Brooks Automation MagnaTran 7.1, Руководство пользователя

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MagnaTran 7.1 User’s Manual Glossary
MN-003-1600-00
Brooks Automation
Revision 2.2
G-11
Universal Cassette Locator: An elevator platform mounted device that facilitates position-
ing 3-inch through 150 mm cassettes.
Vacuum Gauge: A gauge used to measure the vacuum within a chamber. See Convectron
Gauge and Ion Gauge .
Vacuum Pump: Mechanical pump used to remove gases in an enclosed chamber. Types
of pumps: roughing pump, high vacuum pump, ultrahigh vacuum
pump.
VCE: Vacuum Cassette Elevator. See Elevator .
Vent Valve: Valve used to let atmospheric air or other gas into a vacuum system.
VTR: Vacuum Transport Robot. See Robot .
Wafer: A thin silicon disk used for producing semiconductors. See Substrate .
Wafer Present Sensor: An optical sensor that senses wafer presence. See Substrate Present
Sensor .
Wafer Slide Out Detector: An optical sensor that senses when any wafer is out of a cassette
slot. See Substrate Slide Out Sensor .
Wafer Transport Plane: The plane in which wafers are transported horizontally by a sys-
tem's transport arm. The plane is established by the surface of the trans-
port arm end effector which supports the wafer. If the robot is capable
of vertical motion, the “up” position of the end effector is the wafer
transport position. In the VCE, the wafer transport plane is usually
established at approximately one-half wafer thickness below the center-
line of the first slot. See
Substrate Transport Plane .
“with substrate” speed and acceleration: See Low Speed .
“without substrate” speed and acceleration: See High Speed .
WPS: See Wafer Present Sensor .
Wrist: On the robot arm, the joint (two bearings) located at the attachment to
the end effector.
WSO: See Wafer Slide Out Detector .
WTP: See Wafer Transport Plane .
Z Axis: The axis of vertical motion. For a robot it is the “up and down” of the