Strasbaugh 6DS-SP, Operation Manual

Page: 1207 / 1562

STRASBAUGH, INC.
January 24, 2001 6DS-SP Software Ver 4.36 Page 5
Strasbaugh Confidential Information
Choice to Inhibit Life Counting if Using Low or Zero Polish Times:
Version 4.36 adds a choice to inhibit pad, carrier, and primary conditioner life counting and
timing for low or zero polish times. This permits wafer handling testing without advancing
life counters or timers. Such testing uses no polishing or only "touch down" polishing. This
feature expects "touch down" polishing to one second or less. In a production environment,
this choice can prevent needlessly advancing life counts during testing which can lead to early
pad replacements, etc. However, if desired, life counting can still be permitted if the number
of test cycles must be recorded regardless of polish time values.
Calibration variable 240 "No life count if <5sec(0-n,1-y)" sets the choice.
If set to "0", all life counting and timing occurs regardless of polish times. (This was the
behavior before this choice was added.)
If set to "1", pad, carrier, and primary conditioner life counting and timing are inhibited for
any cycle where the total of all left and right polish step times (steps 1-10 for single table
machines and steps 1-20 for two table machines) is less than five seconds. For example, if a
two table machine has step 1 left and right times at one second and step 11 left and right times
at one second and all other steps zero, the total is four seconds. Even though "touch down"
polishing occurs, life counting/timing would not occur.
File Checking at Startup:
Version 4.36 adds a means to check the quality of certain files when the machine is started.
These are the files for logging alarms (Errors.dat), logging aborts (Aborts.dat), and storing the
currently used recipe name (Rec_name.dat) as shown on the status line.
The 6DS-SP software cannot run if any of these files are missing or corrupted. While rare,
this had required finding and installing a "healthy" file to solve the problem. Now, the utility
program Chkfiles.exe is automatically run before running the main software. If Chkfiles.exe
finds file trouble, a screen message notifies the operator who must then press any key. Then
Chkfiles.exe creates a new file(s) so that the 6DS-SP can start successfully.
Newly created Errors.dat or Aborts.dat files won't have any data in them, but the data from
the old file is known to be lost anyway.
A newly created Rec_name.dat file will have the name "None" which will show on the status
line. Simply select any recipe so that an actual recipe name will show with its data.