Strasbaugh 6DS-SP, Operation Manual

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STRASBAUGH, INC.
May 29, 1996 6DS-SP Ver 4.18 Page 11
0- Standard motor (Manufacturer: NSK)
1- "High Torque" motor (Manufactuere: Sierracin/Magnedyne)
Primary Table "Hi-Temp" Halt Changed to "Hi/Lo" Temp Halt:
Calibration Variable 17 now shows "TBL1 Hi/Lo temp halt(0-n,1-y)"
If set to "1", a halt will occur during primary table polishing if the primary table
temperature either rises above the high temperature alarm limit or falls below the low
temperature alarm limit in the Alarm Parameter menu.
If set to "0" the feature is disabled.
(Previously, the feature caused a halt only on a high temperature.)
Lifetime Wafer Count Shown in Alarm Log:
When an alarm occurs and is logged, the lifetime wafer count at that time will also be
logged. In the Alarm Log menu, the lifetime wafer count will show following the date
and time.
Post Loading Wafer Presence Test:
If 15 seconds has passed after wafers are loaded onto the spindles and the wafers have not
been detected, the following will now occur:
The cycle will halt.
An alarm message will show.
Any slurry turned on with the "Slurry Prestart" feature will be turned off.
If the wafers are detected at any time within the 15 seconds, the automatic cycle will
continue normally. (Previously, if wafers were not detected, the cycle would stall with no
alarm message and prestart slurry sould continue to flow.)
New DCX intialization files (for technicians):
Initializations files INIT3.DAN and INIT4.DAN have been added to support the
secondary table conditioner and inline scrubber station features. The creation of these
files prevented the need to change the existing INIT1.DAN and INIT2.DAN files on
machines.