MagnaTran 7.1 User’s Manual
Command Reference
MN-003-1600-00
Check Load
Brooks Automation
Revision 2.2
8-23
Check Load
This command is for the Radial Motion Sensors only.
Purpose
Updates the arm load status to the correct state.
Format
CHECK LOAD [station] [arm] [INTLCK [ALL [DIS|ENB]]|
[EX_ENABLE [DIS|ENB]] [SBIT_SVLV_SEN[DIS|ENB]]
[VLV_SEN [DIS|ENB]]]
Arguments
station:
The number of the station from which to pick. Range: 1-16.
arm:
The arm (A or B) which will perform the pick.
Leaving the arm unspecified results in CHECK LOAD checking both
pans.
Description
This command is available only when at least one station has been set up with an
R_MT Wafer Presence Sensor. This command is used on single and dual arm sets.
CHECK LOAD will find a station that has an R_MT type wafer sensor assigned. The
robot will extend each arm to the load sensing position to determine if there is a load
present on each arm. The edge of the wafer is checked, rather than the center of the
wafer to minimize the length of the extension. Based on the sensor information, the
robot will update it’s arm load status memory map.
This command will cause the robot to query all assigned radial motion sensors and
position the pan over a sensor to determine if a wafer is present.
Use the RQ LOAD command to request the results of the query.
The CHECK LOAD command first tries to find stations for arm A, or the specified
arm, that have wafer sensors mapped. If a station was specified, it will only check that
station. At each station where it finds a wafer sensor, it will check to see if the extend
enable, slot valve, and/or poppet valves are clear. The INTLCK option is used to
Firmware Version V2.12
