Brooks Automation MagnaTran 7.1, Руководство пользователя

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Operation MagnaTran 7.1 User’s Manual
Wafer Presence Sensors-Extend and Retract MN-003-1600-00
Brooks Automation
6-36
Revision 2.2
Wafer PLACE
During a wafer PLACE operation, the robot will retract if required and move T and Z
to the specified station and then perform a Pre-Extend Test.
Pre-Extend Test
The robot will then perform a Pre-Extend Test. This test determines if the sta-
tion has a sensor and if it is configured for use with the active arm. It will check
the sensor configuration at that station for the sensor type and then read the
sensor status. A flowchart of the Pre-Extend Test is shown in
Figure 6-10 .
Sensor Configuration
EXtend type sensor: Sensor state should be OFF indicating that there is no
wafer at the station coordinates where this wafer is to be
placed.
REtract type sensor: Sensor state should be ON indicating that there is a
wafer on the end effector at the station coordinates ready
to be placed.
If the robot does not receive the appropriate signal from the sensor, an error
message will be generated and the PLACE operation will be stopped.
If the robot receives the appropriate signal from the sensor, the PLACE opera-
tion will proceed by performing a Successful Action Test.
Successful Action Test
After the PLACE operation is complete, the robot will perform a Successful
Action Test. If the station has a sensor, and it is configured for use with the
active arm, the robot will check the sensor configuration at that station for the
sensor type and then read the sensor status. A flowchart of the Successful
Action Test is shown in
Figure 6-10 .
EXtend type sensor:
Sensor state should have changed to ON.
REtract type sensor: Sensor state should have changed to OFF.
If the robot does not receive the appropriate signal from the sensor, an error
message will be generated and the PLACE operation is considered to have
failed.