MagnaTran 7.1 User’s Manual
Maintenance and Repair
MN-003-1600-00
End Effector Pad Removal/Replacement
Brooks Automation
Revision 2.2
9-33
End Effector Pad Replacement
Repeated wafer transfers will eventually wear away the friction pads. In time, the sur-
face of the wafer may touch the surface of the End Effector resulting in abrasion and
particle generation. To prevent this abrasion of the wafer surface periodic replace-
ment of the pads according to the maintenance schedule is recommended.
There are three different styles of end effector pads used on MagnaTran robots: metal
pins, grommet style, and adhesive backed. The metal pins do not require any regular
service. The grommet style require replacement every 50,000 (if silicone) or 100,000 (if
urethane) cycles. The adhesive backed pads require replacement every 100,000 cycles.
Part numbers for these pads may be found in the tables below:
Table 9-2: Grommet Style Pads
Color
Description
Part #
Clear
55 Durometer Urethane
001-0929-01
Blue
65 Durometer Urethane
001-0929-02
Figure 9-2: Wafer Support Removal
Wafer Support
