Maintenance
Model 6DS-SP Planarizer
6 - 4
Version 4.0 - February 1998
Transformer 2T is a step down transformer providing single phase 120 VAC
power to three DC voltage power supplies, 1PS, 2PS, and 3PS , and to two 120
VAC duplex receptacles. The two duplex receptacles are AC outlets providing
power for the control computer in the lower cabinet and the display monitor at
the top of the machine.
Transformer 3T is a step down transformer providing 120 VAC power to four
individual motor drive boards (1SCR, 2SCR, 3SCR, and 4SCR), one 120 VAC
quad convenience power outlet, located below the left electrical cabinet, and four
servo axis motor contactors, [1M, 2M, 3M, and 4M. Also powered on this
circuit are solenoids for D. I. water flush for slurry 1 and slurry 2, table coolant
and shunt, and the bridge lube motor.
Inline circuit breakers protect each of the three transformers, 1T, 2T, and 3T, on
both the primary and secondary circuits. Circuit breakers also protect individual
parallel branch circuits on the secondary side of transformer 2T.
DC DISTRIBUTION
The DC voltage distribution consists of three individual power supplies, 1PS for
24 VDC, 2PS for +/- 15 VDC, and 3PS for 5 VDC, and their respective terminal
blocks, 3TS, 4TS, and 5TS. Each DC power supply has its terminal strip to
branch out DC power throughout the machine as shown in the remaining
electrical schematics.
Power supply 1PS sources 24 VDC power for inputs and outputs on the Digital
I/O Racks 1MR, 2MR, 3MR, and 4MR. These outputs enable relays 1CR
through 32CR and solenoid valves for pneumatic, vacuum, and water lines.
Power supply 2PS s/- 15 VDC power for all the analog inputs and
outputs found on the Analog I/O Racks. Power supply 3PS pr5 VDC to
the Digital I/O Racks 1MR, 2MR, 3MR, and 4MR and the two Analog I/O
Racks to power their internal circuitry.
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
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Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
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Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
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Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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