MagnaTran 7.1 User’s Manual
Glossary
MN-003-1600-00
Brooks Automation
Revision 2.2
G-9
SEMI/MESC:
SEMI Modular Equipment Standards Committee.
Serial I/O:
Serial I/O allows a Host Controller to communicate with the product
using the commands detailed in Chapter 5. The characters in each com-
mand are converted to sets of binary bits (1s and 0s) and the bits for each
character are transmitted down a wire in “single-file”. Typically no
additional control, or “handshaking”, wires are used.
Servo:
The control loop that governs the motions of the drive motors.
Set Command:
A command which sets a parameter in RAM. In general, set commands
can have their status requested with corresponding request commands,
and can have their values stored to the EEPROM with corresponding
store commands.
Shoulder:
On the robot arm, the joint located at the drive shaft.
Single Pan Arm Set:
The Brooks Automation “frog leg” arm set with one end effector.
Slit Valve:
See
Slot:
One of the positions on the inside of a substrate cassette that holds sub-
strates. Usually, substrate cassettes have 25 slots.
Slot # 0:
The slot number of the home position. See
Slot Valve:
The valve located at a Transport Module facet that isolates the TM from
the module connected to the facet.
SLPM:
Standard Liters Per Minute. 28 SLPM equals 1 CFM.
SMIF:
Standard Mechanical Interface Facility. Refers to sealed environment
containers for transporting wafers.
SPS:
See
.
SSO:
See
Standard Order:
The default order in which parameters are listed when using the ALL
option. The specific standard order is shown in the reference entry for
each command that supports the ALL option.
Station:
The robot’s identification of a specific set of R, T, and Z coordinates.
Station Coordinates:
The location of the robot’s arm relative to station parameters, that is
Theta = Station Number, R = Extended or Retracted, and Z = Up or
