Strasbaugh 6DS-SP, Operation Manual

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STRASBAUGH, INC.
March 5, 1996 6DS-SP Ver 4.16.3 Page 7
Cycle Start "No Active Receive Cassette" Error Check:
A new cycle start error check will prevent a cycle start if no receive cassette is active. In
the "matched" mode a receive cassette must be active for each spindle used. (This error
check is not performed when using a scrubber.)
This error check prevents a situation where the machine could be started with no active
receive cassette and one is not installed by the time wafers are polished. While another
"no active receive cassette" error will show in this situation, a wafer could still dry out on
the robot if the operator does not respond.
Additional Wafer Handling Tests:
Two tests during the Auto cycle have been added to improve wafer handling reliability.
The load chucks are now raised during the wafer presence testing that occurs during
cycle start testing before every loading cycle. This helps ensure that a wafer
accidentally left in the load chucks will be detected even if it is not fully seated.
A check is made to make sure the wafer deposited on the load chuck by the robot is
still present after the robot arm returns to the zero position. If the wafer is not
detected the cycle will not continue. After a brief delay the error message "Wafer not
found at left load" or "Wafer not found at right load" will show because the chuck
vacuum will be on without a wafer present.