MagnaTran 7.1 User’s Manual
Glossary
MN-003-1600-00
Brooks Automation
Revision 2.2
G-5
High Vacuum Pump:
Vacuum pump used to achieve High Vacuum. See also
Home:
The reference position at which the encoders are reset.
For a robot, this position is considered to be 0
o
for T, Home for R
(slightly past the retract position for a single end effector robot and
equivalent to the mount position for a dual end effector robot), and com-
pletely down for Z.
For an elevator, this is the position of the platform when it activates the
home sensor. This position is near the top of the elevator's travel. The
cassette offsets and all product operations, including moves, steps, and
partial steps, are referenced to the Home position.
Homing Speed:
Usually the slowest speed; the speed at which the product approaches
Home position during a HOME command.
Host Controller:
The user-owned controller that controls the entire system, including the
product.
ICL:
Individual Component Level.
Ion Gauge:
A thermal conductivity vacuum gauge. These gauges are used to mea-
sure high vacuum. There are two types of ion gauges: hot cathode and
cold cathode.
Illustrated Parts Catalog:
A series of illustrations that shows the locations of parts and sub-
systems within the component and identifies their part numbers.
InCooler:
In-line cool module designed to be installed in a Cluster Tool between
the Transport Module and another module. See
.
InLigner:
In-line aligner module designed to be installed in a Cluster Tool
between the Transport Module and another module. See
IPC:
See
IRC:
Individual Replaceable Component.
Isolation Valve:
A large diameter valve used to isolate the vacuum chamber from the
pumps.
Jog:
Move incrementally.
Leadscrew:
A precision screw used to move a mechanism.
