Strasbaugh 6DS-SP, Operation Manual

Page: 769 / 1562

Maintenance Model 6DS-SP Planarizer
10 - 78 Version 4.0 - February 1998
B. SET THE ROBOT UP/DOWN TOP POSITION VARIABLE
Note: For our example, we’ll assume a machine equipped with .25-in.
cassette slot spacing and an RTZ robot and set up for processing of
eight-inch wafers.
1. At the Calibration/Configuration Menu, select Page Down to display
variable
116, Robot up/down top position .
2. Set the value for the top position calibration variable to .5.
C. SET THE ROBOT UP/DOWN MIDDLE POSITION VARIABLE
Note: For our example, we’ll assume a machine equipped with .25-in.
cassette slot and an RTZ robot and set up for processing of eight-inch
wafers.
1. At the Calibration/Configuration Menu, select Page Down to display
variable
117, Robot up/down middle position .
2. Set the value for the middle position calibration variable to .56.
D. SET THE ROBOT UP/DOWN BOTTOM POSITION VARIABLE
Note: For our example, we’ll assume a machine equipped with .25-in. cassette
slot spacing and an RTZ robot and set up for processing of eight-inch
wafers.
1. At the Calibration/Configuration Menu, select Page Down to display
variable
118, Robot up/down top position .
2. Set the value for the top position calibration variable to .62.
E. WHEN THE TOP, MIDDLE, AND BOTTOM POSITION VARIABLES
HAVE BEEN SET
• After setting the Robot Up/Down Top, Middle, and Bottom positions,
perform the
Elevator Height Calibration [#4 In Elevators and Robot
Adjustment Series], located above in this chapter.