MagnaTran 7.1 User’s Manual
Command Reference
MN-003-1600-00
Request Station Option
Brooks Automation
Revision 2.2
8-107
CLEAR
= The sensor is not being blocked
(SAFETY # |PUSH # ):
Response field size: 6
Specifies the distance in microns the end effector may move within the
zone of a Process Module.
SAFETY # = The distance the end effector will stop short of a
station’s R position during a “PLACE”.
PUSH #
= The distance the end effector may push the wafer
past a station’s R position during a “PLACE”.
POST:
The theta coordinate of the VIA point in milli-digress.
POSR:
The radial coordinate of the VIA point in microns.
Description
This command requests the optional station-related parameters.
NOTE:
Request commands display the current value stored in RAM.
See Also:
Set Station Option on page 8-142
Set Station Option VIA Point on page 8-145
Store Station Option on page 8-167
Example
In the following example arm ‘A’ is currently extended in station #3, slot #2 and in the
down position. The robot returns the current configuration and status of the Station
5 Wafer Sensor at the Extend position. Since the wafer sensor has not been configured
“NONE” is returned.
RQ STN 5 A OPTION WAF_SEN EX
