Strasbaugh 6DS-SP, Operation Manual

Page: 804 / 1562

Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 113
6. Place a wafer on the end effector, read, and record the vacuum switch
reading:
a. Manually hold a test wafer under the robot arm end effector vacuum
chuck until the wafer takes vacuum.
b. Using two mirrors, read and record the vacuum switch reading:
Value With a Wafer Present: _____ (Example: - 10.6)
7. Calculate the AVERAGE of the two readings.
AVERAGE = (Value W/Wafer + Value With No Wafer) / 2
Example:
AVERAGE = [ - 4.4 + (- 10.6)] / 2
AVERAGE = ( - 15.0) / 2
AVERAGE = - 7.5
8. Press and hold the vacuum switch's "SET" key until some numbers
briefly show on the left side of the vacuum switch display.
9. Release the "SET" key.
10. "PSI" should be showing as the units flashing at the bottom of the
display.
• If not, press the Down Arrow to select units until "PSI" is displayed.
11. Press "SET" until the "P1 mode is selected ("P" shows at the upper left
and "1" at the lower left).
12. Using the Up and Down Arrows, set P1 as close to the calculated
AVERAGE (from above) as possible.
Notes:
Example 1: The setting permits a 0.2 psi resolution. Thus, for our
example of - 7.5, subtract - .1, and enter the next lower even value ( - 7.4 ).
Example 2: For an average value of -7.2 psi, enter -7.2 .
13. Press and release "SET" to select "P2".