Strasbaugh 6DS-SP, Operation Manual, Page: 1054 / 1562

STRASBAUGH, INC.
Page 46 6DS-SP Calibration/Configuration Reference November 9, 2001 (Ver 4.38)
197 ViPRR
ring area (Sq. In.)
Configuration
ViPRR carrier option
This is the actual surface area of a retaining ring.
As of this document's date, the areas for various rings are:
Wafer size: Retaining ring area
4 in. 13.59 Sq. In.
5 in. 16.3 Sq. In.
6 in. 19.1 Sq. In.
8 in. 15.3 Sq. In.
Strasbaugh drawing 235218U1 has detailed information on these
values.
Note: Some sizes used for previous retaining rings were:
Wafer size: Retaining ring area
6 in. 11.78 Sq. In.
8 in. 15.35 Sq. In.
198 ViPRR
ring offset (lbs)
Configuration
ViPRR carrier option
This is an offset value used to correct the position of the bladder
pressure/ring force curve on a line that projects through zero.
Wafer size: Offset value
4 in. -11.6 lbs.
5 in. -10.4 lbs.
6 in. -13.8 lbs.
8 in. -10.5 lbs.
Strasbaugh drawing 235218U1 has detailed information on these
values.
(Originally, this variable was "deadweight" which was 0.3 lbs if
using polyethylene terephthalate plastic (PET) rings.)
Note: A previous suggested value from empirical testing for and
older 8 inch retaining ring was (-)10.5 lbs.
Note: This must be set to zero if not using ViPRR carriers.