Operation
MagnaTran 7.1 User’s Manual
MagnaTran 7.1 Wafer Handling Robot Overview
MN-003-1600-00
Brooks Automation
6-2
Revision 2.2
MagnaTran 7.1 Wafer Handling Robot Overview
The MagnaTran 7 robot is a vacuum-compatible, central wafer handling robot that
can service up to 16 stations per arm along a 360
o
circular path with superior vibra-
tion-free motion. If desired, it is possible to configure the robot for multiple stations
with the same station coordinates. The two main axes of motion, Radial (R) and Rota-
tional (T), are transmitted into the vacuum region through direct drive D.C. motors,
which uses no rotary seals. The drive and control mechanisms for all three axes are
completely outside the vacuum envelope. The Brooks Automation proprietary single
DSP controller performs Time Optimal Trajectories™ delivering the maximum
throughput possible. This mechanical design allows the robot to move in the rota-
tional axis for an unlimited distance providing enhanced throughput. All three axes
are fully controllable through the robot’s software allowing the robot to position the
wafer located on the end effector anywhere within its reach.
Advanced high level
features provide control and monitoring of the devices and collision avoidance.
The MagnaTran 7 robot provides control for either a single arm or dual semi-indepen-
dent arms through a single concentric shoulder-shaft mechanism. The shoulder-shaft
mechanism provides the drive to the left and right arm mechanisms on both the single
and dual arms. The single arm, referred to as “Arm A”, and the dual arms, referred
to as “Arm A” and “Arm B,” are configured in software for full motion in three axes:
Radial (R), Rotational (T), and, optionally, Vertical (Z).
Arm Description
The MagnaTran 7 robot may be equipped with either the Brooks Automation pan-
tented Single End Effector Arm Set, the BiSymmetrik™ Dual End Effector Arm Set, or
the Leapfrog™ Dual End Effector Arm Set.
Single Pan Arm Set
On all three axis of motion [radial (R), rotational (T for Theta), and the optional
vertical (Z)], both the left and right upper arm segments are driven simulta-
neously and with the same velocity. The rotary motion of the independent
drive shafts is coordinated by the Personality Board and profiled to provide
smooth motion to the arms as the end effector is accelerated from or brought to
rest.
While the maximum radial extension is dependent on the geometry of the arm
specified by the user, the MagnaTran 7 may be supplied with a Single End
Effector Arm Set that meets the specification of a 1050 mm reach from the cen-
ter-line of the robot to the center-line of the wafer. This version of the arm
accommodates loads of up to 1.0kg (2.2lbs) on the end effector. The actual
extension and retraction positions of the arm is software-selectable.
