Strasbaugh 6DS-SP, Operation Manual

Page: 1392 / 1562

STRASBAUGH, INC.
October 15, 1996 (Rev Oct 25, 1996) 6DS-SP Ver 4.20 Page 4
Auto Cycle Action if Leak Feature:
Version 4.20 adds a feature that will cause a "finish cycle" if any of three possible fluid
leak sources are detected. The finish cycle lets the current wafers finish processing but
will not start any new wafers. The leak sources are the primary table drain pan overflow,
the drip pans at the bottom of the machine, and the optional external leak detector input.
Calibration Variable 53 "Action if leak (0-no,1-finish)" enables the feature.
If set to "0", the Auto Cycle will continue and attempt to polish subsequent wafers.
If set to "1", any leak will both cause an alarm and automatically set the "finish cycle"
mode to finish all wafers in process but not start any new ones from the send cassettes.
Automatic DI/Slurry Shutoff Feature:
Version 4.20 adds a feature that will turn off the slurry valves, stop slurry pumps, and
turn off the optional master DI water valve if a leak occurs.
Calibration Variable 54 "Slry/DI off w/leak(0-no,1-yes)" enables the feature.
If set to "0", a leak will cause an alarm only.
If set to "1", any leak will both cause an alarm and automatically cause all slurry shutoff
valves to close, all slurry pumps to stop, and the optional master DI water valve to close.
However, this automatic shutoff will not occur during idling unless Calibration Variable
191 "Abort idle if leak(0-no, 1-yes)" is also set to "1".
Externally Detected Leak Input:
Version 4.20 adds support for an externally detected leak input (Input 69 "Ext leak
detect"). This input can be controlled by an external system which is monitoring its own
leak sensors located in or around the 6DS-SP.
Calibration Variable 190 "Ext. leak detect (0-no, 1-yes)" enables the feature.
If set to "0", the external leak detect input will be ignored. Also, if digital mounting rack
"6MR" is not installed, this variable must be set to "0".
If set to "1", the external leak detect input will be monitored for the purposes of an alarm
showing "EXTERNAL LEAK DETECT". Also, it may be used along with other leak
detection features depending on the settings of variable 53 "Action if leak (0-no,1-
finish)", variable 54 "Slry/DI off w/leak(0-no,1-yes)", and variable 191 "Abort idle if
leak(0-no,1-yes)".
Internal Leak Detect Output: