STRASBAUGH, INC.
September 15, 2000
6DS-SP Software Ver 4.34.1
Page 8
Strasbaugh Confidential Information
GEM Command for Parking the Conditioning Arm(s):
Version 4.34 adds a command to park the conditioning arm(s).
This command behaves the same way as the "Park Cond" function key choice in the Auto
Polish Cycle menu ("Park Arm1&2" function key choice if equipped with two conditioning
arms). If the 6DS-SP has only a primary conditioning arm, that arm will be parked. If the
6DS-SP has both primary and secondary conditioning arms, both arms will be parked. The
6DS-SP will reject the command if it is busy or if there is some problem such as the machine
not being homed.
Refer to the "6DS-SP SECS /GEM Interface Manual", Section 5.7, for further information.
GEM Collection Events for End of Conditioning Arm Parking:
Version 4.34 adds collection events for the end of parking either conditioning arm.
GEM "Homing Status" Indication:
Version 4.34 adds homing status as VID 167.
Refer to the "6DS-SP SECS /GEM Interface Manual" for further information.
XportRec and MportRec Utility Programs:
Version 4.34 has utility programs for converting 6DS-SP recipe files to and from Microsoft
Excel compatible "CSV" files. The programs are called MportRec and XportRec and will be
in the 6DS-SP "QB45" directory along with the various other utility programs.
XportRec and MportRec involve checking recipe entry limits and are therefore related to a
particular 6DS-SP software release. In this case, version 4.34. This relationship is necessary
because software releases sometimes add recipe elements and therefore effect limit checking.
It is expected that these utility programs will be upgraded as needed and provided for future
6DS-SP software releases.
The document UTILS.DOC is included with the 6DS-SP documentation disk and explains
these, and other, 6DS-SP utility programs.
Summary of Contents for 6DS-SP
Page 1: ......
Page 19: ...Introduction INTRODUCTION...
Page 58: ......
Page 59: ...Introduction ACHINE ESCRIPTION...
Page 108: ...Introduction PERATOR UNCTIONS...
Page 131: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 23 Figure 3 4 Menu Selection...
Page 134: ...Operations Model 6DS SP Planarizer 3 26 Version 4 0 February 1998 Figure 3 5 Home Machine Menu...
Page 145: ...Strasbaugh Operator Functions Version 4 0 February 1998 3 37 Figure 3 8 Recipe Management Menu...
Page 150: ...Operations Model 6DS SP Planarizer 3 42 Version 4 0 February 1998 Figure 3 9 Home Machine Menu...
Page 203: ...Introduction ACHINE ETUP...
Page 210: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 7 Figure 4 2 Slurry Flush Menu...
Page 216: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 13 Figure 4 4 Polish Parameters Menu...
Page 254: ...Strasbaugh Machine Setup Version 4 0 February 1998 4 51 Figure 4 13 Password Menu...
Page 258: ...Introduction TROUBLESHOOTING...
Page 267: ...Strasbaugh Troubleshooting Version 4 0 February 1998 5 9 Figure 13 1 Alarm Log Menu...
Page 326: ...Introduction APPENDICES...
Page 329: ...Introduction LECTRIAL NPUT UTPUT...
Page 331: ...Operations Model 6DS SP Planarizer This page intentionally left blank...
Page 332: ......
Page 356: ...Introduction REVISIONS...
Page 357: ...Introduction INTRODUCTION...
Page 396: ......
Page 407: ...Strasbaugh Installation Version 4 0 February 1998 Update 11 06 01 2 11 U...
Page 421: ...Introduction HYSICAL ESCRIPTION...
Page 444: ...Introduction ECHANICAL ESCRIPTION...
Page 463: ...Introduction CONTROL SYSTEM DESCRIPTION...
Page 470: ...Introduction OWER ISTRIBUTION...
Page 479: ...Introduction LUMBING ESCRIPTION...
Page 490: ...Introduction REVENTATIVE AINTENANCE CHEDULES...
Page 507: ...Introduction ECHANICAL AINTENANCE ROCEDURES...
Page 516: ......
Page 691: ...Introduction OFTWARE ALIBRATION ROCEDURES...
Page 862: ...Introduction NEUMATIC DJUSTMENTS...
Page 897: ...Introduction OFTWARE ONTROL OMPUTER AINTENANCE...
Page 912: ...Introduction TROUBLESHOOTING...
Page 921: ...Strasbaugh Troubleshooting Version 4 0 February 1998 13 9 Figure 13 1 Alarm Log Menu...
Page 981: ......
Page 1005: ...Introduction APPENDICES...
Page 1006: ...Introduction ALIBRATION ARIABLES IST...
Page 1008: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1094: ...STRASBAUGH INC May 31 2001 Ver 4 37 6DS SP User Interface Reference Page 21...
Page 1103: ...STRASBAUGH INC Page 30 6DS SP User Interface Reference May 31 2001 Ver 4 37...
Page 1467: ...Introduction SSEMBLY RAWINGS...
Page 1469: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1470: ...Introduction ARTS IST...
Page 1471: ...Introduction LECTRICAL NPUT UTPUT...
Page 1473: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1474: ...Introduction PTIONS...
Page 1476: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix D Options...
Page 1477: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1478: ...Introduction AINTENANCE OG HEETS...
Page 1479: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix E Maintenance Log Sheets...
Page 1480: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1481: ......
Page 1482: ......
Page 1483: ......
Page 1484: ......
Page 1485: ......
Page 1508: ...Introduction APPENDICES...
Page 1509: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Manufacturer Data Attached CD...
Page 1510: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1511: ......
Page 1534: ...Introduction APPENDICES...
Page 1535: ...Strasbaugh Appendices Version 4 0 February 1998 Appendix F Part 2 Manufacturers Data Sheets...
Page 1536: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...
Page 1537: ......
Page 1560: ...Introduction APPENDICES...
Page 1562: ...Maintenance Model 6DS SP Planarizer This page intentionally left blank...