MagnaTran 7.1 User’s Manual
Operation
MN-003-1600-00
Operational Interlocks
Brooks Automation
Revision 2.2
6-31
See
Store Station Option on page 8-167
for a complete description of command
usage.
In this example, a retract wafer present sensor located in the transfer chamber is set
to report the status of a specific arm.
The following is assumed:
•
The wafer present sensor is a laser detector which is on when a wafer is
not detected and is off when a wafer obstructs the beam. The wafer
present sensor is wired between a EXT_IN1 pin 2 and GND (pin 29).
This is digital in bit 1.
1.
Establish serial communication.
NOTE:
DIO mode does not support the sensor setting functionality.
Setting the Station Sensor
2.
Enter the following command:
SET STNSENSOR 1 A TYPE RE ACT LO SEN 2
This creates a mapped name of STN01ASENSOR and assigns it to Station 1. In
this example, SEN is set to input # 2 (EXT_IN1/pin 2) as shown in
Now, if the sensor reports that a wafer is present, the robot will not perform a
PICK at Station 1 and an error will be reported.
See
Error Code Reference Robot Wafer Sensor Errors on page 8-182
for a list of
Interlock Error Codes.
3.
Store the new interlock sensor with the following command:
STORE STNSENSOR 1 ARM A TYPE ACT SEN
See
Store Station Sensor on page 8-169
for a complete description of command
usage.
