Maintenance
Model 6DS-SP Planarizer
10 - 102
Version 4.0 - February 1998
Use the following guidelines when making adjustments:
•
The
smaller
the count number, the nearer the robot arm is to the robot
carriage.
If the arm is
too near
the robot carriage, move the arm away from the
robot carriage by
increasing
the current value of the variable by 500-
count increments.
•
The
larger
the count number, the farther the robot arm is extended from
the robot carriage.
If the arm is
too far away
from the robot carriage, move the arm toward
the robot carriage by
decreasing
the current value of the variable by
500-count increments.
Procedure:
1.
Note whether the arm is positioned
too near
the robot carriage
or
too
far away from
the robot carriage.
2.
At the Calibration/Configuration Menu increase/decrease the value of
variable
114, Robot arms LT load position
, as needed to meet the
goal:
Note:
Changing the value of variable 114 while the robot arm is in its
left load position via the Manual Control Menu automatically
repositions the robot arm to the new location.
a.
Increase/decrease the variable value as needed.
b.
Reevaluate the robot position, and readjust the variable value if
needed.
c.
Repeat checking and adjusting until the goal has been met.
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
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Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1511: ......
Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Page 1560: ...Introduction APPENDICES...
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