Strasbaugh 6DS-SP, Operation Manual

Page: 1432 / 1562

STRASBAUGH, INC.
March 5, 1996 6DS-SP Ver 4.16.3 Page 11
Scrubber Error Choice:
Calibration Variable 187 “Scrb Err (0-rcv cass, 1-fin cyc)” defines what action will occur
if a scrubber error occurs.
If set to “0” the current wafers and all subsequent wafers in the lot will be delivered to the
receive cassette. The receive cassette will be used for the remainder of the lot even if the
scrubber error clears.
If set to “1” the current wafers will be delivered to the receive cassette and a “finish
cycle” status will automatically be set so the cycle will then end. If the scrubber error is
cleared and the 6DS-SP re-started, wafers will again be delivered to the scrubber.
New Scrubber Up/Down Calibration Variable:
Calibration Variable 134 “Robot up/dn above scrbr pos’n” uniquely defines the robot Z-
axis position for the above scrubber position. This is the position where the robot end
effector is comfortably above a wafer sitting in the scrubber flipper.
NOTE: Previous software releases used calibration variable 130 “Robot up/dn above
load pos’n” for the “above scrubber” position. An existing installation should have the
value discovered in variable 130 entered into variable 134.
Endpoint Carrier Presence Detection for Cable Protection:
Calibration Variable 19 “Endpt carr present(0-no, 1-yes)” determines if endpoint carrier
detection for cable protection will occur. This protection prevents bridge moves in the
case where an endpoint carrier is unloaded but its cable is still connected. A bridge move
at that time could rip the cable apart.
Set variable 19 to “1” if endpoint carriers are installed.
Set variable 19 to “0” if endpoint carriers are not installed. (NOTE: If set to “1” and
endpoint carriers are not installed, false error detection may occur.)
If variable 19 is set to “1” inputs 35 “EPt Lt Lsr Pres” and 36 “EPt Rt Lsr Pres” will be
monitored at all times for the purpose of this bridge move protection. These inputs turn
on when their respective carrier cables are plugged in.
If an endpoint carrier’s cable is plugged into the receptacle on the spindle but the carrier
chuck vacuum is not sensed, the bridge amplifier will be disabled preventing bridge
moves. Also, the auto cycle will be prevented from starting. Finally, Manual menu
bridge moves will be prevented.
Change to Wafer Handling with OnTrak Scrubber: