MagnaTran 7.1 User’s Manual
Command Reference
MN-003-1600-00
Set Station Sensor
Brooks Automation
Revision 2.2
8-147
Set Station Sensor
Purpose
Defines the setup for the specified sensor in one step. Setup includes: station assign-
ment, usage type, active state and the sensor coordinates in the chamber.
Format
SET STNSENSOR station [ARM arm] [TYPE type] [ACT state] [SEN sensor] [POS (R
r_coord |T t_coord)]
Arguments
station :
The robot station number being configured for use with wafer sensors.
arm:
The arm that is active for this sensor.
A
- Arm A
B
- Arm B
Arm A is the default.
type:
The sensor's usage during PICK and PLACE commands:
NONE
- sensor not referenced
EX
- Extend: sensor referenced during PLACE
RE
- Retract: sensor referenced during PICK
R_MT
- Referenced motion: sensor referenced when robot arm is
in motion (requires R and T coordinates)
state:
The sensor's active state:
HI
- signal present when wafer present
LO
- signal absent when wafer present
sensor:
The sensor I/O bit number in which the sensor is connected.
r_coord:
The sensor’s R coordinate in the chamber determined by the radial loca-
tion in microns. For R_MT sensors only.
t_coord:
The sensor’s T coordinate in the chamber determined by the offset from
the station’s T value location in microns. For R_MT sensors only.
