Strasbaugh 6DS-SP, Operation Manual

Page: 1019 / 1562

STRASBAUGH, INC.
November 9, 2001 (Ver 4.38) 6DS-SP Calibration/Configuration Reference Page 11
48
(obsolete, see vars 221 & 222)
Previous to version 4.32, was "Xtra soft move down value" for
both spindles.
49
(obsolete, see vars 223 & 224)
Previous to version 4.32, was "Thruput move down value" for both
spindles.
50
(obsolete, see vars 229 & 230)
Previous to version 4.33, was "Pressure control loop gain" for both
spindles.
51
TBL2 mtr(0-standard,1-hi-torq)
Configuration
Second table option
Sets which of two motor types is installed for the secondary table
as follows:
0- Standard motor (Manufacturer: NSK)
1- "High Torque" motor (Mfr: Sierracin/Magnedyne).
52
Wfr slipout detect(0-no,1-yes)
Configuration
Wafer slip-out sensor option
Set to "1" to enable monitoring of wafer slip-out sensors during
polishing.
Set to "0" if the slip-out sensors are not installed or if there is a
reason not to use installed sensors.
53
Wfr slip tbl(0-both, 1-1, 2-2)
Configuration
Wafer slip-out sensor option
Set to "0" for wafer slip-out monitoring for both tables or if not
using the wafer slip-out option.
Set to "1" for wafer slip-out monitoring for the primary table only.
Set to "2" for wafer slip-out monitoring for the secondary table
only.
Note: Calibration variable 52 "Wfr slipout detect(0-no,1-yes) must
be set to "1" for any wafer slip-out monitoring to occur.