Operation
MagnaTran 7.1 User’s Manual
Control/Display Module (CDM) Operation
MN-003-1600-00
Brooks Automation
6-78
Revision 2.2
RE SENSOR ASSIGNED
NOT PRESENT
OBJECT NOT DETECTED >
EX SENSOR ASSIGNED
NOT PRESENT
OBJECT NOT DETECTED >
NOTE:
In the preceding display, the “_” indicates that the CDM will display the
selected station, arm, and value for each setting and the “>” indicates that
pressing the <CR> key will cause the next display selection to be displayed.
LOCATION
Displays robot position information for the selected axis and arm.
Axis Parameter Selection Keys
The MagnaTran 7 robot has motion capabilities in three axes; R (Radial), T (Rota-
tional), and Z (Vertical). These motion parameters are grouped in the second column
on the CDM key pad.
R
R is the absolute radial extension of the center of the wafer relative to the center
of the robot. Note that due to the nature of the Brooks “frog leg” arm it is not
possible to set R = 0.
T
T is the absolute rotational position of the robot relative to the Home position.
Z Associated Parameters
Z/BTO
Z is the absolute vertical position relative to Home (the lowest position). The
Base Transfer Offset (BTO) is defined as the distance between the Home posi-
tion and the Wafer Transfer Plane (WTP). The WTP is defined by the bottom
surface of the wafer during wafer transport (for a multi-slotted station, during
transport to the first slot). In the UP position, therefore, the upper surface of
the robot’s end effector is coincident with the Wafer Transfer Plane.
