Strasbaugh 6DS-SP, Operation Manual

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STRASBAUGH, INC.
March 23, 2000 6DS-SP Software Ver 4.33 Page 7
Strasbaugh Confidential Information
Enhanced Lot/Recipe Integrity for Front-to-Back Throughput
Configuration:
Version 4.33 adds a lot/recipe integrity feature. This feature is only applicable if the machine
has the front-to-back throughput configuration and is using GEM. This feature permits
processing each lot with a different recipe. Lot/recipe integrity is maintained even if lots have
an odd number of wafers. If a lot has an odd number, an "odd wafer polish" will occur to
finish that lot before starting the next one with a different recipe. Also a lot is defined as a
single cassette for this feature.
To use this feature:
Calibration variable 41 "Lot integrity (0-disbl, 1-enbl)" must be set to "1".
Machine Setup menu "Wafer Source/Recipe Source" must be set to "Cass/GEM queue"
General sequence of events:
- Place lot (cassette) in machine.
- Host queues a recipe name to be used for that lot.
- At the start of the auto cycle, the queued recipe is loaded to ensure that any possible
pre polish recipe related actions occur.
- The first lot starts processing.
- Another lot can be placed in the machine while the previous lot is processing.
- The Host then queues a recipe name for that next lot.
- That first lot finishes processing and can be removed.
- New lots with new Host queued recipes can be put in the machine indefinitely.
- For subsequent lots, once the last wafers of the previous lot are unloaded from the
carriers AND the first wafers of the next lot are loaded onto the carriers AND any ex-
situ conditioning from the previous lot is complete, the queued recipe associated with
the next lot is loaded and the cycle continues.
Note: Remember that ex-situ conditioning is part of the recipe and therefore is part of
the processing time for a lot and its associated recipe.
The machine will not process a lot if it has not received a recipe name from the Host for that
lot (even if recipe will be the same as the previous lot). When starting the machine to process
the first lot, if a corresponding recipe has not been received from the Host, the alarm 82 "PP
SELECTION NOT QUEUED" will show, the cycle will not start, and the machine will go to
idle. For subsequent lots during the same automatic cycle, if a recipe is not received for a new
lot the machine will go idle at the end of the previous lot with no alarm.