuse 4 Loose wiring 5 Motor over temp...

Page 957: ...on menu OPERATIONS ROBOT TOP AXIS NOT HOMED 64 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Robot top arm not homed 1a Rehome Axis 10 at the Se...

Page 958: ...RATIONS WAFER FOUND ON ROBOT 67 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Wafer on the robot 1a Manually remove the wafer and restart 2a If...

Page 959: ...OPERATIONS ELEVATOR SECTION OPERATOR DOOR OPEN AT START 70 no alarm Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Elevator section operator door...

Page 960: ...lfunction at affected elevator If the cassette sensor arm is lowered the message indicates wafer is not fully to the rear of the cassette shelf 2 Robot end effector incorrectly adjusted 1a Wafer has t...

Page 961: ...or malfunction 1a Let cycle finish 1b Clean up spillage if any 1c Clean out table drain basket OPERATIONS 2a Check and adjust sensor MAINTENANCE SLURRY 1 SUPPLY LOW OR ABSENT 105 SLURRY 2 SUPPLY LOW O...

Page 962: ...pad conditioning the control computer checks to see if the wafers are in the carriers rather than left behind on the table 2 If no wafer was left on the table 1a Visually check to see if a wafer was l...

Page 963: ...esolution ERROR MESSAGE Control Computer Screen 1 Fluid leak Three pans at machine bottom one at load area two at polish area are equipped with a sensor to detect liquid 2 Sensor malfunction 1a Let cy...

Page 964: ...back to the load stations before beginning pad conditioning the control computer checks to see if the wafers are in the carriers rather than left behind on the table 2 If no wafer was left on a carrie...

Page 965: ...hapter of the 6DS SP Maintenance manual add the approved oil MAINTENANCE LOW COOLING WATER FLOW RATE 111 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Sc...

Page 966: ...Verify facilities are on 1b Verify facilities set to correct pressures MAINTENANCE NO ACTIVE RECEIVE CASSETTE 121 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control C...

Page 967: ...the load station vacuum switch MAINTENANCE CARRIER S NOT INDEXING 142 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Indexing carrier hardware i...

Page 968: ...bot transfer 1a Verify wafer is present 2a Verify robot up down left load or right load is calibrated properly 2b Verify load chuck vacuum switch is adjusted correctly MAINTENANCE BRIDGE NOT ARRIVING...

Page 969: ...ust robot vacuum sensor 1d Clean wafer and robot vacuum chuck MAINTENANCE SHUTTLE NOT ARRIVING FRONT 150 SHUTTLE NOT ARRIVING REAR 151 Problem Indicator Problem Location Component Cause Resolution ERR...

Page 970: ...NG RIGHT LOCK 155 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Locking air cylinder reed switch not sensing the commanded position 2 Sensor adj...

Page 971: ...Control Computer Screen 1 Carrier not installed or 2 Mismatch between the setting at Machine Parameters Menu and carrier s installed 3 Vacuum switch error 1a Install carrier for affected spindle 2a Ch...

Page 972: ...solution ERROR MESSAGE Control Computer Screen 1 Conditioning arm not arriving at the commanded position 2 Conditioning arm flow controls and pressure regulator not adjusted correctly 3 Sensor adjustm...

Page 973: ...Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Spindle not tripping upper limit switch 1a Check and adjust upper limit switch 1b Check related i...

Page 974: ...ervo not arriving at the commanded position 1a Servo tripped out Open and close polish section operator doors to reset OPERATIONS BRIDGE NOT ARRIVING AT LOAD 168 BRIDGE NOT ARRIVING AT MIDDLE 169 BRID...

Page 975: ...GHT RECV 174 ROBOT NOT ARRIVING AT LEFT LOAD 175 ROBOT NOT ARRIVING AT LEFT LOAD 176 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Robot travel...

Page 976: ...2 Calibration variable out of range 1a Servo tripped out Open and close polish section operator doors to reset 2a Abort and rehome robot axes OPERATIONS ROBOT UP DN NOT ARRIVING AT TOP 184 ROBOT UP DN...

Page 977: ...ish section operator doors to reset 2a Abort and rehome axis OPERATIONS COND ARM NOT ARRIVING AT PARK 194 COND ARM NOT ARRIVING AT INNER 195 COND ARM NOT ARRIVING AT OUTER 196 Note Error messages 194...

Page 978: ...HT LOAD 198 Problem Indicator Problem Location Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 The load chuck is not sensing the wafer properly seated in the load station 1a Wafer a...

Page 979: ...Component Cause Resolution ERROR MESSAGE Control Computer Screen 1 Polish section operator door s open 1a Close door s OPERATIONS ELEVATOR SECTION OPERATOR DOOR OPEN 200 no alarm Problem Indicator Pro...

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Page 981: ......

Page 982: ...e current some chapters may not contain all of the changes made to comply with the latest CE regulations These manuals will be replaced with Version 4 1 of the Model 6DSSP Operations and Maintenance M...

Page 983: ...Model 6DS SP Planarizer Maintenance Manual VOLUME 2 STRASBAUGH 825 Buckley Road San Luis Obispo California 93401 Phone 805 541 6424 Fax 805 541 6425...

Page 984: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared by Technical Publications Group...

Page 985: ...ns 6 At the Keyboard 6 At the Control Panel 7 Step By Step Instructions 7 ABOUT THE MODEL 6DS SP PLANARIZER 8 A Basic Machine with Optional Features 8 Mechanical Components 9 Electrical Distribution a...

Page 986: ...ical 13 Compressed Air 14 Vacuum and D I Water 14 Vacuum System 14 Vacuum Separator 15 Exhaust 15 Temperature Controlled Water 15 Temperature Control Unit 15 Drains 16 Step 7 Slurry System Connection...

Page 987: ...Sequence 5 D Wafer Unloading Sequence 6 E Cassette Removal 7 F Cycle Halt 7 Bridge Drive Assembly 8 Elevator Assembly 9 Robot Assembly 11 Left Right Load Unload Stations 12 Left Right Carrier Wafer C...

Page 988: ...apter 7 Plumbing Description 7 1 Compressed Air System 3 Vacuum System 4 Water System 5 Exhaust System 5 Slurry System 6 Chemical System 8 Drain System 8 Chapter 8 Preventive Maintenance Schedules 8 1...

Page 989: ...ent Series 56 ELEVATORS AND ROBOT ORDER OF ADJUSTMENT 61 ELEVATORS AND ROBOT 62 Elevator Cassette Platform Leveling 62 1 in Elevators and Robot Adjustment Series 62 Elevator Cassette Arm Sensor Switch...

Page 990: ...eviously Measured Position 178 Restoration of Electrical Power for the Second Table 180 Performance of Related Software Calibration Procedures 181 Chapter 10 Software Calibration Procedures 10 1 OVERV...

Page 991: ...ration 6 in Elevators and Robot Adjustment Series 83 Robot Up Down Z Axis Load Positions Calibration 7 in Elevators and Robot Adjustment Series 104 Robot Vacuum Switch Wafer Sensing Calibration 8 in E...

Page 992: ...Arm Adjustment Series 16 Load Stations 19 Load Chuck Raise Pressure 19 Left Load Chuck Raise Pressure 19 Right Load Chuck Raise Pressure 22 Shuttle 23 Shuttle Flow Control Adjustments 23 Slurry Syste...

Page 993: ...ers Left on Table Part B 22 Wafers Break During Polish Cycle Part A 22 Wafers Break During Polish Cycle Part B 24 Carriers Drop Off Spindles 25 Robot Drops Wafers Part A 26 Robot Drops Wafers Part B 2...

Page 994: ...SPINDLE VACUUM SWITCH OFF 52 40 SEND CASSETTE S NOT ACTIVE 53 42 ROBOT TOP BOTTOM NOT AT ZERO 54 42 LEFT SPINDLE NOT UP 55 43 RIGHT SPINDLE NOT UP 56 43 AXIS 1 SERVO AMPLIFIER FAULT 57 Left Spindle 44...

Page 995: ...DLE VACUUM NOT FOUND 156 59 RIGHT SPINDLE VACUUM NOT FOUND 157 59 CONDITION ARM NOT ARRIVING UP 158 60 CONDITION ARM NOT ARRIVING DOWN 159 60 LEFT SPINDLE NOT ARRIVING UP 160 61 LEFT SPINDLE NOT ARRIV...

Page 996: ...NOT ARRIVING AT ABOVE LOAD 187 64 ROBOT UP DN NOT ARRIVING AT LEFT LOAD 188 64 ROBOT UP DN NOT ARRIVING AT RIGHT LOAD 189 64 BRIDGE NOT ARRIVING AT LEFT CURTAIN 190 65 BRIDGE NOT ARRIVING AT RIGHT CU...

Page 997: ...Drawings bound under separate cover Customer Parts Lists Appendix C Electrical Input Output System Address List Refer to engineering drawing 217946EM Appendix D Options Appendix E Maintenance Log Shee...

Page 998: ...Operations v Ch 3 Operator Functions Auto Polish Parameters Menu Operations v Ch 4 Machine Setup Calibration Configuration Menu Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variab...

Page 999: ...ii Menu Where to Find Details Manual Location s Polish Parameters Recipe Management Menu Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Slurry System Flush Menu Operations v Ch 4 Machine Se...

Page 1000: ...Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variables Presettable Wafer Polish Count Auto Polish Menu Auto Polish Parameters Menu Operations v Ch 3 Operator Functions v Ch 4 Mac...

Page 1001: ...topic Menu Selection On the Fly Changes Auto Polish Menu Process Parameters Menus Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Auto Cycle Features Auto Polish Menu Operations v Ch 3 Opera...

Page 1002: ...Variables Pre or Post Pad Conditioning Conditioning Cleaning Parameters Menu Operations v Ch 4 Machine Setup Scrubber Support Machine Setup Menu Calibration Configuration Menu Manual Control Menu Oper...

Page 1003: ...gure 9 9 Orientation of Inner Gimbal Ring 19 Figure 9 10 Orientation of Inner Outer Gimbal Ring Unit Relative to the Wafer Manifold Plate 24 Figure 9 11 Orientation of Gimbal Ring Manifold Plate Unit...

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Page 1005: ...Introduction APPENDICES...

Page 1006: ...Introduction ALIBRATION ARIABLES IST...

Page 1007: ...user interface menus with a brief description of each item This document is updated and included with each new 6DS SP software version release Updated versions of this document and the 6DS SP Calibrat...

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Page 1009: ...calibration procedures described in the 6DS SP instruction and maintenance manuals 1 Bridge home position Calibration All machines Nominal value 35 in The distance in negative inches from the primary...

Page 1010: ...ring primary table cooling water exiting the machine Refer to calibration procedure If the machine has the secondary table cooling option this applies to secondary table cooling water entering the mac...

Page 1011: ...ature units selected for display Shunt control is available only if the machine has a fixed temperature sensor monitoring the primary table 14 Bridge left curtain position Calibration Curtain rinse op...

Page 1012: ...he status area The area under the table 2 heading will be blank Set to 1 if the machine has a bridge mounted temperature sensor which can move over either table Temperature will be displayed under the...

Page 1013: ...hen done An indexing cycle can be started in Diagnostics by turning on Flag 213 27 Right carrier index degrees Calibration Carrier indexing option Used in conjunction with variables 24 and 25 Determin...

Page 1014: ...is present normal and require the 6DS SP normally open 0 choice Typically bulk slurry delivery systems provide closed contacts during normal condition meaning slurry is present and require the normal...

Page 1015: ...inimum pressure expressed in control counter counts that will be applied during primary table polishing to ensure the left spindle will remain on the table during polishing This pressure is determined...

Page 1016: ...ounts that will be applied during second table polishing to ensure the left spindle will remain on the table during polishing This pressure is determined experimentally by entering values into counter...

Page 1017: ...the Machine Setup menu must be filled Remaining slots would then be ignored If set to 2 first the first slot must have a wafer If a wafer is not found in the first slot the second slot will not be sea...

Page 1018: ...ration for the Right spindle downforce Refer to calibration procedure 45 Right spindle reducer ratio Calibration All machines The reduction ratio of the gearbox used for the right spindle The standard...

Page 1019: ...ard motor Manufacturer NSK 1 High Torque motor Mfr Sierracin Magnedyne 52 Wfr slipout detect 0 no 1 yes Configuration Wafer slip out sensor option Set to 1 to enable monitoring of wafer slip out senso...

Page 1020: ...the arm will be moved to axis 8 There must not be a cassette installed in axis 8 although the elevator mechanism will still be present A spray nozzle will be positioned in that station instead This wi...

Page 1021: ...closed when no liquid is present Therefore the switch is open when liquid is present normal and require the 6DS SP normally open 0 choice Typically bulk slurry delivery systems provide closed contacts...

Page 1022: ...zero with the table stopped add the negative of the error to the existing value in variable 63 64 Filter const 0 up fast slow Calibration All machines Nominal value 1 This filter is used for dampenin...

Page 1023: ...losed loop control of conditioning downforce If force takes too long too build increase the gain If excessive overshoot occurs decrease the gain The lever type arms use open loop control and don t use...

Page 1024: ...force dead weight lbs then set it to 0 and make sure there is no force whatsoever on the condition force load cell Add any error seen in the Cond force value displayed in the status area to whatever...

Page 1025: ...ane 81 Axis 6 offset to slot 0 Calibration All machines Nominal value 2 to 3 in The distance in inches required to raise an elevator at the axis 6 location furthest right position viewed from polish d...

Page 1026: ...up dn top 89 Obsolete see vars 243 247 Previous to version 4 37 was Thruput unload AGV up dn bot 90 Hydro Lift sta pres 0 no 1 y Configuration Hydro Lift load station option Sets whether or not the op...

Page 1027: ...ump 3 for third pump option flowrate is shown on the status display If neither the third slurry or pump 3 options are not installed this should be set to zero 96 Show pH 0 no 1 yes Configuration All m...

Page 1028: ...sh Manual mode Diag mode Green if no error or halt Processing or conditioning Note Only 1 light will be on at a time If set to 1 a four light tower is supported as follows Light on Light blink Light o...

Page 1029: ...te ready ready or to be removed active Green Processing never Idle In a cycle If set to 3 a two light tower is supported as follows Light on Light blink Light off Red Alarm never No alarm Green Proces...

Page 1030: ...Has priority over port empty Also light tower configuration 5 causes control of relays by controlling digital outputs as follows Output 81 Alarm On when red light on Output 16 Processing On when green...

Page 1031: ...t has a front to back throughput option with a scrubber Also calibration variable 41 Lot Integrity 0 dsbl 1 enbl must be set to 1 for the yellow light operation to work properly Light on Light blink L...

Page 1032: ...enbl must be set to 1 for the yellow light operation to work properly Light on Light blink Light off Green Processing never Idle In a cycle running or halted Red Alarm never No alarm Yellow A cassett...

Page 1033: ...ause all wafers set in No of wafers are polished and cycle went idle Has priority over port empty NOTE This configuration is applicable ONLY to configurations with a single send cassette and a single...

Page 1034: ...tive inches from the robot home position to the center of the Axis 5 location furthest left viewed from the polish doors 104 Axis 6 robot position Calibration All machines Nominal value 25 in The dist...

Page 1035: ...in negative inches from the robot home position to the center of the left load station if the 2 arm robot is used or if the RTZ robot is used on a single table machine If the RTZ robot is used on a tw...

Page 1036: ...wo arm robot 50000 for the RTZ robot A value in counts required to move either the two arm robot s arms or the RTZ robot s single arm into the Axis 8 location nearest right viewed from the polish door...

Page 1037: ...ue for the robot up down servo system The two arm robot uses 101600 while the RTZ robot uses 32000 120 2 arm robot botarm pos n RT ld Calibration Two arm robot Nominal value 3000 A value in counts req...

Page 1038: ...ed for the primary table as follows 0 SCR is the non programmable arm 1 Lift is the programmable arm that is lifted straight up by an air cylinder 2 Lev is the programmable arm without the device rota...

Page 1039: ...sect the table center The value must be as follows for the different conditioning device diameters 2 device 0 02 4 device 0 04 128 Cond1 device reducer ratio Configuration Lift type conditioning arm o...

Page 1040: ...e must be as follows for the various types of conditioning arms Lift type arm 4150 Lever type arm no rotation feature 100 1 gearbox 5696 70 1 gearbox 3987 Lever type arm rotation feature with 2 device...

Page 1041: ...ot up dn bottom scbr pos n Calibration Scrubber option Nominal value 0 5 in Value in inches to move the robot s up down axis to a position below the home position that will contact a wafer sitting in...

Page 1042: ...7 location nearest left position viewed from polish doors and wafer handling arms at the end of the pusher NOTE If the scrubber is not used set this variable to 0 141 Lift off 0 lift 1 slide lift Conf...

Page 1043: ...olishing starts They do not effect the secondary table operation If set to 0 Short slurry delivery specified in step 1 for the primary table begins when the bridge starts moving from the load station...

Page 1044: ...er rod which reduces the area exposed to control pressure Therefore the actual force will be slightly less than what is entered Lever type arm with rotating device This force value is used as a refere...

Page 1045: ...de of an air cylinder without a direction valve The variable should be set to zero 154 Lever arm tolerance lbs Configuration Lever conditioning arm Nominal value 1 lbs Determines the tolerance for det...

Page 1046: ...auto cycle continues to handle the next unpolished wafers If the busy timeout occurs before the scrubber becomes ready the auto cycle starts handling the next unpolished wafers with the second polishe...

Page 1047: ...stabilization delay since there is no load chuck vacuum used It also prevents the wafer presence test which would be unreliable since the fountain rinse can interfere with the wafer detection water s...

Page 1048: ...l calibration is performed by moving the hard stop 167 Scrub actual unload position deg Calibration Scrubber station option Nominal value 180 degrees Sets the position in degrees from the scrubber sta...

Page 1049: ...n a spindle when it shouldn t be This variable has no effect on the Carrier X configuration 173 Approx flush blowout pres psi Configuration All machines without Carrier X Nominal value 20 psi Sets the...

Page 1050: ...ves Nominal value 120 secs Sets the amount of time an elevator fill valve will remain on once it is turned on This is not applicable if variable 226 Keep elev tanks full 0 n 1 y is set to 1 180 Dunk s...

Page 1051: ...recipe number data to the scrubber 0 is disable 1 is for a three byte data transfer Yuasa scrubber without AGV configuration or DNS scrubber 2 is for a four byte data transfer Yuasa scrubber with AGV...

Page 1052: ...operate if enabled See Variable 54 192 Wet idle carr rns 0 no 1 yes Configuration All machines If set to 1 the carrier top side rinses will turn on during wet idling when the carriers are rotated and...

Page 1053: ...sensing option If set to 0 the option is disabled This must be set to 0 if the option is not present If set to 1 the following occurs If the machine is in a polish cycle sensing of slurry flow will be...

Page 1054: ...e Wafer size Retaining ring area 6 in 11 78 Sq In 8 in 15 35 Sq In 198 ViPRR ring offset lbs Configuration ViPRR carrier option This is an offset value used to correct the position of the bladder pres...

Page 1055: ...revious retaining rings were Wafer size Coefficient 6 in 6 85 8 in 8 5 200 Carrier latches 0 no 1 yes Configuration Carrier latch option Set to 1 if the carrier latch option is used Carrier loading or...

Page 1056: ...nish cycle until this choice was added For example in an HTP machine with HTP enabled this could include wafers currently polishing and also wafers on the load stations waiting to be polished For dual...

Page 1057: ...l stay up and move to the ex situ outer position If the automatic cycle ends the arm will then park Depending on other cycle times and machine configuration this can improve throughput by eliminating...

Page 1058: ...unloading even if only the left or right only was used for polishing This choice is mainly available to ensure that both load and unload stations if using the high throughput option experience equal m...

Page 1059: ...rol counter counts that will be applied to the left spindle when moved down onto a table before polishing onto single table dedicated cleaning stations for single table wafer unload if not F B through...

Page 1060: ...Same as variable 219 but for the right spindle using counter 13 221 L spndle down extra soft value Calibration All machines Nominal value 1100 Sets the pressure expressed in control counter counts th...

Page 1061: ...unload stations without applying undue force to the stations A small force of 10 lbs should be sufficient 224 R spndle down thruput value Calibration All machines Nominal value 600 Same as variable 22...

Page 1062: ...les 226 and 228 Variables 227 and 228 are used to turn each elevator tank s fill valve off and on its cassette arm is lifted This causes higher purging flow than provided by the fill valve s bypass fe...

Page 1063: ...for the right spindle 231 L back membrane pres cntl gain Calibration All machines Nominal value 3 If not using Carrier X sets the proportional gain for the closed loop control of backpressure for the...

Page 1064: ...ng slots are ignored and can be empty Note The values entered will remain and will be used for every cycle unless changed by either the operator or by GEM 234 Elev fill off w rinse 0 n 1 y Configurati...

Page 1065: ...be inhibited If a conditioning sweep that will be used by the recipe has an inner position and conditioning device diameter that would get within a 1 625 inch radius an alarm will show and a cycle st...

Page 1066: ...example if set to 1 25 seconds after the 0 75 built in delay is finished the cycle will wait for up to 1 25 seconds before determining no wafer If at any time during that 1 25 seconds the wafer is det...

Page 1067: ...degC Configuration All machines Used in conjunction with variable 241 If primary table inlet cooling water rises above this value an alarm will show Setting both variables 241 and 242 to zero disable...

Page 1068: ...n inches to move the robot s up down axis to a position below the home position that will hold a wafer above the AGV station 247 Robot up dn AGV bot position Calibration AGV option Nominal value 0 33...

Page 1069: ...slurry source option 251 CE config present 0 no 1 yes Configuration All machines Must be set to correspond to whether or not the machine is CE equipped Set to 1 if machine is CE equipped If a CE equi...

Page 1070: ...AUGH INC 6DS SP USER INTERFACE REFERENCE Strasbaugh Inc May 31 2001 This reference is not intended as a guide to machine operation For more information refer to the 6DS SP Operations and Maintenance m...

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Page 1072: ...NITION 7 MENU SELECTION 8 MENU DESCRIPTIONS 10 65 Auto Polish Cycle 10 13 Slurry Flush 14 15 Recipe Management 16 17 Polish Parameters 18 21 Sweep Parameters 22 23 Conditioning Cleaning Parameters 24...

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Page 1074: ...brief description of each item It is a good companion to desktop versions of the software training or general reference This reference is not intended as a guide to machine operation For more informa...

Page 1075: ...rt of recipe has been modified Menu choice key labels Denied choices will show faintly Current wafer dia setting Menu select key label Abort Reset key label Machine status 12 00 00 AUTO POLISH CYCLE V...

Page 1076: ...the eye to areas of interest The background colors used and their functions are Yellow Function key choices involved with menu selection Menu title Prompt line Cursor AGV data display if selected whe...

Page 1077: ...ction keys to prevent tedious switching of the keyboard The keyboard arrow keys are not used and won t work Also the function keys are shared with alpha characters The Alpha key must be set to OFF unl...

Page 1078: ...decimal the hyphen and the Enter key The Backspace and Escape keys can also be used Sometimes numbers are entered into fields in the menu area and sometimes they are entered at the end of the prompt...

Page 1079: ...nter Choice causes the currently showing choice to be confirmed and the cursor color will change back to yellow Escaping can be done by either using the Escape key moving the cursor off of the item or...

Page 1080: ...operation but are not process related Machine settings which are seldom or never changed reside in the Calibration Configuration menu The maintenance menus work together as a group If any change is ma...

Page 1081: ...below Once a menu is selected it will show along with appropriate function key choices for that menu All menus can be selected at least for viewing in all password levels F1 F2 F3 F4 F5 F6 F7 F8 F9 F1...

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Page 1083: ...Engr Engr Engr Engr Engr Engr Engr Engr Password Permission Maint Maint Maint Maint Maint Maint Maint Maint Supvr Supvr Supvr Supvr Supvr Supvr Supvr Supvr 12 00 00 AUTO POLISH CYCLE Ver 4 XX Oper SP...

Page 1084: ...k Conditioner Arm causes the conditioning arm to move to its park position Shows Park Arm1 2 and parks both arms if second conditioner installed Wet Idle Wet Idle causes the machine to go into the wet...

Page 1085: ...operation will be fully automatic This is useful for error recovery Can be toggled on and off Start W Unld Start With Unload Auto mode only starts an automatic cycle as if wafers had just been unload...

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Page 1087: ...s menu is showing by pressing the START button This menu must be showing to start a slurry flush cycle Once the cycle is started other menus can be selected A slurry prime cycle can be started with th...

Page 1088: ...d Sets the Slurry 2 system to be flushed Sets the Slurry 3 system to be flushed Sets the Slurry 1 and 2 systems to be flushed Sets the Slurry 1 and 3 systems to be flushed Sets the Slurry 2 and 3 syst...

Page 1089: ...g the bezel keyboard the Alpha key must be used to set the keyboard to alpha to enter letters Once the letters are entered the Alpha key must be turned off to enable the function keys F1 F2 F6 F8 F9 F...

Page 1090: ...pload the currently cursored recipe to the Host DnLoad Recipe GEM option only Causes a prompt line to show to enter the desired recipe name When the name is entered an attempt is made to download that...

Page 1091: ...re backpressure only time ring force and backpressure or time and ring force Don t use choices with backpressure if using Carrier X If neither Viprr nor Carrier X is used Ring Force will not show If C...

Page 1092: ...step to the right to move to the center column If already on the highest step will wrap to step 1 All Wafers All Wafers sets the machine to polish wafers indefinitely ALL will show in the Wfrs displa...

Page 1093: ...ding on the setting in Machine Parameters menu They will be the same units as used for polish force Range 0 500 lbs or equivalent psi Lt Bk Prs will not show if using Carrier X Sets the target left ba...

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Page 1095: ...nges 250 to 250 rpm 7 5 1 gearbox ratio 190 to 190 rpm 10 1 gearbox ratio 125 to 125 rpm 15 1 gearbox ratio 100 to 100 rpm 20 1 gearbox ratio 175 to 175 rpm optional second table NOTE The primary tabl...

Page 1096: ...lator F1 F2 F3 F8 F9 F10 Set Set Set to OTHER Sel Abort Outer Inner Track Menu Reset Engr Engr Engr Password Permission Maint Maint Maint Supvr Supvr Supvr 12 00 00 SWEEP PARAMETERS Oper SPNDL left ri...

Page 1097: ...up one item in the present column If already at the top will wrap to the bottom of that column Move Down Move Down moves the cursor down one item in the present column If already at the bottom will wr...

Page 1098: ...not have the Cond 1 Device Speed value and instead have an Arm Speed value The arm speed is the approximate number of seconds for the arm to make a sweep across the table Also machines with the non pr...

Page 1099: ...o set the number of cycles used for demand conditioning choice on the Auto Polish menu Cond 1 Ex situ Pre Post Once Pre Cond Post Cond Once only Ex situ conditioning sequence occurs before polish Ex s...

Page 1100: ...flow rate Slurry 2 only set flow rate Optional slurry 3 only set flow rate Both Slurry 1 and 2 set flow rates Both Slurry 1 and 3 set flow rates Both Slurry 2 and 3 set flow rates Slurry1 Slurry 2 an...

Page 1101: ...rpm However choices and events that prevent the arm from moving to the park position supercede this cleaning feature For instance if calibration variable 210 Don t park after batch 0 n 1 y is enabled...

Page 1102: ...es where the cleaning devices will be disabled to permit unobstructed rinsing Machines with the non programmable arm do not have the Cond 1 Sweep Start and Cond 1 In situ Conditioning choices Machines...

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Page 1104: ...ised and conditioning is paused the required time after each complete 2 way sweep to effect the duty cycle If the duty cycle is set to 100 in situ conditioning will be continuous If set to 0 there wil...

Page 1105: ...STRASBAUGH INC Page 32 6DS SP User Interface Reference May 31 2001 Ver 4 37 Continued on next page...

Page 1106: ...g stations while on the carriers after each polish cycle For side to side throughput with Hydro Lift stations a menu note will show Cleaning disabled when throughput enabled because wafers will block...

Page 1107: ...e carriers will be rotated and rinsed above the load stations during cleaning Carrier Cleaning Time Sets the overall time of the carrier cleaning cycle Carrier Cleaning Device single table without fro...

Page 1108: ...cause the actual polish force to differ from the polish parameter force by the percent entered The displayed polish force in the status area will not show this percentage difference Only the actual f...

Page 1109: ...de Backpressure will not show if using Carrier X Disable TBL1 2 std 1std 2dis 2std 1dis 1 2 zone 1zone 2dis 2zone 1dis 1zone 2std 2zone 1std Sets whether or not backpressure is enabled for a table dur...

Page 1110: ...oke limit 0 6in 1 1in Osc Frequency TBl1 TBL2 Sets the number of oscillation strokes per minute Auto Process Control Step Sets which step of the primary table 1 10 will have polish parameters modified...

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Page 1112: ...only applicable if the machine has the chemical option Without this option all rinse types should be set to DI Water If the curtain rinse option is not installed its rinse type parameter can be ignore...

Page 1113: ...load station this turns on the HydroLift spray Note If Fountain Rinsing is enabled Machine Parameters page 3 the fountain rinse will turn on even if this time is zero Therefore if this spray is not d...

Page 1114: ...time the table s will be rotated and rinsed during wet idle Wet Idle Table Off Sets the time the tables will be stopped with rinses turned off during wet idle Wet Idle Carriers On Sets the time the ca...

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Page 1116: ...does not have a curtain rinse the Curtain Rinse choice should be set to Disable 12 00 00 MACHINE PARAMETERS Oper SPNDL left right page 3 Frc 0 0 psi Load Rinse During Polish Interval BkPr 0 0 psig Spi...

Page 1117: ...u page 2 is set to zero Tbl Start W Slurry 0 dsbl Causes the table to rotate during slurry prestart at the rpm entered A 0 entry disables the choice The table will rotate in the same direction as the...

Page 1118: ...nd DI table rinse off 40 rpm rotation and DI table rinse off 50 rpm rotation and DI table rinse off Polish Time Entry Left Right Matched Polish times in the Polish Parameter menu can be entered separa...

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Page 1120: ...lish menu area is not showing a prompt usually the case during polishing it will show the following as a reminder Force cycling Step 3 for 10 sec at 60 sec intvl This information will not show if Forc...

Page 1121: ...e the interval ends This interval should be longer than the force cycling period Force Cycling Period The minimum polish force will be applied for the time set This period should be shorter than the f...

Page 1122: ...ishing All polish forces will be multiplied by this percent during the odd wafer polish They will return to normal when odd wafer polishing is finished Odd Wafer Ring Force Adjust Viprr or Carrier X c...

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Page 1124: ...oner rotation is not installed their choices will not show Also the polish alarms have a fixed 15 second holdoff after each polish step start before monitoring begins The conditioner alarms have a 10...

Page 1125: ...limits Slurry 3 pH Sets the Slurry 3 pH alarm limits LT Backpress will not show if using Carrier X Sets the left backpressure force alarm limits They are entered as delta values RT Backpress will not...

Page 1126: ...ut scrubber and Nova If the Use Partial Send Cassettes feature is enabled the Left Send No of Slots Used and Right Send No of Slots Used choices will show Otherwise they will not show This feature is...

Page 1127: ...rce Tank Bulk If the dual slurry source option is installed the desired source for Slurry 1 can be selected Slurry 2 Source Tank Bulk If the dual slurry source option is installed the desired source f...

Page 1128: ...y GEM AGV recipes are are ignored GEM Queue permits GEM selection even while in an auto cycle AGV Sender will cause recipes to be selected by AGV interface data when using the Auto cycle Any previousl...

Page 1129: ...cass 0 n 1 y The allowable range is 1 to the maximum number of slots The 6DS SP will then search for wafers starting at slot 1 up to the value entered When that slot is reached the cassette will be ma...

Page 1130: ...or to advance a send elevator past many empty slots However it is possible to move elevators to positions where the robot arm can strike a wafer on the next cycle so be careful For maximum safety at...

Page 1131: ...Up Down Raises and lowers the load station load chucks LT and RT Hydro Lift Station On Off choices will show for that type of stations Left Send Elev Move Right Send Elev Move Left Recv Elev Move Righ...

Page 1132: ...has no means to automatically stop select Off before it reaches the end of its travel 12 00 00 MANUAL CONTROL Oper SPNDL left right page 2 Frc 0 0 psi Cond 1 Device Motor On Off BkPr 0 0 psig Cond 1 A...

Page 1133: ...ill run into its limits Cond 1 Force Sets the conditioning downforce The arm must be down Left Spindle Up Down Right Spindle Up Down Raises and lowers the spindles Left Spindle Vac On Off Right Spindl...

Page 1134: ...the slurry diverter option is installed set with Calibration Configuration variable 159 the slurry destination choices will show 12 00 00 MANUAL CONTROL Oper SPNDL left right page 3 Frc 0 0 psi Left...

Page 1135: ...Rinse On Off Turns the primary table DI water rinse on and off Table 2 Rinse On Off Turns the optional second table DI water rinse on and off Slurry 1 Flow Runs the Slurry 1 pump at the selected flow...

Page 1136: ...Wafer Chuck Up BkPr 0 0 psig Nova Chuck Vacuum VacSensOFF Spd 0 0 rpm Nova Chuck Blowoff Load 0 0 amps Nova Wafer Support Arms Open TABLES 1 2 Spd 0 0 rpm Nova Clear Sequence Idle Load 0 amps Temp 0 d...

Page 1137: ...Nova wafer chuck vacuum on and off Nova Chuck Blowoff Turns the Nova wafer chuck blowoff on and off Nova Wafer Support Arms Opens and closes the Nova wafer support arms Nova Clear Sequence This Clear...

Page 1138: ...inputs Unlike the Manual Control Menu the Diagnostic Menu provides no protection against illegal choices Therefore only qualified personnel should change outputs flags or counters An abort reset or m...

Page 1139: ...ntly viewed to advance to the next page If already on the last page will wrap to the first page Toggle Output Toggle Output permits toggling any output When selected the prompt line will ask for an ou...

Page 1140: ...new jogged value is subject to the same illegal value check as if it had been entered manually To help prevent accidental jogging the JOG NEG and JOG POS choices are guarded surrounded by the Smallr J...

Page 1141: ...o go to a higher page number If already on the highest page page 13 the the page will wrap to the lowest page page 1 Smallr Jog Decreases the jog increment by a factor of 10 If the increment is alread...

Page 1142: ...ngr Engr Password Permission Maint Maint Maint Maint Maint Maint Supvr Supvr Supvr Supvr Supvr Supvr 12 00 00 HOME MACHINE Oper Bridge Axis 3 Not referenced Left Send Elev Axis 5 Not referenced Right...

Page 1143: ...d Robot Travel Robot Travel will cause the linear robot to be homed This should not be selected unless the robot arms have been homed and are seen to be at their zero positions Robot Arm Robot Arm wil...

Page 1144: ...s and 15 maintenance passwords The passwords are not used for anything other than setting the function key permissions The Supervisor level has only one supervisor password If this feature is not enab...

Page 1145: ...nance password If a valid password is entered the level will change to Maintenance Otherwise a warning will show If no maintenance passwords exists the level will immediately change to Maintenance Set...

Page 1146: ...TE ALT C will clear both message areas F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 Go On Go Off Go Go Enbl Dsbl Reset OTHER Sel Abort Line Line Local Remote SECS SECS Time Menu Reset Oper Oper Oper Oper Oper Oper...

Page 1147: ...aint Maint Maint Maint Maint Maint Supvr Supvr Supvr Supvr Supvr Supvr Supvr Supvr 12 00 00 GEM SECS CONFIGURATION Oper SPNDL left right Equipment Constants Page 2 Frc 0 0 psi BAUDRATE 9600 BkPr 0 0 p...

Page 1148: ...aint Maint Maint Maint Maint Maint Supvr Supvr Supvr Supvr Supvr Supvr Supvr Supvr 12 00 00 GEM SECS CONFIGURATION Oper SPNDL left right Equipment Constants Page 3 Frc 0 0 psi HEARTBEAT 45 BkPr 0 0 ps...

Page 1149: ...M SECS CONFIGURATION Oper SPNDL left right Equipment Constants set by Host Page 4 Frc 0 0 psi DEVICENAME CMP 46 BkPr 0 0 psig ApcLeftSpindleTime 0 Spd 0 0 rpm ApcRightSpindleTime 0 Load 0 0 amps ApcLe...

Page 1150: ...nt Maint Maint Maint Maint Maint Maint Maint Supvr Supvr Supvr Supvr Supvr Supvr Supvr Supvr 12 00 00 GEM SECS CONFIGURATION Oper SPNDL left right Equipment Constants set by Host Page 5 Frc 0 0 psi DE...

Page 1151: ...he Message to Host area of page 1 The operator can then enter a message to be subsequently sent to the Host A prompt line will note to press ESC when done Backspacing is permitted for editing The Ente...

Page 1152: ...borts occur as a result of either a machine abort or a cycle halt The logs are maintained on disk and will be saved if the machine is turned off Alarm action configuration permits assigning actions of...

Page 1153: ...Cass 1 Slot 8 TABLES 1 2 Spd 0 0 rpm 07 20 98 15 10 10 Wfr 0 Load 0 amps Aborted at step 2 Remaining step time 88 secs Temp 0 degC LT wfr Cass 1 Slot 21 RT wfr Cass 1 Slot 22 Cond 0 lbs SLURRY 1 2 3 0...

Page 1154: ...FORCE HIGH ALARM Load 0 amps 7 RIGHT SPINDLE SPEED LOW ALARM Halt Temp 0 degC 8 RIGHT SPINDLE SPEED HIGH ALARM Halt Cond 0 lbs 9 TABLE TEMP LOW ALARM SLURRY 1 2 3 10 TABLE TEMP HIGH ALARM Flow 0 0 0...

Page 1155: ...to understand how to log onto a disk directory copy files and perform other basic DOS tasks You don t want to accidentally delete or overwrite critical files This document briefly describes each util...

Page 1156: ...sired Save the modified recipe file if new values were entered Save the recipe data along with label and limit data in an Excel import file CSV XportRec is 6DS SP software version specific because rec...

Page 1157: ...o enter a new value if desired Save the modified recipe file in a binary format that can be used by the 6DS SP MportRec is 6DS SP software version specific because recipe limit tests use data in the 6...

Page 1158: ...FILENAME 1 Bridge home position 34 2 Bridge load position 33 39 3 Bridge table 1 position 0 4 Bridge middle position 11 5 TBL1 temp in span 1 6 TBL1 temp out or TBL2 in span 1 7 TBL1 temp in zero 0 8...

Page 1159: ...de of the normal protective entry limit range For example if during calibration an illegal entry warning occurs for a robot calibration and it is known that the value to be entered is realistic CALVAR...

Page 1160: ...how the date and time currently set in the 6DS SP computer PrntVars does not permit specification of a drive directory so you must run it from the same drive directory that contains CALVARS DAT and CA...

Page 1161: ...anytime by first quitting to DOS The servo boards will remember their last status so long as the machine power remains on TELL STATUS UTILITY FOR DCX BOARDS R Howard Strasbaugh Inc 9 1 94 CURRENT CHOI...

Page 1162: ...Terminal emulation displaying ASCII 2 Terminal emulation displaying HEX 3 Change port or baud rate Default is Com1 9600 4 Quit When you select 1 or 2 you will see the screen shown below Characters you...

Page 1163: ...t the 6DS SP s Autoexec bat file automatically download initialization files by performing a machine power off on Strasbaugh with permission from Precision Micro Control Inc has modified the original...

Page 1164: ...axis This program will send choices you make in menus setup or motion control to the selected DCX board It also has an area where you can directly send commands similar to using the DcxCntrl program N...

Page 1165: ...ough 4 17 you MUST first install 4 18 If your machine s version is prior to 4 10 you MUST first install BOTH 4 10 and 4 18 A note about PC DOS You should be using IBM s PC DOS 2000 or PC DOS 7 0 with...

Page 1166: ...sion 4 32 replaces move down calibration variables 38 39 48 and 49 with variables 217 through 224 If re installing a version older than 4 32 check variables 38 39 48 and 49 to make sure they contain a...

Page 1167: ...ng polish doors use reset button on panel to re enable Shows if the major polish section systems are disabled bright blue background This is the highest priority use of the life status area If major p...

Page 1168: ...f the magnetic interlock switches may cause the safety relay to disable systems but not be in a state to accept a reset Note If the reset button does not work it is not a software problem it is an ele...

Page 1169: ...remove the halt CE equipped machines If CE hardware is installed the reset button must be pressed before the start button Different behaviors when opening polish door All machines If a polish door is...

Page 1170: ...ur for all machines and the need for a reset in CE equipped machines Here is an example for carrier loading carrier unloading is similar Make the Load Carrs function key choice Carrierloading begins P...

Page 1171: ...4 38 is used the machine can still be operated but the following will be observed No notice will show with the polish doors closed and the polish section disabled No cycle start inhibit or cycle start...

Page 1172: ...it can be used for any application whether or not the machine is CE equipped There is no hardware change because it uses an existing input for any machine that has digital I O mounting rack 4MR instal...

Page 1173: ...ased on the operator using the No of Wafers feature to set a lot size and the machine permitted to go idle at the end of that lot When the receive cassette arm is lifted to remove the cassette the rea...

Page 1174: ...nge the SECS parameters If an attempt is made to change one of the SECS parameters with the Communication State showing Communicating or Enabled the warning The Communications State must be Disabled P...

Page 1175: ...the original application is only suspended while the spawned application is run there must be sufficient memory available for all applications to be loaded simultaneously On the newer SBS PC5 GEM PC t...

Page 1176: ...ill force a reboot of the Gem PC in the case of the Ziatech 5 The batch file that controls the program flow of the Gem PC GemPc Bat interprets the exit code from the GEM application In this scenario t...

Page 1177: ...Since previous software reset the screen colors with every attempt to select a menu this could cause problems during normal operation when roaming among screens The setting the screen colors now occu...

Page 1178: ...disabled the tank will not fill Made an improvement to prevent a nuisance wafer not found on load station alarm if the machine is halted during the time robot arm swings over and lowers onto the load...

Page 1179: ...tall software Installing new software from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the follow...

Page 1180: ...the life data area Also nuisance alarms may show for polish section servo shuttle and spindle moves with the door shut with partial moves completed Set to 0 if the machine is notCE equipped If a non...

Page 1181: ...ntrol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer...

Page 1182: ...cle the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1183: ...escribes This document describes features added or changed with Version 4 37 4 37 1 4 37 2 and general information If you have any version other than 4 36 you are not up to date on features and possib...

Page 1184: ...STRASBAUGH INC June 30 2001 6DS SP Software Ver 4 37 2 Page 2 Strasbaugh Confidential Information A detailed description of software installation starts on page 17 of this document...

Page 1185: ...on variables assignment Version 4 32 replaces move down calibration variables 38 39 48 and 49 with variables 217 through 224 If re installing a version older than 4 32 check variables 38 39 48 and 49...

Page 1186: ...sed conditioning will occur through the end of polishing Also selecting step 10 will have the same effect as selecting 0 all steps 12 00 00 CONDITIONING CLEANING PARAMETERS Oper SPNDL left right Page...

Page 1187: ...n values NOTE Choices and events that prevent the arm from moving to the park position during an automatic cycle supercede the cleaning feature For example if calibration variable 210 Don t park after...

Page 1188: ...Bot for throughput configurations The following table shows the previous two multiple use calibration variables 88 89 and the five new independent variables 243 247 that replace them Previous variable...

Page 1189: ...s neither an AGV nor high throughput configuration none of these variables apply The automatic transfer of values from old variables to uninitialized new variables ensures the machine will behave exac...

Page 1190: ...e the alarms are 141 Lift off 0 lift 1 slide lift 1 and 236 TBL1 stroke limit 0 6in 1 1in 1 There are two new alarms each has the same text Miscellaneous alarm 225 STROKE LIMIT AND SLIDE LIFT BOTH ENA...

Page 1191: ...nter protection enabled There are two new alarms each has the same text Miscellaneous alarm 223 CENTER PROTECTION HAZARD OR DEVICE DIA 0 Cycle Start alarm 70 CENTER PROTECTION HAZARD OR DEVICE DIA 0 T...

Page 1192: ...o a point higher than its highest safe position The first alarm indicates the software is refusing the move because it can cause damage The second alarm occurs because the elevator has been prevented...

Page 1193: ...blown off the carriers Another case would be an abort between the time the robot successfully gets a wafer from the load station but before the robot arm moves to zero The wafer may or may not have b...

Page 1194: ...revious choices of none Time only Time and Backpressure and Backpressure only If either choice 4 or 5 is set in calibration variable 99 the operator can change ring as shown below This choice not perm...

Page 1195: ...ency TBL1 TBL2 0 cpm LIFE Wafers Time 1 Pad 1 0 0h 0m Auto Process Control Step 0 2 Pad 2 0 0h 0m Scrubber Recipe No 1 99 0 3 L Carr 0 0h 0m 4 R Carr 0 0h 0m 150 mm Wfr 5 Primary Cond 0h 0m Stat Idle...

Page 1196: ...are waiting for Nova wafer handling Added Changes to Use Slurry Systems 1 and 2 Alarm 2 Inputs More Fully Version 4 37 adds changes and corrects to the handling of slurry system 1 and 2 Alarm 2 input...

Page 1197: ...event a cycle start in the unlikely event someone would try to start the machine in that state This alarm condition will now inhibit a cycle start The complete operation of this alarm condition is sim...

Page 1198: ...enough The automatic cycle will now make sure carrier cleaning is done before attempting to start the carrier indexing Made correction to behavior of light tower configuration 5 for any machine confi...

Page 1199: ...unequal polish times a nuisance backpressure alarm would show for the spindle no longer polishing This nuisance alarm will no longer occur Made correction for F B high throughput configurations where...

Page 1200: ...TE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This sh...

Page 1201: ...ntrol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer...

Page 1202: ...cle the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1203: ...by those versions Also if your machine s version is 4 10 through 4 17 you MUST first install 4 18 If your machine s version is prior to 4 10 you MUST first install BOTH 4 10 and 4 18 A note about PC...

Page 1204: ...ion variables assignment Version 4 32 replaces move down calibration variables 38 39 48 and 49 with variables 217 through 224 If re installing a version older than 4 32 check variables 38 39 48 and 49...

Page 1205: ...ier pad spray outputs that utilize the HydroLift spray are off at these times Calibration variable 238 No HydroLift w unload 0 n 1 y sets this choice Set to 0 and the HydroLift spray will be on when w...

Page 1206: ...ycle turns on end effector vacuum and waits 0 75 seconds for vacuum stabilization Then it checks the end effector vacuum switch and determines whether or not a wafer is detected If for any reason the...

Page 1207: ...ble machines and steps 1 20 for two table machines is less than five seconds For example if a two table machine has step 1 left and right times at one second and step 11 left and right times at one se...

Page 1208: ...omatically goes into wet idle if automatic wet idle is selected in the Machine Parameters menu page 2 Version 4 34 had made changes to prevent needless wet idles during certain cycle start errors and...

Page 1209: ...quest that polished wafers be put into receive cassettes as soon as possible It also prevents a problem where excessive unload station rinse water was being used when polished wafers were waiting for...

Page 1210: ...y CR48 which involves the polish doors This alarm disabling software change is not applicable to but will not impair earlier 6DS SP s that have not been rewired with this change Made correction to wha...

Page 1211: ...OTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This s...

Page 1212: ...ntrol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer...

Page 1213: ...cle the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1214: ...lf with their new features and do any special setup required by those versions Also if your machine s version is 4 10 through 4 17 you MUST first install 4 18 If your machine s version is prior to 4 1...

Page 1215: ...ration variables assignment Version 4 32 replaces move down calibration variables 38 39 48 and 49 with variables 217 through 224 If re installing a version older than 4 32 check variables 38 39 48 and...

Page 1216: ...er drop protection Calibration variable 237 4 passages controlled 0 n 1 y sets the configuration Set to 0 for machines with two passage rotary unions standard carriers or two passage control of Viprr...

Page 1217: ...passage unions they are 1 and 2 For four passage unions passages 1 through 4 use areas 1 through 4 of the carrier chuck zones that are separated by o rings as shown below for reference For two passage...

Page 1218: ...145 Passage 2 Top of rotary union for two passage unions Backpressure Counters 55 56 EP regulators 3 4 Backpressure Counters 55 56 EP regulators 3 4 Backpressure 1 Counters 55 56 EP regulators 3 4 Mem...

Page 1219: ...left right ALARM ACTION CONFIGURATION page 1 Frc 0 0 psi LEFT SPINDLE FORCE LOW ALARM Finish BkPr 0 0 psig LEFT SPINDLE FORCE HIGH ALARM St Fin Spd 0 0 rpm LEFT SPINDLE SPEED LOW ALARM Finish Load 0...

Page 1220: ...rst lot starts processing Another lot can be placed in the machine while the previous lot is processing The Host then queues a recipe name for that next lot That first lot finishes processing and can...

Page 1221: ...s the ability to send the robot arm into an elevator station at axis 8 during wet idle If using this feature there must not be a cassette at axis 8 Instead a spray nozzle would be located there If the...

Page 1222: ...r 1 inch Originally it was fixed at 6 inches maximum Calibration variable 236 TBL1 stroke limit 0 6in 1 1in sets this limit The 6 inch choice permits the maximum practical oscillation when over the pr...

Page 1223: ...exec bat file IBMAVD is part of PC DOS but IBM is no longer supporting updates for it If you have a machine with software prior to 4 35 that warns you about old antivirus files during power up just ig...

Page 1224: ...y if in situ conditioning is enabled and the inner outer positions are non zero If not the ex situ outer position is used before moving the bridge Made correction for non F B HTP configurations where...

Page 1225: ...one second delay does not guarantee the shuttle won t hit a load chuck In machines that do not have the load chuck down position sensors installed if the load chucks stick in the up position the F B...

Page 1226: ...OTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This s...

Page 1227: ...ntrol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer...

Page 1228: ...cle the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1229: ...ngs required by any version s that was never installed Refer to documentation for all skipped versions to familiarize yourself with their new features and do any special setup required by those versio...

Page 1230: ...calibration variables assignment Version 4 32 replaces move down calibration variables 38 39 48 and 49 with variables 217 through 224 If re installing a version older than 4 32 check variables 38 39...

Page 1231: ...starting at slot 1 up to the slot number entered When that slot is reached the cassette will be made inactive and the automatic cycle will start using the other cassette or if it is inactive end the c...

Page 1232: ...al is set to zero or any value The Interval value is ignored Therefore setting the interval to zero will disable pre conditioning and post conditioning choices but will not disable the once only choic...

Page 1233: ...already at the load stations the shuttle will first move away from the bridge path the bridge will move and the shuttle will then be moved to a position under the spindles unless using the unload to t...

Page 1234: ...on was probably not successfully downloaded to a DCX board during software startup or a DCX board may be defective For technicians If a homing error occurs register 125 DCX Homing ERR will display the...

Page 1235: ...point step Most recent right endpoint step The variables will contain the most recent endpointed step elapsed time data unless the 6DS SP s software is stopped such as power off on in which case they...

Page 1236: ...collection events for the end of parking either conditioning arm GEM Homing Status Indication Version 4 34 adds homing status as VID 167 Refer to the 6DS SP SECS GEM Interface Manual for further info...

Page 1237: ...dle starting with many conditions that previous produced only a regular idle This has been changed so that wet idle or regular idle occur as they did prior to version 4 32 Made correction for two tabl...

Page 1238: ...corrections to the handling of the No of Wafers feature when using a high throughput feature It was possible to load wafers after the last desired wafer and for single spindle wafer quantity counting...

Page 1239: ...mand The first 9 characters of the remote command will now be saved Corrected acceptance criteria for GEM remote command for Finish Cycle Previously this command would only be accepted during polishin...

Page 1240: ...cted will now occur regardless of the starting shuttle position For 4 34 1 Made correction for non HTP configurations where the automatic wet idle would not start after and auto cycle even though sele...

Page 1241: ...NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This...

Page 1242: ...control software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop compute...

Page 1243: ...cycle the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the scre...

Page 1244: ...adds an alarm action feature that completely changes how alarms affect machine operation If not already done follow instructions in those release notes to review your machine s current alarm configur...

Page 1245: ...and 177 were added in Ver 4 14 that must be set so that automatic cycle spindle flushing will operate correctly NOTE TO GEM USERS Version 4 29 1 included updated drivers to ensure Y2K compliance for t...

Page 1246: ...ince the actual force could be higher or lower Now the display will show the actual force The following table illustrates the difference assuming a 98 force scaling Item Previous values New values Rec...

Page 1247: ...dd wafer polishing All ring forces will be multiplied by this percent during the odd wafer polish Odd Wfr Cond1 In situ Adjust new feature Sets the primary table in situ conditioning force adjustment...

Page 1248: ...lish and ring forces as follows Force Desired recipe force Scaling Odd polish force adjustment Use the status display to confirm scaling and odd polish adjustments are performing properly Also force a...

Page 1249: ...e obsolete New left spindle variable New right spindle variable 50 Pressure control loop gain 229 L press control loop gain 230 R press control loop gain 57 Back membrane press cntrl gain 231 L back m...

Page 1250: ...first lot starts processing Another lot can be placed in the machine while the previous lot is processing The Host then queues a recipe name for that next lot That first lot finishes processing and ca...

Page 1251: ...ve cassette at axis 7 and a scrubber interface at axis 8 Also calibration variable 41 Lot Integrity 0 dsbl 1 enbl must be set to 1 for the yellow light operation to work properly Summary for calibrati...

Page 1252: ...nd 42 after polishing before the spindles are raised from the table Previously the secondary table pressure minimums variables 37 and 47 had been used Made correction to the F B automatic cycle when a...

Page 1253: ...ll software Installing new software from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the followin...

Page 1254: ...l spindle loop gain variables to the corresponding new variables This is necessary so that the machine will behave exactly as it did before upgrading software If this is not done spindles will not low...

Page 1255: ...trol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer o...

Page 1256: ...le the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1257: ...how alarms effect machine operation If not already done follow instructions in those release notes to review your machine s current alarm configuration and reconfigure appropriately IMPORTANT Version...

Page 1258: ...and 177 were added in Ver 4 14 that must be set so that automatic cycle spindle flushing will operate correctly NOTE TO GEM USERS Version 4 29 1 included updated drivers to ensure Y2K compliance for...

Page 1259: ...pndle down extra soft value 222 R spndle down extra soft value 49 Spindles down thruput value 223 L spndle down thruput value 224 R spndle down thruput value NOTE When first installing this software v...

Page 1260: ...ition switches are both on This condition would indicate a machine problem Also software interlocking is added so that effected sequences in the machine control software do not advance during this fau...

Page 1261: ...vailable to ensure that both load stations and unload stations if using the high throughput option experience equal mechanical forces whether the polishing cycle uses both carriers or is in an odd pol...

Page 1262: ...ot used Each elevator tank s fill valve will be on continuously when the cassette arm is down If the cassette arm is up the fill valve will be continuously off continuously on or cycling based on the...

Page 1263: ...command will be performed with completion signaled later by an event HCACK 4 At the end of the spindle flush the 6DS SP will leave wet idle and start GEM Driver Sensing Version 4 32 adds sensing to t...

Page 1264: ...imum pressure indefinitely Now the spindle will raise and the automatic cycle will then stall until the shuttle move sequence problem is resolved Corrected problem where the displayed wafer quantity w...

Page 1265: ...e spindles would continue rotating after completing the rinse sequence after wafer unloading The spindles will now stop rotating after the rinse sequence Corrected nuisance robot arms not at zero alar...

Page 1266: ...all software Installing new software from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the followi...

Page 1267: ...If this is not done spindles will not lower Copy the value found in variable 38 to variables 217 and 218 Copy the value found in variable 39 to variables 219 and 220 Copy the value found in variable...

Page 1268: ...ntrol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer...

Page 1269: ...cle the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1270: ...with version 4 31 If you have any version other than 4 30 or 4 30 1 4 30 2 or 4 30 3 you are not up to date on features and possible settings required by any version s that was never installed Refer t...

Page 1271: ...ant to always have sufficient spindle force compared to membrane force Spindle force is trying to push the carrier down to the table and membrane force has the opposite effect of trying to raise the c...

Page 1272: ...actual ring force will indirectly result from the difference between polishing force and total spindle force Also the left and right force scaling values in the Machine Parameters menu and various Ca...

Page 1273: ...ft Time 0 0 secs Load 0 0 amps Right Time 0 0 secs TABLES 1 2 Spd 0 0 rpm Polish Force 0 0 psi Load 0 amps Ring Force 0 0 psi Temp 0 degC Cond 0 psi SLURRY 1 2 Force Ramp 0 0 secs Flow 0 0 Ring Frc Ra...

Page 1274: ...Left Membrane Force 0 lbs Load 0 0 amps Right Membrane Force 0 lbs TABLES 1 2 Spd 0 0 rpm Table 1 Rinse On Off Load 0 amps Table 2 Rinse On Off Temp 0 degC Cond 0 psi Slurry 1 Flow 0 ml m SLURRY 1 2...

Page 1275: ...brane deadweight and initial membrane stretch 209 CarrX drop off spray secs Sets the time that the Carrier X drop off sprayers will be on during the wafer blowoff sequence These sprayers turn on and t...

Page 1276: ...utput 108 Right Carrier X wafer drop spray Input 79 Left Carrier X wafer sense Input 80 Right Carrier X wafer sense Existing I O with changed functions Standard or Viprr carriers Carrier X Output 110...

Page 1277: ...spindle force starts at the much higher pressure minimum there will likely be some ring pressure overshoot as the polish cycle begins This may actually help prevent wafer slipouts at the start of poli...

Page 1278: ...wafer 9 Wait 2 seconds for vacuum to build and membrane to grab wafer 10 Retract piston plate to pull wafer into retaining ring pocket 11 Raise spindle Wafer presence will be checked later Carrier X W...

Page 1279: ...solid backing Turn on wafer sensing will be used shortly 2 Wait 2 seconds to allow piston plate to extend 3 Set membrane pressure to full vacuum now that piston plate against membrane 4 Test for wafer...

Page 1280: ...ssure system Caution Changing membrane pressure from a positive value to atmosphere may leave the membrane somewhat extended for a period and can interfere with the robot end effector Changing from me...

Page 1281: ...Remember that the displayed forces are related to wafer polishing and are not the actual pressures within the carrier Calibrate down force with units set for lbs and left and right force scaling set...

Page 1282: ...l park after each ex situ conditioning cycle If set to 1 the arm will be left raised at the outer position moved there if necessary after conditioning If the auto cycle finishes the arm will then be p...

Page 1283: ...es to the load station Also an additional check to ensure wafers are on the spindles has been added before starting curtain rinsing to prevent starting conditioning if wafers were left on the table Lo...

Page 1284: ...ion Variable 212 Force F B curtain time secs Entering 0 into variable 211 disables the feature Any non zero value 0 250 rpm enables the feature and sets the forced curtain rinse spindle speed Variable...

Page 1285: ...Handler Removed Version 4 31 removes an software error handler related to the GEM implementation This error handler actually trapped any low level bios errors This error handler permitted software to...

Page 1286: ...dded additional software prevention of spindle lowering movements if polish door open Fixed a problem where if using Viprr carriers and a carrier was not detected at cycle start the resulting alarm wo...

Page 1287: ...OTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This s...

Page 1288: ...ntrol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer...

Page 1289: ...cle the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1290: ...n s that was never installed Refer to documentation for all skipped versions to familiarize yourself with their new features and to perform any special setup required by those versions ALSO if your ma...

Page 1291: ...e choice on the Setup menu must be set for AGV GEM Queue Also the 6DS SP must be in the GEM Control State Remote and the 6DS must have queued a recipe as the result of a Host initiated PP SELECT comma...

Page 1292: ...n the load stations waiting to be polished are not polished The Start with Load feature can then be used to start the next cycle For dual spindle polishing this will usually be two wafers Note The com...

Page 1293: ...hroughput Top positions were identical For the AGV configuration a correction was made so the system returns to wet idle after the last wafer of a lot is completed and no transfer request is subsequen...

Page 1294: ...l software Installing new software from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following...

Page 1295: ...bles if variable 52 is also enabled If not using this feature this should be set to 0 1 means wafer slip out detection will occur only for the primary table if variable 52 is also enabled 2 means wafe...

Page 1296: ...trol software but can be requested from Strasbaugh if needed The following procedure describes this manual loading procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer o...

Page 1297: ...le the power on the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen...

Page 1298: ...RS DOC 6DS SP Calibration Configuration Reference GEM_6DS DOC 6DS SP SECS GEM Interface Specification Version 1 10 To retrieve the files place the diskette in a desktop or laptop computer and copy the...

Page 1299: ...ONFIGURATION page 1 Frc 0 0 psi LEFT SPINDLE FORCE LOW ALARM Finish BkPr 0 0 psig LEFT SPINDLE FORCE HIGH ALARM St Fin Spd 0 0 rpm LEFT SPINDLE SPEED LOW ALARM Finish Load 0 0 amps LEFT SPINDLE SPEED...

Page 1300: ...lays only 0 Finish Sets a finish cycle 1 Stop Finish Will abort polishing sets a finish cycle 2 Halt Causes a cycle halt will abort polishing 3 Some alarms show dimmed in the alarm management menu and...

Page 1301: ...sh 3 halt Alarm 7 2 stop finish 3 halt Alarm 11 2 stop finish 3 halt Misloaded Wafer Test Alarm Action Previously this alarm automatically caused a halt This is the testing that compares the backpress...

Page 1302: ...g the finish cycle This variable now sets only the cycle start inhibiting If a finish cycle is still desired it must be setting using the alarm action feature If variable 59 had been 1 set the followi...

Page 1303: ...3 halt Primary Table High Temperature Alarm Action Previously this alarm automatically caused a halt Set the following to retain the same action Alarm 124 3 halt Bulk Slurry Halt Action Previously Cal...

Page 1304: ...r 48 106 SLURRY 2 SUPPLY LOW OR ABSENT Now each individual input has its own alarm number and message Input 29 105 SLURRY 1 SUPPLY LOW OR ABSENT alarm 1 Input 30 106 SLURRY 2 SUPPLY LOW OR ABSENT alar...

Page 1305: ...lthough its action will still be asserted If multiple action alarms exist the alarm with the most severe action will be displayed Note Multiple alarms are rare If an alarm action aborts polishing the...

Page 1306: ...off delay The Alarm Parameters menu now shows these delay entries in seconds as shown below 12 00 00 ALARM PARAMETERS Oper SPNDL left right Zero in LOW and HIGH LOW HIGH DELAY Frc 0 0 psi disables th...

Page 1307: ...pe OK to Delete ESC prompt is showing Previously this prompted a second press of the Delete Recipe choice OK to Delete is also in a different function key position than any of the cursor movement choi...

Page 1308: ...LVARS2 DAT file if one is not found on the disk This makes sure the SP EXE program never receives values that randomly existed on the disk Therefore it is important to use the install disks when loadi...

Page 1309: ...ed To disable the feature and permit leaving idle with any key or the start or halt button set variable 201 to 0 Note This feature will not affect non operator caused leaving of the idle such as a GEM...

Page 1310: ...ternal Alarm Support Version 4 29 1 adds support for a general purpose external alarm Any external system or sensor can use this alarm to show an alarm condition on the 6DS SP The alarm can also take...

Page 1311: ...point detection CE s 63 and 64 respectively Corrected a problem where the entry of certain Device ID s could cause the GEM software to stop running properly The AGV wafer 2 data will now be null for a...

Page 1312: ...u as they are on the Auto Polish menu In the Manual Control menu a bridge move choice to table 2 will no longer show with single table machines For zone backpressure if no zone choice was made outputs...

Page 1313: ...lling new software from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main men...

Page 1314: ...es the choice and will let any key or the start or halt button leave the idle Variable 202 Show last alarm text 0 n 1 y Set to 1 and when all alarms are clear the last alarm text except for door and h...

Page 1315: ...computer using the GEMINIT disk The following procedure describes this manual procedure Hook up the BOOTPC and GEMPC as shown The BOOTPC can be a laptop computer or can be the machine s control PC MA...

Page 1316: ...the GEM PC Once the GEM PC reboots press the Ctrl Break key combination to exit any executing program 8 Press Enter A DOS prompt originating from the GEMPC should appear on the screen 9 Type S UPGRADE...

Page 1317: ...figuration Reference GEM_6DS DOC 6DS SP SECS GEM Interface Specification Version 1 8 To retrieve the files place the diskette in a desktop or laptop computer and copy the file 428_DOC EXE to the hard...

Page 1318: ...ioning alarms will not cause false alarms Existing recipes will contain 0 for these recipe elements NOTE The alarm will also be disabled for a very small entered value that displays as zero For exampl...

Page 1319: ...larm limit is set to a fixed difference from whatever is desired in the polish recipe regardless of units used psia or psig Backpressure alarms are monitored along with the other polish alarms along a...

Page 1320: ...hoices of none time only and time and backpressure Curtain Rinse Spindle Speed Choices Version 4 28 permits five spindle speed choices during curtain rinse instead of the original fixed 10 rpm This ch...

Page 1321: ...number na if left spindle not used Right wafer cassette number and slot number na if right spindle not used New function key choices Show Alarms and Show Aborts permit viewing either the alarm log or...

Page 1322: ...in wet idle some water will spray on the end effector This spray can help prevent drying of any residual slurry on the end effector This move will not be made if a wafer is on the end effector Instea...

Page 1323: ...l return to the lifetime counters with the normal blue background The red GEM Host Message Waiting which also uses this area has highest priority and if needed will show until cleared Alt A is ignored...

Page 1324: ...o cycle AGV Sender where recipes are selected by the AGV sender data interface The previously separate Setup menu Wafer Source and Recipe Source choices have been combined to permit only valid combina...

Page 1325: ...he cooling water flow rate is now shown in the COOLING WATER title area The new item 5 Primary Cond is added as the fifth resettable life data It shows time only and therefore has no displayed number...

Page 1326: ...situ conditioning sweep time Recipe Store and Delete keys will now be properly dimmed in an auto cycle when in the supervisor or factory test maintenance password levels Slurry priming the F5 choice...

Page 1327: ...ction Events PPID Queued Queued PPID Cleared Remote Next Step Command Conditioner 1 Start Conditioner 1 Stop Conditioner 2 Start Conditioner 2 Stop Added VID s Wafer 1 Slot ID Wafer 1 Cassette ID Wafe...

Page 1328: ...from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press...

Page 1329: ...e robot arm over an optional spray rinse 0 disables the choice Variable 56 Wet unused TBL 2 0 no 1 yes 1 enables the feature and will cause the second table to be wet idled during polishing if it is n...

Page 1330: ...OC EXE to the hard disk Then type 427_DOC ENT to extract the files from the archived file Printed copies of these documents are available upon request NOTE Unless otherwise noted this document describ...

Page 1331: ...TBL1 2 std TBL1 std 1std 2dis 2std 1dis 1 2 zone TBL1 zone 1zone 2dis 2zone 1dis 1zone 2std 2zone 1std Backpressure can be disabled dis standard std or zone The first four choices shown have the same...

Page 1332: ...solates BP2 BP2 vented isolates BP2 BP2 vented isolates BP2 BP2 vented isolates BP2 NOTE Carrier configuration and backpressure choices must match For a two zone configured carrier a zone backpressure...

Page 1333: ...menu selection alone caused the start it was actually the existance of three conditions Also version 4 27 adds Calibration variable 101 AGV max xfer req wait secs instead of the original fixed value s...

Page 1334: ...unloading the spindle flush is now used for blowoff and is allowed to continue while the spindles are raised This continuous blowing off while the spindles are raising helps make sure the wafers don...

Page 1335: ...Software Ver 4 27 Page 6 Version 4 27 adds collection events for the following AGV automatic cycle start Wafers placed on load stations Wafers unloaded from spindles Start of wet idle End of wet idle...

Page 1336: ...rom floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press t...

Page 1337: ...already contain some value because it was previously used in older software versions Variable 101 AGV max xfer req wait secs Set to the desired AGV sender transfer request wait time Set to 0 if not u...

Page 1338: ...etrieve the files place the diskette in a desktop or laptop computer and copy the file 4261_DOC EXE to the hard disk Then type 4261_DOC ENT to extract the files from the archived file Printed copies o...

Page 1339: ...n also come from the send cassette inside the 6DS SP and or be delivered to the receive cassette inside the 6DS SP Also if the scrubber fails polished wafers will be automatically sent to the receive...

Page 1340: ...rface station For a high throughput option configuration they are used to adjust for the throughput stations Machine Setup Menu Changes The Machine Setup menu will show the following choices for the A...

Page 1341: ...lear and the transfer cycle will continue AGV RECIPE NOT FOUND abort clears This alarm means an AGV requested recipe was not found among the recipes stored in the 6DS SP Recipe names must be in the ra...

Page 1342: ...ears the flag If the Machine Parameters menu Recipe Source is set to AGV intrfc the 6DS SP attempts to load the AGV requested recipe If single spindle polishing the 6DS SP will load a recipe for each...

Page 1343: ...esent flag is set If the wafer set signal is not seen in 30 seconds a 6DS SP alarm shows Note The 6DS SP will wait 240 seconds for a transfer request If there is no transfer request the 6DS SP will wa...

Page 1344: ...ting for a wafer from the AGV interface Description of AGV Polish Cassette Mode This is similar to the AGV Polish Scrubber mode except the destination of wafers is the receive cassette instead of the...

Page 1345: ...bber Mode This mode operates the same as the existing 6DS SP software The Inline signal to the AGV interface will be off If the wafers in the cassette were originally received from the AGV and cassett...

Page 1346: ...hen this is done wafer slot integrity will be lost Finally the operator should not start the 6DS SP with a wafer on the AGV station The 6DS SP cannot physically detect the wafer s presence Known AGV r...

Page 1347: ...dd wafer polishing and must be automatically disabled Correction to Actions after F B HTP Odd Wafer Abort Version 4 26 corrects a situation where the right spindle did not have proper polish force aft...

Page 1348: ...to the recipe step value Therefore the error band gradually increased from zero to some maximum value For a long ramping time the error band could still be quite small after the 15 second alarm holdo...

Page 1349: ...on t have cassettes at these stations or use a cassette as a send instead of a receive they are now referred to as shown in the figure below The servo axis numbers used in many Diagnostic menu labels...

Page 1350: ...ing new software from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu...

Page 1351: ...o 0 if not using scrubber data transfer no scrubber or Ontrak scrubber Set to 1 if using a 3 byte data transfer DNS scrubber or a Yuasa scrubber used without AGV Set to 2 if using a 4 byte data transf...

Page 1352: ...in a desktop or laptop computer and copy the file 424_DOC EXE to the hard disk Then type 424_DOC ENT to extract the files from the archived file Printed copies of these documents are available upon re...

Page 1353: ...he selected slurry system s will be opened and both lines will be primed Bulk Slurry Halt Feature Version 4 24 adds a feature that permits using two alarm signals for each bulk slurry system Calibrati...

Page 1354: ...N O or N C See cal var 29 Bulk only using halt feature See cal var 92 Bulk alarm with optional action See cal var 59 N O or N C See cal var 58 Bulk alarm halt See cal var 92 N O Bulk alarm with optio...

Page 1355: ...ng polishing to service high throughput or Nova needs Light Tower Configuration 5 Change Version 4 24 changes the operation for light tower configuration 5 set by calibration variable 98 The flashing...

Page 1356: ...ight now means a cassette is ready to be removed Previously it meant a receive cassette is ready to be removed This light will now be on if either a send cassette or receive cassette is ready to be re...

Page 1357: ...a little more stabilization time the extra time prevents false alarms Calibration Configuration Variable Label Changes All previous cassette location labels such as left send have been changed to the...

Page 1358: ...S GEM Interface Specification Version 1 4 Event reporting has been modified so that a Lot Start event is always reported before a simultaneous Batch Start event Defined VID 67 to track the number of w...

Page 1359: ...ware 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This should cause the DOS prompt C QB45 to show 2 In...

Page 1360: ...obot move Variable 92 Bulk slurry halt 0 no 1 yes If set to 1 alarm signals connected to inputs 47 Slry 1 Alarm 2 and or 48 Slry 2 alarm 2 will cause a cycle halt Also such an alarm will prevent a cyc...

Page 1361: ...ed process control monitor New light tower configuration Supervisor password Automatic set to operator password F B throughput early curtain rinse Misc F B throughput improvements Misc light tower imp...

Page 1362: ...to perform any special setup required by those versions ALSO if your machine s version is 4 10 through 4 17 you MUST first install 4 18 If your machine s version is prior to 4 10 you MUST first insta...

Page 1363: ...ackpressure line and one vacuum blowoff line in spindle Must be used for vacuum chucked carriers Can be used for mechanically latched carriers with fixed retaining rings Cannot be used with ViPRR ViPR...

Page 1364: ...ne terephthalate plastic PET rings Variable 199 Retaining ring coefficient This is an empirical value determined at Strasbaugh that converts the pressure in the ViPRR pneumatic system to the actual fo...

Page 1365: ...force The Frc display in the status area indicates wafer polish force The maximum force specification of the machine 500 lbs applies to total spindle force The amount of that force that will actually...

Page 1366: ...shown before loading or unloading carriers Latched carrier loading or unloading is a three step procedure because the operator must latch or unlatch the carriers midway through the sequence The follow...

Page 1367: ...means unlimited cycles This supports backward compatibility with existing recipes As before conditioning will be terminated when the polish cycle finishes A non zero entry will set the number of in s...

Page 1368: ...m After the wafer is pushed out of the 6DS SP these arms open to release the wafer onto the scrubber s handling system Calibration variables that define the wafer handling configuration must be set as...

Page 1369: ...ged by the external controller Automated Process Control The controller sends messages to change polish time or backpressure for the selected primary table polish parameter step This control may be fu...

Page 1370: ...ds attention Note that a lot end event will not occur if wafers are placed into the receive cassette due to a failed scrubber In that case the lot only ends if the wafers are subsequently passed to th...

Page 1371: ...password and it can be changed using the Change Supvr choice only at the Supvr level The supervisor password cannot be viewed To enable the supervisor password feature for the first time you must per...

Page 1372: ...led in the Machine Parameters menu to use this feature If the robot is busy fifteen seconds after polishing ends a curtain rinse cycle will begin to make sure the wafers stay wet If the robot remains...

Page 1373: ...receive cassette ready to be removed operation The document 6DS SP Calibration Configuration Reference has been changed to more accurately describe this operation Send Cassette Retry Disable Feature P...

Page 1374: ...T Q press the ALT and Q keys together This should cause the DOS prompt C QB45 to show 2 Insert the INSTALL DISK 1 into the machine s disk drive 3 Type A INSTALL 423 and press ENTER Files will automati...

Page 1375: ...f not equipped for ViPRR carriers Variable 197 Retaining ring area Sq In If using ViPRR carriers enter the retaining ring area as discussed above in this document Variable 198 Retain ring dead weight...

Page 1376: ...set error time Improved No of Wafers handling Wafer lift off vacuum alarm Transfer cycle disable of All Wafers and No of Wafers choices Support for slurry flow sensing option Assorted GEM changes Ver...

Page 1377: ...ism will remain out of the way in its front position nearest the operator door and will not be used during auto cycling However the mechanism will be used for loading and unloading carriers Also the f...

Page 1378: ...force will be the spindle lowering force plus the weight of the carrier until the spindles raise This would nominally be 10 lbs of lowering force plus approximately 25 lbs for the carrier or 35 lbs t...

Page 1379: ...ling of the start with unload feature if throughput enabled To use this feature wafers must be on both the load and unload stations or one wafer on each station if a using single spindle If wafers are...

Page 1380: ...of Wafers Handling Version 4 22 has an improvement to wafer handling when polishing with both spindles but the No of Wafers choice is set to an odd number Previously only even numbers were supported...

Page 1381: ...ble 195 Slry flow sensing 0 no 1 yes enables or disables the feature If set to 0 the option is disabled This variable must be set to 0 if the option is not installed It can also be set to 0 if the opt...

Page 1382: ...New Variables New status variables have been added Pad Time Pad Count Carrier Time Carrier Count Lot ID s Maximum Wafer Quantity etc New Remote Commands New remote commands have been defined for setti...

Page 1383: ...SET WFRQTY L L 2 A WFRQTY U2 WaferQuantity 8 0 Variables Re defined VID s 76 140 9 0 Collection Events Re defined CE s 24 and 25 as Lot 2 Start and Lot 2 End respectively the previous definitions of C...

Page 1384: ...are 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This should cause the DOS prompt C QB45 to show 2 Ins...

Page 1385: ...ue suitable for carrier loading Otherwise don t change the value in this variable 195 Slry flow detect pres 0 n 1 y Set to 1 to enable the slurry flow detection option Set to 0 to disable the option o...

Page 1386: ...sible settings required by any version s that was never installed Refer to documentation for all skipped versions to familiarize yourself with their new features and to perform any special setup requi...

Page 1387: ...o the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys...

Page 1388: ...STRASBAUGH INC February 11 1997 6DS SP Software Ver 4 21 2 Page 3 computer disk drive Always keep floppy disks in a cool dry place...

Page 1389: ...Variable Watch Screen for technicians NOTE Unless otherwise noted this document describes only those features added or changed with version 4 20 If you have any version other than 4 19 installed you...

Page 1390: ...s cleaning stations with Cleaning Conditioning Parameter menu choices for post polish wafer and carrier cleaning These are the same cleaning choices that are available for two table machines Send Cass...

Page 1391: ...ely rotate If the choice is disable the table will be stopped and the table rinse turned off during curtain rinsing Existing recipes do not have to be changed because the original enable choice will n...

Page 1392: ...no 1 yes enables the feature If set to 0 a leak will cause an alarm only If set to 1 any leak will both cause an alarm and automatically cause all slurry shutoff valves to close all slurry pumps to s...

Page 1393: ...eak is detected primary table drain pan drip pans or optional external leak input a screen idle or wet idle will be aborted If set to 0 leak detection inputs are ignored during idling This will also d...

Page 1394: ...afers have been polished and delivered to its receive port cassette or scrubber At that time the subsequent send cassette will become active and move into position Also if a scrubber is being used and...

Page 1395: ...r position the wafer will block carrier pad rinse flow during the post polish rinse sequence Its Machine Parameters choice can be set to zero seconds The following chart compares mechanical and Hydro...

Page 1396: ...es that the only effect on the spindle when first lowered will be due to the move down force This prevents a spindle up down oscillation that could otherwise occur if the pressure minimum calibration...

Page 1397: ...hoices and screen Until this is done the watch points will continue to show whenever the Diagnostics menu is selected The selected watch points are saved even if the machine is powered off Therefore a...

Page 1398: ...1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This should cause the DOS prompt C QB45 to show 2 Insert...

Page 1399: ...Set to 1 if the wafer slip out sensor option is installed and you want to use the feature Set to 0 if the option is not installed or is installed but you do not want to use it 53 Action if leak 0 no...

Page 1400: ...Abort idle if leak 0 no 1 yes Set to 1 to abort a screen idle or wet idle if a leak event occurs Set to 0 if the feature is not used NOTE When done saving or installing software remove the floppy disk...

Page 1401: ...date on features and possible settings required by any version s that was never installed Refer to documentation for all skipped versions to familiarize yourself with their new features and to perform...

Page 1402: ...install software Installing new software from floppy disks to the machine NOTE One diskette is used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the follo...

Page 1403: ...ess otherwise noted this document describes only those features added or changed with version 4 18 If you have any version other than 4 17 installed you are not up to date on features and possible set...

Page 1404: ...ree turn into the scrubber Unlike the L configuration the inline configuration uses a vacuum end effector to hold the wafer while transporting it from the 6DS SP to the scrubber The end effector also...

Page 1405: ...hould be showing as the units flashing at the bottom of the display If not use the down arrow to select units until PSI is showing 3 Pres SET enough times until the P1 mode is selected P shows in the...

Page 1406: ...optional secondary table conditioner is installed The following menus have support for the secondary table conditioner Auto Polish Cycle menu The Park Arm1 2 choice will cause both arms to park simult...

Page 1407: ...lue in counts that will place the arm at the park position 122 Cond2 offset This is the value in counts that is set to cause the arm to be at 7 inches from the table center when commanded to be at 7 i...

Page 1408: ...le Signal Descriptions Endpt Pol Start is turned on when polishing starts for the first table with any non zero step times It is turned off when polishing ends on the last table with any non zero step...

Page 1409: ...pplies to two table machine with steps for only one table Two table machine with several timed steps on each table Timed steps Endpt Pol Start Endpt Pol Abort Endpt Pol Step Zeroed steps Moving to Tab...

Page 1410: ...set to minimum dropped and backpressure to full vacuum if backpressure is enabled for the table for each endpoint event for each spindle This will occur even if both spindles are endpointed simultane...

Page 1411: ...le 1 2 T1 2 Enabled during polish for both tables TBL1 only TBL1 Enabled only during primary table polish TBL2 only TBL2 Enabled only during secondary table polish Existing recipes are not effected Ho...

Page 1412: ...wafer off the carrier during the time of the reduced polish force If backpressure is disabled for the table then the backpressure will remain disabled Example Force Cycling is enabled Force cycling S...

Page 1413: ...gged In the Alarm Log menu the lifetime wafer count will show following the date and time Post Loading Wafer Presence Test If 15 seconds has passed after wafers are loaded onto the spindles and the wa...

Page 1414: ...oller cards after INIT1 DAN and INIT2 DAN are downloaded Software Support for Yaskawa Servo Controllers for technicians Yaskawa servo controllers are used for the lever arm power conditioning device r...

Page 1415: ...t you are using 2 After the program starts press the F2 key 3 Click on the PC Disk function or use TAB ENTER keys Highlight the file containing the parameters to be downloaded to the controller and th...

Page 1416: ...oftware Installation Introduction Software is installed by copying files from a floppy disk onto the machine s internal computer This computer is located behind the left front access door Important Co...

Page 1417: ...DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This should cause the DOS prompt C QB45 to show 2 Insert the INSTA...

Page 1418: ...d Refer to documentation for all skipped versions to familiarize yourself with their new features and to perform any special setup required by those versions ALSO YOU MUST FIRST INSTALL 4 10 if your m...

Page 1419: ...files from a floppy disk onto the machine s internal computer This computer is located behind the left front access door Important Copying new software onto the machine will delete whatever software w...

Page 1420: ...alarm contacts Set to 1 if using slurry 3 with normally closed alarm contacts 95 Show slurry 3 0 no 1 yes Set to 1 if either the third slurry system or Pump 3 option is installed 98 Light tower config...

Page 1421: ...ble to 0 Refer to the Support for Lever Type Conditioning Arm with Powered Rotation Device section of this document for more information 129 Prog cond counts per inch This must be properly set for the...

Page 1422: ...ng device downforce added when arm at park position Lever type conditioning arm changes Time delay increased for wafer not found on robot alarm Cycle start alarm test for high recipe polish force Scru...

Page 1423: ...2 software release document Also new calibration variables 176 and 177 were added in Ver 4 14 that must be set so that automatic cycle spindle flushing will operate correctly NOTE New calibration vari...

Page 1424: ...only the minus sign If rotation direction is changed while maintaining full polish force friction may dramatically increase when rotation slows resulting in broken wafers It is best to reduce polish f...

Page 1425: ...hing Also polishing will end and the machine will automatically halt These errors are Spindles Servo motor error or Amplifier fault Primary polish table Servo motor error or Amplifier fault Secondary...

Page 1426: ...starts when the previous polished wafers are being unloaded If a finish cycle is requested a conditioning cycle will still occur when the wafers are unloaded When a new auto cycle is started a pre co...

Page 1427: ...before polishing onto single table machine clean stations from the Manual Control menu for carrier unloading for wet idle Variable 39 Spindles down hard value onto single table load stations for carri...

Page 1428: ...out on the robot if the operator does not respond Additional Wafer Handling Tests Two tests during the Auto cycle have been added to improve wafer handling reliability The load chucks are now raised d...

Page 1429: ...the force is too small the spindles may not fully lower and carriers may drop a small distance to the second table Calibration Variable 161 is applicable only to two table machines and is ignored if...

Page 1430: ...ain errors could occur if the value was non zero The park sequence for the lever type conditioning arm was changed to prevent the arm from temporarily lowering under certain conditions when moving to...

Page 1431: ...choice will show This specifies which of the recipes stored in the scrubber should be used by the scrubber Machine Parameters menu page 1 Scrubber Recipe No 0 99 0 Computer Setup for technicians If t...

Page 1432: ...e scrubber position An existing installation should have the value discovered in variable 130 entered into variable 134 Endpoint Carrier Presence Detection for Cable Protection Calibration Variable 19...

Page 1433: ...e scrubber becomes ready first wafer clears the scrubber s first cleaning station before the busy timeout the second wafer is transferred to the scrubber Then the auto cycle continues to handle the ne...

Page 1434: ...sed for polishing Table 1 post polish cleaning but no table 1 polish Table 1 post polish cleaning sequence will not occur Table 2 post polish cleaning but no table 2 polish Table 2 post polish cleanin...

Page 1435: ...by the 6DS SP The major wafer handling components in the Nova system are the wafer support arms and a wafer chuck The wafer chuck is at the end of a shaft which can move vertically and has top bottom...

Page 1436: ...following menu choices will show if Calibration Variable 181 Nova Present 0 no 1 yes is set to 1 Machine Parameters Menu page 1 Auto Cycle Operation NovaXfer new choice Machine Setup menu Use Nova Ena...

Page 1437: ...fers have been polished and placed in the 6DS SP receive cassette the 6DS SP will return to idle The operator removes cassettes from the 6DS SP Wafer handling when using Nova When using the Nova syste...

Page 1438: ...uffer Next wafers loaded and started polishing Left moved from Nova to Receive when done Right moved from buffer to Receive Nova Buffer now clear for next wafers Measure right wafer only Left unloaded...

Page 1439: ...ion learned and then removed from the Nova station and placed in the receive cassette Loading from a send cassette 1 In the 6DS SP s Machine Parameters menu set for Left Spindle Only 2 In the 6DDS SP...

Page 1440: ...tte Suggestion for setup and operation 1 Create a recipe named NOVAXFER that has Auto Cycle Operation set to NovaXfer in page 1 of the Machine Parameters menu 2 Set other recipe elements in the recipe...

Page 1441: ...r support arms Clearing a wafer from the buffer cassette Open the elevator access door and raise the buffer cassette arm This will tell the 6DS SP that you plan to remove the wafer and the 6DS SP will...

Page 1442: ...contact the wafer when the wafer is fully resting in the Nova wafer support arms Calibration Variable 188 Robot Up Dn Above Nova Pos n This position must permit a wafer on the robot end effector to c...

Page 1443: ...up dn bottom Calibration Variable 163 Thruput Present 0 no 1 yes Setup If the throughput option is installed in the 6DS SP Calibration Variable 163 Thruput Present 0 no 1 yes must be set to 1 If the...

Page 1444: ...ns during polishing Next wafers to be polished loaded to load stations during polishing For two table machines At the beginning of the first cycle First wafers loaded to load stations First wafers sta...

Page 1445: ...han the typical Z axis home position In this case the Z axis home switch must be moved to a higher location This movement will require the recalibration of all Z axis calibration positions NOTE The di...

Page 1446: ...ALL 4163 and press ENTER Files will automatically be copied from the disk to the machine Remove the diskette when done 4 Set the following calibration variables 17 TBL1 Hi temp halt 1 yes 0 no Set to...

Page 1447: ...to the following error setup These changes help prevent nuisance rotating axis errors for the spindles and primary table NOTE Do not change the setting for the secondary table shown as axis 5 at 30000...

Page 1448: ...you are not up to date on changes and features from a previous version s Refer to documentation for any versions that were skipped to familiarize yourself with their new features NOTE New calibration...

Page 1449: ...r a bulk slurry source or tank source for each of the machine s two slurry delivery systems A choice causes selector valves to turn on or off and also determines which slurry source alarm inputs will...

Page 1450: ...bles For manual control such as for slurry pump calibration slurry will be routed as selected in page 3 of the Manual Control menu The following operational combinations are illegal and should be avoi...

Page 1451: ...te arm has been raised and the last wafer handled has been delivered to the scrubber operation was aborted and the send cassette arm is raised searching for wafers in a cassette and the cassette arm i...

Page 1452: ...maint or alarm Yellow Cycle halted A port empty All ports filled cassette not physically present or cassette ready to be removed Green Processing Idle never In a cycle running or halted Blue SECS on l...

Page 1453: ...1 Set the condition force units in the Conditioning Cleaning menu lbs if not already set that way 2 Record the value in variable 71 Cond force dead weight lbs and then set it to 0 3 Make sure there i...

Page 1454: ...r earlier two nuisance errors were occasionally seen on some machines These harmless errors were displayed and logged even though the machine was working normally Both nuisance errors are related to t...

Page 1455: ...now show C QB45 5 Insert a diskette into the drive in the computer located behind the left hand polish section service door 6 Type SBACKUP Enter The following files will automatically be copied to th...

Page 1456: ...sk 7 Remove the diskette with the backed up files 8 Turn the machine off and replace the left hand polish door 9 Turn the machine on to restart the software New Hot Key for Technicians In the Diagnost...

Page 1457: ...The first line on the Machine Setup menu will now clearly indicate whether or not the SECS software option is installed Also if the option is installed the version of the SECS software will show Examp...

Page 1458: ...re from floppy disks to the machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q pre...

Page 1459: ...Set to 1 only if the option is installed Otherwise set to 0 Variable 98 Light tower config 0 1 Set to 0 if a three light tower or no light tower is installed Set to 1 if a four light tower is install...

Page 1460: ...than 4 13 installed you are not up to date on changes and features from a previous version s Refer to documentation for any versions that were skipped to familiarize yourself with their new features N...

Page 1461: ...were 1 second for water and 12 seconds for air To make the machine perform as it did originally use these values Spindle flushing can be tested in the Diagnostics menu by forcing on flag 232 for the...

Page 1462: ...ll move polished wafers to the load stations the fountain rinses will turn on and the carriers will rotate This will continue for the period entered in Wafer Cleaning Time When finished the wafers wil...

Page 1463: ...machine NOTE Two diskettes are used to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys togeth...

Page 1464: ...the settings of the following choices in the Conditioning Cleaning menu page 2 for every stored recipe and set as desired They will probably indicate disable and 0 secs Do this by retrieving each reci...

Page 1465: ...olish time is changed on the fly for the current polish step 4 The polish time is changed from a time longer than the other spindle to a time shorter than the other spindle NOTE This document assumes...

Page 1466: ...to install the software 1 If the DOS prompt C QB45 is not already showing on the screen do the following In the main menu type ALT Q press the ALT and Q keys together This should cause the DOS prompt...

Page 1467: ...Introduction SSEMBLY RAWINGS...

Page 1468: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix B Engineering Drawings bound under separate cover Customer Parts Lists...

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Page 1470: ...Introduction ARTS IST...

Page 1471: ...Introduction LECTRICAL NPUT UTPUT...

Page 1472: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix C Electrical Input Output System Address List Refer to Engineering Drawing 217946EM...

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Page 1474: ...Introduction PTIONS...

Page 1475: ...ote Not all of these options may be present on all machines Please check with your Field Service Engineer if you have a question about machine configuration ViPRR Carrier High Throughput Side to Side...

Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...

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Page 1478: ...Introduction AINTENANCE OG HEETS...

Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...

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Page 1486: ...Version 4 0 February 1998 Model 6DS SP Planarizer Maintenance Manual VOLUME 3 STRASBAUGH 825 Buckley Road San Luis Obispo California 93401 Phone 805 541 6424 Fax 805 541 6425...

Page 1487: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared in cooperation with Larrie Ciano Tech Write 2405 Leona Avenue San Luis Obispo California 93401 Phone Fax 805 543 9089...

Page 1488: ...ns 6 At the Keyboard 6 At the Control Panel 7 Step By Step Instructions 7 ABOUT THE MODEL 6DS SP PLANARIZER 8 A Basic Machine with Optional Features 8 Mechanical Components 9 Electrical Distribution a...

Page 1489: ...ical 13 Compressed Air 14 Vacuum and D I Water 14 Vacuum System 14 Vacuum Separator 15 Exhaust 15 Temperature Controlled Water 15 Temperature Control Unit 15 Drains 16 Step 7 Slurry System Connection...

Page 1490: ...Sequence 5 D Wafer Unloading Sequence 6 E Cassette Removal 7 F Cycle Halt 7 Bridge Drive Assembly 8 Elevator Assembly 9 Robot Assembly 11 Left Right Load Unload Stations 12 Left Right Carrier Wafer C...

Page 1491: ...apter 7 Plumbing Description 7 1 Compressed Air System 3 Vacuum System 4 Water System 5 Exhaust System 5 Slurry System 6 Chemical System 8 Drain System 8 Chapter 8 Preventive Maintenance Schedules 8 1...

Page 1492: ...ent Series 56 ELEVATORS AND ROBOT ORDER OF ADJUSTMENT 61 ELEVATORS AND ROBOT 62 Elevator Cassette Platform Leveling 62 1 in Elevators and Robot Adjustment Series 62 Elevator Cassette Arm Sensor Switch...

Page 1493: ...eviously Measured Position 178 Restoration of Electrical Power for the Second Table 180 Performance of Related Software Calibration Procedures 181 Chapter 10 Software Calibration Procedures 10 1 OVERV...

Page 1494: ...ration 6 in Elevators and Robot Adjustment Series 83 Robot Up Down Z Axis Load Positions Calibration 7 in Elevators and Robot Adjustment Series 104 Robot Vacuum Switch Wafer Sensing Calibration 8 in E...

Page 1495: ...Arm Adjustment Series 16 Load Stations 19 Load Chuck Raise Pressure 19 Left Load Chuck Raise Pressure 19 Right Load Chuck Raise Pressure 22 Shuttle 23 Shuttle Flow Control Adjustments 23 Slurry Syste...

Page 1496: ...ers Left on Table Part B 22 Wafers Break During Polish Cycle Part A 22 Wafers Break During Polish Cycle Part B 24 Carriers Drop Off Spindles 25 Robot Drops Wafers Part A 26 Robot Drops Wafers Part B 2...

Page 1497: ...SPINDLE VACUUM SWITCH OFF 52 40 SEND CASSETTE S NOT ACTIVE 53 42 ROBOT TOP BOTTOM NOT AT ZERO 54 42 LEFT SPINDLE NOT UP 55 43 RIGHT SPINDLE NOT UP 56 43 AXIS 1 SERVO AMPLIFIER FAULT 57 Left Spindle 44...

Page 1498: ...DLE VACUUM NOT FOUND 156 59 RIGHT SPINDLE VACUUM NOT FOUND 157 59 CONDITION ARM NOT ARRIVING UP 158 60 CONDITION ARM NOT ARRIVING DOWN 159 60 LEFT SPINDLE NOT ARRIVING UP 160 61 LEFT SPINDLE NOT ARRIV...

Page 1499: ...NOT ARRIVING AT ABOVE LOAD 187 64 ROBOT UP DN NOT ARRIVING AT LEFT LOAD 188 64 ROBOT UP DN NOT ARRIVING AT RIGHT LOAD 189 64 BRIDGE NOT ARRIVING AT LEFT CURTAIN 190 65 BRIDGE NOT ARRIVING AT RIGHT CU...

Page 1500: ...Drawings bound under separate cover Customer Parts Lists Appendix C Electrical Input Output System Address List Refer to engineering drawing 217946EM Appendix D Options Appendix E Maintenance Log Shee...

Page 1501: ...Operations v Ch 3 Operator Functions Auto Polish Parameters Menu Operations v Ch 4 Machine Setup Calibration Configuration Menu Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variab...

Page 1502: ...ii Menu Where to Find Details Manual Location s Polish Parameters Recipe Management Menu Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Slurry System Flush Menu Operations v Ch 4 Machine Se...

Page 1503: ...Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variables Presettable Wafer Polish Count Auto Polish Menu Auto Polish Parameters Menu Operations v Ch 3 Operator Functions v Ch 4 Mac...

Page 1504: ...topic Menu Selection On the Fly Changes Auto Polish Menu Process Parameters Menus Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Auto Cycle Features Auto Polish Menu Operations v Ch 3 Opera...

Page 1505: ...Variables Pre or Post Pad Conditioning Conditioning Cleaning Parameters Menu Operations v Ch 4 Machine Setup Scrubber Support Machine Setup Menu Calibration Configuration Menu Manual Control Menu Oper...

Page 1506: ...gure 9 9 Orientation of Inner Gimbal Ring 19 Figure 9 10 Orientation of Inner Outer Gimbal Ring Unit Relative to the Wafer Manifold Plate 24 Figure 9 11 Orientation of Gimbal Ring Manifold Plate Unit...

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Page 1508: ...Introduction APPENDICES...

Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...

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Page 1511: ......

Page 1512: ...Version 4 0 February 1998 Model 6DS SP Planarizer Maintenance Manual VOLUME 4 STRASBAUGH 825 Buckley Road San Luis Obispo California 93401 Phone 805 541 6424 Fax 805 541 6425...

Page 1513: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared in cooperation with Larrie Ciano Tech Write 2405 Leona Avenue San Luis Obispo California 93401 Phone Fax 805 543 9089...

Page 1514: ...ns 6 At the Keyboard 6 At the Control Panel 7 Step By Step Instructions 7 ABOUT THE MODEL 6DS SP PLANARIZER 8 A Basic Machine with Optional Features 8 Mechanical Components 9 Electrical Distribution a...

Page 1515: ...ical 13 Compressed Air 14 Vacuum and D I Water 14 Vacuum System 14 Vacuum Separator 15 Exhaust 15 Temperature Controlled Water 15 Temperature Control Unit 15 Drains 16 Step 7 Slurry System Connection...

Page 1516: ...Sequence 5 D Wafer Unloading Sequence 6 E Cassette Removal 7 F Cycle Halt 7 Bridge Drive Assembly 8 Elevator Assembly 9 Robot Assembly 11 Left Right Load Unload Stations 12 Left Right Carrier Wafer C...

Page 1517: ...apter 7 Plumbing Description 7 1 Compressed Air System 3 Vacuum System 4 Water System 5 Exhaust System 5 Slurry System 6 Chemical System 8 Drain System 8 Chapter 8 Preventive Maintenance Schedules 8 1...

Page 1518: ...ent Series 56 ELEVATORS AND ROBOT ORDER OF ADJUSTMENT 61 ELEVATORS AND ROBOT 62 Elevator Cassette Platform Leveling 62 1 in Elevators and Robot Adjustment Series 62 Elevator Cassette Arm Sensor Switch...

Page 1519: ...eviously Measured Position 178 Restoration of Electrical Power for the Second Table 180 Performance of Related Software Calibration Procedures 181 Chapter 10 Software Calibration Procedures 10 1 OVERV...

Page 1520: ...ration 6 in Elevators and Robot Adjustment Series 83 Robot Up Down Z Axis Load Positions Calibration 7 in Elevators and Robot Adjustment Series 104 Robot Vacuum Switch Wafer Sensing Calibration 8 in E...

Page 1521: ...Arm Adjustment Series 16 Load Stations 19 Load Chuck Raise Pressure 19 Left Load Chuck Raise Pressure 19 Right Load Chuck Raise Pressure 22 Shuttle 23 Shuttle Flow Control Adjustments 23 Slurry Syste...

Page 1522: ...ers Left on Table Part B 22 Wafers Break During Polish Cycle Part A 22 Wafers Break During Polish Cycle Part B 24 Carriers Drop Off Spindles 25 Robot Drops Wafers Part A 26 Robot Drops Wafers Part B 2...

Page 1523: ...SPINDLE VACUUM SWITCH OFF 52 40 SEND CASSETTE S NOT ACTIVE 53 42 ROBOT TOP BOTTOM NOT AT ZERO 54 42 LEFT SPINDLE NOT UP 55 43 RIGHT SPINDLE NOT UP 56 43 AXIS 1 SERVO AMPLIFIER FAULT 57 Left Spindle 44...

Page 1524: ...DLE VACUUM NOT FOUND 156 59 RIGHT SPINDLE VACUUM NOT FOUND 157 59 CONDITION ARM NOT ARRIVING UP 158 60 CONDITION ARM NOT ARRIVING DOWN 159 60 LEFT SPINDLE NOT ARRIVING UP 160 61 LEFT SPINDLE NOT ARRIV...

Page 1525: ...NOT ARRIVING AT ABOVE LOAD 187 64 ROBOT UP DN NOT ARRIVING AT LEFT LOAD 188 64 ROBOT UP DN NOT ARRIVING AT RIGHT LOAD 189 64 BRIDGE NOT ARRIVING AT LEFT CURTAIN 190 65 BRIDGE NOT ARRIVING AT RIGHT CU...

Page 1526: ...Drawings bound under separate cover Customer Parts Lists Appendix C Electrical Input Output System Address List Refer to engineering drawing 217946EM Appendix D Options Appendix E Maintenance Log Shee...

Page 1527: ...Operations v Ch 3 Operator Functions Auto Polish Parameters Menu Operations v Ch 4 Machine Setup Calibration Configuration Menu Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variab...

Page 1528: ...ii Menu Where to Find Details Manual Location s Polish Parameters Recipe Management Menu Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Slurry System Flush Menu Operations v Ch 4 Machine Se...

Page 1529: ...Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variables Presettable Wafer Polish Count Auto Polish Menu Auto Polish Parameters Menu Operations v Ch 3 Operator Functions v Ch 4 Mac...

Page 1530: ...topic Menu Selection On the Fly Changes Auto Polish Menu Process Parameters Menus Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Auto Cycle Features Auto Polish Menu Operations v Ch 3 Opera...

Page 1531: ...Variables Pre or Post Pad Conditioning Conditioning Cleaning Parameters Menu Operations v Ch 4 Machine Setup Scrubber Support Machine Setup Menu Calibration Configuration Menu Manual Control Menu Oper...

Page 1532: ...gure 9 9 Orientation of Inner Gimbal Ring 19 Figure 9 10 Orientation of Inner Outer Gimbal Ring Unit Relative to the Wafer Manifold Plate 24 Figure 9 11 Orientation of Gimbal Ring Manifold Plate Unit...

Page 1533: ...Maintenance Model 6DS SP Planarizer xxii Version 4 0 February 1998 This page intentionally left blank...

Page 1534: ...Introduction APPENDICES...

Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...

Page 1536: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...

Page 1537: ......

Page 1538: ...Version 4 0 February 1998 Model 6DS SP Planarizer Maintenance Manual VOLUME 5 STRASBAUGH 825 Buckley Road San Luis Obispo California 93401 Phone 805 541 6424 Fax 805 541 6425...

Page 1539: ...Copyright 1998 by Strasbaugh All rights reserved Document prepared in cooperation with Larrie Ciano Tech Write 2405 Leona Avenue San Luis Obispo California 93401 Phone Fax 805 543 9089...

Page 1540: ...ns 6 At the Keyboard 6 At the Control Panel 7 Step By Step Instructions 7 ABOUT THE MODEL 6DS SP PLANARIZER 8 A Basic Machine with Optional Features 8 Mechanical Components 9 Electrical Distribution a...

Page 1541: ...ical 13 Compressed Air 14 Vacuum and D I Water 14 Vacuum System 14 Vacuum Separator 15 Exhaust 15 Temperature Controlled Water 15 Temperature Control Unit 15 Drains 16 Step 7 Slurry System Connection...

Page 1542: ...Sequence 5 D Wafer Unloading Sequence 6 E Cassette Removal 7 F Cycle Halt 7 Bridge Drive Assembly 8 Elevator Assembly 9 Robot Assembly 11 Left Right Load Unload Stations 12 Left Right Carrier Wafer C...

Page 1543: ...apter 7 Plumbing Description 7 1 Compressed Air System 3 Vacuum System 4 Water System 5 Exhaust System 5 Slurry System 6 Chemical System 8 Drain System 8 Chapter 8 Preventive Maintenance Schedules 8 1...

Page 1544: ...ent Series 56 ELEVATORS AND ROBOT ORDER OF ADJUSTMENT 61 ELEVATORS AND ROBOT 62 Elevator Cassette Platform Leveling 62 1 in Elevators and Robot Adjustment Series 62 Elevator Cassette Arm Sensor Switch...

Page 1545: ...eviously Measured Position 178 Restoration of Electrical Power for the Second Table 180 Performance of Related Software Calibration Procedures 181 Chapter 10 Software Calibration Procedures 10 1 OVERV...

Page 1546: ...ration 6 in Elevators and Robot Adjustment Series 83 Robot Up Down Z Axis Load Positions Calibration 7 in Elevators and Robot Adjustment Series 104 Robot Vacuum Switch Wafer Sensing Calibration 8 in E...

Page 1547: ...Arm Adjustment Series 16 Load Stations 19 Load Chuck Raise Pressure 19 Left Load Chuck Raise Pressure 19 Right Load Chuck Raise Pressure 22 Shuttle 23 Shuttle Flow Control Adjustments 23 Slurry Syste...

Page 1548: ...ers Left on Table Part B 22 Wafers Break During Polish Cycle Part A 22 Wafers Break During Polish Cycle Part B 24 Carriers Drop Off Spindles 25 Robot Drops Wafers Part A 26 Robot Drops Wafers Part B 2...

Page 1549: ...SPINDLE VACUUM SWITCH OFF 52 40 SEND CASSETTE S NOT ACTIVE 53 42 ROBOT TOP BOTTOM NOT AT ZERO 54 42 LEFT SPINDLE NOT UP 55 43 RIGHT SPINDLE NOT UP 56 43 AXIS 1 SERVO AMPLIFIER FAULT 57 Left Spindle 44...

Page 1550: ...DLE VACUUM NOT FOUND 156 59 RIGHT SPINDLE VACUUM NOT FOUND 157 59 CONDITION ARM NOT ARRIVING UP 158 60 CONDITION ARM NOT ARRIVING DOWN 159 60 LEFT SPINDLE NOT ARRIVING UP 160 61 LEFT SPINDLE NOT ARRIV...

Page 1551: ...NOT ARRIVING AT ABOVE LOAD 187 64 ROBOT UP DN NOT ARRIVING AT LEFT LOAD 188 64 ROBOT UP DN NOT ARRIVING AT RIGHT LOAD 189 64 BRIDGE NOT ARRIVING AT LEFT CURTAIN 190 65 BRIDGE NOT ARRIVING AT RIGHT CU...

Page 1552: ...Drawings bound under separate cover Customer Parts Lists Appendix C Electrical Input Output System Address List Refer to engineering drawing 217946EM Appendix D Options Appendix E Maintenance Log Shee...

Page 1553: ...Operations v Ch 3 Operator Functions Auto Polish Parameters Menu Operations v Ch 4 Machine Setup Calibration Configuration Menu Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variab...

Page 1554: ...ii Menu Where to Find Details Manual Location s Polish Parameters Recipe Management Menu Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Slurry System Flush Menu Operations v Ch 4 Machine Se...

Page 1555: ...Maintenance v Ch 10 Software Calibration v Appendix A Calibration Variables Presettable Wafer Polish Count Auto Polish Menu Auto Polish Parameters Menu Operations v Ch 3 Operator Functions v Ch 4 Mac...

Page 1556: ...topic Menu Selection On the Fly Changes Auto Polish Menu Process Parameters Menus Operations v Ch 3 Operator Functions v Ch 4 Machine Setup Auto Cycle Features Auto Polish Menu Operations v Ch 3 Opera...

Page 1557: ...Variables Pre or Post Pad Conditioning Conditioning Cleaning Parameters Menu Operations v Ch 4 Machine Setup Scrubber Support Machine Setup Menu Calibration Configuration Menu Manual Control Menu Oper...

Page 1558: ...gure 9 9 Orientation of Inner Gimbal Ring 19 Figure 9 10 Orientation of Inner Outer Gimbal Ring Unit Relative to the Wafer Manifold Plate 24 Figure 9 11 Orientation of Gimbal Ring Manifold Plate Unit...

Page 1559: ...Maintenance Model 6DS SP Planarizer xxii Version 4 0 February 1998 This page intentionally left blank...

Page 1560: ...Introduction APPENDICES...

Page 1561: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 3 Manufacturers Data Sheets Go to Manufacturer Data...

Page 1562: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...

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