Strasbaugh 6DS-SP, Operation Manual

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Strasbaugh Table of Contents
Version 4.0 - February 1998 xxi
List of Figures
Chapter 2 Page 2-1
Figure 2-1 Utility Connections 12
Chapter 3 Page 3-1
Figure 3-1 Model 6ds-Sp Planarizer - Front View 6
Figure 3-2 Planarizer Left Side View 8
Figure 3-3 Planarizer Right Side View 9
Figure 3-4 Planarizer Rear View 10
Figure 3-5 Planarizer Subassemblies 12
Figure 3-6 Control Panel 15
Chapter 9 Page 9-1
Figure 9-1 Carrier Top Plate 9
Figure 9-2 Carrier Manifold Plate 9
Figure 9-3 Inner Gimbal Ring 10
Figure 9-4 Outer Gimbal Ring 10
Figure 9-5 Carrier Wafer Mounting Plate 11
Figure 9-6 Carrier Retaining Ring 11
Figure 9-7 Retainer Clamp Ring 11
Figure 9-8 Swivel Assembly Installation Showing
Orientation of the Barb on the Top Plate
17
Figure 9-9 Orientation of Inner Gimbal Ring 19
Figure 9-10 Orientation of Inner/Outer Gimbal
Ring Unit Relative to the Wafer Manifold Plate
24
Figure 9-11 Orientation of Gimbal Ring/Manifold Plate
Unit on the Bench Top Carrier Fixture
30
Figure 9-12 Orientation of Wafer Insert Positioning
Holes of Wafer Mounting Plate
38
Figure 9-13 Orientation of Gimbal Ring/Manifold Plate Unit
On the Bench Top Carrier Fixture
45
Figure 9-14 Sketch Showing Elevator Alignment Screws 63
Chapter 10 Page 10-1
Figure 10-1 Fraction/Decimal Inch Conversion Table
Figure 10-2 Manual Control Menu, Screen Page 1 12
Figure 10-3 Manual Control Menu, Screen Page 2 16
Figure 10-4 Manual Control Menu, Screen Page 3 19
Figure 10-5 Diagnostics Menu 22
Figure 10-6 Calibration/Configuration Menu 25
Figure 10-7 Sketch Showing Relationships of Values for Robot
Linear Position Calibration Variables at Elevators
88
Chapter 13 Page 13-1
Figure 13-1 Error Log Menu 9