STRASBAUGH, INC.
September 15, 2000
6DS-SP Software Ver 4.34.1
Page 2
Strasbaugh Confidential Information
IMPORTANT GENERAL INFORMATION
Ver 4.12 added important calibration variables that must be set correctly:
Make sure calibration variables 142 through 144 are properly set before operating the machine to
prevent possible damage to the bridge. Refer to the Version 4.12 software release document.
Ver 4.14 added important calibration variables that must be set correctly:
Make sure calibration variables 176 and 177 are set properly so that automatic cycle spindle
flushing will operate correctly.
Ver 4.29.1 added a new "Alarm Action" feature:
Version 4.29.1 added an “alarm action” feature that completely changes how alarms affect
machine operation. If not already done, follow instructions in those release notes to review your
machine’s current alarm configuration and reconfigure appropriately.
Ver 4.32 changed "Move Down" calibration variables assignment:
Version 4.32 replaces "move down" calibration variables 38, 39, 48, and 49 with variables 217
through 224. If re-installing a version older than 4.32, check variables 38, 39, 48, and 49 to
make sure they contain appropriate values. If skipping version 4.32, refer to 4.32 release notes.
Ver 4.33 changed "Loop Gain" calibration variables assignment:
Version 4.33 replaces "loop gain" calibration variables 50 and 57 variables 229 through 232. If
re-installing a version older than 4.33, check variables 50 and 57 to make sure they contain
appropriate values. If skipping version 4.33, refer to 4.33 release notes.
Version 4.33, 4.34, or 4.34.1 should NOT be installed in Carrier X equipped 6DS-SP's:
Use 4.32. (Versions 4.33, 4.34, and 4.34.1 have not been tested for Carrier X.)
Note to GEM users:
Version 4.29.1 included updated drivers to ensure Y2K compliance for the GEM option. If you
have any version other than 4.29.1 or later, you must either first install Version 4.29.1 and allow
it to execute long enough to update the GEM drivers, or manually update the drivers as described
at the end of this document.
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
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Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Page 1560: ...Introduction APPENDICES...
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