MagnaTran 7.1 User’s Manual
Operational Interfaces
MN-003-1600-00
MISC I/O Communications
Brooks Automation
Revision 2.2
5-17
Safety Interlock
This feature provides an industry SEMI standard Safety Interlock for robot motion.
For example, when the cluster tool’s transport chamber lid is opened, robot motion
will stop and no other motion of the robot can be commanded.
Safety Interlocks may be connected to the MISC I/O at pins 23 and 24. These pins are
hardware connected to the safety interlock circuit. See
for the wiring con-
figuration. Also see the Wiring Diagram in Chapter 12 for the typical external connec-
tions.
The Safety Interlock feature provides a motor enable interlock to disable all the robot
motors (R, T, and Z axis motors) for desired applications. More specifically, pins #23
and #24 of the MISC I/O port must be electrically connected in order for the robot
motors to receive power. If the electrical connection between these two pins is
opened, the following will occur:
1.
Robot motors will not receive power and robot motion will automati-
cally stop.
2.
The robot will generate an error message, “ERR 10029 : Error, Emer-
gency Off Circuit Is Active”.
3.
The robot encoders will remain referenced.
Power to the robot motors will be re-established when the electrical connection
between pins #23 and #24 of the MISC I/O port is re-established. Since the robot
Figure 5-7: Safety Interlocks
Minimum Wiring
Configuration
Typical Wiring
Configuration
