Strasbaugh 6DS-SP, Operation Manual

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Maintenance Model 6DS-SP Planarizer
10 - 32 Version 4.0 - February 1998
Install Polishing Pad on Table and Carriers on Spindles
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
Move Bridge to Load Position
At Page 1 of the Manual Control Menu, select Bridge Move and choose Load to
move the bridge to load position.
B. CHECK CURRENT CALIBRATION
1. At Page 2 of the Manual Control Menu, select Left Spindle Up/Down
and choose Down to lower the left spindle.
2. Select Right Spindle Up/Down and choose Down to lower the right
spindle.
3. Open the Polish Area Left Side Operator Door.
4. Check the position of each carrier.
GOAL: Each carrier should be fully seated inside its white carrier
retaining ring
and
you should be able to see only the edge of each white carrier
retaining ring.
a. If the goal is met, skip to the When Satisfactory Adjustment Is
Achieved section (below).
b. If the goal is not met, perform the adjustment procedure,
immediately below.
C. ADJUSTMENT PROCEDURE
1. At Page 2 of the Manual Control Menu, select Left Spindle Up/Down
and choose Up to raise the left spindle.
2. Select Right Spindle Up/Down and choose Up to raise the right spindle.