Strasbaugh
Mechanical Description
Version 4.0 - February 1998
4 - 13
SHUTTLE ASSEMBLY
The shuttle assembly is comprised of the base plate and top plate sections. Two
hardened steel rails, two shock absorber hard stops, and an air cylinder which
actuates linear movement of the shuttle assembly are mounted on the base plate.
The air cylinder has a magnetic reed switch on each end to notify the control
computer whether the shuttle is in forward or back position. The top plate is
equipped with four bearing blocks which roll along the hardened steel rails
mounted in the base plate. The cleaning and load stations are mounted on the
top surface of the top plate.
On machines equipped with a second polish table, the shuttle assembly uses
locks operated by an air cylinder with reed switches to lock the table in its back
(polish) position. Machines with a second table installed have three plates with
two sets of hardened steel rails and bearings and one air cylinder.
POLISH TABLE DRIVE ASSEMBLY
The polish table drive assembly consists of a brushless DC servo motor, worm
gear reduction gearbox, shaft, and granite table. The brushless DC servo motor is
speed controlled by a servo controller, discussed in detail in the Control System
Description chapter of the
6DS-SP Maintenance
manual. The motor is bolted
directly to the worm gear reduction gearbox. The gearbox is mounted to a box
beam of the machine's framework along the backside and to an angled support
beam at the front.
A drive shaft milled out of eight-inch steel stock runs through the middle of the
gearbox. The drive shaft is keyed to the drive train of the gearbox. The top of
the drive shaft has a flange head to which a subtable of 2 1/4- inch thick steel is
mounted.
The two-layer (granite top layer, stainless steel bottom layer) table assembly, 28
inches in diameter and six inches thick, is mounted to the subtable. The drive
shaft is hollow to permit routing of temperature-controlled water in and out of
the table. A rotary joint at the bottom of the drive shaft accommodates plumbing
of the inlet and outlet water lines.
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
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Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
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Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1511: ......
Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Page 1560: ...Introduction APPENDICES...
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