Glossary
MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
G-2
Revision 2.2
from a turbo pump or other pump.
Bakeout:
The degassing process by which a vacuum system is heated during the
pump down process.
Base Transfer Offset:
A dimension used by robots, it is the distance between Z Axis Home
and the Substrate Transfer Plane.
Batch Transfer Arm:
A robotic arm designed with a set of multi-level end effectors (or
“tines”) used for transporting entire batches of substrates into and out
of an elevator.
Bellows:
A flexible tube that can expand and contract lengthwise while with-
standing pressure radially.
BOLTS:
Box Opener, Loader and Tool-interface Standards. Refers to SEMI E15.1
standard interface for 300mm substrates.
BTA:
See
.
BTO:
See
BiSymmetrik:
Brooks Automation’s patented dual end effector frog leg arm system.
Cassette Elevator:
See
.
Cassette Present Sensor:
A sensor that detects the presence of a cassette in an elevator.
Cassette Type Offset:
The distance downward from the Home position the elevator plat-
form must move a particular type of cassette to position the bottom-
most wafer slot (slot #1) for transport.
Category:
In the context of the product, within a record type, a category is used to
identify a specific command.
CDM:
See
Command Response:
A transmission from the product to the host controller.
Control/Display Module:
A small hand-held local controller for the robot. It provides
access to all robot functions required for setup and testing of the robot.
Convectron Gauge:
A thermal conductivity vacuum gauge that is gas dependant (i.e., the
gauge must be calibrated for the type of gas being used). These gauges
are used to measure vacuum to 1 millitorr.
