Strasbaugh
Software Calibration Procedures
Version 4.0 - February 1998
10 - 133
C.
TEST LEFT VERSUS RIGHT PERFORMANCE
1.
At the Diagnostics Menu, select Toggle Output and enter
8
to turn
Output 8 (Left Wafer Carrier Blow Off)
ON
, enabling backpressure.
2.
Select Toggle Output and enter
10
to turn Output 10 (Right Wafer
Carrier Blow Off)
ON
, enabling backpressure.
3.
Select Change Counter and enter a value of
0
for counter 55.
4.
Select Change Counter and enter a value of
0
for counter 56.
5.
Read the current left and right spindle back pressure values displayed in
the screen status area:
For Back Pressure Displayed In Psia
SPNDL
left
right
Frc
.0
BkPr
4.7
4.8 psia
Spd .0
Load
.0
Example:
BkPr 4.7
4.8
psia
For Back Pressure Displayed In Psig
SPNDL
left
right
Frc
.0
BkPr
-11.2
-11.1
psig
Spd .0
Load
.0
Example:
BkPr -11.2
-11.1 psig
6.
Compare the left and right back pressure status screen values:
GOAL:
The status screen readings for left and right spindle
backpressure should be /- 0.3 psi of equal.
7.
At the Diagnostics Menu, select Change Counter and enter a value of
2000
for counter 55.
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
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Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
Page 1008: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
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Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
Page 1473: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
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Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
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Page 1481: ......
Page 1482: ......
Page 1483: ......
Page 1484: ......
Page 1485: ......
Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
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Page 1511: ......
Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
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Page 1537: ......
Page 1560: ...Introduction APPENDICES...
Page 1562: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...