Strasbaugh 6DS-SP, Operation Manual

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STRASBAUGH, INC.
May 31, 2001 (Ver 4.37) 6DS-SP User Interface Reference Page 39
MACHINE PARAMETERS MENU (cont.)(screen page 2):
This menu/page permits setting some of the seldom changed parameters for machine operation. These
parameters can affect process and are therefore saved as part of the recipe. (Other machine settings can be
found in the Machine Parameters and Calibration/Configuration menus.)
Carrier pad rinse time also applies to the rinses that spray the tops and sides of the carriers. Single table
machines don't have carrier pad rinses but do have top/side rinses. Therefore, for a single table machine
this parameter should be set for the desired carrier top/side rinse. Machines without a high throughput
option won't have the throughput rinse time.
Rinse type selection is only applicable if the machine has the chemical option. Without this option, all
rinse types should be set to
DI Water .
If the curtain rinse option is not installed, its rinse type parameter can be ignored.
12:00:00 MACHINE PARAMETERS 'Oper' SPNDL left right
page 2 Frc .0 .0 psi
Carrier Pad Rinse Time .0 secs BkPr .0 .0
psig
Load Rinse Time .0 secs Spd .0 .0 rpm
Fountain Rinse Time .0 secs Load .0 .0
amps
ThruPut Rinse Time .0 secs TABLES 1 2
Left Load Rinse Type DI Water Spd .0 .0 rpm
Right Load Rinse Type DI Water Load .0
amps
Left Clean Rinse Type DI Water Temp .0
degC
Right Clean Rinse Type DI Water Cond .0 lbs
Curtain Rinse Type DI Water SLURRY 1 2
3
Flow .0 .0
.0
Automatic Wet Idle Start Disable pH .0 .0
.0
Wet Idle Table Speed .0 rpm COOLING WTR .0 gpm
Wet Idle Table On .0 secs I/O .0 .0
degC
Wet Idle Table Off .0 secs LIFE Wafers
Time
Wet Idle Carriers On .0 secs 1-Pad 1 0 0h
0m
Wet Idle Carriers Off .0 secs 2-Pad 2 0 0h
0m
Flushing at Wet Idle Start Disable 3-L Carr 0 0h
0m
4-R Carr 0 0h