Strasbaugh 6DS-SP, Operation Manual

Page: 1020 / 1562

STRASBAUGH, INC.
Page 12 6DS-SP Calibration/Configuration Reference November 9, 2001 (Ver 4.38)
54
Slry/DI off w/leak(0-no,1-yes)
Configuration
All machines
If set to "1", if any leak is detected (primary table drain pan, drip
pans, or external leak input) slurry shutoff valves will close, slurry
pumps will stop, and the optional master DI water valve will close.
If the screen idle or wet idle is occurring, no action will be taken
unless the "Abort idle if leak" variable is enabled.
(See Variable 191).
If set to "0", no action will be taken if a leak is detected.
55
Eff to ax
7/8@wetidle(0-n,1-y
)
Configuration
All machines except AGV
If set to yes, if scrubber equipped, at the start of wet idle the robot
is moved to the scrubber position and the robot arm extended. If no
scrubber is installed, the arm will be moved to axis 8. (There must
not be a cassette installed in axis 8, although the elevator
mechanism will still be present. A spray nozzle will be positioned
in that station instead.)
This will place the end effector over an optional spray that is teed
into the left load station rinse line. During wet idle, when the left
load station is rinsed, the robot end effector will then also be rinsed.
This should not be turned on for the AGV configuration, nor for a
non scrubber configuration where a cassette is being used in axis 8.
56
Wet unused TBL 2 (0-no, 1-yes)
Configuration
Second table option
If set to yes, the second table will be wet idled during
polishing if it is not used (has all polish times set to zero).
The second table speed and on/off times will be whatever is
selected in the Machine Parameters menu for wet idle.
If set to no, the feature is disabled.
57
(obsolete, see vars 231 & 232)
Previous to version 4.33, was "Back/membrane press cntrl gain"
for both spindles.