Strasbaugh 6DS-SP, Operation Manual

Page: 1391 / 1562

STRASBAUGH, INC.
October 15, 1996 (Rev Oct 25, 1996) 6DS-SP Ver 4.20 Page 3
Added Choices for "Table Rinse with Curtain Rinse":
Version 4.20 adds more choices for the primary table rotation and rinsing during curtain
rinsing. Originally, the choices were "disable" or "enable" where "enable" meant 10 rpm
with the D.I. water rinse turned on. Also, the menu name of the feature is now "Table
Action W/Curtain Rinse."
The following choices will now show in the Machine Parameters menu for the "Table
Action with Curtain Rinse" choice:
"Disable"
"10 rpm/DI"
"20 rpm/DI"
"30 rpm/DI"
"40 rpm/DI"
"50 rpm/DI"
"10 rpm/dry"
"20 rpm/dry"
"30 rpm/dry"
"40 rpm/dry"
"50 rpm/dry"
If the choice shows "DI", the primary table rinse will be turned on during curtain rinsing.
If the choice shows "dry", the table rinse will be off during curtain rinsing and the table
will merely rotate. If the choice is "disable" the table will be stopped and the table rinse
turned off during curtain rinsing.
Existing recipes do not have to be changed because the original "enable" choice will now
show as "10 rpm/DI" which is identical to the original "enable" choice.
Wafer Slip-Out Sensor Feature:
Version 4.20 supports the optional wafer slip-out sensors connected to input 70 "Wafer
slip-out". These sensors detect if a wafer has slipped off a carrier during polishing.
Calibration Variable 52 "Wfr slipout detect(0-no,1-yes)" enables the feature.
If set to "0", the feature is disabled. The variable must be set to "0" if the sensors are not
installed. If the sensors are installed, the feature can be disabled if it is not suited to the
application or is otherwise not working reliably.
If set to "1", the feature is enabled. If a slip-out sensor senses a wafer during polishing,
the cycle will automatically halt in an attempt to prevent wafer breakage. The alarm
message "WAFER SLIPPED OFF CARRIER (abort clears)" will show.