Strasbaugh 6DS-SP, Operation Manual

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STRASBAUGH, INC.
Page 58 6DS-SP Calibration/Configuration Reference November 9, 2001 (Ver 4.38)
238 No HydroLift w/unload(0-n,1-y)
Configuration
HydroLift option
Set to "0" and the HydroLift spray will be on when wafers are
unloaded from the spindles and for a short time after the spindles
raise. The spray will also turn on if unloaded wafers are waiting
for Nova wafer handling to finish.
Set to "1" and the HydroLift spray will be off during wafer
unloading from the spindles. This will also prevent the spray from
turning on if wafers are waiting for Nova wafer handling.
Note: If fountain rinsing is enabled in Machine Parameters pages
3, even if the fountain rinse time on page 2 is set to zero, the
HydroLift spray will be on during the rinse sequence. This is
because outputs 70 and 71 are turned on at the start of the rinse
sequence if fountain rinsing is enabled.
239 Extra wfr fetch vac time(secs)
Configuration
All machines
If set to zero: The cycle will perform with the built-in 0.75 second
delay after turning on end effector vacuum to sense a wafer in a
cassette followed by a one time wafer presence check.
If set to non-zero: For example, if set to 1.25 seconds, after the
0.75 built-in delay is finished, the cycle will wait for up to 1.25
seconds before determining "no wafer". If at any time during that
1.25 seconds the wafer is detected, the cycle is continued.
Therefore, that entire 1.25 seconds may not be used.
240 No life count if <5sec(0-n,1-y)
Configuration
All machines
If set to "0", all life counting and timing occurs regardless of polish
times. (This was the behavior before this choice was added.)
If set to "1", pad, carrier, and primary conditioner life counting and
timing are inhibited for any cycle where the total of all left and right
polish step times (steps 1-10 for single table machines and steps 1-
20 for two table machines) is less than five seconds. For example,
if a two table machine has step 1 left and right times at one second
and step 11 left and right times at one second and all other steps
zero, the total is four seconds. Even though "touch down" polishing
occurs, life counting/timing would not occur.
241 TBL1 coolant in LO limit(degC)
Configuration
All machines
Used in conjunction with variable 242. If primary table inlet
cooling water falls below this value, an alarm will show.
Setting both variables 241 and 242 to zero disables this cooling
water alarm monitoring. Units are in centigrade regardless of the
temperature units selected for display.