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Brooks Automation MagnaTran 7.1, Руководство пользователя

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MagnaTran 7.1 User’s Manual

Contents

MN-003-1600-00

Brooks Automation
Revision 2.2

v

Special Notes on RETRACT_PIN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-26
Special Notes on the PowerPak . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-27
Mapping the Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-29

Wafer Presence Sensors-Extend and Retract . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-32

Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-32
Wafer PICK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-33
Wafer PLACE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-36
Servo Position Recording . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-37
Sensor Interface Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-37
Ex/Re Sensor Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-37

Wafer Presence Sensors- Radial Motion. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-38

R_MT Wafer Sensing Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-38
R_MT Placement Criteria . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-38
R_MT Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-39
Radial Motion Setup Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-41

Off Center PICK and PLACE Feature. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-42

Discrete I/O Control (DIO) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-45

DIO Control System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-45
DIO Control Programming. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-45
Initial DIO Configuration Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-45
DIO Fault Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-45
DIO Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-46
DIO Signal Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-46
Enable DIO Initialization Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-56
Robot Motion DIO Inhibition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-56

PASIV™ Safety Feature Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-58

The Workspace Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-58
Creating Workspaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-59
Reserved Workspace Names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-60
Defining Tmin and Tmax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-62
Assigning an Interlock to a Workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-62
PASIV™ commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-62

Control/Display Module (CDM) Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-63

Power Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-63
Control Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-66
Key Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-67
Left Column Keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-69
Axis Parameter Selection Keys. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-78
Moving in the Menu Tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-80
Entering Data Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-80
Setting Up Stations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-81
Example of Teaching a Station with the CDM: . . . . . . . . . . . . . . . . . . . . . . .6-82

Содержание MagnaTran 7.1

Страница 1: ...Brooks Automation MagnaTran 7 1 User s Manual MN 003 1600 00 Revision 2 2 View our inventory...

Страница 2: ...xpress Atmospheric Express PASIV and Time Optimal Trajectory are trademarks of Brooks Automation All other trademarks are properties of their respective owners Brooks Automation 1998 All Rights Reserv...

Страница 3: ...peration Overview 1 4 Documentation Overview 1 5 Supplementary and Related Documentation 1 6 Manual Notation 1 7 Hardware Notation 1 7 Software Notation 1 8 Document and Drawing Numbering 1 9 Notes Ca...

Страница 4: ...11 Thermal Hazards 2 12 Vacuum Hazards 2 13 Fire and Explosion Hazards 2 14 Environmental Hazards 2 15 Noise Emission 2 15 Vibration 2 15 Matrix of Emergency and Corrective Response Actions 2 16 Mater...

Страница 5: ...mmetrik Arm Set Hub Style 3 29 Mount MagnaTran 6 BiSymmetrik Arm Set 3 34 Mount the MagnaTran 6 Frogleg Arm Set 3 38 Mount the MagnaTran 7 BiSymmetrik Arm Set Cone Style 3 42 Install End Effector 3 47...

Страница 6: ...rol Display Module 5 20 Emergency Stop CDM 5 20 Optional CDM 5 21 Operation MagnaTran 7 1 Wafer Handling Robot Overview 6 2 Arm Description 6 2 MagnaTran 7 1 Application Number 6 8 Theory of Operation...

Страница 7: ...Discrete I O Control DIO 6 45 DIO Control System 6 45 DIO Control Programming 6 45 Initial DIO Configuration Procedure 6 45 DIO Fault Conditions 6 45 DIO Start up 6 46 DIO Signal Definitions 6 46 Ena...

Страница 8: ...Issuing an EMERGENCY STOP on the CDM Mode 6 90 Shut down 6 91 Alignment and Calibration Robot Alignment 7 2 Required Tools and Test Equipment 7 2 Alignment Strategy 7 3 Alignment Procedure 7 4 Verifyi...

Страница 9: ...31 Find Zero 8 32 Go To 8 33 Go To Station with Offset 8 36 Halt 8 39 Hllo 8 40 Home 8 41 Life Test 8 43 Map 8 44 Map Pass Through 8 49 Mount 8 51 Move 8 52 Pick 8 54 Pick with an Offset 8 56 Place 8...

Страница 10: ...Request Sync Zero 8 111 Request Version 8 112 Request Warning CDM Status 8 113 Request Who 8 114 Request Workspace 8 115 Request Workspace AutoCreate 8 116 Request Workspace Mode 8 117 Reset 8 118 Set...

Страница 11: ...ce AutoCreate 8 174 Store Workspace Mode 8 175 Transfer 8 176 Transfer with an Offset 8 177 Error Code Reference 8 179 Error listings for the MagnaTran 7 Robot 8 179 Success Codes 8 179 Station Errors...

Страница 12: ...ement Cleaning 9 17 End Effector Alignment 9 20 Power Pak Maintenance 9 21 Repair Philosophy 9 22 Facilitated Field Repair 9 22 Depot Field Repair 9 23 Priority Parts Service 9 23 Brooks Factory Repai...

Страница 13: ...rview 10 2 Communication Related Issues 10 4 Power Related Issues 10 6 Radial Motion Related Issues 10 8 Theta Motion Related Issues 10 10 Z Motion Related Issues 10 12 Find Phase Related Issues 10 15...

Страница 14: ...2 Appendix B Tooling 11 3 Appendix C Torque Settings 11 4 Appendix D Robot Compatibility 11 5 Command Comparison 11 6 Error Code Comparison 11 11 Configuration Compatibility Commands 11 13 Appendix E...

Страница 15: ...Position 3 46 4 1 Protective Covers 4 3 4 2 T1 T2 Drive assembly 4 6 4 3 Z Drive assembly 4 8 4 4 MagnaTran 7 Arm Set Types 4 10 4 5 Printed Circuit Board Locations 4 14 4 6 Power Pak Sub System 4 15...

Страница 16: ...3 9 1 End Effector Mounting Hardware 9 31 9 2 Wafer Support Removal 9 33 9 3 End Effector Pad Grommet Style 9 35 9 4 Arm Assembly Side View 9 40 9 5 Arm Assembly Top View 9 40 9 6 Lower Overtravel Adj...

Страница 17: ...MagnaTran 7 1 User s Manual Figures MN 003 1600 00 Brooks Automation Revision 2 2 xv 12 6 Personality PC104 Board Removal 12 12 12 7 Z Driver Board Removal 12 14 12 8 Radial Axis Board Removal 12 16...

Страница 18: ...Figures MagnaTran 7 1 User s Manual MN 003 1600 00 Brooks Automation xvi Revision 2 2 This Page Intentionally Left Blank...

Страница 19: ...s S101 5 6 5 4 Switch Settings 5 7 5 5 RS 232 Pin Assignments SI02 5 8 5 6 Discrete I O Communications 5 9 5 7 High Side Low Side I O Assignments 5 16 5 8 Marathon Express Connector 5 19 5 9 CDM RS 23...

Страница 20: ...6 68 6 31 Axis Parameter Selection Keys 6 68 6 32 Data Entry Axis Control Keys 6 68 6 33 PowerPak Controls and Indicators 6 85 6 34 Sample Session Software Control 6 88 7 1 Arm B Teaching Procedure 7...

Страница 21: ...fety Values for Station 11 19 11 14 Station Assignments 11 20 11 15 Operational Interlocks MISC I O Connector 11 21 11 16 Standard Brooks RS 422 Interface 11 25 11 17 Optional RS 422 Interface 11 25 1...

Страница 22: ...Tables MagnaTran 7 1 User s Manual MN 003 1600 00 Brooks Automation xx Revision 2 2 This Page Intentionally Left Blank...

Страница 23: ...ted from left to right The dagger indicates which chapters were changed Rev 1 0 Initial release no changes have been made Rev 2 0 Incorporated latest firmware revisions updated procedures Rev 2 1 Inco...

Страница 24: ...Changes MagnaTran 7 1 User s Manual MN 003 1600 00 Brooks Automation xxii Revision 2 2 This Page Intentionally Left Blank...

Страница 25: ...pter organization and a description of each chapter s contents is presented notation con ventions are explained and a reference copy of the standard Brooks Automation War ranty is provided Chapter Con...

Страница 26: ...the center line of the wafer is required Wafer sizes from 100mm to 300mm may be handled This robot is supplied with either the Brooks Automation Single Pan Arm Set the pat ented BiSymmetrik Dual Pan A...

Страница 27: ...bot technology Special features of the MagnaTran 7 include Brooks Automation patented Time Optimal Trajectory motion control allows very high operating speeds with passive wafer support Special comman...

Страница 28: ...7 Robot with the Z Axis option using remote control through the serial communications link might be as follows Command MOVE R ABS 575500 T ABS 97000 Z ABS 21000 ARM A sent to robot Robot moves Arm A...

Страница 29: ...of the robot Chapter 5 Operational Interfaces Detailed information on the interfaces to the robot Chapter 6 Operation Operating procedures for the robot including an overview of all con trols and indi...

Страница 30: ...affect the settings or operating mode of the robot This is especially true for robots supplied as part of a complete system The robot is set to system specifications and acceptance tested with the Int...

Страница 31: ...ware to simplify descriptions of user actions and robot responses The notation system includes the following typographical and presentation conventions Dimensions Dimensions are shown in metric and En...

Страница 32: ...are identified by text in carets Ex Press Enter Press the Enter or Return key on the keyboard A Space B Press the A key then the spacebar then the B key Ctrl C Press and hold the Control key then pre...

Страница 33: ...tion is desired Do not type the brackets Text in parenthesis separated by a vertical line within brackets defines a set of optional inputs to the system Do not type the brackets parenthesis or the ver...

Страница 34: ...cautions are not taken The type of warn ing symbol used indicates the type of hazard electrical laser radia tion or general Figure 1 1 Notes Cautions and Warnings NOTE A note provides additional or ex...

Страница 35: ...hapter 4 Subsystems Engineering information is provided in Chapter 3 Installation Chapter 5 Operational Interfaces Chapter 8 Command Reference Chapter 11 Appendices Chapter 12 Attached Drawings Mainte...

Страница 36: ...t being used See Brooks Automation Specification Sheets or Brooks Automation Installation Drawings 802 for model dimensions Repeatability 0 05 mm 3 T Rotational Axis Range Infinite rotation Repeatabil...

Страница 37: ...ti ble Electrical Specifications Input Power 24 volts DC 10 20 amps 480 watts NOTE Current usage is dependent upon the robot s application Contact Brooks Automation Engineering for requirements Commun...

Страница 38: ...ications MN 003 1600 00 Brooks Automation 1 14 Revision 2 2 Accessories Hand held Control Display Module CDM for control teaching and trouble shooting Power Fault Management Power Pak battery backup A...

Страница 39: ...n Limit 1050 mm armset dependent Exposed Materials Aluminum Stainless Steel Quartz Kalrez Viton Teflon Temperature Range Maximum Operating 120 C Maximum Exposure 120 C Wafer Transfer Time Single Frogl...

Страница 40: ...nge sequence 740mm extension no rotation for 200mm wafer size 3 8 seconds typical at 0 3g acceleration limit 5 6 seconds typical at 0 1g acceleration limit Mechanical Specifications Weight Single Frog...

Страница 41: ...s and the best products Business Profile Brooks Automation Inc is an independent supplier of substrate material handling robots modules software controls and fully integrated cluster tool platforms to...

Страница 42: ...Introduction MagnaTran 7 1 User s Manual Company Overview MN 003 1600 00 Brooks Automation 1 18 Revision 2 2 This Page Intentionally Left Blank...

Страница 43: ...ese safety recommendations are basic guidelines If the facility where the robot is installed has additional safety guidelines they should be followed as well along with the applicable national and int...

Страница 44: ...hile working around the location of the robot The following safety equipment should be donned prior to operating or servic ing the robot Eye protection Safety Shoes Hard Hat Observe the facility guide...

Страница 45: ...h motor has a potential maximum torque capability of 9Nm In normal operation the motors are limited by the power cir cuitry and firmware to a lesser torque However if the servo system fails the maximu...

Страница 46: ...Warning Hazard or Equipment Identification labels Always operate the robot with the protective covers in place CAUTION Use of the MagnaTran 7 robot for any purpose other than as a wafer transfer robot...

Страница 47: ...n 7 is recom mended by Brooks to ensure the safety of personnel servicing this robot Interlocks WARNING The MagnaTran 7 does not provide any personal safety or obstruction interlocks as a stand alone...

Страница 48: ...served These precautions include wearing safety glasses and any other precautions specified within the facility where the robot is being used DANGER Moving mechanisms have no obstruction sensors and c...

Страница 49: ...e or con necting devices may induce electrical shock or burn resulting in seri ous injury or death or cause an equipment fire The proper precautions for operating and servicing electrical equipment mu...

Страница 50: ...power on and live circuits covered No equipment should ever be repaired or replaced with the power on The following are the four types of electrical hazards Table 2 1 Electrical Hazard Classifications...

Страница 51: ...robot is being used must also be observed WARNING Do not look directly at the laser beam for extended periods of time or permanent eye damage may result The following describes laser classifications...

Страница 52: ...nvironmental proce dures must be followed regarding the storage handling and disposal of gases When handling compressed gases such as Nitrogen eye protection should be worn Whenever any gas is used du...

Страница 53: ...s Personal protective equipment such as gloves eye wear respirators self contained breathing apparatus etc may also be required When a chemical is used during servicing the robot the standard precauti...

Страница 54: ...ched components Be aware of these areas during servicing of the robot DANGER Heating elements could cause burns when in contact with skin Allow time for them to cool before servicing the robot This in...

Страница 55: ...tion in which the robot is being used should be applied DANGER Implosion may result from equipment damage It is essential that a complete inspection of the equipment be performed prior to use WARNING...

Страница 56: ...the proper pre cautions for use of that fluid must be observed CAUTION Whenever any cleaning fluid is used during service of the MagnaTran 7 robot all power to the robot should be disconnected and the...

Страница 57: ...se Emission The MagnaTran 7 provides no direct noise hazard during operation When operating normally the robot produces a noise level that is less than 70 db Vibration The MagnaTran 7 provides no dire...

Страница 58: ...ctions required for the equipment the robot is installed in should be provided with that equipment Table 2 2 Emergency Action Matrix Emergency Corrective Response Electric Shock Disconnect from power...

Страница 59: ...tenance and distribution of each MSDS Ensure there is a copy in each workplace for all hazardous materials involved The following hazardous materials may be recommended for use with the robot The foll...

Страница 60: ...can be performed without risk Stay away from the ends of the tanks Withdraw immediately in case of rising sound from the venting safety device or any discolora tion of the tank due to fire Leak Vapors...

Страница 61: ...ner from fire area if this can be performed without risk Leak Shut off ignition sources No flames or smoking in hazard area Stop leak if possible For small spills take up with sand or other non combus...

Страница 62: ...can be performed without risk Stay away from the ends of the tanks Withdraw immediately in case of rising sound from the venting safety device or any discolora tion of the tank due to fire Leak Vapor...

Страница 63: ...rm toxic Fluorine compounds Small fires may be put out with a CO2 or dry chemical type extinguisher Large fires may be extinguished with water spray fog or foam Inhalation Move victim to fresh air If...

Страница 64: ...Safety MagnaTran 7 1 User s Manual Material Safety Information MN 003 1600 00 Brooks Automation 2 22 Revision 2 2 This Page Intentionally Left Blank...

Страница 65: ...r the Brooks Automation MagnaTran 7 Robot including facility requirements unpacking set up and check out Chapter Contents Site Requirements 3 2 Unpacking and Inspection 3 6 Installation Procedure 3 8...

Страница 66: ...including electrical and communications connections are available and are properly prepared for the robot Space The chamber where the MagnaTran 7 Robot will be installed must meet the minimum space r...

Страница 67: ...the minimum dimensions shown below to provide proper clearance for cooling and service Examples of 2 Axis and 3 Axis clearance requirements and the center of gravity are shown in Figure 3 1 Height 53...

Страница 68: ...shown below to provide proper clearance for operation and installation An example of necessary clearance for a single arm MagnaTran 7 is demonstrated in Figure 3 2 Height Dependent on arm type Extensi...

Страница 69: ...n 7 robot requires a single electrical power connection as specified below The source should be line isolated Refer to Figure 5 2 on page 5 3 Two Axis Robot 24 VDC at 20 Amps Three Axis Robot 24 VDC a...

Страница 70: ...ont page of the QR Report any damage immediately to the shipper and to Brooks Automation The following table is for reference only Table 3 1 Packing Checklist Reference Package Contents Robot 1 Robot...

Страница 71: ...rmation about serial number model number etc it also provides critical data Make copies of the form and keep a copy close to the robot Should maintenance be required data from the QR will be needed Er...

Страница 72: ...the chamber and attached to the robot Prepare Surface for Mounting Refer to Figure 3 3 for detailed dimensions and finish specifications for top mounting the robot Inspect the location cut and finish...

Страница 73: ...MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Installation Procedure Brooks Automation Revision 2 2 3 9 Figure 3 3 Top Mount Details 10 000...

Страница 74: ...mber slowly and ensure that all alignment pins are properly located before fully seating the robot into the chamber 3 Insert and tighten all mounting bolts until the lock washers are fully seated then...

Страница 75: ...robot CAUTION Do not connect the robot power supply to facility power until ALL connections have been made Facility power will be connected on Ini tial Power up Sequence on page 3 21 2 Follow the appr...

Страница 76: ...t the short cable shipped with the Power Pak from the Pak connector POWER OUT to the robot POWER connector on the front panel of the robot as shown in Figure 3 4 For the location of the POWER con nect...

Страница 77: ...allation Procedure Brooks Automation Revision 2 2 3 13 NOTE Cable length from power supply to robot must not be longer than the power supply is capable of supporting to ensure proper operation of the...

Страница 78: ...ran 7 robot is capable of RS 232 or RS 422 commu nications with the host controller or with peripheral devices Control Display Module The MagnaTran 7 has a Control Display Module CDM allowing monitori...

Страница 79: ...ct the cable for serial communications to the connector on the front I O panel as shown in Figure 3 5 Host Communication 1 Connect the serial communications cable to the robot at SIO1 2 Route and conn...

Страница 80: ...Installation MagnaTran 7 1 User s Manual Installation Procedure MN 003 1600 00 Brooks Automation 3 16 Revision 2 2 SIO2 2 Route and connect the peripheral communications cable to the periph eral unit...

Страница 81: ...1 Locate the CDM at an accessible location typically on the side of the chamber where the robot is installed 2 Connect the CDM communications cable to the robot CAUTION If using the metal shelled con...

Страница 82: ...ons are made to the 50 pin connector MISC I O located on the front I O panel of the robot as indicated in Figure 3 8 1 Route the discrete I O communications cable from the units that will be monitored...

Страница 83: ...Brooks Automation Revision 2 2 3 19 Software Installation The MagnaTran 7 robot requires no software installation as all robot control software is pre loaded Upgrades to the software can be downloaded...

Страница 84: ...ak test if required Ensure that the arms are properly mounted and that there are no obstructions to their movement Verify that the power cable is routed in a safe place and away from travel area Verif...

Страница 85: ...s electrical services Refer to the power supply instructions for correct termination 4 Following the manufacturers directions turn on the power supply or throw the breaker switch on the Brooks Automat...

Страница 86: ...MagnaT ran 6 robots The robot configuration compatibility is set at the factory according to user specifications Configuration Compatibility allows the MagnaTran 7 to communicate in the same manner as...

Страница 87: ...supplied with the arm set Mount the MagnaT ran 7 Leapfrog Arm Set on page 3 24 Hub style Mag 7 1 BiSymmetrik Arm Set Mag 7 Kit Mounting kit supplied with the robot drive Mount the MagnaT ran 7 1 BiSy...

Страница 88: ...ance from the bottom of the transport cham ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z...

Страница 89: ...under side of the arm set and verify the mounting hardware is pro truding at 4 places If not work the screws until they protrude Position the arms so that when looking down on the robot the I O panel...

Страница 90: ...uld be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each other If vibration is observed or the alignment is off perform the...

Страница 91: ...ht Using the alignment fixture place the arms on the T1 T2 shafts positioning the locating pins of the outer shaft into the arm set Seat onto the T1 shaft The arm set must be fully seated 6 Secure the...

Страница 92: ...arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each...

Страница 93: ...om of the transport cham ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z axis is at a heigh...

Страница 94: ...under side of the arm set and verify the mounting hardware is pro truding at 6 places If not work the screws until they protrude Position the arms so that when looking down on the robot the I O panel...

Страница 95: ...tion After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel re...

Страница 96: ...O panel is facing you and arm A is to your right See Figure 6 7 on page 6 19 Using the alignment fixture place the arms on the T1 T2 shafts positioning the locating pins of the outer shaft into the ar...

Страница 97: ...vibration After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parall...

Страница 98: ...pleted as damage to the robot or arms may result To mount the arms to the robot power connections and communications connections must be complete and verified Communication may be through the serial...

Страница 99: ...ly seated then torque 25 inch pounds 6 Remove the alignment fixture by loosening it s hardware NOTE Save the fixtures for possible future use If the robot is returned to Brooks for service or shipped...

Страница 100: ...adapter to T2 if not factory installed 5 For the following procedure the alignment fixture must be installed on the arm set Verify the T1 adapter wave spring and T2 adapter are in place factory instal...

Страница 101: ...check for vibration After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates...

Страница 102: ...m ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z axis is at a height of 10mm 10000 counts...

Страница 103: ...ed Brooks Automation recommends reteaching the robot all stations Using the red arm mounting fixture place the arms on the T1 T2 shafts posi tioning the 4 locating pins of the shafts into the arm set...

Страница 104: ...he User Preference on page 9 73 Mount CDM 1 Ensure the arm state of the robot is off Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON NO 2 Move the robot to the mount po...

Страница 105: ...ing fixture NOTE Save the mounting fixture for possible future use If the robot is returned to Brooks for service or shipped to another location the original mounting fix ture must be used Also keep t...

Страница 106: ...tom of the transport cham ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z axis is at a heig...

Страница 107: ...rms remain symmetrical about the mounting fixture during installation 5 Secure the arms to the T2 shaft inner shaft using one 5mm SHCS and lock washer Secure the arms to the T1 shaft outer shaft using...

Страница 108: ...ts should be oriented as indicated in Figure 3 9 3 Disengage the robot servos Enter the following path SETUP CONFIG ROBOT SET SERVOS OFF 4 Install the arms on the robot For the following procedure the...

Страница 109: ...is fixture 7 Set the arm state of the robot to on Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON YES 8 Re engage the servos Issue the following command HOME R During t...

Страница 110: ...Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 Brooks Automation 3 46 Revision 2 2 Figure 3 9 MagnaTran 7 MOUNT Position T2 PIN T1 PINS...

Страница 111: ...Install End Effector Brooks Automation Revision 2 2 3 47 Install End Effector 1 Verify flatness using the procedure Verifying Flatness of Robot s End Effector on page 7 5 2 Install the end effector us...

Страница 112: ...arts of the system NOTE Even a small misalignment can interfere with proper system operation and may cause wafer breakage The user must perform a complete alignment as part of installing the robot in...

Страница 113: ...odules include the mechanical system the electrical system and the hand held Control Display Module CDM Chapter Contents Mechanical System 4 2 Subsystems 4 2 Protective Covers 4 3 Frame Assembly 4 4 T...

Страница 114: ...maintaining the vacuum environment in the cham ber The mechanical design and operation of the MagnaTran 7 robot uses a minimum number of moving parts to ensure minimal maintenance requirements Subsys...

Страница 115: ...nding the robot body were designed to provide protection to the moving mechanisms and electronics of the robot and to provide optimal cooling by directing the air flow over the subsystems within A coo...

Страница 116: ...lowing for movement in the Z axis The frame assembly also provides the mounting support for the fan the Z drive motor housing and the electronics PCBs located in the lower section on each side and und...

Страница 117: ...tion of the T1 T2 drive shafts When both shafts turn in the same direction theta movement is performed When the shafts turn in opposite directions radial movement occurs The rotational positions of th...

Страница 118: ...aTran 7 1 User s Manual Mechanical System MN 003 1600 00 Brooks Automation 4 6 Revision 2 2 Figure 4 2 T1 T2 Drive assembly T1 Bellows Buffer Board T2 T2 Drive T1 Drive Outer Shaft Top Motor Inner Sha...

Страница 119: ...own Control electronics coupled with the rotary encoder allow precision movement in the Z axis A fail safe brake freeze the movement of the drive when power is removed The Z axis drive is attached and...

Страница 120: ...rvo controller When an overcurrent situation is detected the corresponding servo is shut off and an error message is generated This protection is a safety feature designed to prevent blown fuses due t...

Страница 121: ...Z axis drive Arm motion in the T axis rotation is provided by synchronous rotational movement of the T1 and T2 drives in the same direction Due to the unique design of these drives there is no limit t...

Страница 122: ...Tran 7 1 User s Manual Mechanical System MN 003 1600 00 Brooks Automation 4 10 Revision 2 2 Leapfrog Same Side Dual Arm Set Frogleg Single Pan Arm Set BiSymmetrik Dual Pan Arm Set Figure 4 4 MagnaTran...

Страница 123: ...oftware Upgrades to the firmware are performed through the interface board serial port onto a FLASH memory disk The Supervisor board s primary function is user interface and general control The Superv...

Страница 124: ...utputs See Figure 5 4 for a diagram of the high side circuit Low Side Interface Board A low side switching board is available using active low signals instead of the CE compliant standard active high...

Страница 125: ...ondary RS 232 port MISC IO Discrete I O Port The high side board has the following indicators 24V Power on indicator TX SIO1 transmit green indicator RX SIO1 receive green indicator The high side inte...

Страница 126: ...Manual Electrical System MN 003 1600 00 Brooks Automation 4 14 Revision 2 2 Figure 4 5 Printed Circuit Board Locations LEFT FRONT RIGH T REAR Personality Board PC104 CPU Board I O Board T1 T2 Axis Dr...

Страница 127: ...ovides a safe recovery of the robot arms within two seconds after power loss The Power Pak also provides immediate removal of power to the robot after EMO actuation When the primary power is returned...

Страница 128: ...MagnaTran 7 robot is in the form of internal control programs that reside on the PC 104 CPU board as flash memory The user interface to this software is through either the Serial Communications Port...

Страница 129: ...ogether Additionally the CDM provides a retractable hanger which allows it to be stored on the side of the machine the robot is mounted in For convenience a brief overview of the instruction set and t...

Страница 130: ...ample Y N indicates that the user should choose the Yes key or the No key Some menus present mul tiple choices such as L S P or 1 2 3 4 which indicates that the user should choose from among the keys...

Страница 131: ...MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Control Display Module Brooks Automation Revision 2 2 4 19 Figure 4 7 CDM Command Flow Chart...

Страница 132: ...Subsystems MagnaTran 7 1 User s Manual Control Display Module MN 003 1600 00 Brooks Automation 4 20 Revision 2 2 This Page Intentionally Left Blank...

Страница 133: ...aces to the Brooks Automation MagnaTran 7 Robot These interfaces provide communications to the robot from the external controller and allow the robot to monitor and control external devices such as wa...

Страница 134: ...ce Overview All operational interfaces to the MagnaTran 7 robot are connected to the robot Inter face Panel as shown in Figure 5 1 The chapter provides instructions for fabricating these interfaces Fo...

Страница 135: ...ity by using known noise reduction techniques such as upgraded grounding on the electronics special designed external covers and compliant power connectors The MagnaTran 7 robot requires 24 VDC 10 20...

Страница 136: ...ected to Earth GND at Power Supply Internal Earth GND to robot frame chassis bolt A3 24V RET Connected to Earth GND at Power Supply and RET post on power sup ply A4 24V 20 Amps 1 no connection PowerPa...

Страница 137: ...of the connection in bits per second Serial port SIO1 is optically isolated Serial and logic commons are tied together with a resistive connection between the two grounds thereby preventing a charge b...

Страница 138: ...pin male D connector at the end that plugs into the robot in the connector labeled SIO1 The pin out for this cable is provided in Table 5 3 Note that pins not identified with a signal name are to be...

Страница 139: ...Settings Serial communications options are set using SW1 on the Personality Board Access to these switches is obtained by removing the robot protective covers See Chapter 12 for the location of the Pe...

Страница 140: ...8 Revision 2 2 Serial Communication SIO2 This port may be used to control peripheral devices such as an Aligner through the serial communications port The following cable is needed Male to male 9 pin...

Страница 141: ...d and cannot be changed The MagnaTran 7 robot offers four types of discrete communication high side low side relay and an exclusive type for Brooks Automation Marathon Express users Each type of I O b...

Страница 142: ...d the outputs of the affected device turn off and a red indicators on the face plate will light A fault message is sent to the host controller Additionally the outputs will be disabled at power up The...

Страница 143: ...Logic zero Refer to specification for UDN2987A Logic one Refer to specification for UDN2987A All discrete input signals connected to the MagnaTran 7 must be open collector as shown in the circuit in...

Страница 144: ...itoring and control through discrete I O lines is done through the 50 pin connector located on the I O panel of the robot There are 22 DIO IN and 20 DIO OUT lines I O external and internal power is di...

Страница 145: ...to specification for ULN2803 Logic one Refer to specification for ULN2803 All discrete input signals connected to the MagnaTran 7 must be open collector as shown in the circuit in Figure 5 5 All disc...

Страница 146: ...uts are optically isolated If user power is not supplied the board automatically switches to on board power With on board power however the ground isolation is defeated See Figure 5 6 for wiring the e...

Страница 147: ...ISC I O The pin out for these cables are provided in Table 5 7 DIO Control Table 5 7 lists the factory programmed DIO commands and their associated pin assignments for the MISC I O connector located a...

Страница 148: ...10 EXT_IN9 input 10 ARM 35 DRV_OUT4 RETRACT_PIN output 5 STN BIT 0 11 EXT_IN10 input 11 MOVE BIT 0 36 DRV_OUT5 output 6 STN BIT 1 12 EXT_IN11 input 12 MOVE BIT 1 37 DRV_OUT6 output 7 STN BIT 2 13 EXT_...

Страница 149: ...s The Safety Interlock feature provides a motor enable interlock to disable all the robot motors R T and Z axis motors for desired applications More specifically pins 23 and 24 of the MISC I O port mu...

Страница 150: ...dix B Tooling on page 11 3 Any of the following methods can be used to bypass this feature NOTE Brooks Automation ships all Magnatran 7 1 robots with this bypass jumper plugged into the MISC I O port...

Страница 151: ...included with the Marathon Express system See also the Brooks Automation Marathon Express User s Manual Table 5 8 Marathon Express Connector Pin com Signal Name Pin com Signal Name Pin com Signal Nam...

Страница 152: ...tton which will turn off the servos to the robot See Control Display Module CDM Operation on page 6 63 for instructions on using the CDM Emergency Stop CDM The CDM communications cable to the Emergenc...

Страница 153: ...D connector at the end which plugs into the robot at the connector labeled CDM and a 6 pin modular connector at the end that plugs into the CDM The pin outs for both ends of this cable are provided i...

Страница 154: ...Operational Interfaces MagnaTran 7 1 User s Manual Control Display Module MN 003 1600 00 Brooks Automation 5 22 Revision 2 2 This Page Intentionally Left Blank...

Страница 155: ...aTran 7 1 Wafer Handling Robot Overview 6 2 MagnaTran 7 1 Application Number 6 8 Theory of Operation 6 9 Controls and Indicators 6 21 Operational Interlocks 6 23 Wafer Presence Sensors Extend and Retr...

Страница 156: ...or either a single arm or dual semi indepen dent arms through a single concentric shoulder shaft mechanism The shoulder shaft mechanism provides the drive to the left and right arm mechanisms on both...

Страница 157: ...Manual Operation MN 003 1600 00 MagnaTran 7 1 Wafer Handling Robot Overview Brooks Automation Revision 2 2 6 3 Wrist Forearm Upper Arm Shoulder End Effector Wafer Center Elbow Forearm A Figure 6 1 Ma...

Страница 158: ...Arm A fully extended to Arm B fully extended with the inactive arm remaining in the retract position while the active arm extends or retracts The rotary motion of the independent drive shafts is coor...

Страница 159: ...al Operation MN 003 1600 00 MagnaTran 7 1 Wafer Handling Robot Overview Brooks Automation Revision 2 2 6 5 Figure 6 2 MagnaTran 7 Dual Arm Wrist Upper Arm Shoulder End Effector Wafer Center Forearm B...

Страница 160: ...inac tive arm remaining in the retract position while the active arm extends or retracts End effectors are spaced approximately 10 to 16mm apart depending on application and calibrated at the factory...

Страница 161: ...er s Manual Operation MN 003 1600 00 MagnaTran 7 1 Wafer Handling Robot Overview Brooks Automation Revision 2 2 6 7 Figure 6 3 MagnaTran 7 Leapfrog Arm End Effector Wrist Forearm Elbow Upper Arm Shoul...

Страница 162: ...ght and location of the wafer To ensure Time Optimal Trajectories work properly Brooks Automation assigns an APPLICATION NUMBER to each robot The Application Number also maps radial displacement in mi...

Страница 163: ...xtension and its Z position vertical dis tance from Home By identifying the stations in this manner it is only necessary to provide the robot with the station number instead of the complete coordinate...

Страница 164: ...eral ways wafer presence will be assumed after a PICK wafer presence will be assumed after power up and wafer absence will be assumed after a PLACE Note that the SET LOAD command can be used by an ope...

Страница 165: ...e arm cannot be set to a different value than that of the other arm since they are coupled at the shoul der shaft The fact that the linear motion profiles of the two arms differs at various points alo...

Страница 166: ...Operation MagnaTran 7 1 User s Manual Theory of Operation MN 003 1600 00 Brooks Automation 6 12 Revision 2 2 Figure 6 5 MagnaTran 7 Coordinate System Dual Arm...

Страница 167: ...cal obstruction of the arm motion of greater than 4 and will stop the servos and report a hard tracking error Small bumps to the robot will cause it to settle back into position without excessive vibr...

Страница 168: ...metrik or Leapfrog arm are occupied and will not move at high speed until a PLACE has been performed on both pans Additionally if an arm has performed a PICK operation the robot assumes that the pan i...

Страница 169: ...otates to station 1 GOTO N 1 R EX Extend arm Place wafer on End Effector SET LOAD ON Set slow speed GOTO N 2 R EX Retract rotate to station 2 and extend arm Remove wafer SET LOAD OFF Set fast speed GO...

Страница 170: ...e disk on chip Every time the robot is started or reset the values of all parameters stored in non volatile memory are loaded into RAM for active use by the controller Using non volatile memory the ro...

Страница 171: ...he modules connected to the system where the MagnaTran 7 robot is installed All station assignments are depen dent upon the specific system configuration Assigning a station number for each module con...

Страница 172: ...tor at each station should be recorded for each type of wafer that will be used with the system NOTE The R value and possibly the other values may change for different size wafers Tables are provided...

Страница 173: ...The Brooks HOME position for the standard drive ori ents the robot arms 90 counter clockwise from the interface panel as shown in Figure 6 7 Two alignment pins located on the flange used for the align...

Страница 174: ...e absolute reference system for each axis of the robot is established by moving as much as 10mm 1 2 the robot forward backward repeatedly pinging centered about the initial starting position unit the...

Страница 175: ...ble controls or indicators are needed Those controls and indicators available are only expected to be used dur ing testing of the robot prior to installation in a system or during service Depending on...

Страница 176: ...e 6 4 Indicator Functions Indicator Function 24V Indicates 24VDC power is being supplied to the robot power on TX Indicates the robot is replying to the host port SIO1 RX Indicates the robot is receiv...

Страница 177: ...up by the user Identification Interlocks are divided into three command groups command types related to Sensors at a station I O State OUTPUTS and Miscellaneous These interlocks are detailed in Table...

Страница 178: ...NOT_CLOSED SBIT_SVLV_SEN SINGLE INPUT OPEN CLOSED RETRACT_SEN SINGLE OUTPUT RETRACTED NOT_RETRACTED EX_ENABLE SINGLE INPUT ENABLED DISABLED I O State OUTPUTS SVLV_CTRL DOUBLE OUTPUT null OPEN CLOSED n...

Страница 179: ...oup Binary number converted to decimal and presented on multiple consecutive OUTPUT channels RETRACT_PIN Allows configured slot values to close only when the robot is in the retracted state HI or LOW...

Страница 180: ...valves etc through the robot These I O channels are mapped or assigned as discussed in this section and also have the option of changing the polarity of the output bit See Map Pass Through on page 8 4...

Страница 181: ...he battery backup power in the Pow erPak An error signal is sent when battery voltage is less than 23 5VDC To map the interlocks the type of I O board for the MagnaTran 7 robot must be known High Side...

Страница 182: ...l Interlocks MN 003 1600 00 Brooks Automation 6 28 Revision 2 2 MAP BATT_LO_UPS UPS_BATTERY_SEN LOW TO DIGITAL_IN 0X10000000 IN29 0x20000000 AC_FAIL_UPS IN28 0x10000000 BATT_LO_UPS To remove the inter...

Страница 183: ...GITAL_OUT 0x80000 The following example demonstrates multiple pin addressing Input designation 14 21 NUMERIC_IN 0x pin 15 22 NUMERIC_IN 0x3fc000 where 3 2 1 f 15 8 4 2 1 c 12 8 4 0 empty block 0 empty...

Страница 184: ...command usage The following truth table illustrates the possible sensor states Setting the Station Option 4 Enter the following command SET STN 2 OPTION SBIT_SVLV_SEN STN_2_SLOT This will assign the...

Страница 185: ...tal in bit 1 1 Establish serial communication NOTE DIO mode does not support the sensor setting functionality Setting the Station Sensor 2 Enter the following command SET STNSENSOR 1 A TYPE RE ACT LO...

Страница 186: ...he robot s radial R rotational T and vertical Z motion servos may be recorded when the state of any specified sensor changes Once this positional data is recorded it may be reviewed at any time by iss...

Страница 187: ...he specified station The robot will then perform a Pre Extend Test Pre Extend test If the station has a sensor and it is configured for use with the active arm it will check the sensor configuration a...

Страница 188: ...ter the PICK operation is complete the robot will perform a Successful Action Test Successful Action Test If the station has a sensor and it is configured for use with the active arm the robot will ch...

Страница 189: ...cates Wafer at Station PICK Proceeds Indicates NO Wafer PICK Proceeds is on End Effector Check Sensor Type Error Message Generated Pick Operation Considered Failed Operations Proceed Indicates NO Wafe...

Страница 190: ...ON indicating that there is a wafer on the end effector at the station coordinates ready to be placed If the robot does not receive the appropriate signal from the sensor an error message will be gene...

Страница 191: ...f servo data collection and all servo position and transition data is stored in a table that may be read at any time Only one sensor may be configured to collect servo position data at a time Enabling...

Страница 192: ...n profiles according to the arm load status in the robot memory map The speed and acceleration that the robot moves during the PICK PLACE XFER and GOTO operations is dependent on the load status of th...

Страница 193: ...sidered Not Available for Check Load and will cycle to the next station The CHECK LOAD command may be used to set the robot arm state to the correct load sta tus on power up or after a failure The fol...

Страница 194: ...he extend and the retract at the specified station In a PLACE operation the robot arm will first be retracted in the R direction if required Then the robot arm will move in the T and Z directions to t...

Страница 195: ...AFER SIZE xxxxxx STORE R_MT WAFER SIZE 2 Connect the wafer sensors for each station to the MagnaTran 7 MISC I O con nection See MISC I O Communications on page 5 9 3 Teach each station to the robot us...

Страница 196: ...on combination of straight lines and curves works with all Brooks MagnaTran robots and arm sets Allows PICK and PLACE to cassettes and pods off the radial axis without interference Utilizes Time Optim...

Страница 197: ...robot will travel in a straight path in order to remove a wafer without interfer ence The travel path of the arm is adjusted for optimal travel in relation to the origin and destination of these two...

Страница 198: ...6 44 Revision 2 2 Set the VIA Values 1 Set the servos to OFF SET SERVOS OFF 2 Manually move the end effector to the desired VIA point location 3 Request the current absolute location RQ POS ABS ALL 4...

Страница 199: ...For example if a MOVE command has been asserted PI 0 21 Pin 25 LOW check for the COMMAND STATUS response PO 0 21 Pin 24 LOW before proceeding Initial DIO Configuration Procedure Before operating the...

Страница 200: ...DIO mode is started in order to restart DIO mode a DIO STOP and then a DIO START must be issued through the serial interface or CDM to restart the discreet interface DIO Signal Definitions The actual...

Страница 201: ...If this signal changes state before the move is completed the move will be aborted the robot will be brought to a controlled stop and the motors will remain on If this signal changes state after the m...

Страница 202: ...M Specifies the arm to be used when the MOVE command is issued STATION NUMBER 0 4 Specifies the station to be accessed by the robot during a MOVE Table 6 11 DIO Move Type Move Type Bit 1 Bit 0 OPTION...

Страница 203: ...1 0 29 4 0 0 0 1 1 28 5 0 0 1 0 0 27 6 0 0 1 0 1 26 7 0 0 1 1 0 25 8 0 0 1 1 1 24 9 0 1 0 0 0 23 10 0 1 0 0 1 22 11 0 1 0 1 0 21 12 0 1 0 1 1 20 13 0 1 1 0 0 19 14 0 1 1 0 1 18 15 0 1 1 1 0 17 16 0 1...

Страница 204: ...osition Z POSITION Used in MOVE Type GOTO The arm will move up or down in the Z axis at the specified station Z motion is performed at the RETRACT position if radial motion is also specified Any Z mot...

Страница 205: ...ill only be achieved if both end effectors are empty ACCELERATION AT ARM B Changes the arm B speed Arm motions may have two speeds Slow velocities and accelerations safe for wafer transport Fast highe...

Страница 206: ...Indicates the robot is in DIO control or not ERROR Indicates there is a current error condition see ERROR NUMBER below Table 6 18 DIO Servo Control LOW HIGH OPTION A Servos ON Servos OFF OPTION B Ser...

Страница 207: ...obot commanded to move before being homed 1 1 0 Home sync failed 1 0 1 Motion error 1 0 0 wafer not detected 0 1 1 wafer detected 0 1 0 Valve interlock error 0 0 1 Other errors 0 0 0 OPTION B No Error...

Страница 208: ...tation or not TARGET STATION Specifies the station to be accessed by the robot during a move Refer to Table 6 13 for the station assignments Table 6 23 DIO Command Status LOW HIGH OPTION A Stopped Mov...

Страница 209: ...1 1 At the RETRACT position 1 0 At the EXTEND position of the current station 0 1 not used 0 0 OPTION B Not at EXTEND or RETRACT position 0 0 At the RETRACT position 0 1 At the EXTEND position of the...

Страница 210: ...ed they are not referenced in absolute space Therefore part of the initialization sequence includes moving the robot s arm to a known HOME position on each axis and resetting the corresponding encoder...

Страница 211: ...DRIVE ENABLE bit The robot must be re referenced according to the Enable DIO Initialization Sequence in the previous section 3 If CDM control is released to DIO control while the robot arm is not full...

Страница 212: ...By default the robot will not operate in the workspace mode Once the workspace feature is enabled one pre defined workspace will exist called the home workspace This workspace defines the safe travel...

Страница 213: ...ve about its home volume Other Workspaces Moving from workspace to workspace can be achieved only if the workspace are adja cent or overlapping Although a workspace may be adjacent or overlapping move...

Страница 214: ...e maximum values For the theta axis the minimum can be greater than the maximum Auto Create To take advantage of workspace auto create the mode must be turned on The SET WSPACE AUTO CREATE command is...

Страница 215: ...e Name Station and Arm Workspace Name Station 1 Arm A STN01A Station 1 Arm B STN01B Station 2 Arm A STN02A Station 2 Arm B STN02B Station 3 Arm A STN03A Station 3 Arm B STN03B Station 4 Arm A STN04A S...

Страница 216: ...er SVLV_SEN or SBIT_SVLV_SEN type Refer to Operational Interlocks on page 6 23 for the description and operation of the MAP command Once an interlock as been defined to a workspace then the ability to...

Страница 217: ...turned off it relinquishes control of the robot to the host con troller NOTE The CDM does not relinquish control of the robot until it is turned off Unplugging the CDM while it is turned on will not...

Страница 218: ...motion will continue and risk of collision exists Plugging the CDM into the robot with the Emergency Stop button pressed will cause the robot to perform an Emergency Stop While the Emergency Stop Cir...

Страница 219: ...OP key stops any action in progress as fast as possible based upon the wafer presence status of each arm After a stop the MagnaTran 7 robot remains referenced allowing it to execute any additional com...

Страница 220: ...nly If Control Mode has been entered select the desired control or monitoring function from the left most keys on the CDM WARNING There are no safety interlocks available when using the CDM to con tro...

Страница 221: ...t the user should choose the Yes key or the No key Some menus present multiple choices such as L S P or 1 2 3 4 which indicates that the user should choose from among the keys labeled Lower Slot Pitch...

Страница 222: ...key specifies the R axis for data entry or query 6 78 T T axis key specifies the T axis for data entry or query 6 78 Z BTO Z axis key specifies the Z axis for data entry or query this key is also use...

Страница 223: ...e an axis is selected the robot will immediately start homing that axis If ALL is selected the robot will home R first then T and finally Z If an error is encountered during HOME the error will be dis...

Страница 224: ...o be moved with the following message MOVE 1 ARM A 2 ARM B Press either 1 or 2 on the numeric keypad to select the arm to be moved Once the arm to be moved is selected the CDM will request selection o...

Страница 225: ...preceding display presented on the CDM the _ indicates that the CDM will display the value for each setting Press either R T or Z on the axis section of the keypad to select the desired axis and then...

Страница 226: ...able PICK and PLACE When Wafer Xfer is selected the CDM will request selection of the arm to be used with the fol lowing message TRANSFER USING WHICH ARM 1 ARM A 2 ARM B Press either 1 or 2 on the num...

Страница 227: ...of robot movement speeds which are based on the robot s tracking the Pick and Place history for each arm Setup Allows the user to set up both the CDM and the robot for operation There are six setup o...

Страница 228: ...CDM will display the selected station and arm and the indicates that pressing the CR key will cause the next menu selection to be displayed Not all of the menu is visible at one time Press YES to disp...

Страница 229: ...WAFER SENSOR Enables the user to configure the wafer sensor in the extend posi tion at the specified station The CDM will display the list of pre viously configured Extend Sensors to the user for sele...

Страница 230: ...e CDM will display the list of previously configured sensors to the user for selection NOTE The sensors must be configured using the MAP command before they can be assigned using the CDM CONFIG ROBOT...

Страница 231: ...tion required with the following message INFO 1 CDM SPEED 2 STATIONS 3 LOCATION Press either 1 2 or 3 on the numeric keypad to select the type of infor mation desired Once the information request is s...

Страница 232: ...and Z Vertical These motion parameters are grouped in the second column on the CDM key pad R R is the absolute radial extension of the center of the wafer relative to the center of the robot Note that...

Страница 233: ...is the vertical location in station coordinates When used as a description parameter in a multi slotted station it means the total number of slots assigned to that station Pitch For a multi slotted s...

Страница 234: ...f the variables showing on the screen To select a specific variable press the key indicated in parenthesis to the left of that variable To keep the original value press CR To change the value the curr...

Страница 235: ...ix setup func tions available ASSIGN LOCATION LEARN R T BTO LEARN LOWER SET RE WAF SEN SET EX WAF SEN SET SLOT VLV SEN Once the arm and station have been specified the CDM will request selection of th...

Страница 236: ...tion command Therefore the operator should issue a Move Station command to the position just learned and adjust it if necessary using Assign Pitch and Number of Slots cannot be learned they must be As...

Страница 237: ...d hold down the Extend or Retract key until the arm is extended to the proper distance then press Store which would Store that value of R as the extended position for Station 3 and return to the previ...

Страница 238: ...mary power the PowerPak will supply a maximum of 20A for 2 sec onds and signal the robot to start a controlled shutdown After two seconds the Pow erPak removes battery power from the robot The followi...

Страница 239: ...roper commands Battery voltage is less than 23 5VDC controlled shutdown of the robot is exe cuted and BATT_LO signal is sent to the host Normal power up sequence of the robot when power is reapplied N...

Страница 240: ...Active LO when the conditions described in Operation above are encountered The robot comes to a controlled stop as quickly as possible regardless of the position of the robot arm after receiving the s...

Страница 241: ...is applied the robot will enter a start up state which assumes that wafers are present on the end effectors The speed of all arm motions are governed by this start up state until the robot is either c...

Страница 242: ...hown in the sample session can be found in Chapter 8 Command Reference Table 6 34 Sample Session Software Control Host Controller Command Robot Response Description HOME ALL _RDY Controller instructs...

Страница 243: ...Issuing an Emergency Off EMO CAUTION The robot is not provided with an Emergency Off EMO device The user is accountable for the EMO circuit Issuing an EMER_STOP in DIO Mode If communicating the with t...

Страница 244: ...tained See also CDM STOP Key on page 6 65 Issuing an EMERGENCY STOP on the CDM Mode During any mode of communication if the CDM is plugged in the Emergency Stop button is effective Pressing the button...

Страница 245: ...moved Ensure that the robot has completed all transfer operations and that there are no wafers left on the end effectors If the host controller is to be shut off the robot should be shut down first SE...

Страница 246: ...Operation MagnaTran 7 1 User s Manual Shut down MN 003 1600 00 Brooks Automation 6 92 Revision 2 2 This Page Intentionally Left Blank...

Страница 247: ...sting the Robot s End Effector 7 7 Setting the Robot to the Wafer Transport Plane 7 13 Setting the Transfer and Process Modules T and R Coordinates 7 16 Teaching Arm B of the Dual Arm Sets 7 18 Final...

Страница 248: ...llowing cir cumstances A complete alignment when the MagnaTran 7 robot is first set up at the user s site A complete check at all stations when the robot s end effector the robot s arms or the robot i...

Страница 249: ...d controls for any devices the robot will interface with 1 Verify the flatness of the robot s end effectors 2 Adjust the robot s end effector for planar motion 3 Set the robot to the Wafer Transport P...

Страница 250: ...including the CDM and the Command Set Verify that the entire system is level Ensure the system is at room temperature and at atmospheric pressure NOTE Ensure that the system the robot is installed in...

Страница 251: ...nded that this procedure be performed every 90 days as a preventive maintenance practice NOTE To successfully align the robot and to obtain consistent and precise handling of wafers the limits and tol...

Страница 252: ...orts are within 0 076 mm 0 003 in of each other Replace any supports that are out of specification using the procedure provided in End Effector Pad Removal Replacement on page 9 32 4 Once all wafer su...

Страница 253: ...flat and that the top surfaces of the wafer support pads are within 0 076 mm 0 003 in of each other Required Tools and Test Equipment A set of Allen wrenches in metric sizes The robot s Control Displa...

Страница 254: ...ed i e Vacuum Cassette Elevator Process Module as shown in Figure 7 1 NOTE To ensure the accuracy of all measurements once the indicator base is set up it should not be moved 2 Using the CDM jog the r...

Страница 255: ...0 002 inches then the total dip runout is 0 004 TIR 4 Position the tip of the dial indicator on the end effector to measure twist where indicated in Figure 7 2 being careful not to deflect the end eff...

Страница 256: ...e Measure Twist Here Twist Securing Screws 5mm SHCS 2 places Twist Adjusting Screws Set screws 2 places Figure 7 2 End Effector Measurement Locations Two Types Shown Measure Dip Here Measure Twist Her...

Страница 257: ...screws If the twist is not level loosen or tighten the outside set screws and use the middle screw as a pivot point If necessary loosen the 4 end effector mounting screws before making the adjustment...

Страница 258: ...st ment set screw 3 Tighten the dip securing screw and torque to 20 23 in lbs 4 Check adjustment with gauge and adjust if necessary 8 Repeat the above procedure for the other end effector on a BiSymme...

Страница 259: ...aduated in millimeters and hundredth inches The robot s Control Display Module CDM Expendable wafer WARNING Breaking wafers may produce flying shards of glass When using wafers in a set up or test pro...

Страница 260: ...height of the end effector above the access slot floor using a ruler or a gauge block made for the appropriate vertical height as shown in Figure 7 4 End Effector Module Chamber Module Access Slot Fig...

Страница 261: ...etup function from the CDM to jog to the appropriate height and store the BTO value NOTE Be sure to store the robot s BTO value Also write down the BTO value as displayed on the CDM for future referen...

Страница 262: ...t the robot s arms or end effector s are removed and replaced CAUTION Transfer and process modules may have specific wafer placement requirements Refer to the appropriate User s Manuals while per form...

Страница 263: ...d on the end effector will be centered on the platform If not use the CDM to jog or hand locate the end effector until it is centered on the platform 6 Using the CDM slowly extend the robot arm in the...

Страница 264: ...arm A Brooks Automation MagnaTran 6 and MTR VTR5 users can employ the same teaching techniques used on these previous robots while using one of the compatibility modes see Configuration Compatibility...

Страница 265: ...value is 180 Set the T position for each station for arm B to the calculated Theta posi tion 3 Adjust R T Z and LOWER values for arm B by verifying the position of each station for arm B as required...

Страница 266: ...ndable wafer WARNING Breaking wafers may produce flying shards of glass When using wafers in a set up or test procedure protective eye wear should be worn at all times to guard against possible eye in...

Страница 267: ...003 1600 00 Final Checkout Brooks Automation Revision 2 2 7 21 3 Repeat the procedure for arm B The system manual may have additional alignment procedures related to the robot such as using an aligner...

Страница 268: ...Alignment and Calibration MagnaTran 7 1 User s Manual Final Checkout MN 003 1600 00 Brooks Automation 7 22 Revision 2 2 This Page Intentionally Left Blank...

Страница 269: ...uding a number of sophisticated integrated command sequences The robot s control software also allows monitoring and control of external devices by the robot Communications between the MagnaTran 7 Rob...

Страница 270: ...axis movement to allow pick and place operations Command Flows The basic MagnaTran 7 software command sequence consists of an interplay between Commands from the Host Controller to the robot and Respo...

Страница 271: ...ecuted in the fore ground while a command is executing in the background A typical sequence of communications in Background Mode appears below Host sends an Action motion command to the robot The robo...

Страница 272: ...layed as _ERR instead of _BKGERR e g _BKGRDY goto n 1 _RDY _BKGERR if an error occurs _BKGRDY when the action completes Operating Modes The MagnaTran 7 provides two modes for serial communications wit...

Страница 273: ...munications mode All responses from the MagnaTran 7 are short with minimal descriptive information provided This mode is best used when a host controller is communicating with the robot A typical sequ...

Страница 274: ...ch the T is a variable and the 4 and 270000 are the data fields SET STN 4 T 270000 In the following response example the STN is a variable indicating the type of response and the type of data followin...

Страница 275: ...available commands organized by type appears in the Quick Reference Tables in this chapter Command Types Action Commands move or otherwise act upon some physical robot component I O Commands define t...

Страница 276: ...e MagnaTran 7 robot to pick a wafer from station 1 CM1 slot number 2 using arm B If the arm is not specified the robot will use Arm A as the default arm Note that the example just given shows all spac...

Страница 277: ...Error Response and Ready Response will be returned Response Types Request Response are responses that return information requested by the host controller Error Response are responses that indicate an...

Страница 278: ...e number and order of the data fields within a response is variable and the response will follow the order provided in the command If the ALL speci fier was used the order of the variables being retur...

Страница 279: ...below indicates that the response is a Packet Mode ready response _RDY Command and Response Compatibility The following guidelines have been established by Brooks Automation to ensure compatibility be...

Страница 280: ...8 12 Revision 2 2 interpret unknown error messages as errors NOTE Brooks Automation may implement different command structures in newer gener ations of a particular robot type Therefore commands that...

Страница 281: ...location in station coordi nate with an offset 8 36 HALT Immediately aborts all robot motions avail able only in Background mode 8 39 HLLO Non intrusion command requesting response HELLO 8 40 HOME Re...

Страница 282: ...f discrete I O control 8 28 RQ DIO OUTPUT Returns the current output mode 8 75 SET DIO OUTPUT Allows output function in serial mode 8 125 STORE DIO OUTPUT Stores the current output mode 8 159 Table 8...

Страница 283: ...the optional station related parameters 8 142 SET STNSENSOR Define the setup for the specified sensor including station assignment usage type and active state 8 147 STORE R_MT SENSE Saves the Radial...

Страница 284: ...ion of the specified arm 8 86 RQ LOAD MODE Returns the current load mode 8 88 RQ POS ABS Returns the actual position of the robot s arm in absolute coordinates 8 90 RQ POS DST Returns the destination...

Страница 285: ...cho option 8 129 SET LOAD Sets the load condition for the specified arm 8 132 SET LOAD MODE Sets the state of the load mode 8 134 SET LOSPD Sets the force low speed option on 8 135 SET MESPD Sets the...

Страница 286: ...CE Removes a Workspace 8 68 RQ WSPACE Returns current setting of specified Work space 8 115 RQ WSPACE MODE Returns the Workspace state 8 117 RQ WSPACE AUTO CREATE Returns state of automatically create...

Страница 287: ...s arm to a location in station coordi nates 8 33 RQ STNSENSOR Returns the station sensor parameters 8 108 SET STNSENSOR Define the setup for the specified sensor including station assignment usage typ...

Страница 288: ...various robot parameters to defaults and clears the database checksum error 8 29 FIND ENCODER Collects amplitude data for T1 and T2 posi tion encoders 8 30 FIND PHASE Performs a Find Phase on individu...

Страница 289: ...PHASE Sets the Sync Phase for the T1 T2 and Z motors 8 149 SET SYNC ZERO Sets the zero or Home reference for the Theta and Z axes 8 150 SET ZBRAKE Controls the brake for the Z drive 8 156 STORE HOME P...

Страница 290: ...mation is provided for each command where appropri ate Purpose Provides a brief description of the command Format Shows the format of the command to the robot including the names of any arguments requ...

Страница 291: ...ion that has an R_MT type wafer sensor assigned The robot will extend each arm to the load sensing position to determine if there is a load present on each arm The edge of the wafer is checked rather...

Страница 292: ...or a dual pan arm set arm B s stations are checked using the same procedure If both arms successfully find stations which have valid sensor readings then the robot will carry out the CHECK LOAD comman...

Страница 293: ...upport for instructions on the correct use of this command Format CONFIG ROBOT APPLIC application_number Arguments application_number Specific number for the robot Description This command resets or c...

Страница 294: ...new work space Description This command is used to create a new work space See Also PASIV Safety Feature Operation on page 6 58 The following names are reserved for the robot and may not be used with...

Страница 295: ...ete I O lines instead of using the serial communications link This command disables all serial control functions and enables Discrete I O control A programmed 4 second delay follows the DIO START comm...

Страница 296: ...nterface of robot Format DIO STOP Description The MagnaTran 7 robot may be controlled and monitored using discrete I O lines instead of using the serial communications link This command enables all se...

Страница 297: ...ks Automation Technical Support for instructions on the correct use of this command Format EEPROM RESET Description This command resets or changes various robot parameters and clears the database chec...

Страница 298: ...FIND ENCODER T1 T2 MAN AUTO Arguments T1 Theta 1 axis to be changed T2 Theta 2 axis to be changed MAN Manual data gathering AUTO Automatic data gathering Description Collects the minimum and maximum d...

Страница 299: ...t Call Brooks Automation Technical Support for instructions on the correct use of this command Format FIND PHASE ALL R T Z Arguments ALL Performs FIND PHASE on all linkages R T Z Performs FIND PHASE o...

Страница 300: ...osition Arguments position The axis to be changed T Theta axis Description The MagnaTran 7 robot Home position may be changed from the factory settings to accommodate the users requirements NOTE The m...

Страница 301: ...DN down SLOT num Indicates the slot to which the arm should move Use a value of 1 or 0 for a non slotted station 1 to n for a slotted station where n the num ber of slots previously set for the partic...

Страница 302: ...d on the arm geometry R position between the minimum and maximum allowed based on the arm geometry For multi axis moves the following sequence of checks and motions occur in the order given for the cu...

Страница 303: ...wn position The arm will move to the up position without retracting NOTE Since no arm descriptor is provided in the example the robot will move the default arm Arm A GOTO Z UP In the following example...

Страница 304: ...offset Specifies the positive or negative offset from the extend retract location for that station TO t_offset Specifies the positive or negative offset from the theta location for that station Z UP D...

Страница 305: ...ulti axis moves the following sequence of checks and motions occur in the order given for the currently defined load If N is specified station or if SLOT is specified or if R RE retract is specified t...

Страница 306: ...et MN 003 1600 00 Brooks Automation 8 38 Revision 2 2 NOTE Since no arm descriptor is provided in the example the robot will move the default arm Arm A GOTO Z UP In the following example arm A is curr...

Страница 307: ...mmediately halts all robot motion operations Format HALT Description A controlled stop is applied to halt all robot motion while minimizing wafer move ment on the end effector and the Z axis brake app...

Страница 308: ...2 2 Hllo Purpose Used as a non intrusive command to determine if a robot is responding to communi cations Format HLLO Description Performs no operation may be used as a non intrusive command for dete...

Страница 309: ...multiple absolute position pattern acquisitions in order to reliably establish the initial position of each axis The absolute reference sys tem for each axis of the robot is established by moving as m...

Страница 310: ...to HOME on T or Z NOTE To stop the robot from pinging and abort the HOME command enter CTRL C on the user keyboard Examples The following example homes the arm s R Axis by moving the arm to the home...

Страница 311: ...ll mechanical systems within the MagnaTran 7 robot The life test performs continuous PICKS and PLACES between Station 1 and Station 2 NOTE Stations 1 and 2 must be defined before executing a life test...

Страница 312: ...function Command Types of I O interlocks and a description of each are listed in Table 6 5 on page 6 24 characteristic The characteristic defines the active state of the I O device being assigned as d...

Страница 313: ...e INACTIVE state will cause the signal to go HI Reading that I O when the signal is LOW will cause an ACTIVE response Reading that I O when the signal is HI will cause an INACTIVE response NOTE The ac...

Страница 314: ...may be used for either DIO or Interlocks refer to MISC I O Communications on page 5 9 for tables displaying the factory assigned DIO bits Many pins on the connectors are not used It may be recommended...

Страница 315: ...I O EXT_IN0 and EXT_IN1 pins 1 and 2 The io_num 0X3 is deter mined by the example in the figure below 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0...

Страница 316: ...lines 11 10 9 and 8 represented by hex F00 The input is wired to connector MISC I O EXT_IN8 EXT_IN9 EXT_IN10 and EXT_IN11 pins 9 10 11 and 2 The io_num 0XF00 is determined by the example in the figure...

Страница 317: ...ximum hex number of the form 0x12345678 representing the specific I O channel s See the examples in the Map command for assistance in designating the io_num Note that leading zeros may be dropped from...

Страница 318: ...Pass Through MN 003 1600 00 Brooks Automation 8 50 Revision 2 2 Opposite polarity MAP DIG_1 PASSTHROUGH NOT DIGITAL_IN 0X40 TO DIGITAL_OUT 0X30 In this opposite polarity example the input which is hi...

Страница 319: ...h is defined as an R axis shaft angle of 90 and a Z position as established by the SET MOUNT Z com mand Format MOUNT Arguments None Description The actual executed sequence is Home R axis Home T axis...

Страница 320: ...REL value ARM arm Arguments R T Z Specifies the axis to be moved NOTE In single axis moves at least one argument must be specified ABS REL Specifies the reference method to be used The options are AB...

Страница 321: ...g the MOVE command The REL and ABS move types require that the axis be homed This is the nor mal mode of operation and is recommended for safe reliable motion All motions will follow the speed and acc...

Страница 322: ...of the pans with or without wafers In any case the robot always moves at with wafer slow speed and acceleration for all three axes when there is a wafer on one of the arms If both arms are empty the...

Страница 323: ...ontrol on page 6 13 NOTE The operator can force a uniform high speed throughout the PICK operation by first invoking the SET HISPD command The set speed remains in effect only until the completion of...

Страница 324: ...r must be specified only to target a slot number other than one arm The arm A or B which will perform the pick The default is Arm A The arm descriptor must be specified only to pick with Arm B The ARM...

Страница 325: ...or will be issued During a PICK operation the MagnaTran 7 robot executes the following sequence of moves Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined...

Страница 326: ...N 003 1600 00 Brooks Automation 8 58 Revision 2 2 CAUTION Setting the HISPD command prior to a PICK command will cause all motion during the PICK command to be to be executed at high speed which may c...

Страница 327: ...ing a PLACE operation is dependent on the status of the pans with or without wafers The robot always moves at with wafer slow speed and acceleration for all three axes when there is a wafer on the act...

Страница 328: ...ecuting the PLACE as being unloaded Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load For a discussion of speed and acceleration profiles for the Magn...

Страница 329: ...ti slot station the slot number must be specified only to target a slot number other than one ARM arm The arm A or B which will perform the pick The default is Arm A The arm descriptor must be specifi...

Страница 330: ...executes the following sequence of moves Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load Simultaneously moves upward and rotates to the Up position...

Страница 331: ...ISPD command The set speed remains in effect only until the completion of the action command following the set speed command CAUTION Setting the HISPD command prior to a PLACE command will cause all m...

Страница 332: ...sion 2 2 Reference Purpose References the specified axis Format REF R T Arguments R Field size 1 character Radial Axis T Field size 1 character Theta Axis Description The robot reference function will...

Страница 333: ...s Automation Revision 2 2 8 65 Release Purpose Releases servo control of the robot Format RELEASE Description The RELEASE command will perform a controlled stop of any motion in progress turn the serv...

Страница 334: ...e assigned to physical I O using the MAP command Description This command is used to remove a previously defined I O name defined using the MAP command from the I O map Removing a name from the I O ma...

Страница 335: ...guments station The number assigned to the physical station Description This command is used to remove a previously defined station and it s values defined using the SET STN command All station values...

Страница 336: ...Automation 8 68 Revision 2 2 Remove Workspace Purpose Removes a work space Format REMOVE WSPACE name Arguments name Removes a specific defined work space Description This command is used to remove al...

Страница 337: ...round task error Current error number will display 0000 if there is no error See Error Code Reference on page 8 179 NOTE Errors are automatically cleared when the next Action Set Command is issued Des...

Страница 338: ...to the maximum of ten in the Servo Position Table if there are any entries If there are no entries the RQ CPTR com mand will indicate that the capture function has not been triggered All servo positio...

Страница 339: ...w linefeed echo chksum data_rep errorlevel baudrate Arguments ALL Reports all options in the order presented in the command format mode Reports the serial I O communications mode MON Monitor mode PKT...

Страница 340: ...the baud rate 9600 Serial communication 19200 LonWorks NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Description Requests the sp...

Страница 341: ...mation Revision 2 2 8 73 The following example requests the serial I O communications mode and the com mand execution mode using the selected specifiers The status is returned as the fol lowing M B Mo...

Страница 342: ...ation number of the robot Format RQ CONFIG Response application_number Arguments application_number The Brooks Automation customized application number Description Example Command RQ CONFIG Response f...

Страница 343: ...DIO OUTPUT Y N Arguments YES DIO Output has been enabled NO DIO Output has been disabled Description This function requests the current mode set for the enabling or disabling of the Dis crete I O Out...

Страница 344: ...ird line Error number description of error Forth line Cycle count position of each axis at time error occurred Total Errors for each axis TOT date of last error time of last error axis letter total nu...

Страница 345: ...MOVING TO STN 2 R RE T TO0 Z UP SLOT 1 ARM A 10009 Hard tracking error Z motor 217015 R 371204 T 179972 Z 759 CMD 10 17 1998 00 30 store servo all ERR 10 17 1998 00 31 pick 1 R MOVING TO STN 1 R EX T...

Страница 346: ...N T AXIS LOG_R_AXIS_ERR R NOT_AT_STATION NAS LOG_T_AXIS_ERR T ARM ARM LOG_Z_AXIS_ERR Z SENSOR SNS LOG_X_AXIS_ERR X TO0 TO0 LOG_TZ_AXIS_ERR TZ TO1 TO1 TO2 TO2 STN NOT_AT_STATION N X AXIS station num e...

Страница 347: ...rpose Requests the Z Axis Home position Format RQ HOME POS Z Response value Arguments value Absolute position value in microns Range 0 to 35000 microns Description The Z Axis HOME position can be requ...

Страница 348: ...CK ALL WAF_SEN TZ Response state mode Arguments state Y Wafer Sensing is Enabled N Wafer Sensing is Disabled mode ON Robot will execute all T moves before Z moves OFF Robot will execute T and Z move s...

Страница 349: ...Specifies the echo option is off no commands echoed Description The I O echo option is used to request full or half duplex communications If the ter minal or terminal emulator displays double charact...

Страница 350: ...ow flexibility characteristics may be active HI or active LOW depending on the hardware functionality Refer to Table 6 5 io_name Specifies the physical name of the I O device assigned The I O devices...

Страница 351: ...all named I O including the definition of each I O name Command RQ IO MAP ALL Response IO MAP P_GAUGE_1 DISCRETE_IN HI DIGITAL_IN 0x00000004 IO MAP STN_1_WFR WAF_SEN HI DIGITAL_IN 0x00000040 IO MAP ST...

Страница 352: ...O being referenced See Table 6 5 for responses to each I O state and descriptions of each response NOTE At least one argument must be specified Description This command is used to monitor the current...

Страница 353: ...defined by STN_1_WFR set using the MAP command which in this case is a wafer sensor indicating that there is a wafer present RQ IO STATE STN_1_WFR IO STATE STN_1_WFR BLOCKED The following example retu...

Страница 354: ...a load is present Description The UNKNOWN status is only available if the LOAD MODE has been set to TRI When the active status is UNKNOWN the robot will move at with wafer slow speed When LOAD MODE i...

Страница 355: ...est Load Brooks Automation Revision 2 2 8 87 Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot responds that it currently assumes that...

Страница 356: ...e mode TRI Three state mode Description This command requests the mode for reporting the load status of the arm The load status is used to determine the speed of all motion commands If the SET LOAD MO...

Страница 357: ...nts mount height Field size 6 characters The vertical Z height to which the arm moves relative to the Home position when it receives the MOUNT command prior to mounting or dismounting the arm Descript...

Страница 358: ...ecifies R T and Z in the order presented in the command format ARM arm Field size 1 The arm for which the pan location is being measured If unspecified the response will be for the default arm Arm A T...

Страница 359: ...bot was commanded see RQ POS TRG to request the target position The number and order of the data fields returned will reflect the number and order of the Request Use of ALL implies that the return dat...

Страница 360: ...and Z in the order presented in the command format ARM arm Field size 1 The arm for which the end effector DESTINATION is being requested If unspecified the response will be for the default arm Arm A...

Страница 361: ...is made after an abort or the robot is standing still the last move desti nation will be displayed The number and order of the data fields returned will reflect the number and order of the Request Us...

Страница 362: ...n location Arguments ALL Specifies R T SLOT and Z in the order presented in the command for mat ARM arm Field size 1 The location of the specified arm or Arm A If unspecified the response will be for...

Страница 363: ...If the robot has been commanded by a station oriented command such as PICK PLACE or GOTO the position for the specified axis for the specified arm is returned The number and order of the data fields...

Страница 364: ...ocation z location Arguments ALL Specifies R T and Z in the order presented in the command format ARM arm Field size 1 The arm that has been commanded to move to the specified location If unspecified...

Страница 365: ...y from the position to which the robot was com manded see RQ POS ABS to request the actual position The number and order of the data fields returned will reflect the number and order of the Request Us...

Страница 366: ...wafer sens ing window in microns OUTER outervalue Length of the wafer sensing window in microns WAFER SIZE size Wafer size in microns 200000 for 200mm wafers 300000 for 300mm wafers Description Displ...

Страница 367: ...Manual Command Reference MN 003 1600 00 Request Radial Motion Sense Brooks Automation Revision 2 2 8 99 In Packet Mode R_MT SENSE INNER 10000 OUTER 20000 WAFER SIZE 300000 See Also Set Radial Motion...

Страница 368: ...RQ ALL Response REF r reference status t reference status z reference status or REF r reference status t reference status z reference status Arguments r reference status Field size 1 character Y refer...

Страница 369: ...Value Purpose Requests the second retract value R2 for the Pick and Place with an Offset com mands Format RQ RTRCT2 Response RTRCT2 value Arguments value Second retract location value in microns Desc...

Страница 370: ...the current Brooks part number and software revision number Format RQ RVSN Response RVSN version date Arguments version The Brook Automation software version number date The revision date of the soft...

Страница 371: ...tibility users see Request Configuration on page 8 74 Purpose Returns the application number of the robot Format RQ ROBOT APPLIC Response application_number Arguments application_number The Brooks Aut...

Страница 372: ...pitch Arguments ALL Specifies R T Z LOWER NSLOTS and PITCH in the order presented in the command format station Field size 4 The number of the station for which parameters are being requested ARM arm...

Страница 373: ...must be specified If the ALL argument is specified no other argument name may be specified Description Requests for the specified variable the absolute coordinate values of the various sta tion relat...

Страница 374: ...r STN station ARM arm OPTION VIA POST value POSR value Arguments station Field size 4 The number of the station for which parameters are being requested ARM arm Field size 1 The arm A or B for which p...

Страница 375: ...POST The theta coordinate of the VIA point in milli digress POSR The radial coordinate of the VIA point in microns Description This command requests the optional station related parameters NOTE Reque...

Страница 376: ...nsors arm The arm that is active for this sensor A Arm A B Arm B Arm A is the default Responses TYPE The sensor s usage during PICK and PLACE commands NONE sensor not referenced EX Extend sensor refer...

Страница 377: ...TYPE is set to R_MT Description The RQ STNSENSOR command is used to determine the current parameters of a specified sensor and to read the current state of the specified sensor If the specified stati...

Страница 378: ...tructions on the correct use of this command Format RQ SYNC PHASE ALL T1 T2 Z Response t1value t2value zvalue Arguments t1value The calculated average T1 value t2value The calculated average T2 value...

Страница 379: ...RQ SYNC ZERO T1 T2 Z Arguments position The axis to be requested T1 Theta axis outer shaft T2 Theta axis inner shaft Z Z Axis Description The MagnaTran 7 robot Home position encoder counts may be req...

Страница 380: ...ersion MN 003 1600 00 Brooks Automation 8 112 Revision 2 2 Request Version Purpose Requests the version and date Format RQ VERSION Response version date Arguments version vv vv date mm dd yy Descripti...

Страница 381: ...request the warning feature status of the CDM Format RQ WARN CDM Response WARN CDM status Arguments status The status of the CDM warning feature Y enabled N disabled Description This command is used...

Страница 382: ...Revision 2 2 Request Who Purpose To request who the robot is by it s firmware version number Format RQ WHO Response BROOKS AUTOMATION V_version Arguments version The installed firmware version Descri...

Страница 383: ...rguments name Specifies the work space name state ACTIVE or INACTIVE intlck Name of a mapped SVLV_SEN or SBIT_SVLV_SEN type input arm A B or BOTH stn 1 16 rmin Robot retract value to robot maximum ext...

Страница 384: ...ent status of the automatically created work space mode Format RQ WSPACE AUTOCREATE Response WSPACE AUTOCREATE ON OFF Arguments ON OFF Specifies the mode of AUTOCREATE operation on or off Description...

Страница 385: ...rpose This command is used to request the current setting of the work space mode of oper ation Format RQ WSPACE MODE Response WSPACE ON OFF Arguments ON OFF Specifies the mode of operation on or off D...

Страница 386: ...ftware reset of the robot s firmware that is functionally equivalent to turning the power off and then back on All parameters stored in RAM will be replaced by the values stored in non volatile memory...

Страница 387: ...rms Purpose Changes the robot armset configuration Format SET ARMS ON OFF Arguments ON Sets robot armset configuration to original values OFF Sets the state to shaft7 or shaft7z Description This comma...

Страница 388: ...d the Servo Position Table is cleared to accept new data A maximum of ten entries may be made into the Servo Position Table Attempting to store additional data will cause that data to be lost All serv...

Страница 389: ...the serial I O communications mode MON Monitor mode PKT Packet mode _RDY flow Specifies the command execution type SEQ Sequential mode BKG Background mode BKG Background Plus mode linefeed Specifies...

Страница 390: ...host controller is communicating with the robot and is rec ognized by the _RDY prompt Flow In sequential mode the robot executes the command completely before return ing a READY signal indicating tha...

Страница 391: ...The checksum algorithm starts with a zero value and adds the ASCII value of each character of the string to be checked During the summa tion process any overflow over 255 is ignored To turn off the ch...

Страница 392: ...e sets the serial I O communications mode in RAM to Monitor SET COMM M B MON The following example sets the command execution mode in RAM to Background SET COMM FLOW BKG The following example sets bot...

Страница 393: ...bot may be controlled and monitored using discrete I O lines instead of using the serial communications link In normal operation the serial con trol is disabled when the Discrete I O control is on Thi...

Страница 394: ...ide backwards compatibility with other Brooks Automation robots and should be avoided The preferred method of control ling the robot s speed is to use the SET LOAD command NOTE HISPD is always set to...

Страница 395: ...rguments value Absolute position value in microns Range 0 to 35000 microns Description The Z Axis HOME position can be changed through a command line entry NOTE Set commands only store the specified s...

Страница 396: ...r Sensing Three types of wafer sensing is available EXtend sensor REtract sen sor and R_MT Radial Motion sensor Each of these sensors is explained in PASIV Safety Feature Operation on page 6 58 The no...

Страница 397: ...et full or half duplex communications If the terminal or terminal emulator displays double characters for all user entered text IO ECHO should be set off If the terminal or terminal emulator displays...

Страница 398: ...es defined using the MAP command The values used when issuing this command are defined by the I O type being referenced their settings and a description of the settings This command is available for t...

Страница 399: ...by SLT_1_DRV set using the MAP command which in this case is a SVLV_CTRL is set to CLOSE SET IO STATE SLT_1_DRV CLOSE The current status of the I O defined by STN_4_WAFR_SEN set using the MAP com man...

Страница 400: ...sets the load status for the arm The load status is used to determine the speed of all motion commands The UNKNOWN status option is only available if the LOAD MODE is set to TRI Note that at power up...

Страница 401: ...tware will assume that arm A is carrying a wafer during all subsequent motion command until either the load is turned OFF or a PLACE is performed SET LOAD ARM A ON The robot software will assume that...

Страница 402: ...us is used to determine the speed of all motion commands The two state mode will report load status as ON or OFF The command WAF_SEN is not required after homing The default on power up is ON The thre...

Страница 403: ...lowed high speed motions are as follows The without wafer velocity and acceleration will be used only during the ini tial motions in a PICK and the final motions in a PLACE and is selected by the robo...

Страница 404: ...e as follows for the single arm the without wafer velocity and acceleration will be used only during the initial motions in a PICK and the final motions in a PLACE for the multi arm the speed selected...

Страница 405: ...height to which the arm moves relative to the Home position when it receives the MOUNT command prior to mounting or dismounting the arm Description The mount height cannot exceed the vertical positio...

Страница 406: ...the wafer sensing window in microns outervalue Length of the wafer sensing window in microns size Enter the wafer size in microns 200000 for 200mm wafers 300000 for 300mm wafers Description The Sense...

Страница 407: ...with an Offset commands Format SET RTRCT2 value Arguments value Sets the second retract location value in microns Description This command sets the value of the second retract location when using the...

Страница 408: ...e being specified Range 1 16 arm The arm A or B for which parameters are being set the default arm is A r loc The station s radial extend location in microns t loc The station s rotational axis locati...

Страница 409: ...nly store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory CAUTION If station coordinates are set using the SET STN or STORE STN c...

Страница 410: ...s Arguments station The number of the station for which parameters are being specified Range 1 16 ARM arm The arm A or B for which parameters are being set the default arm is A The ARM identifier is o...

Страница 411: ...in the Mara thon Express only VLV_SEN name Specifies the name of the valve closed sensor at the specified sta tion NONE name Eliminates an already defined sensor WAF_SEN Specifies the location and nam...

Страница 412: ...ot will cause the original setting to be loaded from non volatile memory See Also Operational Interlocks on page 6 23 for a complete description of how to setup this command and examples Request Stati...

Страница 413: ...ck with Arm B The ARM identifier is optional POST value The theta coordinate of the VIA point in millidegrees POSR value The radial coordinate of the VIA point in microns A non zero value for POSR cau...

Страница 414: ...nless the POSR value is set to non zero again See also Off Center PICK and PLACE Feature on page 6 42 Request Station Option on page 8 106 Store Station Option on page 8 167 NOTE Set commands only sto...

Страница 415: ...m A B Arm B Arm A is the default type The sensor s usage during PICK and PLACE commands NONE sensor not referenced EX Extend sensor referenced during PLACE RE Retract sensor referenced during PICK R_M...

Страница 416: ...Sense on page 8 138 The SET STNSENSOR command automatically creates a new I O in the robot I O map The new I O will name will appear as SET station arm STNSENSOR where sta tion is the tow digit stati...

Страница 417: ...is command Format SET SYNC PHASE ALL t1value t2value zvalue or SET SYNC PHASE T1 t1value T2 t2value Z zvalue Arguments t1value The calculated average T1 value t2value The calculated average T2 value z...

Страница 418: ...position The axis to be set T1 Theta axis outer shaft T2 Theta axis inner shaft Z Z Axis ALL T1 T2 Z Description CAUTION The SET SYNC ZERO command is NOT used in the normal operation of the robot Stor...

Страница 419: ...e robot to teach speed mode Format SET TEACH mode Arguments mode Sets the speed of the robot to the CDM jog speed ON Jog speed OFF Normal speeds Description This command will set the robot into the te...

Страница 420: ...s status Sets the status of the CDM warning feature ON enabled OFF disabled Description This command is used to turn the CDM warning feature on or off If the feature is enabled the host will receive a...

Страница 421: ...space name state ACTIVE or INACTIVE intlck Name of a mapped SVLV_SEN or SBIT_SVLV_SEN type input arm A B or BOTH stn 1 16 rmin Robot retract value to robot minimum retract value in microns rmax Robot...

Страница 422: ...AutoCreate Purpose This command is used to turn the automatically created work space mode of opera tion on or off Format SET WSPACE AUTOCREATE ON OFF Arguments ON OFF Specifies the mode of AUTOCREATE...

Страница 423: ...n 2 2 8 155 Set Workspace Mode Purpose This command is used to turn the work space mode of operation on or off Format SET WSPACE MODE ON OFF Arguments ON OFF Specifies the mode of operation on or off...

Страница 424: ...on Technical Support for instructions on the correct use of this command Format SET ZBRAKE state Arguments state ON Activates the Z drive brake OFF Releases the Z drive brake Description This command...

Страница 425: ...checksum DREP Stores the data reporting mode NOTE At least one argument must be specified Description Stores the current I O configuration in non volatile memory A description of both the communicati...

Страница 426: ...MagnaTran 7 1 User s Manual Store Communication MN 003 1600 00 Brooks Automation 8 158 Revision 2 2 STORE COMM M B The following example stores the current command execution mode in non volatile memor...

Страница 427: ...rete I O DIO output monitoring function Format STORE DIO OUTPUT Description Stores the current function that allows enabling or disabling of the Discrete I O Out put while the serial I O is in control...

Страница 428: ...mat STORE HOME POS Z Description The Z Axis HOME position can be stored through a command line entry NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot wi...

Страница 429: ...s If the terminal or terminal emulator displays double characters for all user entered text IO ECHO should be set off If the terminal or terminal emulator displays no characters for all user entered t...

Страница 430: ...iption This command stores the mode for reporting the load status of the arm The load sta tus is used to determine the speed of all motion commands NOTE Store commands store the current setting in RAM...

Страница 431: ...settings for the Radial Motion detection sensing limits These val ues along with the position where the R_MT type sensor is located in the chamber determine the sensing window Examples To stores the i...

Страница 432: ...alue R2 for the Pick and Place with an Offset commands Format STORE RTRCT2 Description This command stores the value of the second retract location when using the Pick with an Offset and Place with an...

Страница 433: ...ified ARM arm the arm A or B for which parameters are being stored R the station s radial extend location in microns m T the station s rotational axis location in 0 001 degrees Z the z axis location o...

Страница 434: ...s store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory CAUTION If station coordinates are set using the SET STN...

Страница 435: ...number of the station for which parameters are being specified Range 1 16 ARM arm The arm A or B for which parameters are being set the default arm is A The ARM identifier is optional Description The...

Страница 436: ...station 4 for arm A for sensor number 17 in the extended position to active high STORE STN 4 ARM A OPTION WAF_SEN EX STN_4_WAFR_SEN or STORE STN 4 A OPTION WAF_SEN EX STN_4_WAFR_SEN The following com...

Страница 437: ...sensor including station assign ment usage type active state and the sensor coordinates in the chamber to the robot s non volatile memory The STORE STNSENSOR command is used to save a sensor to a spec...

Страница 438: ...Automation Technical Support for instructions on the correct use of this command Format STORE SYNC PHASE ALL T1 T2 Z Arguments ALL Stores all values T1 The T1 value T2 The T2 value Z The Z value Desc...

Страница 439: ...red T1 Theta axis outer shaft T2 Theta axis inner shaft Z Z Axis ALL T1 T2 Z Description The MagnaTran 7 robot Home position encoder counts may be stored in the non vol atile memory NOTE Store command...

Страница 440: ...ature of the CDM Format STORE WARN CDM Description This command is used to store the current CDM warning feature status If the feature is enabled the host will receive an unsolicited error message CDM...

Страница 441: ...TE INTLCK ARM STN RMIN RMAX TMIN TMAX ZMIN ZMAX Arguments name Specifies the work space name Description Stores the current setting of the specified work space parameter or parameters for either the s...

Страница 442: ...rrent status of the automatically created work space mode Format STORE WSPACE AUTOCREATE Description This command is used to store the automatically created work spaces NOTE Store commands store the c...

Страница 443: ...pace Mode Purpose Stores to nonvolatile memory the current setting of the work space mode Format STORE WSPACE MODE Description NOTE Store commands store the current setting in RAM to non volatile memo...

Страница 444: ...r place operation Description This function picks the wafer from one station and places it to another station Use slot 1 of multi slot stations NOTE The XFER command is meant to be used with robots th...

Страница 445: ...must be specified only to pick with Arm B The ARM identifier is optional station a Station number for pick operation station b Station number for place operation STRT Start retract location NR No retr...

Страница 446: ...other station with offset values for R and T NOTE The XFER command is meant to be used with robots that have the Z Axis option installed Using the XFER command with 2 Axis robots will result in an err...

Страница 447: ...obsoleted and equivalent codes Success Codes Error 1 Command failed This is a generic command that requires the operator to have a knowledge of the events leading to the failure For example the operat...

Страница 448: ...eta value T 360 or T 0 Enter a theta position within the range of 0 to 360000 where 360000 represents 360 degrees Robot theta positions are represented in millidegrees Thus 1 degree of robot travel eq...

Страница 449: ...ispatcher Communications Errors Error 602 Command sequencer busy Wait for the robot to complete its last operation If the error persists reset the robot by issuing the RESET command or toggling power...

Страница 450: ...y that a robot emergency off EMO button has been activated and deactivate as appropriate Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Error 611 Warning CD...

Страница 451: ...slot valve for proper operation Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Error 715 Possible material on arm Error 721 Pick failed Ensure wafer sensor...

Страница 452: ...750 No station with R_MT wafer sensor found for Arm A Error 751 No station with R_MT wafer sensor found for Arm B Configuration Errors Error 800 Bad configuration name Verify robot application number...

Страница 453: ...emory system Error 861 No memory available for memory system Error 862 Partition currently in use Monitor Errors Error 950 Unexpected mail received by monitor Error 951 No monitor resources available...

Страница 454: ...or 1014 I O is write only An attempt was made to write to an output Error 1015 I O is read only An attempt was made to read from an input Inclusion Zones Workspace Errors Error 1100 Current position n...

Страница 455: ...time format Enter the time using a two digit number to represent the hour minute and second Separate the hour minute and second using the character For example thirty minutes past noon would be entere...

Страница 456: ...serial communication with remote MCC System Task Kernel Related Errors Error 2000 No memory available for multi tasker Error 2001 Multi tasking kernel error Error 2002 Bad parameter passed to multi ta...

Страница 457: ...ror log not initialized Robot Motion Control Processor Errors Error 10000 Default debug message from the MCC Error 10001 Sync error motor moving or encoder noisy Error 10002 MCC board memory allocatio...

Страница 458: ...ues on page 10 12 Error 10010 MCC soft tracking error Error 10011 Error motor is already moving Error 10012 Error motor is not configured Error 10013 Error motor is not referenced Home the robot by is...

Страница 459: ...location Refer to the Restore the Home Position to the Factory Settings on page 9 71 Error 10024 Error MCC watchdog timed out Error 10025 Error defective R_MT type wafer sensor Verify that the radial...

Страница 460: ...mber 002 3758 01 MISC I O connector pins 23 and 24 Error 10030 Error excessive current detected Error 10031 Warning Z Home Sensor position moved Error 10032 MCC MAP failed Error 10034 Error encoder mi...

Страница 461: ...air and replacement Brooks Automation offers training for troubleshooting and repair of the MagnaT ran 7 Only qualified properly trained persons should perform any maintenance or repair procedures Cha...

Страница 462: ...d understand Chapter 2 Safety NOTE The following Preventive Maintenance Schedule is based on a certified clean dry environment The user should adjust the Preventative Maintenance Schedule to account f...

Страница 463: ...ainte nance contact your local Brooks sales representative or call Brooks Automation Customer Support at 1 978 262 2900 Required Tools PC with a serial terminal program with log file capture capabilit...

Страница 464: ...ommand SET COMM FLOW SEQ M B MON LF ON and the command SET IO ECHO Y Open a log file to save the responses from the robot name the file with the last four digits of the Brooks serial number and the da...

Страница 465: ...Y CMD see Request History on page 8 76 to download the content to the log file 5 Firmware Revision With the log file from Step 1 still open issue the command RQ VERSION to download the firmware revisi...

Страница 466: ...es Flashlight Foam swabs and or lint free cleanroom wipes Follow these procedures to inspect the Ball Screw 1 Attach a PC to the robot with the Serial I O cable 2 Open a terminal software program and...

Страница 467: ...d MOVE Z ABS 35000 for 25mm robots use the command MOVE Z ABS 25000 8 Once the maximum Z position is reached remove power from the robot 9 Disconnect the Power Cable Serial I O Cable CDM Cable and Pow...

Страница 468: ...vers removed look for wear and signs of pinching along the length of the Encoder and Motor Coil cables For the Encoder cable white inspect from the Encoder Buffer Boards down to the Coil cable shelf F...

Страница 469: ...e covers for cracks or damage 2 Turn power to the robot off Remove the Power Cable Serial I O Cable CDM Cable and Power Pak if applicable 3 Remove covers 4 Inspect the inside surface of the covers for...

Страница 470: ...se motion errors during operation Required Tools none Follow these procedures to inspect the Wrist Bands 1 Extend the robot into a load lock or process module so that the End Effector is readily avail...

Страница 471: ...ary to inspect these pads to prevent wafer slippage and loss of repeatability Required Tools none Follow these procedures to inspect the Pads of the End Effectors 1 Extend the end effector into the lo...

Страница 472: ...Inspection MN 003 1600 00 Brooks Automation 9 12 Revision 2 2 Connection Inspection Inspect all connections to the robot PowerPak and power supply Plugs should be fully seated and mating hardware tig...

Страница 473: ...re hazardous materials are present and surfaces may be contaminated by those materials Refer to the facility s Material Safety Data Sheets for those materials to determine proper handling 1 Remove any...

Страница 474: ...3 1600 00 Brooks Automation 9 14 Revision 2 2 CAUTION Wipe must be moistened only squeezing the wipe should not cause any water to drip Do not allow water to come in contact with bearings seals etc 4...

Страница 475: ...s Steel pads use Isopropyl Alcohol Quartz pads use Isopropyl Alcohol Lint free clean room Wipes Clean room gloves Cleaning Kal rez Procedure DANGER The MagnaTran 7 may be used in an environment where...

Страница 476: ...minated by those materials Refer to the facility s Material Safety Data Sheets for those materials to determine proper handling 1 Dampen a cleanroom wipe with Isopropyl CAUTION Wipe must be moistened...

Страница 477: ...or plastic pick Isopropyl Alcohol 100 DI Water Krytox LVP Vacuum Grease Procedure Strategy The o ring replacement procedure requires removal of the existing o ring inspection of the seal area repair...

Страница 478: ...icate the o ring using Krytox LVP grease there should be no lumps of grease on the o ring 4 Install the o ring in the groove provided The o ring groove is a dove tail slot with the narrow portion of t...

Страница 479: ...Cleaning Brooks Automation Revision 2 2 9 19 ring is inserted 5 In applications where the exposed surface of the o ring will be exposed to atmosphere after installation doors lids etc the exposed surf...

Страница 480: ...ector Alignment MN 003 1600 00 Brooks Automation 9 20 Revision 2 2 End Effector Alignment Perform the following procedures to check the end effector 1 Verifying Flatness of Robot s End Effector on pag...

Страница 481: ...er s Manual Maintenance and Repair MN 003 1600 00 Power Pak Maintenance Brooks Automation Revision 2 2 9 21 Power Pak Maintenance Replace the Power Pak using the following procedure Power Pak Replacem...

Страница 482: ...dual Component Level Parts Brooks Priority Parts Service PPS Preventive Maintenance PM Parts Brooks Factory Repair Services Finally if MagnaTran 7 downtime is not critical individual replacement parts...

Страница 483: ...agnaTran 7 to the Depot Field Repair level are available from Brooks Automation at the Chelmsford Ma facility Contact Brooks Automation for information about these classes Priority Parts Service The n...

Страница 484: ...alibration Procedure 9 36 Personality Board Replacement 9 37 Wrist Band Adjustment 9 39 T1 T2 Axis Driver Board Replacement 9 41 Z Driver Board Replacement 9 43 Z Encoder Replacement 9 45 I O Board Re...

Страница 485: ...robot mounting style Removal Replacement Procedure 1 If this procedure is being used to replace a MagnaTran 7 with a MagnaTran 7 robot in the same cluster tool all station values from the old robot c...

Страница 486: ...ure to take the proper precautions before moving it could result in personal injury 3 Unscrew the twelve captive M6 mounting bolts from the chamber do not remove the mounting bolts from the robot s mo...

Страница 487: ...ed Arm Mounting Bracket Removal Replacement Procedure WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Ha...

Страница 488: ...ing fixture Mag 7 1 LeapFrog arms T1 has 3 screws T2 has 2 screws Mag 7 1 BiSymmetrik arms T1 has 4 screws T2 has 2 screws Mag 6 arms remove M4 SHCS 12 places 6 Using the mounting fixture remove the a...

Страница 489: ...l Hazards on page 2 7 WARNING Failure to ensure that the robot is not under remote control could result in automatic operation of the robot resulting in personal injury Removal 1 Loosen but do not rem...

Страница 490: ...30 Revision 2 2 2 While holding the end effector in place tighten the 4 in line flathead screws starting with the 2 inside screws Do not tighten the single flathead screw it is for adjustment only 3 V...

Страница 491: ...Effector Replacement Brooks Automation Revision 2 2 9 31 Figure 9 1 End Effector Mounting Hardware Installation Screws flathead 4 places Pan Mounting Plate bottom side Wrist Mounting Plate Installati...

Страница 492: ...r replacing both types of supports Required Tools Performing the Wafer Support Removal Replacement procedure requires the follow ing tools A set of Allen wrenches in metric sizes A Philips head screw...

Страница 493: ...e pads according to the maintenance schedule is recommended There are three different styles of end effector pads used on MagnaTran robots metal pins grommet style and adhesive backed The metal pins d...

Страница 494: ...t one side has a molding burr on it This burr must face down away from the wafer Be sure to orient the pad as shown in the figure so that the molding burr is on the bot tom of the end effector where i...

Страница 495: ...n Revision 2 2 9 35 Adhesive Backed Pad Replacement The adhesive backed pads may be pulled from the end effector and the metal surface cleaned with ethanol or isopropyl alcohol Carefully remove the ba...

Страница 496: ...Technical Support before beginning this procedure Required Tools and Test Equipment Performing this procedure does not require any tools Setup Strategy This procedure will calibrate the robot All cur...

Страница 497: ...power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off power to the robot and disconnect the power and co...

Страница 498: ...ard off of the header pins Replacement Procedure 1 Connect the PC 104 Board to the new Personality Board Replace the nuts locks and flats 4 places Important The PC104 Card contains all the operating p...

Страница 499: ...tion Dial Caliper or small 6 scale 1 16 resolution PROCEDURE 1 Measure the wrist band thickness as shown in Figure 9 4 Use a small scale or dial caliper to determine the proper specification from Band...

Страница 500: ...he tab moves slightly inward observe the force gauge reading If the force gauge reads less than specified in Table 9 4 adjust the spring loaded screw clockwise 1 8 to 1 4 turn at a time Repeat step 2...

Страница 501: ...off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off the robot and disconnect the power and com...

Страница 502: ...M3 x 14mm SHCS with M3 flat and lock washer 4 places that mount the T1 T2 driver board to the bottom of the PCB Mounting Bracket See Figure 12 4 6 Disconnect the T1 T2 driver board from the Personali...

Страница 503: ...r is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off power to the robot and disconnect the power and commun...

Страница 504: ...osen the M3 hardware on the left side 2 places and slide out the Z Driver board See Figure 12 7 6 Disconnect the Z Driver board from the Personality board Replacement Procedure 1 Connect the Z Driver...

Страница 505: ...nch Small Phillips head screwdriver 4 40 3 32 hex wrench Loctite removable strength 242 Removal Procedure WARNING When equipment is off and power is secured per facilities lockout tagout procedure the...

Страница 506: ...eta driver PCB fan J1 I O power J2 PWR T1 motion P1 T2 motion P2 Z power P4 Remove the 4 M3 SHCS that mount theta driver PCB Disconnect theta driver PCB from the personality PCB 7 Disconnect the Z enc...

Страница 507: ...t by installing and tighten ing 4 40 x 3 16 SHCS qty 2 with 1 drop of removable strength Loctite 242 13 Connect the Z encoder cable to the personality PCB J4 Connect the ground lead to the robot chass...

Страница 508: ...ecured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off power and disconnect the power and communications connection...

Страница 509: ...acement Procedure 1 Plug in the I O Board to the Personality Board P3 2 Plug in J6 connector on the back of the board 3 Install the I O board using the thumbscrews 2 places 4 Connect the cables from t...

Страница 510: ...040 feeler gauge Removal Procedure 1 Issue the command HOME R T 2 Issue the command SET SERVOS OFF 3 Install the arm mounting fixture to the armset ensuring that the arms are sym metrical about the ar...

Страница 511: ...h ers and M3 flat washers 11 Connect the single cable to the z home sensor PCB P14 12 Ensure that the robot power cable and cdm cable are connected to the robot 13 Power up the robot Caution the arm m...

Страница 512: ...hard stops qty 2 and the bottom of the robot T1 T2 motor assembly If these dimensions are not correct see Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 Move the arms to the maximum Z...

Страница 513: ...y to remove the robot to perform this repair procedure 1 Turn off power to the robot and disconnect the power and communications connections to the robot 2 Remove the protective covers as shown in Fig...

Страница 514: ...microswitch activation point clicking sound and the bolt as shown in Figure 9 6 See Appendix B Tooling on page 11 3 for gap setting fixture Lower hard stop Issue the following command HOME ALL Adjust...

Страница 515: ...the Z Upper microswitch activation point clicking sound and the bolt as shown in Figure 9 7 See Appendix B Tooling on page 11 3 for gap setting fixture Upper hard stop Move the robot to its maximum Z...

Страница 516: ...cedure WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off power and...

Страница 517: ...If necessary reconnect robot power and visually inspect the red LED s for illumination 6 Visually inspect the entire robot board set frame and interconnecting cables for any short circuits That is a...

Страница 518: ...version and configuration number by opening a log file and entering the following commands RQ CONFIG ensure the robot is set to ARMS ON for armset configuration data as opposed to SHAFT7Z configuratio...

Страница 519: ...ION Observe proper ESD precautions when handling any electronic device 6 Carefully disconnect the PC 104 board from the Personality Board by removing the 4 40 nuts and split and flat washers 2 places...

Страница 520: ...following commands Encoder and Sync Phase Parameters SET ENCODER T1 ALL sinmin sinmax cosmin cosmax STORE ENCODER T1 ALL SET ENCODER T2 ALL sinmin sinmax cosmin cosmax STORE ENCODER T2 ALL SET SYNC P...

Страница 521: ...G xx xx xx xx xx xx GIVE BIRTH 8 Enter and store the station coordinates using either the CDM or serial commu nication SET STN station ARM arm R loc T loc Z bto LOWER NSLOTS PITCH STORE STN station AR...

Страница 522: ...04 CPU Board Replacement MN 003 1600 00 Brooks Automation 9 62 Revision 2 2 SET STNSENSOR station ARM arm TYPE type ACT act SEN sensor POS R r_value POS T t_value STORE STNSENSOR sensor ARM arm ALL Th...

Страница 523: ...re WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn of the power supp...

Страница 524: ...e power connector from the robot power supply to the Power Pak Plug in the cable from the Power Pak to the robot power connector The PowerPak contains sealed lead acid batteries Dispose of or recycle...

Страница 525: ...to 24V IN or the robot inter face panel Install power cable from the 24VDC power supply to the 24V IN of the Power Pak Power supply must be off while making connections 7 Turn on the power supply 8 T...

Страница 526: ...ire any tools Setup Strategy This procedure will find the encoder values and report them to the operator Three runs of each procedure are performed and then the average value will be set Read the enti...

Страница 527: ...f all three responses and input the average values using the following command SET ENCODER T1 ALL sinmin sinmax cosmin cosmax 6 Store the values using the following command STORE ENCODER T1 ALL Find T...

Страница 528: ...e of the response is as follows ENCODER T2 SINE MIN 1425 SINE MAX 1348 COSINE MIN 1286 COSINE MAX 1254 The values should be between 1500 and 1950 for MagnaTran 7 1 robots Record the values for future...

Страница 529: ...cedure Required Tools and Test Equipment Performing this procedure does not require any tools Setup Strategy This procedure will move the Z drive upwards and then the T1 and T2 shafts simul taneously...

Страница 530: ...use the FIND PHASE T or FIND PHASE Z to find the indi vidual axis phase values NOTE To stop the robot from continuing through the stepping portions of the FIND PHASE enter CTRL C at the user keyboard...

Страница 531: ...well as SYNC PHASE of the robot with the values recorded on the QR to be sure that the values entered for the SYNC ZERO are viable If the values do not coin cide then the home position must be found...

Страница 532: ...46136 T2 4 162485 Z 0 106358 Verify that the values match the QR 6 Cycle power 7 Request the Sync Zero values and verify they are correct 8 Home the robot and verify the home location is accessible NO...

Страница 533: ...formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 1 Install the mounting fixture to the armset Observe the wrist plates Visually verify that the wrist plate...

Страница 534: ...t so that the forearms touch the shims creating a 0 062 gap between the flange and forearm Loosen and manually locate the Z home flag located to the right of the I O board on the the T2 motor housing...

Страница 535: ...Hazards on page 2 7 1 Reset the home position where Pan A is located 180 opposite the power con nector and record the values for SYNC ZERO 2 Record the values for all the stations R T Z LOWER SLOTS P...

Страница 536: ...at a Type 2 hazard category See Electri cal Hazards on page 2 7 1 Enter the following command to home the Z axis HOME ALL 2 Enter the following command to move in the absolute Z direction 10mm this e...

Страница 537: ...t the station values and the station value options for sta tion 1 by using the following CDM path INFO STATIONS SELECT ARM SELECT STATION 2 Record the station values and station value options for stat...

Страница 538: ...set tings for the Magnatran 7 robot are Port Configuration RS 232 or RS 422 Handshake No Baud Rate 9600 Parity Bits None Data Bits 8 Stop Bits 1 Parity None RTS CTS No XON XOFF No 2 When serial commun...

Страница 539: ...5 to 30 seconds to reset RESET Downloading Station Values Using a Computer 1 The station values and station options obtained in the previous section can be input into the desired robot using the follo...

Страница 540: ...Downloading Station Values MN 003 1600 00 Brooks Automation 9 80 Revision 2 2 STORE STN station ARM B ALL STORE STN station ARM A OPTION SAFETY STORE STN station ARM A OPTION PUSH 5 Repeat Step 1 thro...

Страница 541: ...ct the telephone style connector at the CDM base 3 Hold down the Self Test Pitch and Home keys at the same time while plug ging in the connector at the bottom of the unit an assistant may be needed to...

Страница 542: ...he SAVE key 4 The screen now should display the communications parity Press NEXT if necessary until Even is displayed and 5 Press SAVE 6 The screen now should display the character format Press NEXT i...

Страница 543: ...he correct usage of REMOTE EXE to perform the software update Section File Lists lists the files that should reside on the Disk On Chip storage device on the robot for each software release version Th...

Страница 544: ...ion prior to V2 2 The following procedures use the REMOTE EXE file transfer utility When upgrading or downgrading and at least one of the versions is prior to V2 20 REMOTE U should not be initially us...

Страница 545: ...e robot as fol lows COPY REMOTE EXE RC R1 EXE COPY RC R1 EXE RC REMOTE EXE DEL RC R1 EXE 5 Power cycle the robot and begin the standard upgrade procedure using REMOTE U from the host Downgrading from...

Страница 546: ...the robot with the new software 1 When upgrading or downgrading between software versions where one is prior to V2 20 two errors may be reported Database Checksum Error and Cannot open Current Config...

Страница 547: ...th the Brooks Automation MagnaTran 7 Robot is a two step process The first step is the initial troubleshooting of the robot which is used to determine the specific area where the problem exists The se...

Страница 548: ...pes Observed Symptoms Page Number Communication No response from robot using PC No response from robot using CDM See Communication Related Issues on page 10 4 Power 24 volt LED not illuminated Failure...

Страница 549: ...erate error code messages when operating in the background communication flow setting The robot MUST be returned to the original communication flow setting after troubleshooting Refer to the Magnatran...

Страница 550: ...for proper connection and continuity Malfunctioning CDM Verify robot s communication settings are properly set and stored per requirements of system host controller software by issuing the command RQ...

Страница 551: ...e Resolved NO NO NO NO NO NO YES YES YES YES YES YES Check for proper connection between robot and CDM Was Issue Resolved Was Issue Resolved YES YES NO NO The CDM must be reprogrammed Was Issue Resolv...

Страница 552: ...al computer or CDM Troubleshooting Process Check facilities power to power supply Verify power supply rating is 24 volt 30 amperes Verify voltage output at power supply is 24 2 volts Verify voltage at...

Страница 553: ...he Internal Power Cable and the Theta Driver PCB Verify connection between the I O and Personality PCB s Was Issue Resolved Was Issue Resolved Was Issue Resolved No communication through serial connec...

Страница 554: ...Set on page 3 23 Verify armset wrist band tension is adjusted properly Refer to Wrist Band Inspection on page 9 10 Inspect armset wrist bearings for missing ball bearings Inspect armset elbow bearings...

Страница 555: ...evel and not scraping any objects Was Issue Resolved Verify that the armset mounting bolts are torqued to 75 88 in lbs Was Issue Resolved Verify that armset was installed properly Was Issue Resolved V...

Страница 556: ...n to prevent interference Verify system alignment has been taught properly Refer to Chapter 7 Alignment and Calibration Verify armset mounting bolts are torqued to 75 88 in lbs Verify armset is instal...

Страница 557: ...Was Issue Resolved Verify that the armset mounting bolts are torqued to 75 88 in lbs Was Issue Resolved Verify that armset was installed properly Was Issue Resolved Verify that the wrist band tension...

Страница 558: ...Verify that motion is repeatable Refer to Position Repeatability Test on page 10 33 Verify system alignment has been taught properly Refer to Chapter 7 Alignment and Calibration Verify end effector i...

Страница 559: ...e 10 29 Verify the application number is correct Reference the robot QR or contact Brooks Technical Support for the correct robot application number Symptoms Robot hits Z hard stops during operation i...

Страница 560: ...rly Was Issue Resolved Verify that the wrist band tension is adjusted properly Was Issue Resolved Was Issue Resolved DONE CALL BROOKS TECHNICAL SUPPORT DONE Inspect the wrist bearings for excessive we...

Страница 561: ...Track ing Error Symptoms T1 T2 shafts do not move together while pinging in theta direction Troubleshooting Process Inspect robot shafts for a physical obstruction in the theta direction Replace thet...

Страница 562: ...gh DS6 are lit on the Theta Driver PCB Verify that the arms have been removed from the robot Are the LED s lit Issue the command RDMCC 0x0 Did the robot respond Is the DC DC Converter Shorted Verify t...

Страница 563: ...PCB Perform a Z Brake Binding Test to determine if there is excessive friction in the Z Drive Are the LED s lit Issue the command RDMCC 0x0 Did the robot respond Is the DC DC Converter Shorted Verify...

Страница 564: ...002 1655 01 designation P5 Check cable for proper continuity Verify red LED of Z home flag sensor board designation U2 illuminates when the Z home flag sensor designation U1 is blocked If not replace...

Страница 565: ...is homed Did the Sensor Trip Reset the Z Home Flag Limit Switches and Hard Stops The Personality PCB has failed The Z Driver PCB has failed Was There Any Movement in the Z Axis When the Command Was I...

Страница 566: ...er the host controller requirements Verify that the operational interlock is set to the appropriate pin of the Miscellaneous I O connector per the host controller requirements Verify that the operatio...

Страница 567: ...ements Verify that the interlock s state will toggle using RQ IO STATE ALL while physically changing the interlock s state Verify that the interlocked items are operational i e slot valves can open wa...

Страница 568: ...sical obstruction interfering with robot arms and wafer placement Verify process module and its wafer pins are level Verify robot wrist bands are adjusted properly Inspect robot wrist bearings and elb...

Страница 569: ...er pins are level Verify that the wrist bands are aligned properly Inspect the robot wrist bearings and elbow bearings for excessive wear Verify that the Encoder and Sync Phase values are consistant w...

Страница 570: ...Mag6 halt configuration by issuing the command RQ COMPATIBILITY ALL If not set and store the cor rect compatibility by issuing the commands SET COMPATIBILITY HALT MAG6 and STORE COMPATIBILITY HALT MAG...

Страница 571: ...HALT Compatibility Set To The robot will remain servoed in all axes after the HALT command has been issued The robot will deservo the Theta and Z Motors and engage the Z Brake after the HALT command h...

Страница 572: ...esired theta station value Troubleshooting Process Verify station values are correct Verify correct coordinate system is being used by issuing the command RQ COM PATIBILITY ALL Change coordinate syste...

Страница 573: ...Z height is normally 25 mm or 35 mm pending the user application The units of measure for the following command are micrometers 25 mm 25000 units 4 Turn the servos off by issuing the following command...

Страница 574: ...n the Z direction measure the distance between the bottom of the robot armset and the top of the transfer chamber Record the measurement value 8 If the distance measured is less than 4 mm then the Z b...

Страница 575: ...e last 7 lines on this robot response list are shown below Pan B ctr of mass Y coordinate Pan B pad offset total z travel mass seen by the z motor in kg Z motor spring constant Extension arm Angle Ret...

Страница 576: ...cations port 2 Ensure the robot is in the home position by issuing the command HOME ALL 3 Enter the appropriate trace settings by issuing the following commands TRACE CLEAR TRACE ADD ZACTTRQ TRACE TRI...

Страница 577: ...ll be retained in the robot until the TRACE CLEAR command is issued START TRACE 9 Move the robot downward to the minimum Z height by issuing the following command The minimum Z height is 0 mm The unit...

Страница 578: ...onnector of the robot 3 Secure the 24 volt power lead red of the MagnaTran 7 power cable to the 24 volt DC terminal of the power supply Reference Figure 1 4 Secure the 24 volt return lead black earth...

Страница 579: ...he command GOTO R EX WARNING Warning Ensure that the slot valve is open and any physical obstruc tions are removed prior to extending the robot armset 4 Request the present absolute position of the ro...

Страница 580: ...munication or the CDM 1 To request the arm state via serial communication issue the following com mands RQ CONFIG this command will provide the application number presently entered in the robot If the...

Страница 581: ...by issuing the following commands RQ ENCODER T1 ALL RQ ENCODER T2 ALL The robot will respond with four values for each encoder request 3 Compare the encoder T1 and encoder T2 values with those locate...

Страница 582: ...ow the Lower Cover Mount Assembly to drop down 5 Locate the theta driver board Locate the FET designated Q1 and measure its resistance by applying an ohmmeter across pin 1 and pin 3 of the FET Record...

Страница 583: ...tly allow the Lower Cover Mount Assembly to drop down 5 Locate the Z driver board Locate the FET designated Q1 and measure its resis tance by applying an ohmmeter across pin 1 and pin 3 of the FET Rec...

Страница 584: ...Troubleshooting MagnaTran 7 1 User s Manual Checking for FET Short Circuits on the Z Driver Board MN 003 1600 00 Brooks Automation 10 38 Revision 2 2 This Page Intentionally Left Blank...

Страница 585: ...are included to provide the user with a single location for specific information related to the MagnaTran 7 Robot Contents Appendix A Factory Default Settings 11 2 Appendix B Tooling 11 3 Appendix C T...

Страница 586: ...a list of all the factory default set ting Refer to the QR to reset to the default Serial Communications Default Settings Pin Assignments RS 422 See Serial Communication SIO1 on page 5 5 If using the...

Страница 587: ...or use during transport and maintenance Table 11 2 Tools and Fixtures Part Number Description Dependent on arm set Arm Mounting Shipping Bracket 001 1865 01 Serial or Null Modem Cable 000 1262 01 Dial...

Страница 588: ...rs Foot Pounds 1 4 20 22 587 16 67 15 808 11 67 11 856 8 75 5 16 18 46 860 34 58 27 664 20 42 21 454 15 83 3 8 16 83 558 61 67 44 038 32 50 33 875 25 00 7 16 14 134 371 99 17 65 492 48 33 1 2 13 203 2...

Страница 589: ...s Automation MagnaTran 7 Series robot Table 11 3 compares the commands used to operate the MagnaTran 6 and MT5 VT5 to the MagnaTran 7 robot and notes any behavioral differences Table 11 4 and Table 11...

Страница 590: ...mes to a control stop and the arm set servos disengage armset is free moving In Mag 6 mode the robot comes to a control stop and the arm set servos remain engaged armset is under servo control Hllo N...

Страница 591: ...nitor Mode and Packet Mode RQ CPTR response is VT5 CPTR R 1234567 T 1234567 Z 1234567 L Mag 6 R 1234567 T 1234567 Z 1234567 L RQ IO ECHO VT5 Mag 6 Mag 7 command format is the same but the return forma...

Страница 592: ...xxxxxx Packet Mode response to RQ POS ABS ALL VT5 and MAG6 POS ABS xxxxxx xxxxxx xxxxxx RQ POS STN M6 7 are same ARM is optional M6 7 are same ARM is optional No ARM should be used RQ POS STR M6 7 ar...

Страница 593: ...V5 M6 7 are same SET LOSPD V5 M6 7 are same V5 M6 7 are same V5 M6 7 are same SET IO ECHO V5 M6 7 are same V5 M6 7 are same V5 M6 7 are same SET IO STATE M6 7 are same M6 7 are same N A SET LOAD M6 7...

Страница 594: ...are same STORE STN M6 7 are same ARM is optional M6 7 are same ARM is optional No ARM should be used STORE STN OPTION M6 7 are same M6 7 are same N A STORE STNSEN SOR M6 7 are same ARM is optional M6...

Страница 595: ...VT5 Error No Existing MT5 VT5 Error Code Error No Mag 7 70 77 Error Code 411 Interlock Calc Overflow 408 Bad R Position 412 Invalid Arm Locate No equiv 413 Invalid Wafer Size No equiv 501 Internal Err...

Страница 596: ...Error Code Comparison Mag 6 60 Error No Existing Mag 6 60 Error Code Error No Mag 7 70 77 Error Code 411 Station Not Initialized 416 Station Not Initialized 412 Offset Too Large 417 Offset Too Large 4...

Страница 597: ...h none none Serial Communi cations Mode Monitor SET COMM M B MON STORE COMM M B RQ COMM M B Command Flow Mode Sequential SET COMM FLOW SEQ STORE COMM FLOW RQ COMM FLOW Terminal Echo Mode ON SET IO ECH...

Страница 598: ...Wafer Speed Compatibility VT5 SET COMPATIBILITY SPEED VT5 STORE COMPATIBILITY SPEED RQ COMPATIBILITY SPEED Sets the speed for MOVE and GOTO action commands to be com patible with VT5 action is perfor...

Страница 599: ...ECHO Y STORE COMM ECHO RQ COMM ECHO Linefeed After Carriage Return ON SET COMM LF ON STORE COMM LF RQ COMM LF Error Reporting Level 2 SET COMM ERRLVL 2 STORE COMM ERRLVL RQ COMM ERRLVL Data Reporting...

Страница 600: ...ILITY ALL MAG6 Sets the speed for MOVE and GOTO action commands to be com patible with MAG6 pan speed is always used when LOAD is OFF Response Com patibility MAG6 SET COMPATIBILITY RESP MAG6 STORE COM...

Страница 601: ...ks Automation Quality Report QR which lists all the factory assigned parameters In the occurrence that the user re configures the robot the new parameters should be recorded below in the event that a...

Страница 602: ...Brooks Automation 11 18 Revision 2 2 Table 11 9 Current HOME Settings DATE Z Axis Table 11 10 User Setting Sync Zero Home Position DATE SYNC ZERO T1 SYNC ZERO T2 SYNC ZERO Z Table 11 11 Encoder Value...

Страница 603: ...MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix E User Setting Tables Brooks Automation Revision 2 2 11 19 Table 11 13 Push and Safety Values for Station DATE STATION R PUSH SAFETY...

Страница 604: ...oks Automation 11 20 Revision 2 2 Table 11 14 Station Assignments STN DATE Station Name Arm R Extend Retract millimeters T Theta degrees 3 Axis BTO millimeters 3 Axis LOWER millimeters 1 A B 2 A B 3 A...

Страница 605: ...24V RET 5 EXT_IN4 30 24VDC 6 EXT_IN5 31 DRV_OUT0 7 EXT_IN6 32 DRV_OUT1 8 EXT_IN7 33 DRV_OUT2 9 EXT_IN8 34 DRV_OUT3 10 EXT_IN9 35 DRV_OUT4 11 EXT_IN10 36 DRV_OUT5 12 EXT_IN11 37 DRV_OUT6 13 EXT_IN12 3...

Страница 606: ...___________________________________________________________________ _____________________________________________________________________ ______________________________________________________________...

Страница 607: ...___________________________________________________________________ _____________________________________________________________________ ______________________________________________________________...

Страница 608: ...either of two possible RS 422 communication settings This procedure identifies the switch loca tions and positions on the MagnaTran 7 1 robot Relay I O board set that provide either RS 232 or RS 422 c...

Страница 609: ...O board switch selects two different connector pin outs as described below RS 422 Pin outs With the personality switch down RS 422 and I O board switch up the fol lowing table shows the RS 422 connec...

Страница 610: ...ngs Switch Position Function Personality Board UP DOWN Selects operation for Serial I O RS 232 if running RS 232 then Relay I O Board switch must be set to UP RS 422 Relay I O Board UP DOWN Selects op...

Страница 611: ...of the following two aspects of the robot 1 To utilize various robot operational interlocks 2 To operate the robot under Digital I O DIO control Reference Discrete I O Control DIO on page 6 45 for ad...

Страница 612: ...T 0x02 3 INPUT 2 DIR2_EXT_INHIBIT 0x04 4 INPUT 3 DIR3_EXT_INHIBIT 0x08 5 INPUT 4 DIR4_EXT_INHIBIT 0x10 6 INPUT 5 DIR5_EXT_INHIBIT 0x20 7 INPUT 6 DIR6_EXT_INHIBIT 0x40 8 INPUT 7 DIR7_EXT_INHIBIT 0x80 9...

Страница 613: ...tput J7 Connectors Discrete I O Outputs J7 Generic Function Relay I O Operational Interlock Name Hex Address 1 OUTPUT 0 DIR2_GV_CLS_INHBT 0x01 2 OUTPUT 1 DIR4_GV_CLS_INHBT 0x02 3 OUTPUT 2 DIR6_GV_CLS_...

Страница 614: ...ated in the main 24 volt power cable of the robot These pins are internally linked to the Relay I O board at the J6 connector The J6 connector is internal to the robot The pin outs functions and hexad...

Страница 615: ...other related documents provided with this manual are generic and may not reflect specific builds of the robot Refer to the QR shipped with the robot and the Purchase Order for the exact part number...

Страница 616: ...Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 2 Revision 2 2 Illustrated Parts Catalog Figure 12 1 Battery Pack Installation 2 1...

Страница 617: ...1600 00 Illustrated Parts Catalog Brooks Automation Revision 2 2 12 3 Table 12 1 Battery Pack Installation Parts List Item No Part Number Description Qty 1 002 4913 02 MagnaTran 7 1 Standard Drive 1...

Страница 618: ...Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 4 Revision 2 2 1 Figure 12 2 Protective Cover Removal 2 Front View Rear View...

Страница 619: ...l Attached Drawings MN 003 1600 00 Illustrated Parts Catalog Brooks Automation Revision 2 2 12 5 Table 12 2 Protective Cover Parts List Item No Part Number Description Qty 1 002 2312 03 REAR COVER 1 2...

Страница 620: ...d Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 6 Revision 2 2 Figure 12 3 Limit Switches 9 7 8 9 13 14 10 11 12 2 1 3 2 6 4 5 6 4 5 6 4 5 6 4 5 10...

Страница 621: ...Lower Limit Switch Assembly roller switch with cable 1 4 802 4010 10 Screw PHS M2 x 10mm slotted SST 8 5 802 0000 10 Washer M2 Lock SST 8 6 802 0000 00 Washer M2 Flat SST 8 7 002 2977 02 Top Z Travel...

Страница 622: ...Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 8 Revision 2 2 Figure 12 4 Lower Cover Mount I O Board Removal 2 1 3...

Страница 623: ...on 2 2 12 9 Table 12 4 Lower Cover Mount I O Board Parts List Item No Part Number Description Qty 1 002 2411 02 LOWER COVER MOUNT ASSEMBLY 1 2 002 4674 02 002 4674 05 002 4674 06 002 4674 07 Marathon...

Страница 624: ...Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 10 Revision 2 2 Figure 12 5 Theta Board Removal 3 4 5 6...

Страница 625: ...ts Catalog Brooks Automation Revision 2 2 12 11 Table 12 5 Theta Board Parts List Item No Part Number Description Qty 3 002 3754 01 T1 T2 Board Assembly 1 4 803 5014 00 SCREW SHCS M3 0 X 14mm LG SST 4...

Страница 626: ...Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 12 Revision 2 2 5 2 3 4 7 8 9 Figure 12 6 Personality PC104 Board Removal 6...

Страница 627: ...tem No Part Number Description Qty 2 803 5014 00 SCREW SHCS M3 0 X 14mm LG SST 4 3 803 0000 10 WASHER M3 SPLIT LOCK ST 4 4 803 0000 00 WASHER M3 FLAT SST 4 5 002 3752 01 Personality Board Assembly 1 6...

Страница 628: ...Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 14 Revision 2 2 Figure 12 7 Z Driver Board Removal 1 2 3 4...

Страница 629: ...Brooks Automation Revision 2 2 12 15 Table 12 7 Z Driver Board Parts List Item No Part Number Description Qty 1 002 4234 XX Z Driver Board Assembly 24 48V Type 1 1 2 803 5014 00 SCREW SHCS M3 0 X 14m...

Страница 630: ...Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Brooks Automation 12 16 Revision 2 2 Figure 12 8 Radial Axis Board Removal 1 5 2 4 3 2 3 4...

Страница 631: ...omation Revision 2 2 12 17 Table 12 8 Radial Axis Board Parts List Item No Part Number Description Qty 1 001 1957 03 Radial Axis HOME Sensor Board 1 2 803 5008 00 SCREW SHCS M3 0 X 8mm LG SST 4 3 803...

Страница 632: ...g 7 11 SD 002 3756 01 High Side I O Board SD 002 3758 01 Low Side I O Board SD 002 7394 01 Marathon Express I O Board End effectors and arms are specialized Call Brooks Automation Customer Support for...

Страница 633: ...T2PH3MAG T2PH2DIR RECOVER_N Z24VOFF_N ZDIS_N ZHOME ZSNSR3 ZSNSR2 ZSNSR1 OT_BOT_N OT_TOP_N ZBRK_N ZPH3_DIR ZPH2_DIR ZPH1_DIR ZPH3_MAG ZPH2_MAG ZPH1_MAG BATT_LOW_UPS AC_FAIL_UPS HALT 24V EN 24V ENABLE 2...

Страница 634: ...E INFORMATION ENCLOSED HEREIN IS CON FIDENTIAL AND PROPRIETARY TO BROOKS AUTOMATION INC IT MAY NOT BE REPRODUCED IN WHOLE OR IN PART OR DISCLOSED TO ANY THIRD PARTY OR USED WITHO UT THE PRIOR WRITTEN...

Страница 635: ...UT4 OUT8 OUT9 OUT10 OUT11 OUT16 OUT19 OUT17 OUT15 OUT18 OUT13 OUT14 OUT12 OUT6 OUT6 OUT 0 19 DIS_LOG DISABLE INTRLOCK_SRC DISABLE_LOGIC IOSEL1 RXD_RAW 24V_CUST CUST CUST 24V_ISO VCC 24V_CUST 24V_CUST...

Страница 636: ...VCC VCC VCC VCC SIO SIO SIO VCC VCC 12V_ISO 24V_ISO VCC VCC 24V_ROBO T 24V_ROBO T SIO VCC RN7 4 7KNET 16 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 U13 MOCD217 1 2 3 4 8 7 6 5 Anode1 Cathode1 Anode2 Cathode...

Страница 637: ...C DB9_RX RXM 7 TXM 7 INTRLOCK_SRC IN_ISO10 IN_ISO14 IN_ISO15 IN_ISO9 IN_ISO8 IN_ISO11 IN_ISO12 IN_ISO13 IN_ISO26 IN_ISO27 IN_ISO24 IN_ISO25 IN_ISO28 IN_ISO29 IN_ISO30 OUT_FAULT TXC_2 32 RXC_232 BUTTO...

Страница 638: ...that cause the product to execute physical actions Aligner A device used to ensure the proper centering and alignment of a wafer Mechanical contact aligners use pins or other fixtures to ensure prope...

Страница 639: ...sfer Offset BiSymmetrik Brooks Automation s patented dual end effector frog leg arm system Cassette Elevator See Elevator Cassette Present Sensor A sensor that detects the presence of a cassette in an...

Страница 640: ...transmission which serves to distinguish the product from other devices connected to the same host This number is only used when the product is using RS 485 com munications DI Water De ionized water...

Страница 641: ...as The distance that the elevator platform must move upward to place a substrate in the substrate present sensor beam for detection Flag A piece of opaque material that interrupts the beam in an optic...

Страница 642: ...pproaches Home position during a HOME command Host Controller The user owned controller that controls the entire system including the product ICL Individual Component Level Ion Gauge A thermal conduct...

Страница 643: ...SEMI factory interfacing requirements for open cassettes SMIF pods or FOUPs delivered manually or via fac tory automated handling systems Low Speed Usually slightly faster than Homing speed the speed...

Страница 644: ...d the partial step size Partial Step Size The distance between the up and down positions of a slot Physical Coordinates The location along the spatial axes R T and Z as appropriate PM See Process Modu...

Страница 645: ...phere to 10 3 Torr Rough Vacuum Pump A mechanical vacuum pump used to provide the initial evacuation of a chamber Robot A device used to move wafers between various stations Within a Trans port Module...

Страница 646: ...rm Set The Brooks Automation frog leg arm set with one end effector Slit Valve See Slot Valve Slot One of the positions on the inside of a substrate cassette that holds sub strates Usually substrate c...

Страница 647: ...strate Transport Plane The plane coincident with the bottom surface of the substrate as the substrate is being transported See Wafer Transport Plane T Axis The axis of rotational movement of the robot...

Страница 648: ...fer Slide Out Detector An optical sensor that senses when any wafer is out of a cassette slot See Substrate Slide Out Sensor Wafer Transport Plane The plane in which wafers are transported horizontall...

Страница 649: ...Glossary MagnaTran 7 1 User s Manual MN 003 1600 00 Brooks Automation G 12 Revision 2 2 robot s arms For an elevator it is the up and down of the platform...

Страница 650: ...leaning end effectors 9 15 general 9 13 vacuum seals 9 17 Command fields 8 6 flow 8 2 syntax 8 8 Communications options 3 14 specifications 1 13 CONFIG ROBOT APPLIC 8 25 Configuration Compatibility 3...

Страница 651: ...6 Error Codes 8 179 Error Response 8 9 8 11 EX_ENABLE 6 24 Extension Limit 1 15 F Facilitated Field Repair 9 22 Facilities Connections 3 10 Facility Checks 3 20 Factory Default Settings 11 2 FIND ENCO...

Страница 652: ...8 185 Monitor Mode 8 4 Motion Control 6 13 Motion Control Computer Board 4 11 MOTION_IND 6 24 Motor Electrical Phase Calibration 9 69 9 69 MOUNT 8 51 MOUNT position 3 46 Mount the Arm Set 3 23 Mount Z...

Страница 653: ...4 9 Robot Removal Replacement 9 25 RQ BG 8 69 RQ COMM 8 71 RQ CONFIG 8 74 RQ CPTR 8 70 RQ DIO OUTPUT 8 75 RQ HISTORY 8 76 RQ HOME POS Z 8 79 RQ INTLCK 8 80 RQ IO ECHO 8 81 RQ IO MAP 8 82 RQ IO STATE...

Страница 654: ...tion Setup Errors 8 180 Stop Bits 5 6 STORE COMM 8 157 Store Commands 8 8 STORE DIO OUTPUT 8 159 STORE HOME POS Z 8 160 STORE IO ECHO 8 161 STORE LOAD MODE 8 162 STORE R_MT SENSE LIMITS 8 163 STORE RT...

Страница 655: ...8 182 Wafer Transport Plane 7 13 Warnings 1 10 Workspace 6 58 Workspace Errors 8 186 WTP See Wafer Transport Plane X XFER 8 176 XFER offset 8 177 XON XOFF 5 6 Z Z Vertical Axis 1 12 Z Axis Drive 4 7 Z...

Страница 656: ...ate Please specify by Page any errors you have found _________________________________________________________________________________ _________________________________________________________________...

Страница 657: ..._______________ _________________________________________________________________________________ _________________________________________________________________________________ ____________________...

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