Operation
MagnaTran 7.1 User’s Manual
Wafer Presence Sensors-Extend and Retract
MN-003-1600-00
Brooks Automation
6-34
Revision 2.2
Sensor Configuration
EXtend type sensor:
Sensor state should be "ON" indicating that there is a
wafer at the station.
REtract type sensor:
Sensor state should be "OFF" indicating that there is no
wafer on the end effector.
If the robot does not receive the appropriate signal from the sensor, an error
message will be generated and the PICK operation will be stopped. If the robot
does receive the appropriate signal from the sensor, the PICK operation will
proceed.
After the PICK operation is complete, the robot will perform a Successful Action Test.
Successful Action Test
If the station has a sensor, and it is configured for use with the active arm, the
robot will check the sensor configuration at that station for the sensor type and
then read the sensor status. A flowchart of the Successful Action Test is shown
in
EXtend type sensor:
Sensor state should have changed to "OFF".
REtract type sensor:
Sensor state should have changed to "ON".
If the robot does not receive the appropriate signal from the sensor, an error
message will be generated and the PICK operation is considered to have failed.
NOTE:
If the Successful Action Test fails, all robot motion will have been com-
pleted.
There is no need to clear the error before issuing another command.
