Command Reference
MagnaTran 7.1 User’s Manual
Check Load
MN-003-1600-00
Brooks Automation
8-24
Revision 2.2
either turn off interlock checking completely (ALL) or allows the user to turn off
checking of the interlocks individually. For example, if the VCE’s are turn off, then
the extend enable signal will not be present, so the EX (extend enable sensor) interlock
may be disabled for CHECK LOAD to avoid errors. If the robot cannot find any sta-
tions with a wafer sensor mapped, the command will fail and report an error stating
that no station with R_MT sensors could be found. Otherwise, if no R_MT wafer sen-
sor equipped stations succeeded due to sensor errors, the reason the last station was
rejected is reported.
If no arm was specified, or the search for arm A is successful, for a dual pan arm set,
arm B’s stations are checked using the same procedure. If both arms successfully find
stations which have valid sensor readings, then the robot will carry out the CHECK
LOAD command.
If an error is received by the user after trying a CHECK LOAD command, and the error is
addressing a problem with the slot valve, poppet, or extend enable sensors, it is important to
remember that the error is only relevant to the last station that had a wafer sensor mapped.
See Also:
Wafer Presence Sensors- Radial Motion on page 6-38
Examples
The following command updates the load status:
CHECK LOAD
Examples
The following command checks the load at station 1 and ignores interlocks:
CHECK LOAD 1 INTLCK ALL DIS
The following command checks the load at the first valid station and ignores the
extend enable interlocks:
CHECK LOAD INTLCK EX_ENABLE DIS
The following command checks the load on arm A only at the first valid station and
all interlocks are observed:
CHECK LOAD A
