Strasbaugh 6DS-SP, Operation Manual

Page: 1084 / 1562

STRASBAUGH, INC.
May 31, 2001 (Ver 4.37) 6DS-SP User Interface Reference Page 11
AUTO POLISH CYCLE MENU (continued):
FUNCTION KEY CHOICES:
Finish
Cycle "Finish Cycle" causes the machine to stop after the current cycle. This can be toggled back
off during the cycle. (Auto mode only)
Next
Step
"Next Step" Immediately ends the current polish step and starts the next. If there are no more
steps, polishing will end.
Demand
Cond
"Demand Conditioning" causes a pad conditioning cycle according to the ex-situ sweep and
pad conditioning parameters. (Shows
Demand Cond#1 if second conditioner is installed.)
Park
Cond "Park Conditioner Arm" causes the conditioning arm to move to its park position. (Shows
Park Arm1&2 and parks both arms if second conditioner installed.)
Wet
Idle "Wet Idle" causes the machine to go into the wet idle state.
All
Wafers "All Wafers" sets the machine to polish wafers indefinitely. ALL will show in the Wfrs
display area.
No. of
Wafers
"Number of Wafers" permits entry of a number of wafers to polish (up to the number of
wafers held in two send cassettes) before automatically going to a "Finish Cycle" state when
polishing the last wafers. The
Wfrs display area will show the number of wafers remaining
to be polished. When done, the display will return to the ALL setting.
Note: The "No. of Wafers" choice will not work if all polish times are set to zero which
disables polishing.
(Continued on next page)