Operation
MagnaTran 7.1 User’s Manual
Control/Display Module (CDM) Operation
MN-003-1600-00
Brooks Automation
6-72
Revision 2.2
To insure that the arm can move from difficult positions, Jog mode allows the
user to move the arm even if it has lost its referencing. Since the location of an
unreferenced arm is undefined, motion beyond the allowed limits is possible,
conceivably resulting in impact with the Z axis mechanical stops, top and bot-
tom, or the chamber interior. The module warns the user that the user is oper-
ating in an unreferenced mode.
Wafer Xfer:
Allows the user to execute a wafer transfer to or from a specified station. There
are two transfer options available; “PICK” and “PLACE”. When “Wafer Xfer”
is selected the CDM will request selection of the arm to be used with the fol-
lowing message:
TRANSFER USING
WHICH ARM
(1) ARM A
(2) ARM B
Press either “1” or “2” on the numeric keypad to select the arm to be used.
Once the arm to be used is selected the CDM will request selection of the sta-
tion, with the following prompt:
TRANSFER WITH ARM _
STATION _
(enter STN# <CR>)
NOTE:
In the preceding display presented on the CDM the “_” indicates that the
CDM will display the selected arm and station.
Enter the number of the station to be involved in the transfer using the numeric
keypad and press the <CR> key. Once the station is selected the CDM will
request selection of the transfer type, described below, with the following
prompt:
WITH ARM _
(1) PERFORM PICK
(2) PERFORM PLACE
NOTE:
In the preceding display presented on the CDM the “_” indicates that the
