Strasbaugh 6DS-SP, Operation Manual

Page: 1195 / 1562

STRASBAUGH, INC.
June 30, 2001 6DS-SP Software Ver 4.37.2 Page 13
Strasbaugh Confidential Information
Operator "Scaling and Odd Time Adjust" Choice:
Version 4.37 adds the choice to permit, while in the operator password level, changes to the
recipe parameters Left Force Scaling and Right Force Scaling in Machine Parameters menu,
page 1 and Odd Wafer Time Adjust in Machine Parameters menu, page 4.
Calibration Variable 249 "Oper chg scaling&odd (0-n,1-y)" enables/disables this choice. If
enabled, the cursor and "MoveUp" and "Move Down" keys show as required. See below:
12:00:00 MACHINE PARAMETERS 'Oper' SPNDL left right
page 1 Frc .0 .0 psi
Auto Cycle Operation Auto BkPr .0 .0 psig
Active Spindles Both Spd .0 .0 rpm
Spndle Force Mode Const Pres Load .0 .0 amps
Pad Temperature 40 degC TABLES 1 2
Backpressure (TBL# & type) Disable Spd .0 .0 rpm
Polish/ring Force Units psi Load .0 amps
Wafer Dia. (if using psi) 150.0 mm Temp .0 degC
Cond .0 lbs
Left Force Scaling 100.0 % SLURRY 1 2 3
Right Force Scaling 100.0 % Flow .0 .0 .0
pH .0 .0 .0
Osc. Stroke (TBL1, 6 max) .0 in. COOLING WTR .0 gpm
Osc. Stroke (TBL2, 1 max) .0 in. I/O .0 .0 degC
Osc. Frequency(TBL1/TBL2) .0 cpm LIFE Wafers Time
1-Pad 1 0 0h 0m
Auto Process Control Step 0 2-Pad 2 0 0h 0m
Scrubber Recipe No. (1-99) 0 3-L Carr 0 0h 0m
4-R Carr 0 0h 0m
150 mm Wfr 5-Primary Cond 0h 0m
Stat: Idle Rec PROC-150 Wfrs All Lifetime 0 0h
F1 F2 F3 F4 F5 F6 F9 F10
Move Move View Enter Page Page Sel Abort/
Up Down Choice Choice Up Down Menu Reset
12:00:00 MACHINE PARAMETERS 'Oper' SPNDL left right
page 4 Frc .0 .0 psi
Force Cycling Disable BkPr .0 .0 psig
Force Cycling Step 1 Spd .0 .0 rpm
Force Cycling Interval 0 secs Load .0 .0 amps
Force Cycling Period 0 secs TABLES 1 2
Spd .0 .0 rpm
Polish Param Entry Limits Disable Load .0 amps
Min Polish Entry Limit 0.0 secs Temp .0 degC
Max Polish Entry Limit 0.0 secs Cond .0 lbs
Min Bkpressure Entry Limit 0.0 psig SLURRY 1 2 3
Max Bkpressure Entry Limit 0.0 psig Flow .0 .0 .0
pH .0 .0 .0
Odd Wafer Polish Disable COOLING WTR .0 gpm
Odd Wafer Time Adjust 100.0 % I/O .0 .0 degC
Odd Wafer Pol Force Adjust 100.0 % LIFE Wafers Time
Odd Wafer Ring Force Adjust 100.0 % 1-Pad 1 0 0h 0m
Odd Wfr Cond1 In-situ Adjust 100.0 % 2-Pad 2 0 0h 0m
(0% defaults to 100%) 3-L Carr 0 0h 0m
4-R Carr 0 0h 0m
150 mm Wfr 5-Primary Cond 0h 0m
Stat: Idle Rec PROC-150 Wfrs All Lifetime 0 0h
F1 F2 F3 F4 F5 F6 F9 F10
Move Move View Enter Page Page Sel Abort/
Up Down Choice Choice Up Down Menu Reset