Alignment and Calibration
MagnaTran 7.1 User’s Manual
Final Checkout
MN-003-1600-00
Brooks Automation
7-20
Revision 2.2
Final Checkout
Verify Proper PICK and PLACE of Wafer
Once the robot’s R, T, and Z axes have been set up for all transfer and process modules
it is necessary to verify proper transfer of wafers to and from all modules within the
system the robot is installed in.
NOTE:
This procedure must be performed during initial setup and at any time that the
robot’s arms or end effector(s) are damaged, removed and replaced, or changed.
Required Tools and Test Equipment
•
The robot’s Control/Display Module (CDM)
•
Expendable wafer
WARNING
Breaking wafers may produce flying shards of glass. When using
wafers in a set up or test procedure, protective eye wear should be
worn at all times to guard against possible eye injuries.
Adjustment/Calibration Strategy
This procedure verifies proper operation of wafer transfer between all modules by
observing system operation during wafer transfers.
Adjustment Procedure
1.
Using the robot’s CDM, PICK the wafers from one module and PLACE them
into another module. During the PICK and PLACE procedures, observe the
system to verify proper operation. Repeat the procedure to transfer the wafers
back to their original location.
NOTE:
If the module is a Cassette Elevator or a multi-slotted module the wafers
should be “picked” and “placed” in all slots.
2.
Repeat the procedure for each module in the system.
