Strasbaugh 6DS-SP, Operation Manual

Page: 280 / 1562

Operations Model 6DS-SP Planarizer
5 - 22 Version 4.0 - February 1998
WAFERS LEFT ON TABLE - PART B
Problem
Indicator Problem
Location Component/ Cause Resolution/
Responsibility
WAFERS LEFT
ON TABLE AT
END OF AUTO
CYCLE Table (4) Spindles and
load stations
misaligned.
(5) At the
Calibration menu,
read the value of
calibration variable
171 (minimum
liftoff vacuum).
(6) Vacuum holes in
carrier blocked.
(7) Inadequate air
and vacuum at
spindle.
(4a) Realign spindles
and load stations.
(5a) Consider lowering
the value of calibration
variable 171 (set at the
Calibration menu) to a
value lower than the
current setting.
Lower the value in
increments of 1 PSIA
(or 1 PSIG) and test.
Repeat lowering and
testing as needed.
6a) Check/clean
vacuum holes in
carrier to permit air
and vacuum to pass
through freely.
(7a) Test and correct
by following the
“Testing Spindle
Vacuum And Air
Procedure,” found in
the Software
Calibration
Procedures chapter of
the 6DS-SP
Maintenance manual.
MAINTENANCE