Brooks Automation MagnaTran 7.1, Руководство пользователя

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Glossary MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
G-10
Revision 2.2
Down and Slot #.
Store Command: A software command, used in serial communications with the product,
that stores a selectable parameter to the EEPROM.
STP: See Substrate Transport Plane .
Subcategory: In the context of the product, a subcategory is a variable parameter in a
transmission to or from the product. Subcategories often describe a
position to be acted upon, or a variable to be set.
Substrate: A thin quartz glass sheet used for producing Liquid Crystal Displays.
Can also refer to a silicon wafer. See
Wafer .
Substrate Present Sensor: An optical sensor that senses substrate presence. See Wafer
Present Sensor .
Substrate Slide Out Sensor: An optical sensor that senses when any substrate is out of a
cassette slot. See Wafer Slide Out Detector .
Substrate Transport Plane: The plane coincident with the bottom surface of the substrate as
the substrate is being transported. See Wafer Transport Plane .
T Axis: The axis of rotational movement of the robot’s arms.
T1 Drive: The lower drive subsystem on a MagnaTran robot, which transmits its
power to the arms through the inner drive shaft. Operating with the T2
Drive this axis drives the arms in both the Rotational (T) and Radial (R)
axes.
T2 Drive: The upper drive subsystem on a MagnaTran robot, which transmits its
power to the arms through the outer drive shaft. Operating with the T1
Drive this axis drives the arms in both the Rotational (T) and Radial (R)
axes.
TM: See Transport Module .
Torr: Pressure measurement.
Transport Module: The central hub of a Cluster Tool. Typically a large horizontal chamber
with a centrally located wafer handler. All wafer handling and Process
modules are attached to the external facets of the chamber.
Top Reference Flag: See Flag .
Ultra High Vacuum: Pressure ranges from about 10
-8
Torr to less than 10
-14
Torr.