Strasbaugh 6DS-SP, Operation Manual

Page: 1080 / 1562

STRASBAUGH, INC.
May 31, 2001 (Ver 4.37) 6DS-SP User Interface Reference Page 7
MENU GROUPING AND RECIPE DEFINITION:
The menus are divided into five groups:
Operation
Process Setup (recipe)
Machine Setup (Routinely changed machine setups that are not process related)
Maintenance
Miscellaneous
The Slurry Flush Menu and Recipe Management Menu apply to both operation and recipe setup.
Menu select function key label rows are organized as shown below. One group at a time will show.
The recipe is defined as everything seen in the Slurry Flush Menu and everything in the "parameter" menus.
(NOTE: With previous software, only polish parameter values were saved as the recipe.)
Since everything in these menus can affect processing in some way, they are included in the recipe.
The Machine Setup menu contains machine setups that are commonly changed as part of machine
operation but are not process related. (Machine settings which are seldom or never changed reside in the
Calibration/Configuration menu.)
The maintenance menus work together as a group. If any change is made in the Manual Control Menu the
status line will show
Manual Mode . If any change is made in the Diagnostic Menu the status line will
show Diag Mode . As long as menu selection involves only the maintenance menus, the changes will
remain. However, if a door is opened in the manual mode, choices in the section protected by the door's
interlock will be cancelled. Finally, if a non-maintenance menu is selected, an automatic abort/reset will
occur to clear the changes and reset the machine back to normal.
F1 F2 F3 F4 F5 F6 F7 F8 F9 F10
Auto Slurry Recipe Polish Sweep Cond Mach Alarm OTHER
Abort/
Cycle Flush Manage Param Param Param Param Param Reset
F1 F2 F3 F4 F5 F6 F7 F8 F9 F10
Mach Manual Diag- Cal/ Home Pass- GEM Alarm OTHER
Abort/
Setup Cntrl nostic Config Mach word Menu Manage Reset
Operation
Process Setup (Recipe)
Setup Maintenance Miscellaneous