Strasbaugh 6DS-SP, Operation Manual

Page: 1197 / 1562

STRASBAUGH, INC.
June 30, 2001 6DS-SP Software Ver 4.37.2 Page 15
Strasbaugh Confidential Information
Include Pacific Scientific Amplifier Software and Strasbaugh
Parameter Files (for technicians):
Version 4.37 adds the directory "PacSci" to releases which contain Pacific Scientific's DOS
version of "930 Dialogue" for setting up newer versions of Pacific Scientific amplifiers. (It is
not needed for original amplifiers.) The directory will also contain default parameter files for
the spindle, bridge, and primary table amplifiers. It is expected that subsqequent releases will
have this same information should 4.37 be skipped.
This makes the software and parameter files readily available on the machine. It is best to
transport the entire directory contents via diskette for use on a laptop computer instead of
using the machine's computer.
Miscellaneous Improvements:
While the condition where the primary table oscillation sweep is out of range would show as a
steady alarm, it did not prevent a cycle start (in the unlikely event someone would try to start
the machine in that state). This alarm condition will now inhibit a cycle start.
The complete operation of this alarm condition is similar to the "STROKE LIMIT AND
SLIDE&LIFT BOTH ENABLED" alarms described above and is as follows:
There are two alarms (each has the same text):
Miscellaneous alarm #226
TABLE1 OSCILLATION SWEEP IS OUT OF RANGE
Cycle Start alarm #69 TABLE1 OSCILLATION SWEEP IS OUT OF RANGE
Alarm #226 will show continuously (unless a higher priority alarm is showing) un til the
primary table oscillation stroke and/or setting of Calibration Variable 236 "TBL1 stroke
limit(0:6in,1:1in)" are changed.
Alarm #69 will never show on the screen or be logged in the alarm log because the higher
priority alarm #226 which supercedes it. However, if an attempt is made to start a cycle,
the cycle start will be inhibited and this alarm will be reported to a GEM host.
Made correction where a nuisance alarm could occur if a high throughput configured machine
with the misloaded wafer test enabled (calibration variable 193 "Misloaded wfr test(psi,0-
dsbl)") was in an odd polish cycle. This nuisance alarm will no longer occur.