Glossary
MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
G-8
Revision 2.2
command. Parameters stored in RAM are erased when power is
removed.
Ready String:
In the Serial Mode, the string of ASCII characters the product sends
when it is ready for the next command.
Record Type:
A single character field in an product transmission which identifies it as
either action (A), set (S), store (P), request (R), response (X), or a system
abort (E) command.
Request Commands:
A software command, used in serial communications with the prod-
uct, that requests information from the product.
Reticle:
Glass plate that contains the patterns to be reproduced on the wafer.
Retract:
Movement inward. For a robot, this is movement of the robot’s arm
inward (towards from the robot’s body). For an elevator, this is move-
ment of the platform arm inward (towards from the elevator’s body).
Rough Vacuum:
Pressure ranges from atmosphere to 10
-3
Torr.
Rough Vacuum Pump:
A mechanical vacuum pump used to provide the initial evacuation
of a chamber.
Robot:
A device used to move wafers between various stations. Within a Trans-
port Module the robot moves wafers between the modules connected to
the facets.
Rotational Movement:
Circular movement of the robot’s arm between the various stations.
RS-232:
A serial communications protocol for communications between two
devices. This protocol uses one wire for transmitting, one wire for
receiving, and a common ground in a shielded cable.
RS-422:
A serial communications protocol for communications between two
devices. This protocol uses two “twisted pair” wires; one for transmit-
ting and one for receiving.
RS-485:
A serial communications protocol for communications between multi-
ple devices. This protocol uses one “twisted pair” wire for both trans-
mitting and receiving. All devices using this protocol must have an
“address” to ensure that information is sent to the right device.
SCARA:
Selectively Compliant Articulated Robot Arm.
SEMI:
Semiconductor Equipment and Materials International.
