Strasbaugh 6DS-SP, Operation Manual

Page: 1042 / 1562

STRASBAUGH, INC.
Page 34 6DS-SP Calibration/Configuration Reference November 9, 2001 (Ver 4.38)
139 Wafer clean rinse time(secs)
Configuration
Single table machines
Sets the time period at the end of the wafer cleaning cycle when the
cleaning device will be disabled permitting unobstructed rinsing of
the wafer. Carrier rotation speed is 10 rpm so every 6 seconds is
about 1 revolution.
140 Scrub orientation(0=L,1=I,2=U)
Configuration
Scrubber equipped machines
Sets which scrubber configuration is used.
Set to "0" for the "L" configuration which has the scrubber station
at the axis 8 location (nearest right position viewed from polish
doors) and does not have wafer handling arms at the end of the
pusher.
Set to "1" for the "Inline" configuration which has the scrubber
station at the axis 7 location (nearest left position viewed from
polish doors).
Set to "2" for the "U" configuration which has the scrubber station
at the axis 7 location (nearest left position viewed from polish
doors) and wafer handling arms at the end of the pusher.
NOTE: If the scrubber is not used, set this variable to "0".
141
Lift off(0-lift, 1-slide&lift)
Configuration
All machines
Selects whether spindles will be directly lifted from the table at the
end of polishing or whether they will first be slid to calibrated
positions before lifting.
142
Bridge Tbl1/L carr lift pos'n
Calibration
All machines
Nominal value: 0 to -6 in.
If using the "slide&lift" feature, sets the bridge position for raising
the left carrier at the primary table relative to the primary table
center. (Note: Standard machines will not mechanically accept the
full range of nominal values for this variable without mechanical
modification.)
143
Bridge Tbl1/R carr lift pos'n
Calibration
All machines
Nominal value: -20 to +3 in.
If using the "slide&lift" feature, sets the bridge position for raising
the right carrier at the primary table relative to the primary table
center. (Note: Standard machines will not mechanically accept the
full range of nominal values for this variable without mechanical
modification.)